Parker MX80L series User manual

Ma nual No. 10 0-5 326- 01
Rev. 8
MX80L Precision Grade
MX80L Standard Grade
Product Manual
Effective: July 11, 2011
Supersedes: March 1, 201
Electromechanical
Positioning Systems
Daedal
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MX80L Series Product Manual
Parker Hannifin Corporation
Daedal Division
Irwin
,
Penns
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Important User Information
The information in the product manual, including any apparatus, methods, techniques, and concepts
described herein, are the proprietary property of Parker Hannifin Corporation, Daedal Division or its
licensors, and may not be copied, disclosed, or used for any purpose not expressly authorized by the
owner thereof.
Since Parker Hannifin Corporation, Daedal Division constantly strives to improve all of its products, we
reserve the right to change this product manual and equipment mentioned therein at any time without
notice.
For assistance contact:
Parker Hannifin Corporation
Daedal Division
1140 Sandy Hill Road
Irwin, PA 15642
Phone: [phone]
800/245-6903
Fax: [phone]
E-mail: [email protected]
Web site: www.daedalpositioning.com
WARNING
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED
HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries, and authorized distributors provide
product and/or systems options for further investigation by users having technical expertise. It is important that you
analyze all aspects of your application and review the information concerning the product or system in the current product
catalog. Due to the variety of operating conditions and applications for these product systems, the user, through its own
analysis and testing, is solely responsible for making the final selection of the products and systems and assuming that all
performance, safety, and warning requirements of the application are met.
The products described herein, including without limitation, product features, specifications, designs, availability and
pricing, are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice.
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412LXR Series Product Manual Chapter 1 - Introduction
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MX80L Series Product Manual
Table of Contents
IMPORTANT USER INFORMATION............................................................................................................................................2
TABLE OF CONTENTS................................................................................................................................................................3
REVISION NOTES........................................................................................................................................................................5
CHAPTER 1 - INTRODUCTION ...................................................................................................................................................6
PRODUCT DESCRIPTION ............................................................................................................................................................... 6
MX80L POSITIONER....................................................................................................................................................................6
UNPACKING ................................................................................................................................................................................. 6
RETURN INFORMATION.................................................................................................................................................................. 7
RETURNS.....................................................................................................................................................................................7
REPAIR INFORMATION................................................................................................................................................................... 7
OUT-OF-WARRANTY REPAIR....................................................................................................................................................7
WARNINGS AND PRECAUTIONS ...................................................................................................................................................... 7
SPECIFICATION CONDITIONS ......................................................................................................................................................... 8
ASSEMBLY DIAGRAM .................................................................................................................................................................... 9
CHAPTER 2 – MX80L SERIES TABLE SPECIFICATIONS ......................................................................................................10
ORDER NUMBER NOMENCLATURE ............................................................................................................................................... 10
DIMENSIONAL DRAWINGS............................................................................................................................................................ 11
GENERAL TABLE SPECIFICATIONS................................................................................................................................................ 14
TEST METHODOLOGY ................................................................................................................................................................. 15
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 16
LINEAR MOTION GUIDE BEARING LIFE/LOAD COMPUTATION ........................................................................................................... 21
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 22
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 22
BLANK PAGE.............................................................................................................................................................................. 23
ELECTRICAL SPECIFICATIONS ...................................................................................................................................................... 24
CLEAN ROOM PREPARATION ....................................................................................................................................................... 25
ENCODER SPECIFICATIONS ......................................................................................................................................................... 26
HALL EFFECT SPECIFICATION...................................................................................................................................................... 26
LIMIT AND HOME SENSOR SPECIFICATIONS................................................................................................................................... 26
LOW ESD SPECIFICATIONS......................................................................................................................................................... 26
DRIVE SPECIFICATIONS............................................................................................................................................................... 26
STANDARD CABLING AND WIRING DIAGRAMS ................................................................................................................................ 27
