MKS EtherCAT 390 Series Operator's manual

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
EtherCAT®
Communication
Protocol
User’s
Instruction
Manual
MKS p/n 20018109-001
for Series 390 EtherCAT
Transducers

2 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Table of Contents
Chapter # Page #
1... Introduction........................................................................................................................5
2... Definitions ..........................................................................................................................5
3... Physical Interface..............................................................................................................2
4... Device Profile.....................................................................................................................4
5... Process Data Objects........................................................................................................4
6... Object Dictionary Overview..............................................................................................5
7... Object Dictionary Terms and Definitions........................................................................6
8... Object Dictionary Data Types...........................................................................................6
9... Communication Area ........................................................................................................7
10. Manufacturer Specific Data ............................................................................................11
11. Input Data of Modules.....................................................................................................11
12. Output Data of Modules..................................................................................................12
13. Semiconductor Device Profile Area ..............................................................................18
14. Value Range Setting........................................................................................................19
15. Exception Handling Data ................................................................................................19
16. Manufacturer Specific Device Data................................................................................21
17. SDP and CDP Device Specific Inputs............................................................................21
18. SDP and CDP Device Specific Outputs.........................................................................22
19. SDP and CDP Device Specific Configuration Data ......................................................22
20. SDP and CDP Device Specific Information Data..........................................................23
21. SDP and CDP Device Specific Diagnosis Data.............................................................24
22. SDP and CDP Command Objects ..................................................................................24
23. Firmware Update..............................................................................................................33
24. Recommendations ..........................................................................................................33
25. Examples for Common Activities ..................................................................................33
26. Troubleshooting ..............................................................................................................35
27. SDO Abort (Error) Codes................................................................................................35
28. AL Status Codes..............................................................................................................36

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 3
Table # Page #
Table 1: Common Definitions .....................................................................................................................................5
Table 2: DB-15 Pinout ................................................................................................................................................2
Table 3: 8P8C LED Indications ..................................................................................................................................3
Table 4: Module to Sensor Mapping...........................................................................................................................4
Table 5: Module to PDO Mapping ..............................................................................................................................4
Table 6: Differential Sensor Default PDO...................................................................................................................4
Table 7: Device Default PDO .....................................................................................................................................5
Table 8: Object Dictionary Mapping ...........................................................................................................................5
Table 9: Object Dictionary Terms and Definitions......................................................................................................6
Table 10: Relevant Data Types..................................................................................................................................6
Table 11: Communication Area Object.......................................................................................................................7
Table 12: Manufacturer Configuration Objects........................................................................................................ 11
Table 13: Input Data of Modules Objects................................................................................................................ 11
Table 14: Output Data of Modules Objects ............................................................................................................. 12
Table 15: Sensor Warning and Errors..................................................................................................................... 17
Table 16: Semiconductor Device Profile Area Objects ........................................................................................... 19
Table 17: Exception Handling Data Objects............................................................................................................ 19
Table 18: SDP and CDP Device Specific Inputs Objects........................................................................................ 21
Table 19: SDP and CDP Device Specific Configuration Data Objects ................................................................... 22
Table 20: SDP and CDP Device Specific Information Data Objects....................................................................... 23
Table 21: SDP and CDP Command Objects........................................................................................................... 24
Table 22: 0xF840:01 Supported Values.................................................................................................................. 34
Table 23: 0xF840:03 Supported Values.................................................................................................................. 34
Table 24: SDO Abort Codes.................................................................................................................................... 35
Table 25: AL Status Codes...................................................................................................................................... 36
Customer Service / Technical Support:
MKS Global Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com
Copyright Information

4 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
© 2019-2021 MKS Instruments, Inc. All rights reserved. Granville-Phillips®and Micro-Ion®, are registered
trademarks, and mksinst™ is a trademark of MKS Instruments Inc. EtherCAT®is a registered trademark and
patented technology licensed by Beckhoff Automation GmbH, Germany. Windows®is a trademark of Microsoft
Corporation. All other trademarks and registered trademarks are the properties of their respective owners.
No part of this work may be reproduced by any method including photocopying and recording or by any
information or retrieval system without written permission of MKS Instruments, Inc.

