LEYBOLD MAG W 2010 C User manual

MAG W 2010 C
Turbomolecular Pump
with Magnetic Bearing
MAG.DRIVE 2000
Electronic Frequency
Converter
Software version 1.4.xx
Cat. Nos.
121 32
121 35 /36
Operating Instructions
Vacuum Solutions Application Support Service LEYBOLD VACUUM
GA 05.136/2.02

Contents Page
1Description . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 System overview. . . . . . . . . . . . . . . . . . . . . . 3
1.2 Compatibility with pumped media . . . . . . . . . . 3
1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . 3
1.4 Function and design of the MAG.DRIVE . . . . 4
1.5 Standard specification . . . . . . . . . . . . . . . . . . 6
1.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 6
1.7 Ordering information . . . . . . . . . . . . . . . . . . . 7
2Installation . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 General safety information . . . . . . . . . . . . . . 11
2.2 Unpacking - storing - transportation . . . . . . . 11
2.3 Operating environment . . . . . . . . . . . . . . . . 12
2.4 Connecting the MAG
to the vacuum chamber . . . . . . . . . . . . . . . . 12
2.5 Connecting the backing pump . . . . . . . . . . . 16
2.6 Connecting the cooling water . . . . . . . . . . . . 18
2.7 Connecting the purge gas . . . . . . . . . . . . . . 19
2.8 Installing the MAG.DRIVE . . . . . . . . . . . . . . 20
2.8.1 Power supply connection X10 . . . . . . . . . . . 20
2.8.2 Pump connection . . . . . . . . . . . . . . . . . . . . . 21
2.8.3 Control plug X14 . . . . . . . . . . . . . . . . . . . . . 21
2.8.4 Interface connector . . . . . . . . . . . . . . . . . . . 24
3Operation . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.1 General operation rules . . . . . . . . . . . . . . . . 25
3.2 Operation with the START and STOP keys . . 26
3.3 Remote control . . . . . . . . . . . . . . . . . . . . . . 27
4Plug-in Control . . . . . . . . . . . . . . . . . . . . . 28
4.1 Operation with plug-in control . . . . . . . . . . . 28
4.2 Operating statuses . . . . . . . . . . . . . . . . . . . 30
4.3 Operating menu. . . . . . . . . . . . . . . . . . . . . . 32
4.3.1 Basic menu. . . . . . . . . . . . . . . . . . . . . . . . . 32
4.3.2 Settings converter . . . . . . . . . . . . . . . . . . . . 33
4.3.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 34
4.3.6 Total view of the menu. . . . . . . . . . . . . . . . . 35
5Maintenance . . . . . . . . . . . . . . . . . . . . . . . 36
5.1 Removing the pump from the system . . . . . . 36
5.2 Service at Leybold’s. . . . . . . . . . . . . . . . . . 37
6 Troubleshooting . . . . . . . . . . . . . . . . . . . . . 38
6.1 Warning messages . . . . . . . . . . . . . . . . . . . 39
6.2 Failure messages . . . . . . . . . . . . . . . . . . . . 40
6.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 43
Certifications . . . . . . . . . . . . . . . . . . . . . . . . 44
Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Figures
The references to diagrams, e. g.(1/2) consist of the Fig.
No.and the Item No.in that order.
We reserve the right to alter the design or any data given
in these Operating Instructions.The illustrations are not
binding.
The Operating Instructions are included with the pump
and the converter.If they have different editions, the
version delivered with the pump describes the pump
correctly and the version delivered with the converter
describes the converter correctly.The version number
is the digit behind the „/“ in the GA No.. Example: GA
05.136/1.02 is the first edition.
Differences between the versions:
/1 →/2
• We corrected the dimensional drawings and the dra-
wings for the purge gas connector.
• We changed some ordering data.
• We added information for fastening the vacuum
chamber.
• We added certifications concerning EC directives.
• We corrected some minor mistakes.
Thus, you may use version /2 instead of version /1.
See also the last page.
2GA 05.136/2.02 - 10/98

