Numerik Jena RIK 4 User manual

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USER MANUAL
RIK 4 VACUUM
Rotary encoder for vacuum applications

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Index
1. Features and Applications .................................................................................................... 4
2. Safety ...................................................................................................................................... 5
2.1 General Information ..................................................................................................... 5
2.2 Notes on Legal Requirements ..................................................................................... 6
2.3 Notes on Transport, Storage and Handling .................................................................. 7
2.4 Notes on Operation ...................................................................................................... 8
2.5 Notes on Maintenance ................................................................................................. 8
3. Setup of the Vacuum Encoder .............................................................................................. 9
4. Grating Disks ....................................................................................................................... 10
4.1 Grating Disks - Types ................................................................................................. 11
5. Scanning Head ..................................................................................................................... 12
6. Technical Data ...................................................................................................................... 13
 6.1 ResolutionandAccuracy(Denition) ......................................................................... 13
6.2 Resolution .................................................................................................................. 13
6.3 Accuracy .................................................................................................................... 13
6.4 Mechanical Data ........................................................................................................ 14
6.5 Calculation of the Attainable Speed of Rotation ......................................................... 14
6.6 Electrical Data ............................................................................................................ 15
6.7 Switch-On Behaviour ................................................................................................. 15
6.8 Ambient Conditions .................................................................................................... 16
6.9 Cable .......................................................................................................................... 16
6.10 Connector .................................................................................................................. 16
6.11 Pin Assignment .......................................................................................................... 17
 6.12 ElectromagneticCompatibility(EMC) ........................................................................ 18
6.13 Shielding Concepts .................................................................................................... 19
6.14 Voltage Output 1 VPP .............................................................................................................................................................................. 20
6.15 Square-Wave Output RS 422 .................................................................................... 21
 6.16 OnlineCompensation(OffsetandAmplitudeControl) ............................................... 22
7. General Mounting Instructions ........................................................................................... 23
7.1 Delivery Contents ....................................................................................................... 23
7.2 Encoder Mounting Position ........................................................................................ 23
7.3 Mounting of the Encoder System ............................................................................... 24
7.4 Dimensions and Mounting Tolerances ....................................................................... 25
7.5 Mounting of the Grating Disk ..................................................................................... 27
7.6 Mounting of the Scanning Head ................................................................................. 31
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8. Signal Adjustment with ADJUSTMENT TOOL ................................................................... 33
8.1 Functions of the ADJUSTMENT TOOL ...................................................................... 33
 8.2 DynamicOffsetandAmplitudeControl(OnlineCompensation) ................................ 33
8.3 Scope of Delivery ....................................................................................................... 33
8.4 EPIFLEX Software ..................................................................................................... 34
9. Cleaning ................................................................................................................................ 35
10. Troubleshooting ................................................................................................................... 36
11. Ordering Key ........................................................................................................................ 37
11.1 Scanning Head .......................................................................................................... 37
11.2 Speed Chart for RIK Series ....................................................................................... 38
11.2.1 RIK 4 with Op-Amp .....................................................................................................38
11.2.2 RIK 4 without Op-Amp ................................................................................................40
11.3 Grating Disk ............................................................................................................... 42
11.4 ADJUSTMENT TOOL ................................................................................................ 43