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 5
1Introduction
This document describes the physical interface, Device Profile, and Object Dictionary used for the
Series 390 Micro-Ion®ATM Vacuum Transducers.
It is assumed the reader has a general knowledge of EtherCAT and EtherCAT Masters. Refer to the
following EtherCAT specifications in addition to this manual:
•ETG.1000 v1.0.4
•ETG.1020 v1.2.0
•ETG.1300 v1.1.1
•ETG.2000 v1.0.0
•ETG.2010 v1.0.0
•ETG.5000.1 v0.9.0
•ETG.5003.1 v1.1.0
•ETG.5003.2 v1.0.0
•ETG.5003.2080 v1.3.0
•ETG.9001 v1.2.5
This document does not describe basic EtherCAT knowledge or the specific use of EtherCAT Masters.
2Definitions
Table 1: Common Definitions
Term
Definition
B/S
Backup/Save
Backup/Save
Backup/Save parameters are saved in NV memory
CG
Combo-Gauge
CoE
CAN Application Protocol over EtherCAT
CDP
Common Device Profile –ETG.5003
ESI
Electronic Slave Information –an XML file describing the device
ETG
EtherCAT Technology Group
FoE
File Access over EtherCAT
LSD
Least Significant Digit
Master
The EtherCAT Master
MSD
Most Significant Digit
NV
Non-Volatile
PDO
Process Data Object
RO
Read-Only
RW
Read/Write
RX
RxPDO
RxPDO
Receive PDO (Master -> Slave)
SDO
Service Data Object
SDP
Specific Device Profile –ETG.5003.2080
SI
Sub-Index
SII
Slave Information Interface
Slave
The EtherCAT Slave
TX
TxPDO
TxPDO
Transmit PDO (Slave -> Master)
VG
Vacuum Gauge

2 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
3Physical Interface
EtherCAT®Connectors
The EtherCAT transducers are all equipped with a connector for power input, analog output, and other functions.
Two 8P8C connectors are used for the EtherCAT digital IN/OUT. Three switches are used to set the Device ID.
Two LEDs show the Run/Error condition(s) and one LED shows the Device State.
Figure 1: Control Panel
Table 2: DB-15 Pinout
Pin #
Pin Function
Pin #
Pin function
1
No Connect
9
No Connect
2
No Connect
10
Relay 1 NC
3
+24Vdc
11
Relay 1 COM
4
Power Return -
12
Relay 1 NO
5
Analog Signal Output +
13
Relay 2 NC
6
Analog Signal Common
14
Relay 2 COM
7
Chassis Ground
15
Relay 2 NO
8
No Connect
Connector <IN>(NC = No Connection)
Pin Number
Function
Pin Number
Function
1
TX+
5
NC
2
TX-
6
RX-
3
RX+
7
NC
4
NC
8
NC
Connector <OUT> (NC = No Connection)
Pin Number
Function
Pin Number
Function
1
TX+
5
NC
2
TX-
6
RX-
3
RX+
7
NC
4
NC
8
NC

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 3
Indicators
EtherCAT Status
A “RUN” indicator and an “ERR” indicator are used to indicate EtherCAT status. See ETG.1300 for more
information.
Red LED (ERR)
Flash Interval
EtherCAT Status
OFF
No error
Blinking
200 ms
Invalid configuration
Flickering
50 ms ON
50 ms OFF
Invalid firmware
Single Flash
100 ms ON
1000 ms OFF
Unsolicited state change
Double Flash
Application watchdog timeout
Green LED (RUN)
Flash Interval
EtherCAT State
OFF
Initialization
Blinking
200 ms
Pre operational
Single Flash
100 ms ON
1000 ms OFF
Safe operational
Flickering
50 ms ON
50 ms OFF
Bootstrap
ON
Operational
EtherCAT Link/Activity
The Green LEDs on the 8P8C connectors indicate the link activity of the IN and OUT ports.
Table 3: 8P8C LED Indications
Link/Activity
Code
Link
Activity
Condition
ON
Yes
No
Port open
Flickering
Yes
Yes
Port open
Device State
A bi-color indicator is used to indicate the state of the transducer.
LED Status
Description
OFF
Module not powered
Steady Green
Power applied –Ion gauge OFF
Blinking Green
Micro-Ion gauge ON
Steady Amber
Micro-Ion gauge ON –One filament is inoperable
Blinking Amber
1. Both Micro-Ion gauge filaments inoperable –
Replace the gauge
2. Possible electronics failure –Return the module to
MKS

