Manitou Systems PB-3 SERIES User manual

Manitou Systems, Inc.
12 South Street Danbury, CT 06810
Office Tel.[phone] Fax.[phone]
Web: www.manitousys.com Email: [e-mail]
High-powered solutions for RF and microwave applications
PROCESS OPTIMIZED RF POWER SYSTEMS AND COMPONENTS
SERIES PB-3
13.56 MHz RF POWER SYSTEM
OWNERS MANUAL
CUSTOMER
DATE
SERIAL #
COPYRIGHT MANITOU SYSTEMS, INC. 2002 Part # 00800077 r-1 File # PB3 manual- 100_300W digital MSI
OWNERS
MANUAL

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 2
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
WARNING
Lethal RF and DC voltages are present in this system.
Only qualified personnel should install and service this equipment.
Prior to installation and operation of this system, this instruction manual should be consulted to ensure that
the installation and operation are in accordance with Manitou Systems' recommendations.
Failure to properly install or operate this unit will result in voiding the equipment warranty.
Copyright 2002 Manitou Systems, Inc.
This owner’s manual is provided to enable the user to safely install, operate and service the equipment
described.
Manitou Systems, Inc. reserves the right to make product changes and enhancements without notification
or obligation.
For more information, please write Manitou Systems, Inc. 12 South Street Danbury, CT 06810 USA or
contact us via:
• Telephone at [phone]
• FAX at [phone]
• e-mail [email protected]
• Website at www.manitousys.com.
Published in the United States of America.
This document may not be reproduced without the written permission of Manitou Systems, Inc.
All rights reserved.
Revisions to Manual
12.8.02 SMS r1- Add new ground/return scheme to User I/O connection. Modified Section 2.4 Pg 11 &
Section 32. Pg 14

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 3
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
TABLE OF CONTENTS
SECTION 1 INTRODUCTION
1.1 General Description
1.2 Icon Explanations
1.3 Mechanical Description
1.4 Technical Specifications
1.5 Safety Precautions
1.6 Theory of Operation
SECTION 2 INSTALLATION
2.1 Unpacking Your PB-3
2.2 System Components List
2.3 Mechanical Installation
2.4 Electrical Installation
SECTION 3 OPERATION
3.1 Front Panel / Operator Controls & Metering
3.2 Rear Panel Controls & Connections
3.3 Preliminary Operator Control Settings
3.4 Preliminary Checks Before Turning on the RF Power
3.5 Turning on the RF Power
SECTION 4 TROUBLESHOOTING PROCEDURES
4.1 RF Generator Problems
4.2 Impedance Matching Network Problems
SECTION 5 MAINTENANCE PROCEDURES
5.1 Cleaning Of Debris
5.2 Front Panel Cleaning
SUPPLEMENTS
PB3 Common Exciter operation tech note.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 4
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
INTRODUCTION SECTION 1
1.1 GENERAL DESCRIPTION
1.2 ICON EXPLANATIONS
1.3 MECHANICAL DESCRIPTION
1.4 TECHNICAL SPECIFICATIONS
1.5 SAFETY PRECAUTIONS
1.6 THEORY OF OPERATION
1.1 GENERAL DESCRIPTION
The budget minded SERIES PB-3 is specifically designed for continuous operation in gas plasma
process applications.
The RF power generator and manual impedance matching network are both housed in a single,
compact enclosure.
The RF generator provides precise process control - even in the varying environment of plasma
processes. Ruggedized output transistors are used to ensure reliability during 100% duty-cycle
operation. A high current switch mode DC power module provides all necessary support power.
The system's control circuitry offers fine control resolution: A ten (10) turn control pot is used to
provide a 1% control resolution.
A manually controlled impedance matching network provides the user with a broad tuning range.
The network includes a tapped, field changeable series inductor and optional fixed shunt
capacitor(s) enabling the unit to match a wide range of plasma electrode impedances.
An optional common exciter input allows the PB-3 to be used in multiple cathode and substrate
bias applications.
External analog user interface connections permit the PB-3 to be controlled via the user's PLC or
computer.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 5
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
1.2 ICON EXPLANATIONS
WARNING This symbol is used only where an immediate hazard exists.
When this word is used, immediate danger exists and special
precautions are necessary to prevent possible injury, death or
significant property damage.
CAUTION
This symbol is used when unsafe operating or service
practices could result in damage to the equipment
This icon means "NOTE" or the information following should be
mentally highlighted.
The finger-pointing icon is used to indicate a procedure or step
required before powering on the system.
1.3 MECHANICAL DESCRIPTION
The system's chassis footprint measures 12" W x 7" H x 16" D, the chassis is attached to a 19"
wide rack mount front panel. The cabinet is constructed from chemically treated aluminum
components. The front panel and top cover are removable to provide access to system
components and adjustments.
The PB-3 is designed to be mounted in a 19” electronics rack cabinet.
Cooling air is drawn in through the rear panel inlets and exhausted through a side panel louver.
All operator controls are mounted on the front panel.
AC mains input, RF power output, common exciter in/out and a remote control connector are
grouped together on the rear panel.
The internal matching network is connected to the generator’s output by a short coaxial cable
(terminated with a BNC male connector) that protrudes from the rear of the unit. The matching
network may be bypassed by disconnecting this short cable from the generator’s output and
connecting the load in its place.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 6
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
1.4 TECHNICAL SPECIFICATIONS: SYSTEM LEVEL
Input Power PB3/100 110 VAC, 50/60 Hz, 1 Phase, 5A Max
PB3/100 220 VAC, 50/60 Hz, 1 Phase, 2.5A Max
PB3/300 220 VAC, 50/60 Hz, 1 Phase, 5A Max
Cooling Forced air via a 110-CFM fan. Maximum 90% relative humidity &
100 degrees F ambient temperature.
System Footprint 12-1/4" W x 6" H x 16" D with a 7" high, 19" rack mount front panel.
Shipping Weight Approximately 25 lbs.
RF Output Power 100 or 300 watts into a 50 ohm load
Output Frequency 13.56 MHz +/- .005%
Output Impedance 50 ohms resistive
Output Connector BNC female
Output Power Stability +/- .5% of set-point
TECHNICAL SPECIFICATIONS: IMPEDANCE MATCHING NETWORK
RF Output Connection HN female coaxial cable connector
RF Input Connector BNC male coaxial cable connector
Matching Network "L" using a variable shunt capacitor and a tapped series inductor &
variable capacitor. Additional fixed shunt capacitors are installed in the
network, these may be connected in parallel with the variable shunt
capacitor if needed to match low impedance loads.
Matching Network Shunt Capacitor: 1000 pF
Element Values Series Capacitor: 488 pF
Series Inductor: 2.5 uH
Shunt Cap (Fixed) 200 & 400pF
Output Impedance Wide range - will match to all sputtering sources and
plasma etching / deposition electrodes
1.5 SAFETY PRECAUTIONS

