Nikon XT V 160 User manual

X-Tek X-ray and CT Inspection
XT V 160 X-ray System
Operator Manual
XTM0011-F2

Legal Information
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This publication or parts thereof may not be reproduced in any form, by any method, for any
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respective owners. Nikon Metrology N.V. or any of its group companies make no claim to
third party trademarks.
The use of Nikon Metrology products, services and materials is subject to the Nikon
Metrology General Sales Terms and Conditions.
About this manual
This manual applies to a typical machine with the model type given on the front cover. Any
non-English manual is a translation of the ORIGINAL Instructions for the safe use of this
machine.
Nikon Metrology reserves the right to revise and improve its products as it sees fit. This
publication describes the state of this product at the time of publication, and may not reflect
the product at all times in the future.
Liability for calibration
Nikon Metrology will only accept liability for re-calibration if carried out in our own factory, and
for the verification process at the customer's site carried out by Nikon Metrology staff. We
also accept liability if the re-calibration or verification process is carried out by the customer if
these processes are explicitly agreed between the customer and Nikon Metrology. We will
not accept liability if the customer performs the re-calibration, or takes over responsibility for
the verification process from Nikon Metrology without prior authorisation, even if the
recommended Nikon Metrology process is followed.
Manufacturer's contact details
Nikon X-Tek Systems Ltd,
Tring Business Centre, Icknield Way, Tring, Hertfordshire HP23 4JX. United Kingdom.
Tel. [phone] Fax: [phone]
Website: http://www.nikonmetrology.com
Registered in England No. 01981536, VAT No. GB433 079 460
Sources of additional information
Contact [e-mail] to:
•Get technical support (customers and distributors)
•Request quotations and order service parts
Current application software, drivers and manuals can be downloaded from:
https://shared.nikonmetrology.com/
Access for customers, resellers etc should be requested via Sharepoint access
Documentation feedback, suggestions for new or missing content or other comments can be
sent to: EngDoc.NM-[email protected]

Safety symbol definition
The following symbols are used throughout this document. Please familiarise yourself with
their meaning:
A red circle with a diagonal line indicates an action that is prohibited. A
specific warning will be displayed inside the circle as a black symbol.
A white symbol inside a blue circle indicates a mandatory action that
must be taken to avoid a hazard.
A black symbol inside a yellow triangle with a black border indicates a
hazard.
A black symbol on a white background with a red diamond border
indicates a harmful chemical or irritant.
A white symbol on a green background indicates a safe condition.
The note symbol is used to draw your attention to additional important
information.

XT V 160 X-ray System XTM0011-F2 vii
About this manual
This manual provides necessary information regarding safety, operation, maintenance and
troubleshooting for the X-ray system. Familiarising yourself with this information will help you
to get the most from the system.
This manual may contain additional information about system features
that are not applicable to your specific hardware configuration.
It is important to read ALL accompanying safety and installation
instructions to avoid damage to the product and potential injury to
yourself or others.
The manual is divided into the following sections:
•Important health and safety information - It is mandatory to read and understand this
section before operating the X-ray system.
•Safety systems - Details the safety systems of the machine.
•Warnings - It is mandatory to read and understand this section before operating the X-ray
system.
•Introduction to the X-ray system - Provides an overview of the system and its
components.
•Getting started - Provides information to enable you to quickly start inspecting samples
using the system.
•Maintenance - Covers the maintenance procedures which are required to ensure reliable
and safe operation.
•Troubleshooting - Provides procedures to identify and resolve simple system faults.
•Declaration of conformity - Provides the declaration of conformity for the named machine.
This manual covers the following model: XT V 160.