COMPAX3CABLING AND WIRING DIAGRAMS ................................................................................................................................. 28
CHAPTER 3 - HOW TO USE THE MX80L.................................................................................................................................29
MOUNTING ORIENTATIONS .......................................................................................................................................................... 29
MOUNTING SURFACE REQUIREMENTS .......................................................................................................................................... 29
LOAD MOUNTING REQUIREMENTS................................................................................................................................................ 30
LIMIT AND HOME SENSOR OPERATION........................................................................................................................................... 31
ADJUSTING THE LIMIT FLAG PROCEDURE...................................................................................................................................... 32
SETTING HOME SENSOR............................................................................................................................................................. 33
ZCHANNEL POSITION REFERENCE .............................................................................................................................................. 33
GROUNDING /SHIELDING ............................................................................................................................................................ 34
CABLING ................................................................................................................................................................................... 34
CABLE MANAGEMENT ................................................................................................................................................................. 35
PNEUMATIC COUNTERBALANCE ................................................................................................................................................... 35
CHAPTER 4 - PERFORMANCE.................................................................................................................................................36
ACCELERATION LIMITS................................................................................................................................................................ 36
SPEED LIMITS ............................................................................................................................................................................ 36
THERMAL EFFECTS ON ACCURACY............................................................................................................................................... 37
THERMAL EFFECTS ON REPEATABILITY......................................................................................................................................... 37
CAUSES OF TEMPERATURE INCREASES ........................................................................................................................................ 38
COMPENSATING FOR THERMAL EFFECTS ...................................................................................................................................... 38
CHAPTER 5 - CONNECTING TO THE VIX................................................................................................................................39
CHAPTER 6 - MAINTENANCE AND LUBRICATION................................................................................................................40
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412LXR Series Product Manual Chapter 1 - Introduction
Parker Hannifin Corporation
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CROSS ROLLER BEARING LUBRICATION ....................................................................................................................................... 40
APPENDIX A - INTERNAL PROTECTION.................................................................................................................................41
NOTE: NUMBER INDICATORS ABOVE REPRESENT ONLY A PARTIAL LIST OF IP RATING SPECIFICATIONS............. 41
APPENDIX B - EC DECLARATION OF CONFORMITY............................................................................................................42
INDEX.........................................................................................................................................................................................43
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MX80L Series Product Manual Revision Notes
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Revision Notes
Revision 1
Original Document
Revision 2 – 8/25/03
General
Made numerous spelling corrections
Added precision grade tables
Page 9 – Modified configurable to include precision grade tables
Page 13 – Modified specifications to include precision grade tables
Page 25 – Modified Low ESD description to include precision grade tables
Revision 3
Changed wiring block extension dimension on page 10
Page 29, 30, & 31, Changed Limits/Home from optical sensors to magnetic sensors
Revision 4
Removed Steps 5a & 5b from page 30 (Steps 5a & 5b were for optical Limits/Home)
Revision 5
Added information for the T05 (200mm travel) positioner
Revision 6
Updated electrical specification for the resistance and inductance on D11 and D13 motors, page 23.
Added the following Note to page 26: Tables purchased before June 1, 2009 require an interpolator box
and a bypass cable for 10 and 20 nanometer resolutions.
Revised Static Friction for D11 motor from 0.5N to 1.0N, page 23.
Page 29, Changed the following sentence from “These factory settings only allow for a minimum of 3mm
(0.12”) before the carriage contacts the end stop.” to “These factory settings only allow for a minimum of
1.5mm (0.06”) before the carriage contacts the end stop.”
Page 9, added encoder option E5 to Order Number Nomenclature section.
Revision 7
Add Compax3 option.
Add MX80L EC declaration.
Revision 8
Add warning for maximum operating voltage for Compax3.
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MX80L Series Product Manual Chapter 1 - Introduction
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Chapter 1 - Introduction
Product Description
MX80L Positioner
Although the MX80L is small in size and weight, it is large on performance and reliability. All key
components are integral to the unit - residing within the body of the stage to provide a clean looking,
reliable, unobstructed package. At the heart of the MX80L is an innovative non-contact linear servo
motor (patent pending). This direct drive motor has been optimized for force, speed, and acceleration, to
deliver outstanding performance and response. A high precision non-contact linear encoder provides
sub-micron resolution and repeatability. Selectable resolutions range from 10 nanometers to 5 microns.
Precision ground “zero cage creep” crossed roller bearing sets provide extremely smooth - precise linear
translation. Travel limit and home sensors are conveniently designed into the unit for easy adjustment
over the entire travel of the stage. Although there are no moving cables, 1 or 3 meters of hi-flex cabling
depending on configuration option is included and wired directly into the units. This hi-flex cabling
addresses cable flexing concerns associated with the second or third axis in multi-axis system.