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 7
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
SAFE OPERATION IS THE RESPONSIBILITY OF THE USING ORGANIZATION AND ITS
PERSONNEL. READ THIS OWNERS MANUAL AND UNDERSTAND HOW TO AVOID
HAZARDS PRIOR TO OPERATING THIS UNIT.
Your compliance with the following safety practices is expected:
1. Never work alone on live electrical circuits. You must be within sight or calling distance of
another employee who has the following qualifications:
A. Knows how to remove power from the equipment.
B. Knows how to apply artificial respiration.
C. Is acquainted with emergency procedures, first aid locations and the use of fire
extinguishers.
2. Do not wear rings, wristwatches or other jewelry on your person while working on live electrical
circuits.
3. Wear eye protection while working on live electrical circuitry where a flash might occur.
DO NOT WEAR CONTACT LENSES.
Because currents of 40 ma or greater across the chest can be fatal, read this manual to find out,
before working on the equipment, how much current is present in each circuit.
BE EXTRA CAREFUL!
4. Replace all safety shields after completing system setup, trouble shooting and maintenance
procedures.
5. Immediately report to your supervisor any unsafe conditions that exist.
WARNING Proper use and safe operating practices with respect to this system are
the responsibility of the user of this system. Manitou Systems, Inc. provides information on its
products and associated hazards, but it assumes no responsibility for the after-sale operation and
safety practices; take appropriate action to protect personnel and property from hardware failure.
All personnel who work with or are exposed to this system must take precautions to protect
themselves against possible serious and/or fatal bodily injury. DO NOT be careless around this
system.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 8
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
1.6 THEORY OF OPERATION
The Series PB-3 is a fixed frequency plasma power system consisting of an RF generator and a
manual impedance matching network.
RF GENERATOR
The RF generator is comprised of a DC power section, operator/control panel, switch mode RF
power generator module and an RF power detector module.
Switch Mode RF Power Generator Module
The operating frequency (13.56 MHz) is fixed using a crystal oscillator. Its output drives a TTL
integrated circuit, which produces a square wave output that is fed directly to the gates of a class
C FET RF power amplifier.
This ruggedized power amplifier produces an RF output of 100 or 300 watts maximum based on
the model. The entire circuit is air-cooled.
DC Power Section
The DC power section supplies all of the necessary DC power to the front panel/control board and
the RF section. A fused, switched power entry module is provided on the PB-3 rear panel to
protect the entire system. A fuse is present on the control power supply board for its own
protection.
Operator/Control Panel
The operator/control board contains the basic controls, circuits and switches required to preset,
control, and monitor the PB-3's forward and reflected RF output power. The adjustment knobs for
the impedance matching network are also included on this panel.
The front panel circuit board also includes circuits designed to provide linearization, RF control,
metering and user interface functions. It first linearizes the forward and reflected RF power
signals coming from the RF detector module. This circuit also provides protection for the RF
power amplifier module and its transistors in the event of a mismatched plasma load (i.e. high-
reflected power or an over current condition). The DC drive signal and subsequent RF output
level is limited under these fault conditions. The user interface section of the module contains a
provision for programming the RF power set point input signal. This input can be switched
between Local and Remote by connections on the 25 pin interface connector. Local is defined as
control via the operator/control panel. Remote is defined as operation from a customer's external
signal. All outputs are available at the DB-25 connector in either local or remote control mode. All
signals are buffered by op-amp devices. The interface shorting plug shipped with the unit is
configured to permit local (front panel) control of the RF output level.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 9
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
1.6 THEORY OF OPERATION
RF Power Detector
The power detector is used to provide the control circuits with DC signals corresponding to the
forward and reflected power detected at the generator's output.
Matching Network
The manual impedance matching network uses an "L" circuit topology. A variable shunt capacitor
and a tapped fixed series inductor & variable capacitor are used to match the RF generator's 50
ohm resistive output to the complex plasma impedance. Additional fixed shunt capacitors (200 &
400pF) are included in the unit and may be connected if needed to match low impedance loads.
As delivered, this network exhibits a wide range output impedance and will match to most
sputtering sources and plasma etching / deposition electrodes
Interlocks
When the external interlock connection is satisfied, the green LED on the RF power on/off switch
will illuminate indicating the unit is in a standby condition.
The over temperature interlock is controlled by a thermostat located on the RF generator's heat
sink surface. If an over temperature condition exists, this thermostat will break the RF power set
point circuit. There are no operator indicators connected to this circuit. The PB-3's front panel
indicators will appear normal, but NO output power will be available. The user should wait until
the system cools down, check for cooling vent obstructions & fan operation and re-start the
system.
INSTALLATION SECTION 2
2.1 UNPACKING THE PB-3
2.2 SYSTEM COMPONENTS LIST
2.3 MECHANICAL INSTALLATION
2.4 ELECTRICAL INSTALLATION
2.1 UNPACKING
Remove the unit from its packing and shipping material. Inspect for any damage and contact
Manitou Systems Inc. and the shipping company if any is found.