4 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Device Address Switches
The Device ID and the Configured Station Alias can be set by three hexadecimal rotary switches (labeled “ID” in
Figure 1) as stated in ETG.5003.1 and ETG.1020.
𝐴𝑑𝑑𝑟𝑒𝑠𝑠 = 𝑥100(0𝑥100)+ 𝑥10(0𝑥10)+ 𝑥1(0𝑥1)
For example, if the address switches from MSD to LSD are set to “321” –
𝐴𝑑𝑑𝑟𝑒𝑠𝑠 = 3(0𝑥100)+ 2(0𝑥10)+ 3(0𝑥1)= 0𝑥321
4Device Profile
The 390 is a Vacuum Pressure Gauge (VPG) Combo Device (CG) conforming to ETG.5003.2080. Several
pressure sensors are used to create “Combination” and “Differential” pressures. Each pressure sensor is its own
Module.
Table 4: Module to Sensor Mapping
Module Number
Pressure Sensor
0
Absolute Piezo
1
Differential Piezo
2
Conductron (Heat Transfer)
3
Hot Cathode Ion
5Process Data Objects
Fast information flow (polling rates up to 1ms according to ETG.5003.1) between Slave and the Master is ensured
by the use of PDOs. Important information (i.e. pressure –see Poll Current Pressure) is mapped from the Object
Dictionary into PDO objects. Information about setting PDOs is found in Modifying PDO Mapping and ETG.1020.
Per ETG.5003.2080, each Module has its own set of PDOs.
Table 5: Module to PDO Mapping
Module Number
RxPDO Indexes
TxPDO Indexes
1
0x1600, 0x1601
0x1A00, 0x1A01
2
0x1602, 0x1603
0x1A02, 0x1A03
3
0x1604, 0x1605
0x1A04, 0x1A05
4
0x1606, 0x1607
0x1A06, 0x1A07
The device as a whole also has two sets of PDOs.
RxPDO Indexes
TxPDO Indexes
0x17FE, 0x17FF
0x1BFE, 0x1BFF
There are two default PDOs populated with information about the Differential Pressure and Combination
Pressure.
Table 6: Differential Sensor Default PDO
PDO Index
Sub
Index
PDO Entry
Index
PDO Sub
Index
Bit
Length
Name

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 5
0x1A02
0x01
0x6012
0x01
1
Reading Valid
0x02
0x6012
0x01
1
Overrange Exceeded
0x03
0x6012
0x00
1
Underrange Exceeded
0x04
0x0000
0x00
5
---
0x05
0x6010
0x11
32
Sensor Value
Table 7: Device Default PDO
PDO Index
Sub
Index
PDO Entry
Index
PDO Sub
Index
Bit
Length
Name
0x1BFF
0x01
0xF380
0x00
8
Active Exception Status
0x02
0xF640
0x01
1
Combination Gauge
Reading Valid
0x03
0xF640
0x02
1
Combination Gauge
Overrange Exceeded
0x04
0xF640
0x03
1
Combination Gauge
Underrange Exceeded
0x05
0x0000
0x00
5
---
0x06
0xF640
0x12
16
Combination Gauge Active
Sensor Number
0x07
0xF640
0x11
32
Combination Gauge Active
Value
0x08
0xF640
0x01
32
Trip Point Output ALL
Instance
Limitations
•Not all TxPDOs can be mapped at once; 68-bytes is the limit
•There may not be enough sub-indexes in a module-specific TxPDO object to map all of the
module-specific TxPDO-mappable objects. However, any TxPDO object may be used to map
any object that is TxPDO-mappable.
6Object Dictionary Overview
The Object Dictionary of Service Data Objects (SDO) is organized into several sections by Index. Not all sections
are used by the 390.
Table 8: Object Dictionary Mapping
Index
Object Dictionary Area
0x1000…0x1FFF
Communication Area
0x2000…0x5FFF
Manufacturer Specific Data
0x6000…0x6FFF
Input Data of the Modules
0x7000...0x9FFF
Output Data of the Modules
0xF0xx
Semiconductor Device Profile Area
0xF300
Value Range Setting
0xF38x…0xF3Ax
Exception Handling Data
0xF5xx
Manufacturer Specific Device Data
0xF6xx
SDP and CDP Device Specific Inputs

