LumaSense technologies IMPAC IN 9 plus User manual

MANUAL
IMPAC Pyrometer
IN 5/9 plus

Confidential Information
The material contained herein consists of information that is the property of LumaSense
Technologies and intended solely for use by the purchaser of the equipment described in this
manual. All specifications are subject to change without notice. Changes are made periodically
to the information in this publication, and these changes will be incorporated in new editions.
LumaSense Technologies prohibits the duplication of any portion of this manual or the use
thereof for any purpose other than the operation or maintenance of the equipment described
in this manual, without the express written permission of LumaSense Technologies.
Copyright
© LumaSense Technologies 2018. All rights reserved.
Trademarks
IMPAC is a trademark of LumaSense Technologies.
All other trademarks are trademarks, registered trademarks, and/or service marks of their
respective holders.
Service Centers
LumaSense Technologies, Inc.
North America
Sales & Service
Santa Clara, CA, USA
Ph: [phone]
Ph: [phone]
Fax: [phone]
LumaSense Technologies GmbH
Other Than North America
Sales & Support
Frankfurt, Germany
Ph: [phone]
Fax: [phone]
Global and Regional Centers
Our Headquarters
LumaSense Technologies, Inc.
Santa Clara, CA, USA
Ph: [phone]
Fax: [phone]
Americas, Australia, & Other Asia
LumaSense Technologies, Inc.
Santa Clara, CA, USA
Ph: [phone]
Fax: [phone]
Europe, Middle East, Africa
LumaSense Technologies GmbH
Frankfurt, Germany
Ph: [phone]
Fax: [phone]
France
LumaSense Technologies Sarl
Erstein, France
Ph: [phone]
Fax: [phone]
India
LumaSense Technologies, India
Mumbai, India
Ph: + 91 22 67419203
Fax: + 91 22 67419201
China
LumaSense Technologies, China
Shanghai, China
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Ph: [phone]
E-mail [e-mail]
[email protected]
[email protected]om
Website http://www.lumasenseinc.com
Part No 3 869 017 - EN
Revision B
July 2018

IN 5/9 plus Manual Contents •iii
Contents
1General Information ....................................................................................................... 5
1.1 Information about the user manual...................................................................... 5
1.1.1 Legend......................................................................................................................5
1.1.2 Terminology .............................................................................................................5
1.2 Safety ....................................................................................................................... 5
1.2.1 Laser Targeting Light...............................................................................................5
1.2.2 Electrical connection................................................................................................6
1.3 Limit of liability and warranty .............................................................................. 6
1.4 Unpacking the Instrument...................................................................................... 7
1.5 Service Request, Repair, or Support...................................................................... 7
1.6 Shipments to LumaSense for Repair ..................................................................... 7
1.7 Transport, packing, and storage ............................................................................ 8
1.8 Disposal / decommissioning................................................................................... 8
2Introduction..................................................................................................................... 9
2.1 Appropriate use ...................................................................................................... 9
2.2 Scope of delivery .................................................................................................... 9
2.3 Technical data.......................................................................................................... 9
2.4 Dimensions ............................................................................................................ 10
2.5 Physical user interface.......................................................................................... 11
2.6 Accessories (Optional) .......................................................................................... 11
2.6.1 Mounting................................................................................................................11
2.6.2 Water Cooling Jacket ............................................................................................11
2.6.3 Miscellaneous.........................................................................................................12
2.6.4 Display ....................................................................................................................12
3Controls and Installation.............................................................................................. 13
3.1 Electrical Installation ............................................................................................ 13
3.1.1 Pin assignment for the connector on the back of the pyrometer......................13
3.1.2 Connecting the pyrometer to a PC.......................................................................13
3.1.3 Connecting to RS232 interface .............................................................................14
3.1.4 Connecting to RS485 interface .............................................................................14
3.1.5 Connection of additional analyzing devices........................................................14
3.2 Sighting.................................................................................................................. 15
3.2.1 Laser targeting light ..............................................................................................15
3.2.2 Thermal Alignment................................................................................................15
3.3 Optics ..................................................................................................................... 16
3.3.1 Calculating spot sizes.............................................................................................16
4Instrument Settings ...................................................................................................... 17
4.1 Switches at the Instrument.................................................................................. 17
4.1.1 Instrument Switches ..............................................................................................18
4.2 Online/Offline Mode (ONL/OFFL) .......................................................................... 18
4.2.1 Offline (OFFL).........................................................................................................18