Description
3
GA 05.136/2.02 - 10/98
1Description
1.1 System overview
The Leybold MAGpumping system consists of:
•The MAG W 2010 C turbopump
The MAG are turbomolecular pumps utilizing magne-
tic bearings.They are designed to evacuate vacuum
chambers down to pressure values in the high-vacu-
um range and to pump high gas throughputs.
•The MAG.DRIVE 2000 frequency converter
The electronic converter converts the single-phase
line supply voltage into a three-phase DC voltage to
drive the pump motor.It also evaluates measured sig-
nals and controls
- the pump functions and
- the active magnetic bearing system
The MAG.DRIVE 2000 can be operated with the
START and STOP keys, via a plug-in control, via a
serial interface, or via a DeviceNet interface.
•A cable set consisting of:
- BEARING cable
- DRIVE cable
1.2 Compatibility with
pumped media
The MAG W 2010 C is specifically designed for the
needs of the semiconductor industry.
Corrosion protection
To protect the pump from corrosive gases it is mandatory
to use dry Nitrogen purge during operation of the
pump.The purge gas protects the bearing section and
the motor from corrosive gases.
The rotor and the stator of the pump are KEPLA®-coated
to prevent corrosive attack caused by the process gases.
The corrosion protection of the pump is effective only
when the pump is protected from moisture during
standstill and storage.If the process gas contains moi-
sture, contact Leybold for recommendations.
Caution The pump cannot handle gases or media
(e.g. AlCl3) which form deposits inside the
pump.
Ignition danger
During operation the pressure inside the MAG is so low
that there is no danger of ignition (at pressures below
about 100 mbar). A hazardous condition will be created
if flammable mixtures enter the hot pump at pressures
above 100 mbar.During operation the pump can reach
temperatures as high as 120 °C (248°F). If the pump is
damaged, sparks could occur which could ignite explosi-
ve mixtures.
Please consult Leybold regarding the media which can
safely be handled with this unit, with or without purge
gas.
1.3 Design of the MAG
The MAG comprises basically the pump housing, the
multistage rotor with the stator package, the drive, and a
magnetic bearing.
Rotor
The rotor is made from a high strength aluminium alloy.
The rotor and the lower stator plates are protected with
a special ceramic layer ( KEPLA-COAT®).The rotor is a
multi-stage axial-flow turbine.In addition to the turbine
stage it has a screw stage.
The rotor is machined from one piece and the geometry
of the the blades is optimized for high compression and
pumping speed of the typical gases used in semicon-
ductor manufacturing processes ( e.g. SF6, Ar, BCl3).
Bearings
The MAG has a built-in precision 5-axis controlled
magnetic bearing. The rotor is suspended by trouble-
free magnets:
• along two orthogonal axes in each of two radial planes
• and completely in the axial direction
The bearing concept allows for low vibration operations
and insures operation of the pump in any mounting posi-
tion. Magnetic bearings also guarantee ultra-clean vacu-
um because no grease is used for lubrication of bea-
rings.