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1. Features and Applications
Position encoders in drive systems have to meet high and controversial demands, especially in linear
drive systems. The demands opposing each other are high accuracy and resolution on the one hand
and low mass, small dimensions and high measuring speed on the other hand.
• Thegraduatedscaleisdenitiveforthequalityofalinearencoder.Requirementsformaximum
position deviations of ±2 μm per meter or less are no rarity. The emphasis is mostly on the
avoidance of shortrange errors, since long-range errors, mostly linear error components, can often
be compensated.
• The concentration of multiple axes in motion in very tight spaces, such as in semiconductor-
producing machines, requires the miniaturization of the drives, guideways and encoders.
• High machining speeds and therefore high accelerations make low masses of the components in
motion essential.
The LIK incremental encoders for vacuum applications are equipped with features which are supposed
tofulllthesehighrequirementsinanidealway.
• Due to an interpolation circuitry which is integrated in a 15-pin D-sub connector, a resolutions down
to 50 nm is possible without any additional electronics.
• The permissible traversing speed for a sinusoidal signal output amounts to 10 m/s. A Square wave
signaloutputwitharesolutionof0.1μmallowsapermissibletraversingspeedof1.6m/s.
• Theshort-rangepositionerrors(interpolationerrors)weresignicantlyreducedbyintroducingan
electronic compensation of amplitude and offset deviations of the coarse signals. This compensation
functions without following error in all velocity ranges.
Additional features:
• Suitable for vacuum applications up to 10-9mBar(UHV)atmosphericpressure
• Bake out cycles of 12 h and 150°C possible
• UHV-components will be delivered precleaned
• Possibility of electronic signal adjustment / optimization after mounting
(anelectronicsignaladjustmentafterachievingthenalpressureisrecommended)
Typical Applications:
• Production and inspection machines for the semiconductor industry
• Linear units, drives and coordinate tables
• Positioning and measuring devices
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2. Safety
2.1 General Information
• Make sure to familiarize yourself thoroughly with the contents of these installation instructions
before installing and starting up the encoder!
• Please contact the support of NUMERIK JENA GmbH or an authorized representation for further
information. Please visit the NUMERIK JENA website to get the contact information.
• NUMERIK JENA GmbH is not liable for damages caused by unauthorized handling of the encoders.
Any unauthorized handling leads to forfeiture of all warranty claims.
• The encoders are guaranteed to function if the mounting and operating conditions are maintained
as stated in these mounting instructions.
• Make sure to follow the right sequence of the mounting steps during mounting.
• NUMERIK JENA GmbH does not assume any liability for any damages or operating errors caused
by incorrect installation or operation.
• The stated tolerances must be maintained in order to achieve the accuracies listed in the
specications!
• Ifthe machine tolerancesexceedthe tolerances statedinthe mounting instructions,errorscan
occur in both the operation and during measuring. NUMERIK JENA GmbH assumes no liability for
this.
• Please refer to the operating manuals and safety instructions included with the devices to ensure
the reliable operation of the encoder systems, especially pertaining to:
- Auxiliaryelectronicunits
- Counters
- Displays
- Controllers
- Encoders
- Basemechanicaldevices(machinetools)
• Please pay attention to the safety instructions and warning symbols!
Danger to the device or to the
function of the device!
Pull the plug! Highlyinammable!
!
!
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2.2 Notes on Legal Requirements
• The NUMERIK JENA encoders conform to EC standards and carry the CE mark.
• NUMERIKJENAencodersfullltherequirementsofthe(German)ProductSafetyAct(ProdSG)
from November 8th, 2011.
• Connect NUMERIK JENA encoders only to subsequent electronics whose power supply is
generatedfromPELVsystems(EN50178).
• NUMERIKJENAencoders fulll the requirements of standard IEC61010-1only if the power is
supplied from a secondary circuit with current limitation as per IEC 610103rd Ed., Section 9.4 or
with power limitation as per IEC 60950-12nd Ed., Section 2.5 or from a Class 2 secondary circuit as
speciedinUL1310.*
• This user manual supersedes all previous editions, which thereby become invalid. The basis for
ordering from NUMERIK JENA is always the user manual edition valid when the contract is made.
• Standards(ISO,EN,etc.)applyonlywhereexplicitlystatedintheusermanual.
In place of IEC 61010-13rdEd., Section 9.4, the corresponding sections of standards DIN EN 61010-1, EN61010-1, UL 61010-1 and
CAN/CSA-C22.2 No. 61010-1 can be applied and in place of IEC 60950-12nd Ed., Section 2.5 the corresponding sections of standards
DIN EN60950-1, EN60950-1, UL60950-1, CAN/CSA-C22.2 No. 60950-1 can be applied.
*