IN 5/9 plus Manual Contents •iv
4.2.2 Online (ONL) ..........................................................................................................18
4.3 Factory settings..................................................................................................... 18
5Parameter Descriptions / Settings................................................................................ 19
5.1 Settings at the pyrometer or via serial interface............................................... 19
5.1.1 Emissivity (Emi).......................................................................................................19
5.1.2 Exposure time (t90) .................................................................................................19
5.1.3 Analog Output 0/4 to 20 mA ................................................................................20
5.2 Settings only via serial interface......................................................................... 20
5.2.1 Maximum / minimum value storage (tClear)...........................................................20
5.2.2 Subrange ................................................................................................................21
5.2.3 Baud rate (kBaud)..................................................................................................21
5.2.4 Address ...................................................................................................................22
5.2.5 Ambient temperature compensation...................................................................22
5.2.6 Wait time (tw) .........................................................................................................23
5.2.7 Internal temperature.............................................................................................23
5.3 Avoiding Reading Errors ...................................................................................... 23
6Software InfraWin......................................................................................................... 25
6.1 Connecting the pyrometer to a PC ...................................................................... 25
6.2 Installation ............................................................................................................ 25
6.3 Program start ........................................................................................................ 25
7Maintenance .................................................................................................................. 27
7.1 Cleaning the front window.................................................................................. 27
7.2 Safety ..................................................................................................................... 27
8Troubleshooting ............................................................................................................ 29
9Data Format UPP (Universal Pyrometer Protocols)..................................................... 31
10 Reference Numbers ....................................................................................................... 33
10.1 Reference numbers instrument ........................................................................... 33
10.2 Reference numbers accessories ........................................................................... 33
Index..................................................................................................................................... 35

IN 5/9 plus Manual General Information •5
1General Information
1.1 Information about the user manual
Congratulations on choosing this high quality and highly efficient IN 5/9 plus pyrometer.
This manual provides important information about the instrument and can be used as a work of
reference for installing, operating, and maintaining your pyrometer. It is important that you
carefully read the information contained in this manual and follow all safety procedures before
you install or operate the instrument.
To avoid handling errors, keep this manual in a location where it will be readily accessible.
1.1.1 Legend
Note: The note symbol indicates tips and useful information in this manual. All notes
should be read to effectively operate the instrument.
Attention: This sign indicates special information which is necessary for a correct
temperature measurement.
Warnings and Cautions: The general warnings and cautions symbol signifies the
potential for bodily harm or damage to equipment.
MB Shortcut for Temperature range (in German: Messbereich)
1.1.2 Terminology
The terminology used in this manual corresponds to the VDI- / VDE-directives 3511, Part 4.
1.2 Safety
This manual provides important information on safely installing and operating the
pyrometer. Several sections of this manual provide safety warnings to avert danger. These safety
warnings are specified with a warning symbol. You must read and understand the contents of
this manual before operating the instrument even if you have used similar instruments or have
already been trained by the manufacturer.
It is also important to continually pay attention to all labels and markings on the instrument and
to keep the labels and markings in a permanent readable condition.
Warning: The pyrometer is only to be used as described in this manual. It is
recommended that you only use accessories provided by the manufacturer.
In addition, signs and markings on the device are to be observed and maintained in a legible
condition.
1.2.1 Laser Targeting Light
For easy alignment to the measuring object the pyrometers are equipped with a laser targeting
light. This is a visible red light with a wavelength 650 nm and a maximum power of 1 mW. The
laser is classified as product of laser class 2.