GA 05.136/2.02 - 10/98
Description
4
Housing
The converter is supplied with a closed housing. It can
be installed in a 19” cabinet; see Section 2.8.
Front panel
Main switch
9-pin connecting socket for the plug-in control or for
connection of a serial interface
2 short-stroke keys
1 green/red STATUS LED
1 green COM LED (communications interface)
1 green MAIN LED (line supply voltage)
2 fusesTMS (Temperature Management System;no fun-
ction when operating a MAG W 2010 C)
The optional plug-in control has 10 keys and 1 backlit
LCD with 2 lines, each 16 characters.The plug-in control
displays operating statuses and failures and allows the
configuration of the pumping system.
Rear panel
X14 50-pin D socket connector for remote monitoring
and open-loop control
X19 3-pin Hirschmann connector for the connection to
the mains supply
X20 55-pin MIL standard socket connector for internal
sensors and magnetic bearing connection
X21 41-pin MIL standard socket connector for the motor,
TMS, and purge valve connection
Spare slot for optional network cards
Two touch down bearings are provided to stabilize the
rotor mechanically if impacts occur during operation.
They are only used in case of the breaking of the power
supply or BEARING cable during operation, strong
shocks, or faulty electronics.
Motor and control
A DC motor without commutator is used to power the
rotor.
Drive voltage for the motor and the operating voltage for
the magnetic bearing are supplied by the MAG.DRIVE
frequency converter. It also handles the automatic moni-
toring of these systems.
The pump is equipped with a data storage device which
stores the important operating parameters during the
complete operation time of the pump.
The converter monitors continously all important opera-
ting parameters and provides warning and alarm signals
in case the operating conditions exceed the specification
or the set threshold.
1.4 Function and design of
the MAG.DRIVE
The MAG.DRIVE 2000 electronic converter is used to
drive the MAG turbo-molecular pumps.
The electronic converter converts the single-phase line
supply voltage into a three-phase DC voltage to control
and monitor the electronically-commutated DC motor.It
also evaluates measured signals and controls (open-
loop and closed-loop) the pump functions.
The magnetic bearing control system is integrated into
the converter.It actively controls the pump rotor in five
axes (closed-loop control).
All parameters required for pump operation and the
listed faults and operating hours are stored in a non-vola-
tile memory in the pump.When the converter is switched
on, the data are loaded into the converter from the pump.
The outputs of the electronic converter are no-load and
short-circuit proof.
For remote control via control connector X14 we recom-
mend that either a relay or optocoupler is used to provi-
de electrical decoupling.

X19
X14 X20
X21
Start Stop
Esc Mon Prog Enter
+
_
GA 05.136/2.02 - 10/98
Description
5
Fig. 1 Front panel
X14 Connection control plug
X19 Mains connection
X20 Connection magnetic
bearing
X21 Connection pump motor and
TMS
Fig.2 Rear panel with connections
MAG.DRIVE 2000
MAG.DRIVE 2000 with plug-in control

Description
1.6 Technical data
MAG W 2010 C
Pumping speed for N2measured
with splinter guard (PNEUROP) 1650 l·s-1
Gas flow (continuous operation
with Argon) 1000 sccm
Compression for N2>108
Ultimate pressure as to DIN 28 400 < 10-8 mbar
Max. forevacuum pressure
with Nitrogen 3.3 mbar
with Argon 4.1 mbar
Rotor Speed 28,800 min-1
Run-up time < 10 min
Braking time with/without venting 1 / < 7.5 min
Cooling water
Cooling connection,
Push-on connector Swagelok
tube outlet connector 1/2“
tube inlet connector 2 x 3/8“
Cooling water temperature 15 to 30 °C
59 to 86 °F
Base flange temperature 30 to 50 °C
(depending on the load) 86 to 122 °F
Weight approx. 65 kg
High-vacuum connection flange DN 250 ISO-F
Forevacuum connection flange DN 40 KF
Recommended backing pump DRYVAC 50
Admissible ambient temperature 5 to 40 °C
40 to 104 °F
Storage temperature -10 to +60 °C
14 to 140 °F
Max. relative air humidity 95%
(non-condensing)
Degree of protection IP 20
(EN 60529)
Purge Gas
Purge gas: dry nitrogen, argon or similar
Purge gas throughput 0.5 to 0.65 mbar·l·s-1
30 to 40 sccm
Connection:VCR Nut 1/4“
6GA 05.136/2.02 - 10/98
1.5 Standard specification
MAG
The turbomolecular pumps are shipped complete,
sealed in a PE bag containing a desiccant. The maxi-
mum effective life time of the desiccant is one year.
The intake flange is sealed with a transport seal, the
forevacuum flange with a plastic cap.
For the intake flange, a centering ring with FPM O-ring,
outer ring, and a splinter guard are enclosed. For the
cooling water inlet a blind plug is enclosed.
We also provide the bolts for attaching the pump to your
tool.To avoid any safety risk we highly recommend using
only the bolts provided with the pump. Refer also to Sec-
tion 2.4 „Connecting the MAG ...“.
The electronic frequency converter MAG DRIVE as well
as the cables required for operation must be ordered
seperately.
In addition, a seal kit is included to seal the pump tightly
if it is removed from the process.
MAG.DRIVE
•Converter
•Line supply cable with USA connector, approx. 3m
•Line supply cable with EURO connector, approx. 3 m
•2 spare fuses for the TMS (miniature fuses 5 x 20
mm, F4A; according to IEC 127-2/1) and 2 fuse hol-
ders 6.3 x 30 mm
•Plug for control plug X14
Cable Set
•BEARING cable
•DRIVE/TMS cable