XT V 160 X-ray System XTM0011-F2 i
Contents
1Important health and safety information 1
1.1 Safety notice..............................................................................................................1
1.2 Intended use..............................................................................................................2
1.3 In case of emergency ................................................................................................2
1.4 Health and safety information....................................................................................2
1.5 Understanding the hazards .......................................................................................3
1.5.1 X-ray radiation ...........................................................................................................3
1.5.2 High voltages.............................................................................................................3
1.5.3 Laser radiation...........................................................................................................4
1.6 Hazard warning labels...............................................................................................4
1.7 Disposal and recycling – European Union...............................................................11
2Safety systems 13
2.1 X-ray status indication .............................................................................................13
2.2 Emergency stop.......................................................................................................14
2.3 Door interlocking......................................................................................................14
2.4 Coolant sensing.......................................................................................................15
3Warnings 17
3.1 General....................................................................................................................17
3.2 Electrical ..................................................................................................................18
3.3 X-ray source assembly............................................................................................18
3.4 Vacuum system .......................................................................................................19
3.5 Mechanical...............................................................................................................20
3.6 Chemical..................................................................................................................20
4Introduction to the X-ray system 23
4.1 System overview......................................................................................................23
4.2 Control console........................................................................................................25
4.3 Monitor and console arm adjustment ......................................................................26
4.4 Inspect-X..................................................................................................................28
4.4.1 The Inspect-X manipulator and imaging controls....................................................31
4.5 Laser pointer............................................................................................................34
4.5.1 Use the laser pointer................................................................................................34
4.5.2 Clean the laser optics..............................................................................................34
5Getting started 35
5.1 Power up sequence.................................................................................................35
5.2 Condition the source................................................................................................36
5.3 Check the status of the system ...............................................................................37
5.4 Inspect a sample......................................................................................................37
5.4.1 Home the manipulator .............................................................................................37
5.4.2 Load the sample......................................................................................................38
5.4.3 Set the X-ray conditions...........................................................................................39
5.4.4 Switch X-rays on......................................................................................................39
5.4.5 Display a live image.................................................................................................40
5.4.6 Position the sample for inspection...........................................................................41
5.4.7 Optimise the image..................................................................................................41
5.4.8 Capture an image....................................................................................................42

ii XTM0011-F2 XT V 160 X-ray System
5.4.9 Save an image.........................................................................................................42
5.5 Computed tomography............................................................................................43
5.5.1 The Inspect-X computed tomography workflow ......................................................44
5.6 X.Tract .....................................................................................................................45
5.6.1 The X.Tract workflow...............................................................................................45
6Maintenance 47
6.1 Preventive maintenance..........................................................................................47
6.1.1 Interlock testing........................................................................................................47
6.1.2 External connections ...............................................................................................48
6.1.3 Status indicator LED................................................................................................48
6.1.4 Maintenance checks................................................................................................49
6.2 Routine maintenance...............................................................................................50
6.2.1 Access the service area...........................................................................................50
6.2.2 Check the backing pump oil level............................................................................51
6.2.3 Check the coolant level............................................................................................52
6.2.4 Access the mains distribution chassis.....................................................................54
6.2.5 Filament change and alignment ..............................................................................55
6.2.6 Fuse list....................................................................................................................77
6.2.7 Radiation integrity....................................................................................................77
6.2.8 Cleaning...................................................................................................................78
6.2.9 Environmental considerations .................................................................................78
7Troubleshooting 79
7.1 Simple fault finding procedures ...............................................................................79
8Declaration of conformity 81

XT V 160 X-ray System XTM0011-F2 1
1 Important health and safety information
1.1 Safety notice
It is extremely important to read ALL safety information and instructions and any
accompanying documentation before operating the system. The Operator Safety Manual is
an integral part of the product and must be kept with the X-ray system at all times.
Observe all cautions and warnings during routine use of the system. All operators must have
read and understood the Safety Information and the X-ray system's Operating Instructions
and have received relevant training before using the X-ray system for X-ray inspection. Any
operator performing Routine Maintenance Tasks as detailed in the X-ray system's Operator
Manual must have received appropriate training in these procedures.
Before opening the operator door (or any other access panels), you
must switch X-rays off from the X-ray zone of Inspect-X.
Do not attempt to unpack, install or commission the system.
Unpacking and installation must only be performed by a qualified
Nikon Metrology service engineer.
Do not move the system. Contact a Nikon Metrology representative if
you wish to relocate the X-ray system.
The X-ray system is designed to operate under the following environmental conditions:
•External temperature range to be 10°C to 30°C.
•Relative humidity to be 30-80%, dew point <14°C.
•Vibration to be less than -3 µm/s RMS (ISO VC-B).
•Air cleanliness must be ISO 8 (ISO 14644-1) and Pollution Degree 2 or better.
•The system is IP20 rated and not designed to be used in a wet environment.
The system should be sited on flat, suitably rated ground, with sufficient clearance left for
service access. Refer to the relevant installation drawing for your system for further details.
Fusing requirements
Supply voltage/tap (V) Recommended fuse/breaker capacity (A)
100 16
110 15
115 15
200 10
220 10
230 8
240 8

