Pfeiffer Vacuum TMH 260 C User manual

Operating Instructions
Turbomolecular Drag Pumps For
Corrosive Gas Processes
TMH 260 C/ TMU 260 C
TMH 520 C/ TMU 520 C
PM 800 370 BE/D (9906)
TMH/U 260 C
TMH/U 520 C

2
1. Safety Precautions.................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pumps .................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
3. Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Assembling The Pump,
Connecting The High Vacuum Side................................ 5
Fitting The Splinter Shield................................................. 6
3.3. Connecting The Fore-Vacuum Side................................ 6
3.4. Connecting The Cooling Unit............................................ 6
Cooling Water From The Mains...................................... 6
Cooling With The Water Recycling Unit TZK
(Accessory)......................................................................... 7
3.5. Connecting The Venting Valves....................................... 7
3.6. Connecting The Electronic Drive Unit............................ 8
3.7. Connecting The Sealing Gas Valve................................. 8
4. Operations................................................ 9
4.1. Lubricant Filling.................................................................. 9
4.2. Before Switching ON......................................................... 9
4.3. Switching ON...................................................................... 9
4.4. Heating (Only Pumps With Heating Jackets)................ 9
4.5. Circulatory Lubrication.................................................... 10
4.6. Switching OFF And Venting............................................ 10
4.7. Shutting Down For Longer Periods............................... 10
5. What To Do In Case
Of Breakdowns?.................................... 11
6. Service.................................................... 12
7. Maintenance.......................................... 13
7.1. Changing The Lubricant.................................................. 13
7.2. Cleaning The Lubricant Pump........................................ 14
8. Technical Data....................................... 15
8.1. Dimensions........................................................................ 16
9. Accessories .......................................... 17
9.1. Lubricant............................................................................ 18
10. Spare Parts............................................. 18
Declaration Of Contamination.................... 20
Manufacturer's Declaration......... (last page)
INDEX
Page Page

3
Danger of damage to the pump or system.
Danger of burns from touching hot parts.
Danger of an electric shock.
1. Safety Precautions
☞Read and follow all the instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can arise in your system;
– Hazards which can be caused by the medium being
pumped.
☞Avoid exposing any part of your body to vacuum.
☞Comply with all safety and accident prevention
regulations.
☞Check regularly that all safety requirements are being
complied with.
☞Do not operate the pump with open high vacuum flange.
☞Do not carry out any unauthorised conversions or modifi-
cations on the pump.
☞When returning the pump to us please note the shipping
instructions.
☞Use at least four bracket screws to connect the high vacu-
um flange.
☞Fix down the pump in accordance with the instructions on
installation.
☞Do not disconnect the pump cable during operations.
☞When the pump is open, disconnect the electronic drive
unit from the mains.
☞After switching off the pump, disconnect the electronic
drive unit only once the rotor is at rest.
☞When working on the pump, only open the high vacuum
flange once the rotor is at rest.
☞When using sealing gas, limit the pressure in the hose
connection to 2 bar via the overflow valve.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. Take care to
avoid burns !
☞During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot
surfaces ( > 70 °C).
Modifications reserved.
Danger of injury from moving parts.
Danger of personal injury.
1.1. For Your Orientation
In the text
➡Operating instruction: Here, you have to do something.
Symbols used
The following symbols are used throughout in the
illustrations:
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Sealing gas connection
Power connection
Position numbers
Identical pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions

4
2.1. Main Features
2. Understanding The Pumps
Proper use
– Turbomolecular Pumps may only be used for the purpose
of generating vacuum.
– The Turbomolecular Pumps are designed to pump corrosi-
ve gases and vapours. Where corrosive gas processes
are involved, gas bonding and particels which can dama-
ge the surfaces of the pump can be produced. The motor
and bearing compartments have to be protected with sea-
ling gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– Turbomolecular Pumps may only be operated with a
PFEIFFER Electronic Drive Units and relevant cables.
– The turbo pump must be connected to a backing pump as
per Section 3.3.
Improper use
Certain types of use are regarded as improper, e.g.
– Pumping explosive gases.
– Operating the pump where explosive processes are
involved.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– Using accessories not named in this manual and/or not
authorised by PFEIFFER.
Improper use will cause any rights regarding liability and
guarantees to be forfeited.
2.2. Differences Between The Pump Types
Feature TMH 260 C TMU 260 C
HV flange ISO-K CF-F
Seal Viton Metal
Attainable < 1 · 10-8 mbar < 1 · 10-9 mbar
final pressure (withoutbaking out) (withbaking out)
TMH 520 C TMU 520 C
HV flange ISO-K CF-F
Seal Viton Metal
Attainabler < 1 · 10-8 mbar < 5 · 10-11 mbar
final pressure (without baking out) (withbaking out)
All parts exposed to the media are either manufactured in, or
coated with, corrosion-proof materials.
Sealing gas can be connected to protect rotor bearing and
lubricant (see Section 3.7.).
Cooling
Standard: Water cooling
Integrated excess temperature safety feature:
Electronic drive unit reduces
rotor rotation speed to zero.
Bearings
High vacuum side: Wear free, coated permanent magnetic
bearing.
Fore-vacuum side:Oil circulatory lubricated bearings with
ceramic balls
Pumps must not be transported when
containing lubricant.
When being fitted into or dosmantled from a
system, turbopumps may only be positioned as
shown in Section 3.2.
Other positions can cause the pumps to be contaminated with
lubricant.
Turbomolecular Pumps TMH/U 260 C
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
4 Venting connection
5 Power connection
6 Rubber feet
9 Locking screw/sealing gas connection
52 Connecting cable/Lubricant monitor
71 Lubricant filler screw
72 Lubricant drain screw
77 Lubricant pump
1
3
7752
72
71
2
4
5
9
6