6 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
0xF7xx
SDP and CDP Device Specific Outputs
0xF8xx
SDP and CDP Device Specific Configuration Data
0xF9xx
SDP and CDP Device Specific Information Data
0xFAxx
SDP and CDP Device Specific Diagnosis Data
0xFBxx
SDP and CDP Command Objects
The indices and sub-indices in the SDP and CDP can be queried, and in the case of the configuration data, are
changed by sending the relevant commands shown in this document.
7Object Dictionary Terms and Definitions
Table 9: Object Dictionary Terms and Definitions
Term
Definition
Index
A 2-Byte integer that uniquely identifies an object.
Sub-Index
A 1-Byte integer used with the index to uniquely identify object data and methods.
Not all objects have sub-indexes.
Data Type
Type of object data (see Object Dictionary Data Types)
Backup (B) / Save (S)
Indicates if parameter is stored in Non-volatile memory
Access
Indicates if parameter is Read-Only (RO), Read-Write (RW), or Write Only (WO).
Also indicate EtherCAT state restrictions. For example, WO PREOP indicates the
parameter is only writable in PREOP state. No state restriction indicates the
parameter access is valid for PREOP, SAFEOP, and OP states.
Name
Name of Object / Object Parameter
Description
More info about Object / Object Parameter
8Object Dictionary Data Types
Data types are described in ETG.1020. The data types the 390 uses are reproduced here for convenience.
Table 10: Relevant Data Types
Name
Bit Length
Description
ARRAY [0..n] OF BYTE
(n+1)*8
Array of bytes with length n
BOOL
1
0: False
1: True
UDINT
32
Unsigned Integer
UINT
16
Unsigned Integer
ULINT
64
Unsigned Integer
USINT
8
Unsigned Integer
PDO MAPPING
32
16-bits Index, 8-bits Sub-index, 8-bits Bit Size
For example: 0x60120101 is Index 0x6012, Sub-Index 0x01,
length 1-bit
REAL
32
IEEE-754 encoded floating-point value
STRING(n)
(n+1)*8
8-bit encoded ASCII string n-characters long terminated by the
”null character” 0x00
pad_n
n
n - Bits of padding

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
9Communication Area
Contains identity and PDO configuration.
Table 11: Communication Area Object
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x1000
UDINT
RO
Device Type
Bit 0-15: device profile number = 5003
Bit 16-31: 0x0000
sub-profile number is defined in 0xF010 bit 0..15
0x1008
STRING(n)
RO
Manufacturer Device Name
390 Micro-Ion ATM
0x1009
STRING(n)
RO
Manufacturer Hardware
Version
x.x
0x100A
STRING(n)
RO
Manufacturer Software
Version
x.x.x
0x100B
STRING(n)
RO
Manufacturer Bootloader
Version
x.x.x
0x1018
Identity Object
0x01
UDINT
RO
Vendor ID
MKS Vendor ID = 1291
0x02
UDINT
RO
Product Code
Unique product code
6010 = GP 390
0x03
UDINT
RO
Revision Number
Coded as 0xnnnnnn00
I.E. 0x01010100 = 1.1.1
0x04
UDINT
RO
Serial Number
Always 0; Use Manufacturer Serial Number –0xF940
0x10F8
ULINT
RO
Timestamp Object
Local time stamp of the device in nanoseconds (ns)
0x1600
RxPDO Absolute Piezo
Default
No default outputs. Can only write SI 0 = 0x00
0x1601
RxPDO Absolute Piezo
User
Rx mappings available for the user. Up to 8 entries can be
configured
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1602
RxPDO Piezo Differential
Default
No default outputs. Can only write SI 0 = 0x00
0x1603
RxPDO Piezo Differential
User
Rx mappings available for the user. Up to 8 entries can be
configured

