Numerik Jena LIA series User manual

SIMPLY PRECISE
USER MANUAL
LIA SERIES
Optical Linear Encoder with Online Compensation

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2
Index
1. Features and Applications .................................................................................................... 4
2. Safety ...................................................................................................................................... 5
2.1 General Information ..................................................................................................... 5
2.2 Notes on Legal Requirements ..................................................................................... 6
2.3 Notes on Transport, Storage and Handling .................................................................. 7
2.4 Notes on Operation ...................................................................................................... 8
2.5 Notes on Maintenance ................................................................................................. 8
3. Functional Elements .............................................................................................................. 9
3.1 Online Compensation (Offset and Amplitude Control) ................................................. 9
3.2 Switch Sensor ............................................................................................................ 10
3.3 Switch Foil .................................................................................................................. 11
4. Technical Data ...................................................................................................................... 12
 4.1 ResolutionandAccuracy(Denition) ......................................................................... 12
4.2 Mechanical Data ........................................................................................................ 13
4.3 SINGLEFLEX and DOUBLEFLEX Scale Tape .......................................................... 14
4.4 Guide Tape and Mounting Tool (FAV) ........................................................................ 15
4.5 Electrical Data ............................................................................................................ 16
4.6 Switch-On Behaviour ................................................................................................. 17
4.7 Attainable Traversing Speed ...................................................................................... 17
4.8 Ambient Conditions .................................................................................................... 18
4.9 Cable .......................................................................................................................... 18
4.10 Connector Variants .................................................................................................... 19
4.11 PIN Assignment ......................................................................................................... 20
4.12 PIN Assignment for JST Miniature Connector ........................................................... 22
4.13 Electromagnetic Compatibility (EMC) ........................................................................ 23
4.14 Shielding Concepts .................................................................................................... 24
4.15 Voltage Output 1 VPP .................................................................................................. 25
4.16 Square-Wave Output RS 422 .................................................................................... 26
4.17 Switch Sensor TTL ..................................................................................................... 27
4.18 Switch Sensor MOS-Relay LIA 21 ............................................................................. 28
4.19 Switch Sensor Open Collector ................................................................................... 28
4.20 Connection Circuits for JST Miniature Connector ...................................................... 28

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5. General Installation Notes .................................................................................................. 30
5.1 Delivery Contents ....................................................................................................... 30
5.2 Installation Position .................................................................................................... 30
5.3 Scale Tape Position ................................................................................................... 33
5.4 Mounting Surfaces for Scanning Head and Scale Tape ............................................ 34
5.5 Mounting Steps .......................................................................................................... 35
5.6 Specifying the Switch Point of the Switch Sensor for LIA 21 ..................................... 50
6. Mounting Drawing - LIA 20 / 21 .......................................................................................... 52
6.1 Scanning Head LIA 20 / 21 ........................................................................................ 52
6.2 Assignment of Scanning Head, Scale Tape and Measuring Length .......................... 53
6.3 Using of Switch Sensor and Switch Foil (LIA 21) ....................................................... 53
7. Signal Adjustment with ADJUSTMENT TOOL ................................................................... 56
7.1 Functions of the ADJUSTMENT TOOL ...................................................................... 56
7.2 Dynamic Offset and Amplitude Control (Online Compensation) ................................ 56
7.3 Scope of Delivery ....................................................................................................... 56
7.4 EPIFLEX Software ..................................................................................................... 57
8. Cleaning ................................................................................................................................ 58
8.1 Measuring System ..................................................................................................... 58
8.2 Scale Tape ................................................................................................................. 58
9. Troubleshooting ................................................................................................................... 59
10. Ordering Key ........................................................................................................................ 61
10.1 Scanning Head .......................................................................................................... 61
10.2 Speed Chart for LIK Series ........................................................................................ 62
10.2.1 LIK Series with Op-Amp ............................................................................................. 62
10.2.2 LIK Series without Op-Amp ........................................................................................ 64
10.3 Scale Tape ................................................................................................................. 66
10.4 ADJUSTMENT TOOL ................................................................................................ 67