Description
Technical data (continued)
MAG.DRIVE
Voltage range 200 - 240 V +10% -15%
Line supply frequency 50 / 60 Hz
Load
Stand-byapprox. 100 W
Continuous (rated speed) 810 W
Maximum 1800 W
Max. voltage motor 60 V
Maximum pump current 20 A rms
Continuous pump current, max. 15 A rms
Maximum frequency 480 Hz
Load capability, relay output 42 V, 1 A
Temperature during operation 0-45°C
Storage temperature - 10°C to + 60°C
Relative air humidity Class F acc. to DIN 400 40
Weight 10 kg
The units have degree of protection IP20 in accordance
with EN 60529
(protection against the ingress of solid foreign bodies >
12 mm diameter (finger). It is not protected against the
ingress of water with damaging effects.)
An increased degree of protection, e.g. IP54 can only be
implemented by mounting the converter in an additional
housing.
7
GA 05.136/2.02 - 10/98
1.7 Ordering data
Order No.
MAG W 2010 C 121 32
Seal Kit DN 250 200 91 641
MAG.DRIVE 2000 converter 121 35
Plug-in control 121 36
MAG.DRIVE 2000 with DeviceNet 121 37
Connecting cables, converter / pump
Length Cable Cable
BEARING DRIVE/TMS
————————————————————————
1.5 m 121 29 121 30
10 m 121 21 121 22
20 m 121 25 121 26
19“ installation frame 161 00
Connector for hardware interface
from 25 pins to 50 pins on request
MAG.WIN, an operator control interface
which can run under Windows with user
instructions as Windows help on request
Connecting cable serial interface (front panel,
9-pin D-connector), approx. 5 m long on request

Description
8GA 05.136/2.02 - 10/98
Fig. 3 Dimensional drawing of the MAG.DRIVE; dimensions in mm
122.4
198 Ø 3.3
with cable length 1.5 m
with cable length 10 or 20 m

Description
9
GA 05.136/2.02 - 10/98
10-1
10-2
10-3
10-4
50 sccm
100 sccm
200 sccm
500 sccm
1000 sccm
10-2 10-1 1 10
Torr
Torr
Fig. 5 MAGW 2010 C: operation diagram for nitrogen
High vacuum pressure
Forevacuum pressure
Rotor speed 480 Hz
Purge gas flow36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP
1500
1000
500
0
2000
10-2 10-1 1
Torr
10-3 10-4
l/s
MAG W 2010 C
High Vacuum Pressure
Fig. 4 Pumping speed curve for Nitrogen
Pumping speed
Rotor speed 480 Hz
Purge gas flow36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP

