Micronix PPS-20 Series User manual

S e r i e s
Reference Manual
Precision Piezo Stage
(Open and Closed Loop Versions)
PPS-20

PPS-20
Piezo Positioner Stage
Reference Manual
Rev 3.12
MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

PPS-20 Piezo Positioner Stage
1
Rev: 3.12
MICRONIX USA,LLC
www.micronixusa.com
Reference Manual
Contents
1. Introduction 2
1.1 Product Description.......................................................................................................................................................................................2
1.2 Recommended Controllers............................................................................................................................................................................3
1.3 Technical Data...............................................................................................................................................................................................3
1.4 Load Characteristics ......................................................................................................................................................................................3
2. Model Configurations 4
2.1 PPS-20 Order Numbers .................................................................................................................................................................................4
3. Preparing to Install the PPS-20 5
3.1 Installation Preparation.................................................................................................................................................................................5
3.2 Package Contents..........................................................................................................................................................................................5
4. Installing the PPS-20 6
4.1 PPS-20 Installation.........................................................................................................................................................................................6
4.1.1 General Mounting................................................................................................................................................................................6
4.1.2 X-Y Mounting.......................................................................................................................................................................................7
5. Connecting the PPS-20 7
5.1 Atmospheric Environments...........................................................................................................................................................................7
5.1.1 Open Loop Installation & Wiring Diagram ...........................................................................................................................................7
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram ..........................................................................................................................9
5.2 Vacuum Environments ................................................................................................................................................................................10
5.2.1 Handling and Preparation..................................................................................................................................................................10
5.2.2 Open loop Installation & Wiring Diagram..........................................................................................................................................10
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram ........................................................................................................................11
6. Dimensions 13
6.1 PPS-20 with Digital Encoder ........................................................................................................................................................................13
6.2 PPS-20 with Analog Encoder .......................................................................................................................................................................13
7. Stacking Configurations 15
7.1 Configurations Examples.............................................................................................................................................................................15
8. Supplementary Information 16
8.1 Maintenance ...............................................................................................................................................................................................16
8.2 Units and Conventions ................................................................................................................................................................................16
A. Appendix 17
A.1 Electrical Connection...................................................................................................................................................................................17
A.2 2 Phase Piezo Motor Wiring Diagram..........................................................................................................................................................17
A.3 Open Loop Vacuum Wiring Diagram ...........................................................................................................................................................18
A.3.1 Straight Through 9-Pin Feed Through................................................................................................................................................18
A.4 Using the Digital Encoder Module...............................................................................................................................................................19
A.4.1 Encoder Module Pin-out....................................................................................................................................................................19
A.4.2 Operating and Electrical Specifications..............................................................................................................................................20
A.4.3 Output Signals & Signal Termination for A quad B, Index and limits .................................................................................................20
A.4.4 Resolution..........................................................................................................................................................................................20
A.4.5 Digital Encoder Wiring Diagram.........................................................................................................................................................21
A.4.6 Straight Through 25-Pin Feed Through..............................................................................................................................................22
A.5 Using an Analog Encoder.............................................................................................................................................................................23
A.5.1 Analog Encoder Overview..................................................................................................................................................................23
A.5.2 Operating and Electrical Specifications..............................................................................................................................................23
A.5.3 Analog Output (Pins 1,2,6, and 7)......................................................................................................................................................23
A.5.4 Index Window (Pins 3).......................................................................................................................................................................23
A.5.5 Resolution..........................................................................................................................................................................................24
A.5.6 Analog Encoder Wiring Diagram........................................................................................................................................................24
A.5.7 Straight Through 15-Pin Feed Through..............................................................................................................................................25

PPS-20 Piezo Positioner Stage
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1. 0BIntroduction
1.1 Product Description
The PPS-20 is a high-precision, long travel linear piezo stage. Miniature cross-roller
bearings assure high stiffness and guiding accuracy for loads up to 20N (Horizontal
orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high
speed (>2mm/s) and high blocking force (>2N). The PPS-20 is available in travel
lengths of up to 51mm in open loop or with an external encoder, and an optional
linear encoder provides nanometer repeatability. Vacuum, Ultra High Vacuum
(10-9 mbar) and/or Cryo (<77 Kelvin) compatible versions are available.
Features:
▪Travel ranges of 12mm, 18mm, 26mm, and 51mm
▪Load capacity up to 2kg
▪Optional linear encoder
PPS-20 20mm Open Loop
(Shown in center position)
Carriage
Base
Encoder Bracket
Scale Bracket
Encoder Head
Encoder Bracket
Scale Bracket
Encoder Head
PPS-20 20mm Closed Loop
with 2nm digital encoder
(Shown in center position)
PPS-20 20mm Closed Loop
with 10nm Analog encoder
(Shown in center position)