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1. Features and Applications
Position encoders in drive systems have to meet high and controversial demands, especially in linear
drive systems. The demands opposing each other are high accuracy and resolution on the one hand
and low mass, small dimensions and high measuring speed on the other hand.
• Thegraduatedscaleisdenitiveforthequalityofalinearencoder.Requirementsformaximum
position deviations of ±2 μm per meter or less are no rarity. The emphasis is mostly on the
avoidance of shortrange errors, since long-range errors, mostly linear error components, can often
be compensated.
• The concentration of multiple axes in motion in very tight spaces, such as in semiconductor-
producing machines, requires the miniaturization of the drives, guideways and encoders.
• High machining speeds and therefore high accelerations make low masses of the components in
motion essential.
The LIA incremental encoders from NUMERIK JENA are equipped with features which are supposed
tofulllthesehighrequirementsinanidealway.
• Due to an interpolation circuitry which is integrated in a 15-pin D-sub connector or in the scanning
head, a resolutions down to 50 nm is possible without any additional electronics.
• The permissible traversing speed for a sinusoidal signal output amounts to 10 m/s. A Square wave
signaloutputwitharesolutionof0.1μmallowsapermissibletraversingspeedof1.6m/s.
• Theshort-rangepositionerrors(interpolationerrors)weresignicantlyreducedbyintroducingan
electronic compensation of amplitude and offset deviations of the coarse signals. This compensation
functions without following error in all velocity ranges.
Additional features:
• Referencesignal(s)withrepeatabilityaccuratetoaspecicincrement,regardlessofthedirection
from which the reference mark(s) is/are traversed
• Compact size and large mounting tolerances
• Highresistancetocontaminationdueto2-eldscanning
• Possibility of electronic signal adjustment (signal optimization after mounting)
• Optional, additional optical switch sensor integrated in the scanning head (LIA 21)
• Special, easy to mount scale tapes (SINGLEFLEX and DOUBLEFLEX) for a variety of applications
and ambient conditions
Applications:
• Production and inspection machines for the semiconductor industry
• Linear units, drives and coordinate tables
• Measuring machines and measuring microscopes
• Positioning and measuring devices for medical technology
• Precision devices for reprography
• Precision machining
• Robotics
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2. Safety
2.1 General Information
• Make sure to familiarize yourself thoroughly with the contents of these installation instructions
before installing and starting up the encoder!
• Please contact the support of NUMERIK JENA GmbH or an authorized representation for further
information. Please visit the NUMERIK JENA website to get the contact information.
• NUMERIK JENA GmbH is not liable for damages caused by unauthorized handling of the encoders.
Any unauthorized handling leads to forfeiture of all warranty claims.
• The encoders are guaranteed to function if the mounting and operating conditions are maintained
as stated in these mounting instructions.
• Make sure to follow the right sequence of the mounting steps during mounting.
• NUMERIK JENA GmbH does not assume any liability for any damages or operating errors caused
by incorrect installation or operation.
• The stated tolerances must be maintained in order to achieve the accuracies listed in the
specications!
• Ifthe machinetolerancesexceedthetolerancesstatedinthemountinginstructions,errorscan
occur in both the operation and during measuring. NUMERIK JENA GmbH assumes no liability for
this.
• Please refer to the operating manuals and safety instructions included with the devices to ensure
the reliable operation of the encoder systems, especially pertaining to:
- Auxiliaryelectronicunits
- Counters
- Displays
- Controllers
- Encoders
- Base mechanical devices (machine tools)
• Please pay attention to the safety instructions and warning symbols!
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Danger to the device or to the
function of the device!
Pull the plug! Highlyinammable!
!
!
!

SIMPLY PRECISE
2.2 Notes on Legal Requirements
• The NUMERIK JENA encoders conform to EC standards and carry the CE mark.
• NUMERIKJENAencodersfullltherequirementsofthe(German)ProductSafetyAct(ProdSG)
from November 8th, 2011.
• Connect NUMERIK JENA encoders only to subsequent electronics whose power supply is
generated from PELV systems (EN 50178).
• NUMERIKJENAencoders fulllthe requirementsofstandard IEC61010-1 onlyifthe poweris
supplied from a secondary circuit with current limitation as per IEC 610103rd Ed., Section 9.4 or
with power limitation as per IEC 60950-12nd Ed., Section 2.5 or from a Class 2 secondary circuit as
speciedinUL1310.*
• This user manual supersedes all previous editions, which thereby become invalid. The basis for
ordering from NUMERIK JENA is always the user manual edition valid when the contract is made.
• Standards(ISO,EN,etc.)applyonlywhereexplicitlystatedintheusermanual.
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In place of IEC 61010-13rdEd., Section 9.4, the corresponding sections of standards DIN EN 61010-1, EN61010-1, UL 61010-1 and
CAN/CSA-C22.2 No. 61010-1 can be applied and in place of IEC 60950-12nd Ed., Section 2.5 the corresponding sections of standards
DIN EN60950-1, EN60950-1, UL60950-1, CAN/CSA-C22.2 No. 60950-1 can be applied.
*