SERIES PB-3 13.56 MHz RF Power System
High-powered solutions for RF and microwave applications
Corporate Headquarters: 10
12 South Street Danbury, CT 06810
Tel: [phone]  Fax: [phone]
Email: [email protected]  www.manitousys.com
2.2 SYSTEM COMPONENTS LIST
A. PB-3 System
B. DB-25 User Interface Connector with Hood
C. Owners Manual
2.3 MECHANICAL INSTALLATION
The Model PB-3 RF power system is designed to mount near the vacuum chamber RF feed-
through in a standard 19" rack. It requires 7" of height in the rack. Alternately, it may be fastened
to the system chassis using the four (4) 10-32 mounting holes in the baseplate.
Connect the BNC Male “Pigtail Coax” (Matching Network Input) to the female BNC
connector (RF Generator Output).
Always provide continuous airflow through any enclosed electronics rack cabinet containing
heat generating equipment. Exhaust fans mounted in the cabinet's top surface and a filtered inlet
at the bottom will provide the correct enclosure cooling.
2.4 ELECTRICAL INSTALLATION
WARNING Please review the following initial checkout procedure. Follow these steps prior to
normal system operation.
1. The high voltage in this system can cause instant electrocution upon contact or, under some
circumstances, even close proximity to contact. Except as specified in this manual, never open
the system covers or panels without disconnecting the AC input power at its wall source and also
attaching a grounding rod to the high voltage circuit.
2. The system's radio frequency power is transferred to the vacuum chamber through a shielded
vacuum feed through. Harmonic RF energy generated in the plasma discharge and will radiate if
the vacuum chamber is not well grounded. Install a low impedance ground strap between the
chamber and PB-3 and earth ground. This strap should be constructed from silver plated copper
sheet. The width should be 1" to 2" wide X .020" thick. Keep these connections as short as
possible.
3. Before operating the power supply for the first time, it is essential to insure that ground
connections have been installed as specified, that all interlocks are verified to be working properly
and that all high voltage and RF carrying conductors are shielded from human contact. Every
precaution must be taken to install and operate the system in accordance with this manual.
4. In a faulty circuit, operational voltages can be retained internally even after the source of the
power is shut off. Always insure that all filter capacitors are discharged after disconnecting source
power and before examination. Don't assume the power is off until it is checked.
5. If you must examine the system or its AC source with the power on, have another person
present, use the schematics, lock out any power that is not needed, and attach test meter leads
before turning the power on. NEVER, UNDER ANY CIRCUMSTANCES, REACH INSIDE THE
POWER SUPPLY WITH THE POWER ON.