PPS-20 Piezo Positioner Stage
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1.2 Recommended Controllers
The following controllers are available from MICRONIX USA for piezo stages:
▪MMC-100
▪MMC-110
1.3 Technical Data
Motor
PM-002
Speed Max. (mm/sec)
2 (MMC-100), 10(MMC-110)
Resolution Typical (nm)
<1 (open loop), 2 (digital encoder),
10 (analog encoder)
Bi-directional Repeatability (nm)
N/A (open loop), ± 50 (digital encoder),
±50 (analog encoder)
Uni-directional Repeatability (nm)
N/A (open loop), 50 (digital encoder),
50 (analog encoder)
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
PM-002
2
20
20
0.7
0.7
0.7

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2. 1BModel Configurations
2.1 13BPPS-20 Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-20-
1
Piezo Motor PM-002 1
12mm Travel 1
18mm Travel 2
26mm Travel 3
51mm Travel 5
Open Loop 0
Analog (1Vpp), 10nm 2
Digital Encoder, 2nm 3
No Limit Switch 0
Magnetic 1
Non-vacuum 0
Vacuum prepared, 10-6 mbar 6
Vacuum prepared, 10-9 mbar 9

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3. 2BPreparing to Install the PPS-20
3.1 14BInstallation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A surface
that is not flat can adversely affect the performance and structural integrity of the
stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 15BPackage Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪PPS-20 Linear Stage
▪Reference Manual
▪Any other previously agreed upon components such as a controller

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4. 3BInstalling the PPS-20
All mounting patterns require M2 screws for mounting and M1.5 x 5mm dowel pins
for precision alignment. Additional brackets and screws may be needed for
custom applications.
4.1 16BPPS-20 Installation
4.1.1 28BGeneral Mounting
For general mounting configurations, mount the base to the mounting surface.
Align carriage with clearance holes to access base mounting pattern. (Please
note, it is possible to move the carriage manually without damaging the stage)
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2 x 5mm Socket Head Cap Screws
(optional) 2x M2 x 5mm Socket Head Cap
Screw for ear mounts
2. Align carriage with a
clearance hole and install an
M2 Socket Head Cap Screw
Direction
of Travel
Clearance Hole
Optional Side
Mounting screws
Customer Supplied
Base Plate or
Mounting Surface
1. Align carriage with remaining
clearance hole and install
second M2 Socket Head Cap
Screw
Optional Ear
Mount Screws

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4.1.2 29BX-Y Mounting
For X-Y mounting, follow the instructions for mounting the X-axis stage, outlined in
section 4.1.1 General Mounting, then proceed to mount the Y-axis stage, as shown
below (Please note, it is possible to move the carriage manually without damaging
the stage):
Note: For stages assembled in an XY configuration in factory do not require disassembly for
base mounting
5. 4BConnecting the PPS-20
5.1 17BAtmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 30BOpen Loop Installation & Wiring Diagram
Connecting the PPS-20 in an open loop configuration only requires that the D-sub
9 Pin male Motor Cable be connected to a compatible controller. No other cables
or components are needed.
Travel
A
B
12mm
20
16
18mm
30
16
26mm
40
36
51mm
80
50
Requires:
2x M1.5 x 4mm Dowel Pins
4x M2 x 4mm Socket Head Cap Screws
2. Align Carriage with remaining
clearance hole and install second
M2 Socket Head Cap Screw
1. Align Y- Axis Stage Carriage with
Clearance Hole. Install M2 Socket
Head Cap Screw
Direction
of Travel
Y-Axis Stage

PPS-20 Piezo Positioner Stage
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PPS-20 Piezo Positioner Stage
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5.1.2 31BClosed Loop/Encoder Installation & Wiring Diagram
Using the PPS-20 stage with an encoder requires a closed loop compatible
controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect
the stage as shown below.
5.1.2.1 Analog Encoder Wiring Diagram
5.1.2.2 Digital Encoder Wiring Diagram