Description
10 GA 05.136/2.02 - 10/98
Fig. 6 MAG W 2010 C, Dimensions in mm

Installation
11
GA 05.136/2.02 - 10/98
Warning Unauthorized opening of the converter
voids the warranty.
Before opening the converter, always dis-
connect it from the mains and the pump!
Before disconnecting any cables make sure
that the converter is switched off and the
pump has come to a standstill.
When applying external voltage in excess of
42 V to terminals of the device, observe
local safety regulations!
Unauthorized device conversion and modi-
fications are prohibited for safety reasons.
Please keep this Operating Instruction for future referen-
ce.
2.2 Unpacking - storing -
transportation
Remove the equipment from the transportation box and
keep the packaging. Make sure that the product has not
been damaged during transportation.If this unit is dama-
ged contact your carrier and inform LEYBOLD if neces-
sary. For storage of the product, use the packaging pro-
vided.
Lift the pump by the crane eyelets or move it with at least
two persons.
You can position the pump on the base plate for trans-
port with a lift-truck. Protect the pump against slipping
and tipping over.
Caution Be careful not to damage the sockets and
coolant connections during transportation.
Do not stand below the pump while connecting or remo-
ving the MAG.
The MAG is shipped in a sealed PE bag with desiccant.
Do not open the sealed package until immediately befo-
re installing.
Do not remove the covers and blanking flanges until you
are ready to make the connections, to ensure that the
MAG is installed under the cleanest possible conditions.
2Installation
2.1 General safety information
Warning
Indicates procedures that must be strictly observed to
prevent hazards to persons.
Caution
Indicates procedures that must be strictly observed to
prevent damage to, or destruction of the MAG.
Warning Never expose any parts of the body to the
vacuum.
Warning The converter has dangerous voltage
levels.
Failure to strictly follow the instructions in
this Manual can result in death, severe
bodily injuries or significant material dama-
ge.
Only suitably qualified personnel are per-
mitted to work on the pump or converter.
Personnel must be completely knowledgea-
ble of all warning information and measures
which are specified in this Instruction
manual for transporting, installing, and ope-
rating the unit.
Qualified personnel
Qualified electrical personnel in this instruction manual
means a person who has received electrical engineering
instruction or is an electrical expert in accordance with
EN 60204, Part 1, 3.30 respectivly 3.55.
Warning The device contains electrostatically sensi-
tive devices (ESD)!

Installation
12 GA 05.136/2.02 - 10/98
1
2
1Aluminum cover
2Screws
Fig. 7 Removing the transport seal
2.3 Operating environment
When using the MAG inside a magnetic field, the magne-
tic induction at the pump housing must not exceed 5 mT;
(1 mT (milliTesla) = 10 G (Gauß))
Exceeding this limit can cause excessive rotor heating
due to the eddy currents generated in this situation. It is
therefore necessary to provide suitable shielding in such
cases.
The standard version of the MAG is resistant to radiation
at levels up to 103Gy.(1 Gy (Gray) = 100 rad)
The ambient temperature must not exceed 40°C
(104 °F).
The noise level when the pump is running is below 70
dB(A). No acoustic insulation is required.
2.4 Connecting the MAG to
the vacuum chamber
The MAG is shipped in a sealed PE bag with desiccant.
Do not open the package until immediately before instal-
ling.
Do not remove the covers and blanking flanges until you
are ready to make the connections, to ensure that the
MAG is installed under the cleanest possible conditions.
Pay attention to maximum cleanliness when connecting.
Remove the transport seal from the intake flange. To do
so unscrew the screws (7/2) and remove the aluminum
cover.We recommend saving the transport seal for main-
tenance.

Installation
13
GA 05.136/2.02 - 10/98
Foreign objects entering the pump through the high-va-
cuum flange can cause serious damage to the rotor.
That’s why the splinter guard must always be installed.
Damages caused during operation without the splinter
guard are excluded from warranty.
Caution Install the splinter guard as shown in Fig.9.
Installing the splinter guard upside down
may lead to contact between splinter guard
and rotor during fast venting of the pump.
Fig. 8 Connection elements
Intake flange
Forevacuum flange
Cooling water out
Correct
Wrong
Fig. 9 Installing the splinter guard
Cooling water in
Purge gas connector
(behind the pump)

