Pfeiffer Vacuum PRISMAPRO QMG 250 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
QMG 250 PRISMAPRO®
Compact mass spectrometer

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new mass spectrometer should
support you in your individual application with full performance and without malfunctions. The
name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 8
1.1 Validity 8
1.1.1 Applicable documents 8
1.1.2 Variants 8
1.2 Target group 9
1.3 Conventions 9
1.3.1 Instructions in the text 9
1.3.2 Pictographs 10
1.3.3 Stickers on the product 10
1.3.4 Abbreviations 11
1.4 Trademark proof 11
2 Safety 12
2.1 General safety information 12
2.2 Safety instructions 12
2.3 Safety precautions 15
2.4 Proper use 16
2.5 Foreseeable improper use 16
2.6 Responsibilities and warranty 16
2.7 Owner requirements 16
2.8 Personnel qualification 16
2.8.1 Ensuring personnel qualification 17
2.8.2 Personnel qualification for maintenance and repair 17
2.8.3 Advanced training with Pfeiffer Vacuum 17
2.9 Operator requirements 17
3 Product description 18
3.1 Scope of delivery 18
3.2 System overview 18
3.2.1 Structure of the system 18
3.2.2 Analyzer QMA 250 20
3.2.3 Electronic unit QME 250 21
3.2.4 PV MassSpec software 22
3.3 Interfaces 22
3.3.1 POWER SUPPLY 22
3.3.2 Ethernet (LAN) 23
3.3.3 AUX I/O 23
3.3.4 EXT I/O 24
3.3.5 TP GAUGE 26
3.3.6 USB 26
3.4 Identifying the product 26
3.5 Operating principle 27
4 Transport and storage 28
4.1 Transporting the product 28
4.2 Storing the product 28
5 Installation 29
5.1 Installing PrismaPro 29
5.2 Installing the analyzer 30
5.3 Assemble the electronic unit 33
5.4 Establishing an electrical connection 33
5.4.1 Establishing the Ethernet connection 33
5.4.2 Connecting the current supply 34
5.5 Connecting gauges 34
5.6 Establishing a network connection 35
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5.6.1 IP addresses 35
5.6.2 Sub-networks 36
5.6.3 Changing the PrismaPro IP address 36
5.6.4 Changing the host computer IP address 36
5.7 Connecting the PrismaPro 37
5.7.1 Connecting each individual PrismaPro 37
5.7.2 Connecting several PrismaPro devices 37
5.8 Installing PV MassSpec 38
6 Commissioning 39
6.1 Commissioning the device 39
6.2 Switch on the device 39
7 Operation 41
7.1 Using PrismaPro Web UI 41
7.2 Use PV MassSpec 41
8 Decommissioning 42
9 Maintenance 43
9.1 Execution of maintenance work 43
9.2 Test report 43
9.3 Maintaining the analyzer QMA 250 44
9.3.1 Visually inspect the QMA 250 analyzer 45
9.3.2 Baking out the analyzer 47
9.4 Replace filament unit 47
9.4.1 Replacing the filament unit of the open ion source 48
9.4.2 Replacing the filament unit of the crossbeam ion source 50
9.4.3 Replacing the filament unit of the grid ion source 51
9.5 Replacing the ion source 53
9.5.1 Replacing the open ion source 53
9.5.2 Replacing the cross beam ion source 54
9.5.3 Replacing the grid ion source 56
9.6 Calibrating high frequency and the mass scale 57
9.6.1 Factory calibration 57
9.6.2 Attaining a stable operating temperature for PrismaPro 58
9.6.3 Selecting the gas mixture for the mass calibration 58
9.6.4 Setting high frequency for both polarities 58
9.6.5 Perform mass calibration (TUNE) 59
9.6.6 Calibrating with a test gas mixture 60
9.6.7 Calibration with process gases 60
9.6.8 Calibration of the helium leak detection 60
10 Malfunctions 61
10.1 Troubleshooting 61
10.1.1Remedying system and communication errors 61
10.1.2Remedying hardware errors 62
10.1.3Remedying operating and measuring errors 65
10.1.4Calling software error messages from PV MassSpec 66