8 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1604
RxPDO Heat Transfer
Default
No default outputs. Can only write SI 0 = 0x00
0x1605
RxPDO Heat Transfer User
Rx mappings available for the user. Up to 8 entries can be
configured
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1606
RxPDO Hot Cathode
Default
No default outputs. Can only write SI 0 = 0x00
0x1607
RxPDO Hot Cathode User
Rx mappings available for the user. Up to 8 entries can be
configured
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x17FE
RxPDO Combo Default
No default outputs. Can only write SI 0 = 0x00
0x17FF
RxPDO Combo User
Rx mappings available for the user. Up to 8 entries can be
configured
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1A00
TxPDO Absolute Piezo
Default
No default entries. Can only write SI 0 = 0x00
0x1A01
TxPDO Absolute Piezo
User
Tx mappings available for the user. Up to 8 entries can be
defined
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1A02
TxPDO Piezo Differential
Default
Default inputs as defined by ETG.5003.2080
0x01
PDO
MAPPING
RW
Reading Valid
0x60120101
0x02
PDO
MAPPING
RW
Overrange Exceeded
0x60120201

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 9
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x03
PDO
MAPPING
RW
Underrange Exceeded
0x60120301
0x04
PDO
MAPPING
RW
Padding
0x00000005
0x05
PDO
MAPPING
RW
Sensor Value
0x60101132
0x1A03
TxPDO Piezo Differential
User
Up to 8 entries can be defined
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1A04
TxPDO Heat Transfer
Default
No default entries
Can only write SI 0 = 0x00
0x1A05
TxPDO Heat Transfer User
Up to 8 entries can be defined
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1A06
TxPDO Hot Cathode
Default
No default entries
Can only write SI 0 = 0x00
0x1A07
TxPDO Hot Cathode User
Up to 8 entries can be defined
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1BFE
TxPDO Combo Default
Default inputs as defined by ETG.5003.2080
0x01
RW
Active Exception Status
0xF3800008
0x02
RW
Combination Gauge
Reading Valid
0xF6400101
0x03
RW
Combination Gauge
Overrange Exceeded
0xF6400201
0x04
RW
Combination Gauge
Underrange Exceeded
0xF6400301
0x05
RW
Padding
0x00000005
0x06
RW
Combination Gauge Active
Sensor Number
0xF6401210

10 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x07
RW
Combination Gauge Active
Value
0xF6401120
0x08
RW
Trip Point Output All
Instance
0xF6410120
0x1BFF
TxPDO Combo User
0x01
thru
0x08
PDO
MAPPING
(R if SI <= SI0)
(W PREOP if
SI = 0)
0x1C00
Sync Manager
Communication Type
0x01
USINT
RO
Communication Type Sync
Manager 0
1 = Mailbox receive (master to slave)
0x02
USINT
RO
Communication Type Sync
Manager 1
2 = Mailbox send (slave to master)
0x03
USINT
RO
Communication Type Sync
Manager 2
3 = Process data output (master to slave)
0x04
USINT
RO
Communication Type Sync
Manager 3
4 = Process data input (slave to master)
0x1C12
RxPDO Assignment
List of output PDOs
0x01
–
0x1A
UINT
(R if SI <= SI0)
(W PREOP if
SI = 0)
Index of PDO Mapping, i.e. –0x17FF
0x1C13
TxPDO Assignment
List of input PDOs
0x01
–
0x1A
UINT
(R if SI <= SI0)
(W PREOP if
SI = 0)
Index of PDO Mapping, i.e. –0x1BFE
0x1C32
Output SyncManager
Parameter
Subindexes supported according to ETG.1020 Table 63
0x01
UINT
RW
Sync mode
Free Run 0x00
0x04
UINT
RO
Sync mode supported
Free Run 0x01
0x1C33
Input SyncManager
Parameter
Subindexes supported according to ETG.1020 Table 64
0x01
UINT
RW
Sync mode
Free Run 0x00
0x04
UINT
RO
Sync mode supported
Free Run 0x01