GA 05.136/2.02 - 10/98
Installation
14
Warning The pump must be securely attached. If the
pump should suddenly seize, inadequate
attachment could cause the pump to break
away or allow internal pump parts to be dis-
charged. Never operate the pump (in bench
tests, for instance) without its being con-
nected at the vacuum chamber.
If the pump should suddenly seize, the dec-
celeration torque of 60,000 Nm will have to
be absorbed by the system. To accomplish
this, use all 12 bolts provided by Leybold for
fastening the high-vacuum flange; see also
Fig. 11.
Mount the MAG as close as possible to the vacuum
chamber.If the MAG is permanently flanged to a vacuum
chamber with a weight exceeding 500 kg, it will not be
necessary to secure it in any other way.
The vacuum chamber must be securely attached to the
floor or a solid wall.
In case of lighter vacuum vessels secure the pump addi-
tionally.The pump’s bottom is equipped with tappered
holes for fastening a support; see Fig. 6.
If the pump is exposed to shocks, e.g. by a gate valve,
secure the pump so that it is supported in the direction of
the shock.
We recommend installing an isolation valve between the
pump and the chamber.The valve should be closed
during wet cleans of the chamber and in case of pump
failures which will lead to a pump shut down. The valve
should normally be closed with power off.
M = 60,000 Nm
M = 60,000 Nm
Correct Wrong
Fig. 10 Vacuum chamber fixed to the floor

Installation
15
GA 05.136/2.02 - 10/98
18
ll > 15 mm in aluminium
l > 10 mm in steel
Sealing (FPM)
Splinter guard
Max. torque = 60,000 Nm
Fig. 11 Fixing the intake flange
Bolts: M10 x 35 / M10 x 40
Quality 12.9 according to DIN 898:
0,2% yield strength > 1080 N/mm2
Bolt torque = 40 Nm

Installation
16 GA 05.136/2.02 - 10/98
Fig. 12 Layout of a turbomolecular pump system
Key to Fig. 12
1 Turbomolecular pump
2 Forevacuum gauge point
3Backing pump
4Anti-vibration bellows
5 Forevacuum valve
6High vacuum valve
7Purge gas connection
8 Valve in the roughing line
9Electronic frequency converter
— — — — roughing line; recommended
if shorter cycle times are to be achieved
— · — · — · — · DRIVE and BEARING cable
2.5 Connecting the backing
pump
A two stage rotary vane pump or dry-compression
backing pump is required to support operation of the
MAG.
We recommend using the DRYVAC or our TRIVAC-B
pump for this purpose.
In case of high gas throughput, it may also be necessary
to use a roots blower to achieve the backing pressure
necessary for operating the MAG. We recommend our
RUVAC blower for this purpose or our DRYVAC 251/501
systems.
Fig. 12 shows schematically the design of a pump
system incorporating a MAG with an additional foreline
valve and an isolation valve between chamber and MAG.
The foreline isolation valve is recommended to protect
the MAG from shock venting in case of uncontrolled shut
down of the backing pump.This valve must be able to
close fast enough to avoid pressure increase in the
MAG.
In case of an oil-sealed backing pump the foreline isola-
tion valve protects the MAG from backstreaming oil
vapor during standstill.
Connect the forevacuum flange of the MAG to the
backing pump.
The torque on the forevacuum connection flange must
not exceed the values shown in Fig. 13.
Warning The forevacuum line must be tight. Hazar-
dous gases can escape at leaks or the
gases being pumped can react with the air
or humidity. We recommend a leak check.

Installation
17
GA 05.136/2.02 - 10/98
M
Mq
M < 150 Nm
Mq< 150 Nm
Fig. 13 Maximum torques for the forevacuum connection and connecting the cooling water
Cooling water out
1/2“ tube
Cooling water in
2 x 3/8“ tube