Unpacking
Unpacking
Carefully remove the positioner from the shipping container and inspect the unit for any evidence of
shipping damage. Report any damage immediately to your local authorized distributor. Please save the
shipping container for damage inspection or future transportation.
Incorrect handling of the positioner may adversely affect the performance of the unit in its application.
Please observe the following guidelines for handling and mounting of your new positioner.
•DO NOT allow the positioner to drop onto the mounting surface. Dropping the positioner can
generate impact loads that may result in flat spots on bearing surfaces or misalignment of drive
components.
•DO NOT drill holes into the positioner. Drilling holes into the positioner can generate particles and
machining forces that may effect the operation of the positioner. Daedal will drill holes if
necessary; contact your local authorized distributor.
•DO NOT subject the unit to impact loads such as hammering, riveting, etc. Impacts loads
generated by hammering or riveting may result in flat spots on bearing surfaces or misalignment of
drive components.
•DO NOT lift the positioner by cables or cable management system. Lifting positioner by cables or
cable management system may effect electrical connections and/or cable management assembly.
The unit should be lifted by the base structure only.
•DO NOT expose positioner to mist, spray or submersion in liquids.
•DO NOT disassemble positioner. Unauthorized adjustments may alter the positioner’s
specifications and void the product warranty.
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MX80L Series Product Manual Chapter 1 - Introduction
Parker Hannifin Corporation
Daedal Division
Irwin
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Return Information
Returns
All returns must reference a “Return Material Authorization” (RMA) number. Please call your local
authorized distributor or Daedal Customer Service Department at 800-245-6903 to obtain a “RMA”
number. See Daedal Catalog #8083/USA, for additional information on returns and warranty.
Repair Information
Out-of-Warranty Repair
Our Customer Service Department repairs Out-of-Warranty products. All returns must reference a “RMA”
number. Please call your local authorized distributor or Daedal Customer Service Department at 800-
245-6903 to obtain a “RMA” number. You will be notified of any cost prior to making the repair.
Warnings and Precautions
Hot Surfaces
DO NOT touch linear motor coils located in the base of the MX80, (see page 8, Assembly Diagram, for
component location), after high duty operation. Motor temperature may approach 125 C. The unit itself
may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the positioner while unit is plugged into an
electrical outlet. SHUT OFF power before replacing components to avoid electrical shock.
High Magnetic Field
Unit may be HAZARDOUS to people with Pace Makers or any other 'magnetically-sensitive' medical
devices. Unit may have an effect on 'magnetically-sensitive' applications.
Ferrous Materials
The positioner's open design WILL ATTRACT ferrous materials. The customer must take additional
precautions in these applications to keep positioner free of these highly magnetic particles.
Vertical Operation
The MX80L is NOT recommended for vertical operation unless it is configured with the pneumatic assist
option. If the pneumatic assist is not used, the carriage and customer's load will fall in power loss
situations potentially causing product or load damage or personal injury.
General Safety
Because linear motors can accelerate up to 5 g's, and sometimes positioners move without warning,
keep all personnel away from dynamic travel range of positioner.
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MX80L Series Product Manual Chapter 1 - Introduction
Parker Hannifin Corporation
Daedal Division
Irwin
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Specification Conditions
Specifications Are Temperature Dependent
Catalog specifications are obtained and measured at 20 Degrees C. Specifications at any other
temperature may deviate from catalog specifications. Minimum to maximum continuous operating
temperature range (with NO guarantee of any specification except motion) of a standard unit before
failure is 5 - 40 degrees C.
Specifications Are Mounting Surface Dependent
Catalog specifications are obtained and measured when the positioner is fully supported, bolted
down, and is mounted to a work surface that has a maximum flatness error of:
•Standard Grade: 0.003mm/300mm (0.0001”/ft)
•Precision Grade: 0.001mm/300mm (0.00004”/ft)
Table will operate with work surface 0.100mm/300mm but performance specifications will be
significantly effected.
Specifications Are Point of Measurement Dependent
Catalog specifications and specifications in this manual are measured from the center of the carriage,
38 mm above the carriage surface. All measurements taken at any other location may deviate from
these values.