10.2 Contacts on QMA 250 and QME 250 67
10.3 Checking the QMA 250 analyzer 67
11 Shipping 69
12 Recycling and disposal 70
12.1 General disposal information 70
12.2 Dispose of a compact mass spectrometer 70
13 Service solutions by Pfeiffer Vacuum 71
14 Ordering information 73
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14.1 Ordering parts 73
14.2 Spare parts Maintenance Level 1 73
14.2.1Electronic unit QME 250 73
14.2.2Analyzer QMA 250 73
14.2.3Filament units 74
14.3 Spare parts Maintenance Level 2 74
14.4 Spare parts and small parts sets 74
14.4.1Spare parts 74
14.4.2Set of small parts PT 163 544 for open ion source 75
14.4.3Set of small parts PT 163 543 for crossbeam ion source 75
14.4.4Set of small parts PT 163 534 for grid ion source 75
15 Technical data and dimensions 76
15.1 General 76
15.2 Technical data PrismaPro QMG 250 F 76
15.3 Technical data PrismaPro QMG 250 M 77
15.4 Dimensions 79
NRTL certification 83
Declaration of conformity 84
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List of tables
Tbl. 1: Applicable documents 8
Tbl. 2: QMG 250 PrismaPro 8
Tbl. 3: Analyzer QMA 250 9
Tbl. 4: Electronic unit QME 250 9
Tbl. 5: Abbreviations used 11
Tbl. 6: Ion sources for analyzer QMA 250 M 21
Tbl. 7: Front panel elements 22
Tbl. 8: Status of the Ethernet connection 23
Tbl. 9: Required tightening torques 30
Tbl. 10: Gauges 34
Tbl. 11: Examples for sub-networks 36
Tbl. 12: Connections of the filament and the ion source 46
Tbl. 13: Maximum bakeout temperatures 47
Tbl. 14: Mass calibration 58
Tbl. 15: System and communication errors 62
Tbl. 16: Hardware errors 64
Tbl. 17: Operating and measuring errors 66
Tbl. 18: Software error messages from PV MassSpec 66
Tbl. 19: Measurements for checking the analyzer 68
Tbl. 20: Electronic unit QME 250 73
Tbl. 21: Analyzer QMA 250 74
Tbl. 22: Filament units 74
Tbl. 23: Ion sources 74
Tbl. 24: Spare parts 75
Tbl. 25: Set of small parts PT 163 544 for open ion source 75
Tbl. 26: Set of small parts PT 163 543 for crossbeam ion source 75
Tbl. 27: Set of small parts PT 163 534 for grid ion source 75
Tbl. 28: Conversion table: Pressure units 76
Tbl. 29: Conversion table: Units for gas throughput 76
Tbl. 30: Technical data PrismaPro QMG 250 F 77
Tbl. 31: Technical data PrismaPro QMG 250 M 79
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 10
Fig. 2: Main components of the PrismaPro 19
Fig. 3: System overview 20
Fig. 4: Analyzers with transport protection 20
Fig. 5: Components of the analyzer QMA 250 with open ion source 21
Fig. 6: QME 250 front panel: left standard, right with IO 250 22
Fig. 7: PV MassSpec 22
Fig. 8: View on the mains part plug 23
Fig. 9: Ethernet connection 23
Fig. 10: AUX I/O, 15-pin D-Sub socket 23
Fig. 11: EXT I/O, 62-pin HD D-Sub socket 24
Fig. 12: Connection example: Digital output EXT I/O 25
Fig. 13: Connection example: Digital input AUX I/O and EXT I/O 26
Fig. 14: TP GAUGE, 6-pin Amphenol C 091 A socket 26
Fig. 15: Principle of the quadrupole mass spectrometer system 27
Fig. 16: Fastening and grounding of analyzer 32
Fig. 17: Mounting aid and transport protection 32
Fig. 18: Desktop shortcut 38
Fig. 19: Excerpt of an exemplary a test report 44
Fig. 20: Ion source with open ion source as an example 45
Fig. 21: Connections of the filament and the ion source with clamps 46
Fig. 22: High-frequency connections of the quadrupole mass filter 46
Fig. 23: Disassembling the filament unit of the open ion source 49
Fig. 24: Installing the filament unit of the open ion source 49