IN 5/9 plus Manual General Information •6
Warning: To reduce the risk of injury to the eyes, do not look
directly into the targeting laser and do not point the targeting laser
into anyone's eyes. The instrument is equipped with a class II laser
that emits radiation.
•Never look directly into the laser beam. The beam and spot can be watched
safely from side.
•Make sure that the beam will not be reflected into eyes of people by mirrors or
shiny surfaces.
1.2.2 Electrical connection
Follow common safety regulations for main voltage (230 or 115 V AC) when connecting
additional devices. Touching the main voltage can be fatal. An incorrect connection and/or
mounting can cause serious health or material damages.
Only qualified specialists should connect such devices to the main voltage.
1.3 Limit of liability and warranty
All general information and notes for handling, maintenance, and cleaning of this instrument
are offered according to the best of our knowledge and experience.
LumaSense Technologies is not liable for any damages that arise from the use of any examples
or processes mentioned in this manual or in case the content of this document should be
incomplete or incorrect. LumaSense Technologies reserves the right to revise this document and
to make changes from time to time in the content hereof without obligation to notify any
person or persons of such revisions or changes.
All instruments from LumaSense Technologies have a regionally effective warranty period.
Please check our website at http://info.lumasenseinc.com/warranty for up-to-date warranty
information. This warranty covers manufacturing defects and faults, which arise during
operation, only if they are the result of defects caused by LumaSense Technologies.
The Windows compatible software was thoroughly tested on a wide range of Windows
operating systems and in several world languages. Nevertheless, there is always a possibility that
a Windows or PC configuration or some other unforeseen condition exists that would cause the
software not to run smoothly. The manufacturer assumes no responsibility or liability and will
not guarantee the performance of the software. Liability regarding any direct or indirect
damage caused by this software is excluded.
The warranty is VOID if the instrument is disassembled, tampered with, altered, or otherwise
damaged without prior written consent from LumaSense Technologies; or if considered by
LumaSense Technologies to be abused or used in abnormal conditions. There are no user-
serviceable components in the instrument:
•No adjustments may be made to the targeting laser. It is fixed at the factory.
•No adjustments may be made to the targeting laser's power level.

IN 5/9 plus Manual General Information •7
1.4 Unpacking the Instrument
Thoroughly inspect the instrument upon delivery to purchaser. Check all materials in the
container against the enclosed packing list. LumaSense Technologies cannot be responsible for
shortages against the packing list unless a claim is immediately filed with the carrier. The
customer must complete final claim and negotiations with the carrier.
Save all packing materials, including the carrier’s identification codes, until you have inspected
the pyrometer and find that there is no obvious or hidden damage. Before shipment, the
pyrometer was examined and has been tested. If you note any damage or suspect damage,
immediately contact the carrier and LumaSense Technologies, Inc.
1.5 Service Request, Repair, or Support
Contact LumaSense Technologies Technical Support in case of a malfunction or service request.
Provide clearly stated details of the problem as well as the instrument model number and serial
number. Upon receipt of this information, Technical Support will attempt to locate the fault
and, if possible, solve the problem over the telephone.
If Technical Support concludes that the instrument must be returned to LumaSense Technologies
for repair, they will issue a Return Material Authorization (RMA) number.
Return the instrument upon receipt of the RMA number, transportation prepaid. Clearly
indicate the assigned RMA number on the shipping package exterior. Refer to Section 1.6,
Shipments to LumaSense for Repair, for shipping instructions.
Technical Support can be contacted by telephone or email:
Santa Clara, California
•Telephone: [phone] or [phone]
•Email: [email protected]
Frankfurt, Germany
•Telephone: [phone]
•Email: [email protected]
Erstein, France
•Telephone [phone]
•Email: [email protected]
1.6 Shipments to LumaSense for Repair
All RMA shipments of LumaSense Technologies instruments are to be prepaid and insured by
way of United Parcel Service (UPS) or preferred choice. For overseas customers, ship units air-
freight, priority one.
The instrument must be shipped in the original packing container or its equivalent. LumaSense
Technologies is not responsible for freight damage to instruments that are improperly packed.
Contact us to obtain an RMA number (if one has not already been assigned by Technical
Support). Clearly indicate the assigned RMA number on the shipping package exterior.

IN 5/9 plus Manual General Information •8
Send RMA Shipments to your nearest technical service center:
Santa Clara, California Frankfurt, Germany
LumaSense Technologies, Inc.
3301 Leonard Court
Santa Clara, CA 95054 USA
Telephone: [phone]
[phone]
Email: [e-mail]
LumaSense Technologies GmbH
Kleyerstr. 90
60326 Frankfurt
Germany
Telephone: [phone]
Email: eu[email protected]
1.7 Transport, packing, and storage
With faulty shipping, the instrument can be damaged or destroyed. To transport or store the
instrument, please use the original box or a box padded with sufficient shock-absorbing
material. For storage in humid areas or shipment overseas, the device should be placed in
welded foil (ideally along with silica gel) to protect it from humidity.
The pyrometer is designed for a storage temperature of -20 to 70 °C with non-condensing
conditions. Storing the insturment out of these conditions can cause damage or result in
malfunction of the pyrometer.
1.8 Disposal / decommissioning
Inoperable IMPAC pyrometers must be disposed of in compliance with local regulations for
electro or electronic material.

