Micronix PPS-28 series User manual

S e r i e s
Reference Manual
Precision Piezo Stage
(Open and Closed Loop Versions)
PPS-28

PPS-28
Piezo Positioner Stage
Reference Manual
Rev 3.02
MICRONIX USA, LLC
15375 Barranca Parkway, E-106
Irvine, CA 92618
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
1
Reference Manual
Contents
1. Introduction 3
1.1 Product Description.................................................................................................................................................3
1.2 Recommended Controllers......................................................................................................................................4
1.3 Technical Data .........................................................................................................................................................4
1.4 Load Characteristics ................................................................................................................................................4
2. Model configurations 5
2.1 PPS-28 Order Numbers............................................................................................................................................5
3. Preparing to Install the PPS-28 6
3.1 Installation Preparation...........................................................................................................................................6
3.2 Package Contents ....................................................................................................................................................6
4. Installing the PPS-28 7
4.1 PPS-28 Installation...................................................................................................................................................7
4.1.1 General Mounting ...........................................................................................................................................7
4.1.2 X-Y Mounting...................................................................................................................................................7
5. Connecting the PPS-28 9
5.1 Atmospheric Environments.....................................................................................................................................9
5.1.1 Open Loop Installation & Wiring Diagram.......................................................................................................9
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram......................................................................................9
5.2 Vacuum Environments ..........................................................................................................................................10
5.2.1 Handling and Preparation..............................................................................................................................10
5.2.2 Open loop Installation & Wiring Diagram .....................................................................................................10
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram....................................................................................11
6. Dimensions 12
6.1 PPS-28 20mm with Digital Encoder.......................................................................................................................12
6.2 PPS-28 20mm with Analog Encoder ......................................................................................................................13
7. Stacking Configurations 13
7.1 Configuration Examples (Additional configurations available upon request).......................................................13
8. Supplementary Information 14
8.1 Maintenance..........................................................................................................................................................14
8.2 Units and Conventions ..........................................................................................................................................14
A. Appendix 15
A.1 DB-9 Male Motor Connector.................................................................................................................................15
A.2 2 Phase Piezo Motor Wiring Diagram....................................................................................................................15
A.3 Open Loop Vacuum Wiring Diagram .....................................................................................................................16

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
2
Reference Manual
A.3.1 Straight Through 9-Pin Feed Through ...........................................................................................................16
A.4 Using the Encoder Module....................................................................................................................................17
A.4.1 Encoder Module Pin-out ..................................................................................Error! Bookmark not defined.
A.4.2 Operating and Electrical Specifications ............................................................ Error! Bookmark not defined.
A.4.3 Output Signals & Signal Termination for A quad B, Index and limits ............................................................18
A.4.4 Resolution......................................................................................................................................................18
A.4.5 Digital Encoder Wiring Diagram ....................................................................................................................19
A.4.6 Straight Through 25-Pin Feed Through .........................................................................................................19
A.5 Using an Analog Encoder.......................................................................................................................................20
A.5.1 Analog Encoder Overview .............................................................................................................................20
A.5.2 Encoder Pin-out.............................................................................................................................................20
A.5.3 Operating and Electrical Specifications .........................................................................................................20
A.5.4 Analog Output (Pins 1,2,6, and 7)..................................................................................................................20
A.5.5 Index Window (Pins 3)...................................................................................................................................20
A.5.6 Resolution......................................................................................................................................................21
A.5.7 Analog Encoder Wiring Diagram ...................................................................................................................21
A.5.8 Straight Through 15-Pin Feed Through .........................................................................................................21