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For a PPS-20 with a digital encoder, connect the stage as shown below
using the supplied 15 to 9 pin cable to connect the Encoder Module to the
Controller.
5.2 18BVacuum Environments
5.2.1 32BHandling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is 100°C.
MICRONIX USA supplies the stage with vacuum compatible connectors: 9-pin
female PEEK connectors for open loop, 15-Pin female PEEK connector for closed
loop with analog encoder, 25-pin female PEEK connector for closed loop with
digital encoder.
5.2.2 33BOpen loop Installation & Wiring Diagram
Connecting an open loop PPS-20 in a vacuum chamber requires the use of a feed
through connector at the vacuum chamber wall. The vacuum compatible PPS-20
will be supplied with wiring for a straight through feed through not a cross over
gender changer. MICRONIX USA supplies test connectors that simulate the
vacuum feed through to allow functionality test prior to installation in a vacuum
chamber. For details regarding the pin-out and feed through specifications see
the Appendix A.3.

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5.2.3 34BClosed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-20 stage in vacuum environments requires an
intermediate feed through connector at the vacuum chamber wall that can
accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-20 will be supplied with wiring for a straight through
feed through not a cross over gender bender. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow functionality test prior
to installation in a vacuum chamber. For details regarding the pin-out and feed
through specifications see the Appendix A.4.5, A.5.5.

PPS-20 Piezo Positioner Stage
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5.2.3.1 Analog Encoder Wiring Diagram
5.2.3.2 Digital Encoder Wiring Diagram

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6. 5BDimensions
6.1 19BPPS-20 with Digital Encoder
L
Travel
A
B
C
D
E
20
12mm
6
1
2
15
16
30
18mm
6
1
2
25
16
40
26mm
10
3
6
35
36
80
51mm
18
7
14
75
36
* Grey parts for external closed loop
only

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6.2 20BPPS-20 with Analog Encoder
7.
L
Travel
A
B
C
D
E
20
12mm
6
1
2
15
16
30
18mm
6
1
2
25
16
40
26mm
10
3
6
35
36
80
51mm
18
7
14
75
36
* Grey parts for external closed loop
only

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6BStacking Configurations
7.1 Configurations Examples (Additional Configurations available upon request)
Using Z-Adapter (P/N: 430509)
X-Y
X-Y
No carriage
X-Y
Back to back
X-Y
18mm-12mm
X-Y
18mm (no carriage) -12mm
X-Y (back to back)
38mm (X-Axis) –26mm (Y-Axis)
X-Y
PPS-28
PPS-20 XYZ
X-38mm, Y-18mm, Z-26mm
X-Y-Z
X-Y-Z

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8. 7BSupplementary Information
8.1 21BMaintenance
•The PPS-20 series of linear piezo stages utilizes a maintenance free design. Do not
modify the stage or perform any maintenance unless specifically instructed to do
so by MICRONIX USA personal. If the stage is not performing up to the original
specifications, please contact MICRONIX USA.
•The PPS-20 linear piezo stage is a precision mechanical device and
should be handled with care. Do not drop or mishandle the stage.
•Do not touch the bearings, as this will contaminate the lubrication and jeopardize
the longevity of the stage.
•Follow the Installation Preparation requirements and use proper cable
management to ensure a clean and safe operating environment.
8.2 22BUnits and Conventions
All measurements in this document are in the metric system of units.
Metric Unit
English Unit
1 millimeter
0.0394 inches
1 micron
0.0000394 inches
1 Newton
0.2248 lbs.
1 Newton-meter
8.85 in-lbs.

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A. 8BAppendix
A.1 Electrical Connections
A.1.1 DB-9 Standard Male Motor Connector
A.1.2 Encoder Pinout
A.2 24B2 Phase Piezo Motor Wiring Diagram
Pin
Description
Color
1
Phase 1
Red
2
Phase 2
Yellow
3
N/C
N/C
4
Not In Use
N/C
5
Ground
Black& Green
6
N/C
N/C
7
N/C
N/C
8
N/C
N/C
9
Ground
N/C
Pin
Function
Low Cost Digital
Analog
1
A+/Cos+
Brown
Brown
2
B+/Sin+
Grey
Yellow
3
Index+
Violet
Violet
4
GND
Black & Inside shield
Black & Inside shield
5
+5V
Red
Red
6
A-/Cos-
Orange
Orange
7
B-/Sin-
White
Green
8
Index-
Blue
Blue
9
N/A
N/A
N/A
Shield
GND
Outside Shield
Outside Shield
X-Y-Z
PP-22

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A.3 25BOpen Loop Vacuum Wiring Diagram
A.3.1 35BStraight Through 9-Pin Feed Through