Important health and safety information
2XTM0011-F2 XT V 160 X-ray System
This system is a Class A product and should not be connected to the
domestic electrical supply. In a domestic environment, this product may
cause harmonic interference. If the user wishes to connect to a
domestic supply they may be required to take adequate measures to
prevent interference.
Machines ship configured for a UK style 230 V (50/60 Hz) AC supply to
a single live conductor, a neutral conductor referenced to earth, and a
separate earth (TN-S). Other supply earth arrangements are not
supported.
The user must not configure or modify the electrical supply in any way.
Using domestic electrical fittings or inadequate wiring may lead to
fitting/wire overheating, failure, or electrical fire.
This system has high protective conductor currents
3.5 mA < IL< 10 mA.
It must be connected via either permanent fixed wiring or a suitable
industrial plug and socket.
1.2 Intended use
Nikon Metrology X-ray products are intended for non-destructive inspection of industrial and
electronic components using X-rays.
Do not use the system for any purpose other than its intended use.
1.3 In case of emergency
To make the system safe in case of emergency, push the emergency
stop button and isolate the system from mains power. The emergency
stop button is located on the control console.
1.4 Health and safety information
1. The relevant “Health and Safety at Work” authorities, for your country, may need to be
informed that you are in possession of equipment designed for the generation of X-rays.
This is a statutory requirement in many countries, including the UK.
2. You must comply with all legislation for X-ray generating equipment existing in your
country. In some countries, both national and local government regulations apply. For
example, in the USA the use of X-ray equipment is controlled by both Federal and State
regulations. In the UK, the applicable regulations are the Ionising Radiation Regulations
2017 (IRR17).
3. It is essential that the personnel engaged in the operation and maintenance, and any
repair of this equipment, be competent and experienced in this work, and that they
comply with the relevant statutory requirements and regulations.

Important health and safety information
XT V 160 X-ray System XTM0011-F2 3
These include either the provisions of the Health and Safety at Work Act 1974 (UK
Regulations), or the Occupational Safety and Health Act (OSHA) as published in the
Code of Federal Regulations (USA), title 29, part 1910, and any additions or
amendments that may become legal requirements.
The personnel should also comply with the equivalent statutory requirements of their own
country.
4. Any operator performing routine maintenance on the X-ray system must be trained to
carry out these procedures.
Refer to the Operator Manual provided either physically or electronically with the X-ray
system for details of these procedures.
5. Ensure that the control console and monitor support arms are adjusted for comfortable
operator use and then firmly locked in position, where applicable.
Take advice on the safe use of computer and monitor equipment as provided by local
regulations.
6. Take care when loading and unloading samples from the system. Never overload the
manipulator. Repeated opening of the door and sample loading may lead to discomfort.
Customers should comply with Provision and Use of Work Equipment Regulations
(PUWER).
7. Noise emitted by the X-ray system is minimal. The level of noise will not exceed
an A-weighted pressure level of 70 dB (A).
8. The cabinet can be cleaned with a cloth dampened with water. Switch off and isolate
mains power before cleaning, and allow to dry before reconnecting. Take care when
cleaning as mechanical hazards are present.
1.5 Understanding the hazards
1.5.1 X-ray radiation
X-rays are ionising radiation. High doses of ionising radiation can cause lasting injuries,
disfigurement and (in extreme cases) death.
The X-ray system has been designed and built to United Kingdom Ionising Radiation
Regulation Standards (IRR 2017).
The system is certified by Nikon Metrology to emit less than one microsievert per hour
(1 µSv/h) on all external surfaces. Certification is provided with the system. There is no
significant X-ray radiation risk to users under normal operating conditions.
If the system is damaged, it must not be used and Nikon Metrology
must be contacted immediately. Nikon Metrology will then arrange for
an approved engineer to examine the system for radiation leakage
before it can be re-commissioned.
This does not replace the need for statutory radiation safety checks to be carried out at the
site in accordance with your regional or national legal requirements.
1.5.2 High voltages
The system contains high voltages. These pose no risk to users under
normal operating conditions.

Important health and safety information
4XTM0011-F2 XT V 160 X-ray System
1.5.3 Laser radiation
The system may be fitted with a Class 2 laser product. The laser
module is classified as Class 2 in accordance with IEC60825-1 2007
and complies with 21 CFR 1040.10 and 1040.11.
Do not stare into the beam. The laser is safe for accidental viewing as
protection is afforded by the blink reflex (aversion response). There is
no hazard to the skin.
1.6 Hazard warning labels
Hazard warning labels are fixed to the X-ray system for your information and safety.
Labels must not be removed or tampered with.
If you require replacement labels, please contact Nikon Metrology.
Labels are not shown to scale.
Caution label near the roof on the sides and / or rear of the cabinet.
DO NOT LOAD CABINET ROOF
LOADS PLACED ON THE ROOF OF
THIS SYSTEM MAY RESULT IN
FAILURE OF THE RADIATION
SHIELDING
Safety warning label fitted above the machine identification label.