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2.3 Notes on Transport, Storage and Handling
Encoder
• Use the original packaging for transportation only!
• If possible, use the original packaging for storage only.
SINGLEFLEX scale tape
• Can be rolled up (minimum bending radius = 140 mm).
• No restrictions regarding to the length.
DOUBLEFLEX scale tape
• In no case the DOUBLEFLEX scale tape should be stored, transported or used when rolled up!
• Use only the original packaging for transportation!
- Lengths up to 3 m - stretched out
- Lengthsabove3m-tapelaiddownasagureeight
• Use the original packaging for storage only!
• Damages to the adhesive layer between the scale tape and carrier tape must absolutely be avoided,
since otherwise the measuring properties of the DOUBLEFLEX scale tape are lost.
• Only remove the DOUBLEFLEX scale tape from the packaging on site, directly before mounting.
• Do not separate the scale tape and carrier tape from each other! Avoid any unintentional separation
of the scale tape from the carrier tape, even just partial separation.
• Avoidradialoraxialoffsettingbetweenthescaletapeandcarriertape.
• If the scale tape should become partially or completely separated from the carrier tape - even
for just a very short time - simply pressing them together again will not result in sufcient
adhesion. In this case neither the operational reliability nor the metrological properties can
be guaranteed anymore. Please return the scale tape to NUMERIK JENA GmbH for repair!
Unfortunately a repair at the customer site is not possible.
• WhenremovingtheDOUBLEFLEXscaletapefromthepackaging,thesagmustnotexceedmore
than 100 mm.
• After removing the greatest distance between two supports must not be more than 800 mm. Scale
tapesupto1,200mmmustbesupportedapprox.300mmfromtheendsandlongerscaletapes
must be supported correspondingly.
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2.4 Notes on Operation
• Do not connect or disconnect plugs if the power is on!
• Only operate the encoder with the supply voltage stated in this product data sheet.
• ComplywithapplicablePINassignmentifauxiliaryelectronicunitsareconnected(e.g.controller
or display)!
• Integrate exposed encoders in instruments, devices or machines in such a way that these are
protected against contamination.
• Protect the scale tape against mechanical damage.
• Protect the scanning head against shock, impact and humidity.
2.5 Notes on Maintenance
• The encoder requires no maintenance whatsoever, but must be cleaned occasionally, depending
on the ambient conditions.
• ModicationsandrepairsoftheencodermayonlybecarriedoutbyNUMERIKJENA GmbHor
appropriately authorized persons.
• NUMERIK JENA GmbH is not liable for damages caused by unauthorized handling of the encoder.
All warranty claims are forfeited by unauthorized handling.
• Exposedmeasuringsystemsaresensitivetocontamination,especiallythescalesurfaceandthe
scanning windows for the counting and reference tracks on the scanning head.
• Particularly critical are rough and irregular contamination and deposits (e.g. oil, grease or water).
• The user has to protect the encoder from contamination by way of appropriate design measures.
• When cleaning the encoder, ensure that no solvent ows under the scale tape!
• When cleaning the components, ensure that the scanning window and scale tape are not
scratched by any deposited particles!
• Please also pay attention to the notes in chapter 9 „Cleaning“.
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!
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SIMPLY PRECISE
3. Functional Elements
3.1 Online Compensation (Offset and Amplitude Control)
Contamination and mounting errors lead to interferences in the optical scanning of the scale by the
scanning head and so to periodic deformations of the sinusoidal counting track signals, which are
exempliedas
• Offset deviations
• Amplitude deviations
• Amplitude differences between the sine and cosine channels
and lead to interpolation errors.
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U
sin
+ U
cos
U
sin
/U
cos
U
sin
+ U
cos
U
sin
/U
cos
U
sin
/U
cos
U
sin
+ U
cos
Contaminated Scale Tape
Scanning head signal with contaminated
grating disk before activation of the online
compensation.
Incorrect Mounting
Scanning head signal with faulty
mounting before activation of the online
compensation.
Active Online Compensation
Scanning head signal with contaminated
grating disk and/or faulty mounting after
activation of the online compensation.
Usin+ Ucos Usin/Ucos
Usin+ Ucos Usin/Ucos
Usin/Ucos
Usin+ Ucos
U
sin
+ U
cos
U
sin
/U
cos
U
sin
+ U
cos
U
sin
/U
cos
U
sin
/U
cos
U
sin
+ U
cos
Image 1
Image 2
Image 3

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Through the offset and amplitude control the signals generated by the measuring module are
automatically corrected within the sensor without following error over the entire velocity range.
This measure not only increases the accuracy, but also the reliability of the encoder.
3.2 Switch Sensor
The use of a switch sensors results in no additional switches being needed. This saves cable material
and time for installation. The opto-electronic switch sensor integrated in the LIA 21 scanning head can
be used
• to detect limit positions with left/right distinction,
• to indicate the scanning head position within the measuring range or
• to enable a reference mark (selection of one reference mark from n marks)
It is also possible to combine these variations.
The switch sensor can be used universally depending on the various output settings (order options):
• TTL low active or TTL high active
• Open Collector low active or Open Collector high active
• MOS relay opening or closing to 300 V switching voltage
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