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
3
Reference Manual
PPS-28 20mm Open Loop
Or Internal 10nm Encoder
(Shown in center position)
Base
PPS-28 20mm with external 2nm encoder
(Shown in center position)
PPS-28 20mm with external Analog encoder
(Shown in center position)
1. Introduction
1.1 Product Description
The PPS-28 is a high-precision, long travel linear piezo stage. Miniature cross-roller
bearings assure high stiffness and guiding accuracy for loads up to 50N
(Horizontal orientation). It utilizes our patent-pending multi-phase piezo motor
resulting in high speed (>2mm/s) and high blocking force (>2N). The PPS-28 is
available in travel lengths of up to 103mm, and an optional linear encoder
provides nanometer repeatability. Vacuum, Ultra High Vacuum (10-9 torr) and/or
Cryo (<4 Kelvin) compatible versions are available.
Features:
§Travel ranges of 26mm, 35mm, 51mm, 76mm, and 102mm
§Load capacity up to 5kg
§Optional linear encoder
Carriage
Bearings
Scale Bracket
Encoder Head
Encoder Scale
Encoder Bracket

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
4
Reference Manual
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
§MMC-100
§MMC-110
1.3 Technical Data
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
PM-002
2
50
50
0.7
0.7
0.7
Motor
PM-002
Speed Max. (mm/sec)
2 (MMC-100), 10 (MMC-110)
Resolution Typical (nm)
<1 (open loop), 2 (digital encoder),
10 (analog encoder)
Bi-directional Repeatability (nm)
N/A (open loop), ± 20 (digital encoder),
±50 (analog encoder)
Uni-directional Repeatability (nm)
N/A (open loop), 20 (digital encoder),
50 (analog encoder
Accuracy (µm)
+/- 3 (+/- 1 on request)

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
5
Reference Manual
2. Model configurations
2.1 PPS-28 Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-28-
1
0
Piezo Motor PM-002 1
26mm Travel 1
51mm Travel 3
76mm Travel 4
102mm Travel 5
Open Loop 0
Analog (1Vpp), 10nm 2
Digital, 2nm 3
No Limit Switch 0
Non-vacuum 0
Vacuum prepared, 10-6 mbar 6
Vacuum prepared, 10-9 mbar 9

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
6
Reference Manual
3. Preparing to Install the PPS-28
3.1 Installation Preparation
When mounting the stage it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A
surface that is not flat can adversely affect the performance and structural
integrity of the stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following
conditions:
§Mount to a clean and flat surface which is free of debris, burrs or dings
§An indoor atmosphere free of corrosive gasses, and condensation
§Temperature range of 0-40°C
§Relative humidity between 20-80%
§Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
§PPS-28 Linear Stage
§Reference Manual
§Any other previously agreed upon components such as a controller

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
7
Reference Manual
4. Installing the PPS-28
All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for
precision alignment. Additional brackets and screws may be needed for custom
applications.
4.1 PPS-28 Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface.
Align carriage with clearance holes to access base mounting pattern. (Please
note, it is possible to move the carriage manually without damaging the stage)
Travel
A
B
26mm
45
40
51mm
90
50
76mm
120
80
102mm
150
80
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2.5 x 5mm Socket Head Cap Screws
(optional) 2x M2 x 5mm Socket Head Cap
Screw for ear mounts
1. Align Carriage with Clearance
Hole. Install Dowel Pins and M2
Socket Head Cap Screw
2. Align carriage with
remaining clearance hole
and install second M2 Socket
Head Cap Screw
Customer Supplied
Base Plate or
Mounting Surface
Direction
of Travel
Clearance
Hole

PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
8
Reference Manual
4.1.2 X-Y Mounting
For additional mounting configurations see section 8. Stacking Configurations
(Please note, it is possible to move the carriage manually without damaging the
stage)
Note: For stages assembled in an XY configuration in factory do not require disassembly
for base mounting
Travel
A
B
26mm
45
37
51mm
90
82
76mm
120
112
102mm
150
142
Direction
of Travel
Requires:
4x M1.5 x 4mm Dowel Pins
4X M2.5 Button Head Screws
2x M2 x 4mm Socket Head Screws
1. Align Carriage with
remaining clearance
holes and install
second M2 Socket
Head Cap Screw
Y-Axis Stage
2. Align X-Axis Stage
Carriage with Clearance
Holes. Install Dowel Pins
and M2 Socket Head Cap
Screw