GA 05.145/3.02 - 02/2001
Description
Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Standard equipment . . . . . . . . . . . . . . . . . . . . 3
1.3 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.4 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 7
2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.1 Operating environment . . . . . . . . . . . . . . . . . . 12
2.2 Attach the pump to the vacuum chamber . . . . . 13
2.3 Forevacuum connection . . . . . . . . . . . . . . . . . . 15
2.4 Connect the cooling . . . . . . . . . . . . . . . . . . . . . 17
2.5 Electrical connection . . . . . . . . . . . . . . . . . . . . 20
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.2 Shutting down . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.3 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.4 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.5 Removing the pump from the system . . . . . . . . 29
4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.2 Service by LEYBOLD . . . . . . . . . . . . . . . . . . . 30
5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . 31
EC Declarations . . . . . . . . . . . . . . . . . . . . . . . 34
Figures
The references to the diagrams, e.g. (2/10), consist of the figu-
re number and the item number, in that order.
Warning
Identifies working and operating procedures which must be
strictly observed to prevent hazards to persons.
Caution
Indicates working and operating procedures which must be
strictly observed to prevent damage to or destruction of the
appliance.
We reserve the right to alter the design or any data given in
these operating instructions.
The illustrations are approximations.
1 Description
The TURBOVAC TW 70 H is a wide range turbomolecu-
lar pump designed to evacuate vacuum chambers down
to pressure levels in the high vacuum range. It is suita-
ble for pumping air and clean gases. The TURBO.
DRIVE S frequency converter and a forevacuum pump
are required for its operation.
These pumps are not suitable for
-pumping liquids or gases containing dust or particu-
lates
-pumping corrosive or reactive gasses
- operation without a forevacuum pump.
If reactive gases in low concentrations must be pumped
please consult with Leybold.
During operation the pressure inside the pump is so low
that there is no danger of ignition (at pressures below
about 100 mbar). A hazardous condition will be created
if flammable mixtures enter the hot pump at pressures
above 100 mbar. During operation the pump can reach
temperatures as high as 110°C (230 °F). Ignition sparks
could occur in case of damage to the pump and these
could ignite explosive mixtures.
We would be glad to consult with you as regards the
media which can safely be handled with this unit.
Warning Never expose any parts of the body to the
vacuum.
2