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 11
10 Manufacturer Specific Data
Contains configuration and command status.
Table 12: Manufacturer Configuration Objects
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x4035
Manufacturer Configuration Hot
Cathode
0x01
ENUM
RW
Filament Mode
"03 00 00 00" - Manual
"02 00 00 00" - Alternate
"01 00 00 00" –Automatic
Updates object 0x4035:01
0x403C
Customer Requested
Configuration Hot Cathode
0x01
UDINT
RO
TX
Process Control Emission User
Mode Last Error
Last EtherCAT error when SI02 changed. Zero indicates no
error (mode switched). Non-zero indicates an error when the
SI02 entry value changed.
0x02
BOOL
RW
RX
Process Control Emission User
Mode
Changes User Emission Mode. Only sets a new mode if the
new entry value is different from the previous value, and the
new entry value is one of:
0x00 Sets the mode to Automatic; returns ion gauge to
secondary sensor control
0x01 Sets the mode to Manual; if ion gauge is on, turns
off
Updates object 0x8035:02
11 Input Data of Modules
Contains Pressure and Status.
Table 13: Input Data of Modules Objects
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x6010
Input Common Differential Piezo
0x0E
BOOL
RO
TX
TxPdoState
Set to 1 if the device is not in any error condition
0x11
REAL
RO
TX
Sensor Value
Negative value indicates pressure is less than atmospheric
pressure
0x6012
Input Differential Piezo

12 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x01
BOOL
RO
TX
Reading Valid
Indicates whether the Sensor Value (6010:11) parameter
contains a valid value within the specified accuracy or not
0: invalid
1: valid
0x02
BOOL
RO
TX
Overrange Exceeded
Set if overrange exceeded
0x03
BOOL
RO
TX
Underrange Exceeded
Set if underrange exceeded
0x6035
Input Hot Cathode Ion Gauge
0x01
BOOL
RO
TX
Reading Valid
Indicates whether the Sensor Value contains a valid value
within the specified accuracy or not
0: invalid
1: valid
0x02
BOOL
RO
TX
Overrange Exceeded
Set to 1 if overrange exceeded
0x03
BOOL
RO
TX
Underrange Exceeded
Set to 1 if underrange exceeded
0x05
BOOL
RO
TX
Emission Status Off/On
0: Off
1: On
0x06
BOOL
RO
TX
Degas Status Off/On
0: Off
1: On
0x600E
Input Trip Point 1
0x01
BOOL
RO
TX
Status High Trip
1: High Trip asserted
0x02
BOOL
RO
TX
Status Low Trip
1: Low Trip asserted
0x600F
Input Trip Point 2
Trip Point 2
0x01
BOOL
RO
TX
Status High Trip
1: High Trip asserted
0x02
BOOL
RO
TX
Status Low Trip
1: Low Trip asserted
12 Output Data of Modules
Contains Configuration.
Table 14: Output Data of Modules Objects
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x8035
Configuration Hot Cathode Ion
Gauge
Hot Cathode Ion Gauge
0x01
BOOL
B/S
RW
Filament User Mode
0: Automatic - active filament is always changed when the
filament is switched on
1: Manual - filament selection is static as defined by
“Active Filament”

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 13
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
In either configuration, both filaments may be active at
high emission.
In either configuration, both filaments will be degassed
(only one filament is degassed at a time).
If the device is configured for automatic filament selection,
the Active Filament parameter has RO access.
0x02
BOOL
B/S
RW
Emission User Mode
0: Automatic- emission is enabled by a different sensor
1: Manual - emission is enabled by the Command Object
0xFB44
0x03
pad_14
Reserved
0x04
–
0x10
Reserved
0x11
USINT
B/S
RW
Active Filament
Active sensor filaments. Each bit represents a different
filament.
0x12
USINT
B/S
RW
Active Degas Filament
Current active degas filament. Each bit represents a
different filament.
0x16
UINT
B/S
RW
Degas Time on Interval
Time degas is on
in seconds
0x800E
Configuration Trip Point 1
0x01
BOOL
B/S
RW
High Trip Enable
High Trip Point
0: Disable
1: Enable
If the Low Trip Point is enabled it must be disabled first or
SDO Abort Code 0x06040043 “General parameter
incompatibility” is returned
0x02
BOOL
B/S
RW
Low Trip Enable
Low Trip Point
0: Disable
1: Enable
If the High Trip Point is enabled it must be disabled first or
SDO Abort Code 0x06040043 “General parameter
incompatibility” is returned
0x11
REAL
B/S
RW
High Trip Point limit
High limit to trigger trip point condition if Input Value is
above this limit

