
2
Contents
Stages covered by this manual ............................................................................................ 3
Before Setting Up Your Equipment....................................................................................... 3
Important Notice ................................................................................................................ 4
Warranty............................................................................................................................ 4
Technical Support............................................................................................................... 4
Equipment Maintenance...................................................................................................... 4
Handling Liquid Nitrogen..................................................................................................... 4
Safety Precautions .............................................................................................................. 5
Symbol Reference......................................................................................................... 5
Introduction. ...................................................................................................................... 6
FDCS196 Stage Specification ......................................................................................... 6
FDCS196 System ................................................................................................................ 6
Stage Anatomy................................................................................................................... 7
Mounting Stage to Microscope with Dovetail Substage .......................................................... 8
Setting up the Condenser for Koehler Illumination .......................................................... 8
Vacuum Tweezers .............................................................................................................. 9
Connecting the Pirani Gauge ............................................................................................. 10
Flexible Stainless Steel Vacuum Tube Connection ............................................................... 11
FDCS196 Pro System Setup............................................................................................... 12
Vacuum Pump Setup................................................................................................... 12
MV196 Motorised Valve System Setup.......................................................................... 12
Mounting the MV196................................................................................................... 12
Sample Preparation and Loading ....................................................................................... 13
Sample Loading Using G16.3 Sample Holder................................................................. 13
Sample Loading Using FDCS196/CC Crucible Carrier and Quartz Crucible ....................... 16
Cooling Connections ......................................................................................................... 19
Filling the Liquid Nitrogen Dewar ................................................................................. 19
Appendix.......................................................................................................................... 20
Using The Stage with Gas Connectors................................................................................ 20
Installing Gas Connectors............................................................................................ 20
Window Assembly............................................................................................................. 21
Lid Window Assembly ................................................................................................. 21
Bottom Window Assembly ........................................................................................... 21
Troubleshooting ............................................................................................................... 22
Alternative Configuration: THMS350V ................................................................................ 23
THMS350V Stage Anatomy.......................................................................................... 24
Alternative Configuration: THMSEL350V............................................................................. 25
THMSEL350V Stage Anatomy ...................................................................................... 26
Using the Ellipsometer stage with vacuum port............................................................. 27
Ellipsometer windows assembly................................................................................... 28
Contact Details ................................................................................................................. 32