IN 5/9 plus Manual Introduction •9
2Introduction
2.1 Appropriate use
The IN 5/9 plus is a digital, highly accurate pyrometer for non-contact temperature measurement
of Sapphire and Sapphire Wafers between 0 °C and 1500 °C.
2.2 Scope of delivery
Instrument with selected optics, works certificate, PC measurement and evaluation software
InfraWin
Note: A connection cable is not included with the instrument and has to be ordered
separately (see Chapter 10, Reference numbers).
2.3 Technical data
Temperature Range:
0 … 1500 °C
Temperature Subrange:
Any range adjustable within the temperature range, minimum span 51
°C
Spectral Range:
8 … 9.7 µm
Optics:
Zinc-Sulfide (ZnS)
Resolution:
Interface: 0.1 °C
Analog output:< 0.1 % of the adjusted temperature range
Meas. Uncertainty*:
(ε= 1, t90 = 1 s,
Tamb. = const.)
0.6% of reading in °C or 3 °C (T
amb
= 15...30 °C)
1 % of reading in °C or 5 °C (Tamb = 0…15 or 30…63 °C)
Whichever value is greater. The instrument must be at a constant
ambient temperature for a minimum of 60 minutes and must be
connected to the power supply.
Repeatability:
(ε= 1, t90 = 1 s,
Tamb. = const.)
0.3% of reading in °C or 0.6 °C
The instrument must be at a constant ambient temperature for a
minimum of 30 minutes.
Noise Equivalent
Temperature Difference
(NETD):(at σ=1, ε=1,
Tamb. = 23 °C)
Temperature NETD at
t90 = 180 ms / °C
NETD at
t90 = 1 s / °C
350 °C 0.5 0.2
950 °C 0.4 0.1
Emissivity
ε
:
0.2 ... 1.2 switchable in the instrument (offline mode: adjustable from
0.2 ... 1.0) or with the software InfraWin (online mode) in steps of 0.01
Exposure Time t
90
:
0.18 s; adjustable in the pyrometer: 0.5 s; 1 s; 2 s; 5 s,
adjustable via interface: 0.5 s; 1 s; 2 s; 5 s; 10 s; 30 s
Sighting:
Laser targeting light 650 nm
Laser power level < 1 mW
Laser class 2 per IEC60825-1-3-4
Maximum Value
Storage:
Built-in single and double store. Clearing with clear time t
CL
(0.1 s;
0.25 s; 0.5 s; 1 s; 5 s; 25 s), external contact or via interface or also
automatically with each new item to be measured

IN 5/9 plus Manual Introduction •10
Analog Output:
Adjustable 0 ... 20 mA or 4 ... 20 mA (linear)
Load:
Max. 500 Ohm at 24 V (max. 200 Ohm at 18 V)
Digital Interface:
RS232 (RS485 on request)
Parameters:
Adjustable on the pyrometer (in offline mode):
Emissivity, exposure time, 0/4 ... 20 mA analog output range,
online- / offline switch
Readable and adjustable via interface / PC (in online mode):
Emissivity, exposure time, 0/4... 20 mA analog output range, sub
temperature range, automatic clearing of the max./min value
storage, external clearing of the max./min value storage, clear
times of the max/min value storage, address, baud rate, internal
temperature °C / °F, max. / min. selection, activation of ambient
temperature correction
Power Supply:
24 V DC (18 ... 30V DC) nominal, ripple must be less than 0.5 V
Power Consumption:
Max. 70 mA
Isolation:
Power supply, analog outputs and digital interfaces are electrically
isolated from each other
Ambient Temperature:
0 ... 63 °C
Storage Temp.:
-20 ... 70 °C
Rel. Humidity:
Non-condensing conditions
Protection Class:
IP65 (DIN 40050)
Operating Position:
Any
Housing:
Stainless steel
Weight:
410 g
Connection:
12 pin connector
CE-Label:
According to EU directives about electromagnetic immunity
Note: The calibration / adjustment of the instruments was carried out in accordance
with VDI/VDE directive “Temperature measurement in industry, Radiation
thermometry, Calibration of radiation thermometers”, VDI/VDE 3511, Part 4.4.
For additional details on this directive, see http://info.lumasenseinc.com/calibration or
order the directive from “Beuth Verlag GmbH” in D-10772 Berlin, Germany.
2.4 Dimensions
All dimensions in mm