Important health and safety information
XT V 160 X-ray System XTM0011-F2 5
WARNING: X-RAY PROTECTION
DO NOT DRILL OR SCREW INTO ANY PART OF THE CABINET
DO NOT REMOVE ANY PART OF THE CABINET
DO NOT MODIFY ANY PART OF THIS EQUIPMENT
Safety warning label fitted on removable radiation protection covers.
SAFETY WARNING
THIS IS A RADIATION PROTECTION COVER
X-rays must not be generated with this cover removed
Only trained or qualified personnel to remove
If in doubt contact X-Tek Systems Ltd.
Warning label placed on the radiation protective lead glass window in the operator
door.
RADIATION PROTECTIVE GLASS
DO NOT REPLACE
CONTACT X-TEK SYSTEMS LTD.
Earth warning label located adjacent to the machine identification label.
WARNING
THIS SYSTEM HAS HIGH PROTECTIVE CONDUCTOR CURRENTS
3.5 mA < IL< 10 mA
SYSTEM MUST BE CONNECTED VIA EITHER PERMANENT FIXED
WIRING OR A SUITABLE INDUSTRIAL PLUG AND SOCKET

Important health and safety information
6XTM0011-F2 XT V 160 X-ray System
Warning labels placed on the warning lamp tower.
PRE-WARNING
X-RAYS ON
Radiation warning label affixed to the front of the cabinet adjacent to the operator
door.
CAUTION
X-RAYS PRODUCED WHEN ENERGISED
Mandatory label placed on the rear of the monitor arm.
CONSULT THE USER MANUAL BEFORE
ATTEMPTING TO MOVE THE MONITOR
BRACKET
Warning label fitted on electrical covers.
DANGER
DISCONNECT THE MAINS SUPPLY BEFORE
REMOVING THIS COVER
Warning label located near the cabinet feet.

Important health and safety information
XT V 160 X-ray System XTM0011-F2 7
WARNING
HAND CRUSH HAZARD
DO NOT OVER EXTEND FEET
MISALIGNMENT OR OVER EXTENSION MAY LEAD TO SERIOUS INJURY
Laser warning label fitted to the front of the cabinet and manipulator, if a laser module
is fitted to the system.
LASER RADIATION
DO NOT STARE INTO BEAM
CLASS 2 LASER PRODUCT
Laser aperture warning label. Fitted to the laser module, if a laser option is fitted to the
system.
Laser Aperture
Beta CW 670 mm
Caution label placed on the manipulator platform.

Important health and safety information
8XTM0011-F2 XT V 160 X-ray System
DO NOT STEP, STAND OR SIT ON THIS SURFACE
MAY CAUSE INJURY AND / OR EQUIPMENT DAMAGE
Caution label placed on the manipulator inside the cabinet, dependent on the load
rating of the manipulator platform.
MAXIMUM 500 g
MAXIMUM 5 kg
Warning label fitted to the X-ray source target if a beryllium window is fitted.
BERYLLIUM
THE TARGET ASSEMBLY ON THIS X-RAY SOURCE CONTAINS A BERYLLIUM
WINDOW
WEAR GLOVES WHEN HANDLING
DO NOT SCRATCH OR ABRADE THE WINDOW
REFER TO MANUAL FOR MORE INFORMATION
DO NOT REMOVE THIS LABEL

Important health and safety information
XT V 160 X-ray System XTM0011-F2 9
Warning label placed on the top hinge of the service door.
HEAVY
SERVICE DOOR
250 kg
Warning label placed on the operator door.
HEAVY
USER DOOR
50 kg
Warning label on the X-ray source inside the cabinet.
HEAVY
X -RAY SOURCE
2 PERSON LIFT
40 kg

Important health and safety information
10 XTM0011-F2 XT V 160 X-ray System
Warning label fitted on cooling system reservoir.
CAUTION
FILL WITH UNDILUTED
HEXID A4 ONLY
Hexid A4 Supplied by:
Applied Thermal Control, UK.
Tel: [phone]
COMPOSITION:
Water, Propylene Glycol and
Fluorescein Biocide:
1-2-Benzisothiazol-3(2H)-one
0.002%
Machine identification label fitted to the side of the cabinet.