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2.3 Notes on Transport, Storage and Handling
• Please use the original packaging for transportation and storage only!
• Afterreceivingthemeasuringsystempleasecheckthepackagingandthesealfordamagesrst!
Once opened, scratches or contaminations on the grating disk cannot be complained anymore.
• Handle the grating disk carefully! Its surface is sensitive to scratching.
• Small surface errors evident at the time of shipping are due to the production process. These errors
are no indication for a qualitiy defect and do not affect the encoder’s functionality.
• Handle the aluminum disk carefully please and protect it especially against mechanical deformation.
Unevennessofthediskinuencesthecorrectoperationoftheencoder.
Image 1
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2.4 Notes on Operation
• Do not connect or disconnect plugs if the power is on!
• Only operate the encoder with the supply voltage stated in this product data sheet.
• ComplywithapplicablePINassignmentifauxiliaryelectronicunitsareconnected(e.g.controller
ordisplay)!
• Integrate exposed encoders in instruments, devices or machines in such a way that these are
protected against contamination.
• Protect the grating disk against mechanical damage.
• Protect the scanning head against shock, impact and humidity.
2.5 Notes on Maintenance
• The encoder requires no maintenance whatsoever, but must be cleaned occasionally, depending
on the ambient conditions.
• ModicationsandrepairsoftheencodermayonlybecarriedoutbyNUMERIKJENAGmbHor
appropriately authorized persons.
• NUMERIK JENA GmbH is not liable for damages caused by unauthorized handling of the encoder.
All warranty claims are forfeited by unauthorized handling.
• Exposedmeasuringsystemsaresensitivetocontamination,especiallythedisksurfaceandthe
scanning windows for the counting and reference tracks on the scanning head.
• Particularlycriticalareroughandirregularcontaminationanddeposits(e.g.oil,greaseorwater).
• The user has to protect the encoder from contamination by way of appropriate design measures.
• When cleaning the encoder, ensure that no solvent ows under the grating disk!
• When cleaning the components, ensure that the scanning window and grating disk are not
scratched by any deposited particles!
• Please also pay attention to the notes in chapter 9 „Cleaning“.
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3. Setup of the Vacuum Encoder
The vacuum encoders from NUMERIK JENA consists of two different assemblies. One of them is made
for vacuum areas, the other is for normal atmospheric pressure. Thus only the vacuum suitable parts
will be placed in the vacuum chamber.
The vacuum assembly will be delivered especially cleaned and is suitable for vacuum applications up
to 10-9mBar(UHV)atmosphericpressure.Furthermoreitcanbebakedoutbycyclesupto12hand
150°C(302°F).
VACUUM NORMAL PRESSURE
Please note: a+ b≤5m
Image 2
Signal pass
(mustberealizedbycustomer)
15-pin D-Sub-Connector
(withelectronics)
A X2
14
1
1
14
Cable A
length a
Cable B
length b
Grating Disk
Scan head Vacuum cable

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diInside diameter of the grating disk
daOutside diameter of the grating disk
dtCenter diameter of the incremental track
d1 Outsidediameteroftheindextrack
d2 Insidediameteroftheindextrack
dLHole spacing of borings for mounting screws
d Diameter of the borings
Z Number of lines of the grating disk
4. Grating Disks
The grating disks from NUMERIK JENA are available in different sizes and versions. Hereto we have
a big selection of obtainable grating disks in supply but on request we also manufacture at customer‘s
option.
Our grating disks are made of an aluminium alloy. They are also available in glass on request.
Incremental track
Indextracks
thickness depends
to the material
for Aluminium = 0.5 mm
for glass on request
Image 3
d
di
dL
d
2
d
1
d
t
da