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MX80L Series Product Manual Chapter 1 - Introduction
Parker Hannifin Corporation
Daedal Division
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Assembly Diagram
CARRIAGE
Anti Cage Creep
Cross Roller Bearings
Limit Flag Bracket
Left side of stage w.r.t. cables
+X
Travel
BASE
Linear Motor
Coils
Encoder
Read
Head
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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Chapter 2 – MX80L Series Table Specifications
Order Number Nomenclature
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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Dimensional Drawings
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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Z-axis configuration with counter balance (not available on 200mm Travel)
25 and 50mm travel
45.0 [1.77]
Z-AXIS SHOWN AT MID-TRAVEL POSITION
13.1 [0.51]
P/N 100-9822-01
QTY.(2)
P/N 002-2223-01
CYLINDER ASSY.
MX80L-T01 OR T02
16.0 [0.63]
5.6 [0.22]
125.0 [4.92]
100mm travel
2.1 [0.08]
220.0 [8.66]
MX80L-T03
002-2223-02
CYLINDER ASSY.
5.6 [0.22] 16.0 [0.63]
002-2223-02
Cylinder Ass'y.
5.6 [0.22]
MX80L-T03
16.0 [0.63]
50.0 [1.97]
Z-Axis - shown at Mid-travel
2.1 [0.08]
P/N 100-9822-
02
Qty.(2)
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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150mm travel
75.0 [2.95]
Z-Axis at Mid-travel 7.1 [0.28]
285.0 [11.22]
P/N 100-9822-02
QTY.(2)
MX80L-T04
P
/N 002-2223-03
C
YLINDER ASSY
16.0 [0.63]
5.7 [0.22]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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General Table Specifications
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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Test Methodology
Published accuracy and repeatability specifications are subject to the testing methodology. Daedal’s
methodology provides specifications over the entire table travel regardless of start or finish position. The
accuracy and repeatability specifications are based on the peak to peak error measured by a laser
interferometer and prism located at 38mm above the center of the table. This type of measurement sums
the X, Y, Z, roll, pitch, and yaw errors. Temperature deviations from test condition may cause deviations
in straightness, flatness, accuracy, and repeatability from catalog specifications. Tests are performed with
the table mounted to a granite table, unloaded at 20oC.
In this example, the accuracy of an MX80L-T02 ranges from -3.68 microns to 2.64 microns. This table
would have its accuracy specified as 6.32 micron since the worst case would be starting at one extreme
and traveling to the other.
2.64
-3.68
6.32
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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MX80L Series Technical Data
The useful life of a linear table at full catalog specifications is dependent on the forces acting upon it.
These forces include both static components resulting from payload weight, and dynamic components due
to acceleration/deceleration of the load. In multi-axes applications, the primary positioner at the bottom of
the stack usually establishes the load limits for the combined axes. When determining load/life, it is critical
to include the weight of all positioning elements that contribute to the load supported by the primary axis.
The life/load charts are used to establish the table life relative to the applied loads.
Life-Load Curve All Travels
Moment Load – Life Curves
The effect of moment loading on the bearing life is dependent upon load and lever arm. The lever arm in
this case is measured from the center of the surface of the table to the point where the load is applied. For
dynamic loading, use the distance from the center of the table to the center of mass of the load. The Life-
Load charts show curves for various lever arm lengths (units in [mm]). Note Pitch moments and Yaw
moments use the same curves.
Yaw Moment Loading Roll Moment Loading Pitch Moment Loading
ForceForce
ForceForce
ForceForce
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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[T01] Travel Moment Life – Load Charts
Life - Moment Chart 25mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
Life - Moment Chart 25mm travel Roll Loading
25
50
75
100
150
200250
300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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[T02] Travel Moment Life – Load Charts
Life-Moment Chart 50mm travelPitch-Yaw Loading
25
50
75
100
150
200
250300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
Life-Moment Chart 50mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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[T03] Travel Moment Life – Load Charts
Life- Moment Chart 100mm travel Pitch-Yaw Loading
25
50
75
100
150
200
250300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
Life - Moment Chart 100mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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[T04] Travel Moment Life – Load Charts
Life- Moment Chart 150mm travelPitch-Yaw Loading
25
50
75
100
150
200
250300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
Life- Moment Chart 150mm travel Roll Loading
25
50
75
100
150
200
250
300
100
1000
10000
100000
012345678
Load [kg]
Life [km]
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