Installation
18 GA 05.136/2.02 - 10/98
2.6 Connecting the cooling
water
Cooling water specifications
Inlet temperature 15 - 30 °C
Max. inlet pressure 9 bar over atmosphere
Cooling water requirement See Fig. 14
Appearance Colorless, clear,
free of oils and greases
Sediments < 250 mg/l
Particle size< 150 µm
Electrical conductivity < 500 µS/cm
pH value 7 to 8.5
Overall hardness (total alkaline earths)
max. 20 °German hardness scale
(= 3.57 mmol/l)
Further information on request.
Connect the cooling water to the connectors;see Fig.13.
In case you want to use only 1 inlet connector close the
other one with the blind plug provided with the pump.
Turn off the cooling water supply when the pump is
switched off in order to avoid condensate formation in the
pump.
If you do not close the cooling water it may take longer to
achieve ultimate pressure after start up of the system.
5 10 15 20 25 30 35 40
°C
400
360
320
240
200
160
120
80
40
0
l/h
minimum
Fig. 14 Recommended cooling water flow as a function of cooling water temperature
Temperature
Flow

Installation
19
GA 05.136/2.02 - 10/98
2.7 Connecting the purge
gas
The MAG is equipped with a purge gas connector. To
ensure protection of the pump a constant purge gas
throughput of 30 to 40 sccm is required.You may use a
flow controller to ensure the flow. Inadequate purge gas
flow voids the warranty.
Connect purge gas to the VCR nut 1/4“ as shown in Fig.
15.
Warning Monitor the purge gas continuously.
Insufficient purge gas flow can result in:
- Process gases entering the motor and
bearing area of the MAG
- Process gases escaping from the purge
gas connector
- Humidity entering the pump.
Fig. 15 Connecting the purge gas

Warning Unauthorized opening of the converter
voids the warranty.
Hazardous voltages are present inside the
converter.Death or severe injury can occur
if you come into contact with these hazar-
dous voltages.Before opening the conver-
ter, isolate the converter from the line supp-
ly, and lock the switch so that it cannot be
accidentally switched on again.
In addition the pump has to stand still
because it works as generator as long as it
rotates, and the pump cables have to be
disconnected.
Installation instructions to maintain EMC
The MAG.DRIVE 2000 complies with the Electromagne-
tic Compatibility (EMC) Directives of the EC.In order to
maintain this the following installation instructions must
be observed:
• To connect the pump to the converter the prescribed
Leybold cables must be used.
•The connection cables to the analog interface (control
plug X14) and to the serial interface (connector X7)
must be shielded. The shields must be connected to
the metal housings of the SUB-D-connector and
SUB-D-socket.
2.8.1 Power supply connection X19
The converter is ready to be connected to line supply
voltages between 200-240V 50/60 Hz.The connection is
established using the power cable supplied, which is ins-
erted at connector X19 at the rear of the converter.
Caution The converter will be damaged if it is ope-
rated with the incorrect supply voltage.
Installation
20 GA 05.136/2.02 - 10/98
2.8 Installing the
MAG.DRIVE
The converter can be installed in a 19” cabinet. It is 1/2
of 19“ wide and has 3 height units.For easier installation
we offer an installation frame;see Section 1.7. If you use
this installation frame, remove the converter’s rubber feet
when installing the converter.
Caution In order to guarantee sufficient cooling,
there must be a minimum clearance of 1
height unit (44.2 mm) at the bottom and 1
height unit at the top.During operation the
temperature of the ambient air must not
exceed 45 °C.
Warning The pump may be operated only with a sui-
table frequency converter and a suit-
able connector cable.
Peak voltages of up to 130 V may be pre-
sent at the connector line between the fre-
quency converter and the pump; mains vol-
tage is present at the heater.
Route all cables so as to protect them from
damage.
The protection rating for the connectors is IP 30.
Do not expose the pump, the frequency converter or the
connections to dripping water.
Install 16 A fuses for the converter.
Warning Only adequately trained electrical/electronic
personnel may connect-up the equipment in
accordance with valid IEC (international),
EN (European) and/or national guidelines,
or under their management and supervisi-
on.
Caution The connecting cables between the conver-
ters and pump may only be inserted or
removed when the pump is switched off
and stands still after the run-down procedu-
re and the converter is isolated from the
line supply.
If a connector is inserted or withdrawn
when the converter is switched on or the
pump is rotating, the converter and the
pump could be damaged or destroyed!