14 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x14
REAL
B/S
RW
Low Trip Point Limit
Low limit to trigger trip point condition if Input Value is
below this limit
0x17
REAL
B/S
RW
High Trip Hysteresis
Hysteresis value for High Trip Point
0x18
REAL
B/S
RW
Low Trip Hysteresis
Hysteresis value for Low Trip Point
0x1A
UDINT
B/S
RW
Source Index
Index and sub-index Trip Point Source —
0xF6401100: Combo Gauge
0x60101100: Differential Piezo
0x800F
Configuration Trip Point 2
0x01
BOOL
B/S
RW
High Trip Enable
High Trip Point
0: Disable
1: Enable
0x02
BOOL
B/S
RW
Low Trip Enable
Low Trip Point
0: Disable
1: Enable
0x11
REAL
B/S
RW
High Trip Point limit
High limit to trigger trip point condition if Input Value is
above this limit
0x14
REAL
B/S
RW
Low Trip Point Limit
Low limit to trigger trip point condition if Input Value is
below this limit
0x17
REAL
B/S
RW
High Trip Hysteresis
Hysteresis value for High Trip Point
0x18
REAL
B/S
RW
Low Trip Hysteresis
Hysteresis value for Low Trip Point
0x1A
UDINT
B/S
RW
Source Index
Choose Absolute Pressure or Differential Pressure as the
Trip Point Source. Changing the Source Index will restore
the other Trip Point parameters to default values.
0x60101100: Differential Pressure (0x6010:11)
0xF6401100: Absolute Pressure (0xF640:11)
0x9002
Information ATM Piezo
See Sensor Warnings and Errors
0x01
UINT
RO
Sensor Warnings
0x02
UINT
RO
Sensor Errors
0x9012
Information Differential Piezo
See Sensor Warnings and Errors
0x01
UINT
RO
Sensor Warnings
0x02
UINT
RO
Sensor Errors
0x9023
RO
Information Heat Transfer
See Sensor Warnings and Errors
0x01
UINT
RO
Sensor Warnings

EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B 15
Index
Sub-
Index
Data Type
Backup(B)/
Save(S)?
Access
PDO
Assignable?
Name
Description
0x02
UINT
RO
Sensor Errors
0x9035
Information Hot Cathode Ion
Gauge
0x01
UINT
RO
Sensor Warnings
See Sensor Warnings and Errors
0x02
UINT
RO
Sensor Errors
See Sensor Warnings and Errors
0x06
UINT
RO
Degas Time on remaining
Remaining time for the current degas on cycle in seconds
0x07
UDINT
RO
Time Filament 1 powered in
seconds
0x08
UDINT
RO
Time Filament 2 powered in
seconds
0x900E
Information Trip Point 1
0x01
REAL
RO
Input Value Trip Point 1
Trip Point input value as referenced by 800E:1A
0x900F
Information Trip Point 2
0x01
REAL
RO
Input Value Trip Point 2
Trip Point input value as referenced by 800F:1A

16 EtherCAT®Communication Protocol Manual –p/n 20018109-001 Rev. B
Trip Points
The 390 uses relays for process control. Each Trip Point can activate the relay upon increasing or decreasing vacuum or differential pressure.
NOTE: Trip points cannot be configured to activate on increasing AND decreasing pressure. Only, increasing OR decreasing pressure.
For example, if the High Trip Point is Enabled (0x800E/F:01=1), the Trip Point will activate if the pressure p is greater than the Trip Point Limit P1
(0x800E/F:11). The Trip Point will switch from Active to Inactive if the pressure p is less than the Trip Point Limit P2 (0x800E/F:11 –0x800E/F:17).
Sensor Warnings and Errors
Each sensor has detailed warnings and errors in accordance with ETG5003.2080 as shown in Output Data of Modules. Table 15 lists those warnings and
errors with specific notes for the 390.
Each bit represents a particular warning or error. A value of 1 indicates the warning/error is active (or was active for Latched Warnings/Errors).