Fig. 25: Filament unit of the crossbeam ion source 50
Fig. 26: Support spring on the analyzer with crossbeam ion source 51
Fig. 27: Filament unit of the grid ion source 52
Fig. 28: Replacing the open ion source 54
Fig. 29: Replacing the cross beam ion source 55
Fig. 30: Support spring on the analyzer with crossbeam ion source 55
Fig. 31: Replacing the grid ion source 57
Fig. 32: Warning message with security prompt 59
Fig. 33: New high frequency/reverse polarity 59
Fig. 34: Contacts on QMA 250 and QME 250 67
Fig. 35: Dimensions QMG 250 F / open IS / straight QME 250 79
Fig. 36: Dimensions QMG 250 M / open IS / straight QME 250 80
Fig. 37: Dimensions QMG 250 M / crossbeam IS / straight QME 250 80
Fig. 38: Dimensions QMG 250 M / grid IS / straight QME 250 80
Fig. 39: Dimensions QMG 250 F / open IS / 90° QME 250 81
Fig. 40: Dimensions QMG 250 M / open IS / 90° QME 250 81
Fig. 41: Dimensions QMG 250 M / crossbeam IS / 90° QME 250 82
Fig. 42: Dimensions QMG 250 M / grid IS / 90° QME 250 82
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"PrismaPro Web UI" Operating instructions
QMG 250
BG 6002
Quick-Start Guide "PrismaPro"
QMG 250
BG 6003
Software documentation
PV MassSpec
(part of the software)
Declaration of conformity (part of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following part numbers:
Part number Designation
PT M15 ... QMG 250 PrismaPro (Faraday)
PT M16 ... QMG 250 PrismaPro (Faraday/electron multiplier)
Tbl. 2: QMG 250 PrismaPro
Part number Short description Mass range [u] Detector Ion source Filament Wiring
PT M25 411 QMA 250 F1 1 – 100 Faraday open W Nickel
PT M25 412 Ir-Y2O3
PT M25 413 QMA 250 M1 Faraday/EM W
PT M25 414 Ir-Y2O3
PT M25 415 CB W Copper, silver-plated
PT M25 416 Ir-Y2O3
PT M25 419 Grid W
PT M25 421 QMA 250 F2 1 – 200 Faraday open W Nickel
PT M25 422 Ir-Y2O3
PT M25 423 QMA 250 M2 Faraday/EM W
PT M25 424 Ir-Y2O3
PT M25 425 CB W Copper, silver-plated
PT M25 426 Ir-Y2O3
PT M25 429 Grid W
About this manual
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Part number Short description Mass range [u] Detector Ion source Filament Wiring
PT M25 431 QMA 250 F3 1 – 300 Faraday open W Nickel
PT M25 432 Ir-Y2O3
PT M25 433 QMA 250 M3 Faraday/EM W
PT M25 434 Ir-Y2O3
PT M25 435 CB W Copper, silver-plated
PT M25 436 Ir-Y2O3
PT M25 439 Grid W
Tbl. 3: Analyzer QMA 250
Part number Short description Mass range [u] Input/Output Version
PT M28 641 QME 250 M1 1 – 100 Standard
(without IO 250)
straight
PT M28 642 QME 250 M2 1 – 200
PT M28 643 QME 250 M3 1 – 300
PT M28 651 QME 250 M1 1 – 100 expanded
(with IO 250)
PT M28 652 QME 250 M2 1 – 200
PT M28 653 QME 250 M3 1 – 300
PT M28 661 QME 250 M1 1 – 100 Standard
(without IO 250)
90° angled
PT M28 662 QME 250 M2 1 – 200
PT M28 663 QME 250 M3 1 – 300
PT M28 671 QME 250 M1 1 – 100 expanded
(with IO 250)
PT M28 672 QME 250 M2 1 – 200
PT M28 673 QME 250 M3 1 – 300
Tbl. 4: Electronic unit QME 250
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
About this manual
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Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
D-35614 Asslar
Mod.
P/N
S/N
Input
QMG 250
PT M16 312 210
4452....
24 V DC 1.25 A 30 W
Made in United States 2020/02
Rating plate (example)
Rating plate for PrismaPro
1 2 3
3
Fig. 1: Position of the stickers on the product
1 Rating plate for entire system QMG 250 3 Rating plate for analyzer QMA 250
2 Rating plate for electronic unit QME 250
About this manual
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