5
Maximum high vacuum flange axial loading
capacity:
TMH/U 260 C max. 500 N (corresponds to 50 kg).
TMH/U 520 C max. 1000 N (corresponds to
100 kg).
No asymmetrical loading on the high vacuum flange.
In horizontal installation, the turbopump fore-vacuum flange
must point vertically downwards (deviation max. ±20%)
otherwise contamination is possible and the lubricant pump
may not function properly.
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or modifications on the pump.
– The maximum permissible rotor temperature of the pump is
90 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exeeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– Only remove blank flanges on the high and fore-vacuum
side just before connecting.
– Appropriate shielding must be provided (available on
request) if magnetic fields >5.5 mT (TMH/U 260 C) and
>5.0 mT (TMH/U 520 C) are involved.
– If pumps are to be baked out, the heating jacket and the
body of the pump must be insulated (in case of contact).
– The turbo pumps must be filled with lubricant before first
start-up (see Section 4.1.).
– In the event of a sudden standstill of the rotor, torques of
up to 720 Nm (TMH/TMU 260 C) and up to 2550 Nm
(TMH/TMU 520 C) can arise and these must be taken up by
the turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 4 bracket screws, or
– CF flange with the complete set of M8 screws, or
– underside of the pump with 4 screws M5,
screws quality 8.8.
3.2. Assembling The Pump,
Connecting The High Vacuum Side
Important:
Maintain the utmost cleanliness when fitting all high vacuum
parts. Unclean components prolong the pumping time.
Use of the splinter shield
A splinter shield in the high vacuum flange protects the pump
against foreign particles emanating from the vacuum
chamber but it does reduce the volume flow rate of the pump
by approx. 15%.
For fitting please refer to "Fitting The Splinter Shield".
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a bellows or a vibration compensator
(see ”Accessories”).
Connecting via bellows
If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump (please see dimensions). The
fastening must be able to withstand the torque referred to in
Section 3.1.
3. Installation
H
V
V
H
11
Permissible turbo pump installation positioning
11 Vacuum chamber
20°20°
H
VV
Installation position with oil sealed backing pump
No forces must be transmitted from the pipe
system to a pump which is anchored.
Support or suspend all pipes to the pump.
Connecting via a vibration compensator
The maximum permissible temperature at the
vibration compensator is 100 °C.
Where a vibration compensator is in use, a freely suspended
turbopump can be flanged onto the vacuum chamber.
Additional fastening is unnecessary.
Direct flanging

6
Minimum oxygen content 4 mg/kg
Maximum chloride content 100 mg/kg
Maximum carbonate hardness 10 ° dH
Maximum consumption of
potassium permanganate 10 mg/kg
Carbon dioxide Absent
Ammonia Absent
pH-value 7 – 9
Max. fore-line over pressure 6 bar
Minimum flow rate at gas load max. 100 l/h bei 15 °C
3.3. Connecting The Fore-Vacuum Side
Backing pump: Fore-vacuum pressure ≤5 mbar
Recommendation: Oil free Diaphragm Pump, UniDry
or PFEIFFER Rotary Vane Series
Vacuum Pump.
Connecting the backing pump
All fore-vacuum line connections: With normal small flange
components or screwed hoses.
Exhaust gases from the backing pump must be
conducted away safely. Ensure the full width of
the fore-vacuum flange is unhindered by
upstream components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
Fitting The Splinter Shield
High vacuum flange DN 100 and DN 160
Insert the splinter shield in the high vacuum flange so that the
curvature of the grill faces outwards.
➡Bend clamping lugs slightly outwards so that the splinter
shield will sit firmly in the high vacuum flange (preventing
noise).
➡Insert splinter shield in the high vacuum flange with clam-
ping lugs bent slightly inwards.
➡Press splinter shield outer ring into the high vacuum flange
up to the stop limit.
12a
12
H
Inserting the splinter shield
12 Splinter shield
12a Clamping lug
22
23
21
DN 25 KF
G 1⁄4"
V
≤5 mbar
Connecting the backing pump
21 Backing pump
22 Vacuum safety valve
23 Suction line
➡Fit the vacuum safety valve in the fore-vacuum line (in
PFEIFFER rotary vane vacuum pumps already integrated).
This prevents vacuum chamber venting via the backing
pump.
➡With rigid pipe connections: Fit bellows in the connecting
line to reduce vibration.
➡Backing pump power connection: see operating instruc-
tions for the electronic drive unit.
3.4. Connecting The Cooling Unit
The turbopumps are water cooled as standard.
Cooling water either
– from the mains
– or from Water Recycling Unit TZK with closed circuit.
Cooling Water From The Mains
Cooling water must be filtered to prevent deposits forming in
the pump.
Minimum cooling water requirements
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral, temperature > dew point.

7
Venting Control Electronic Venting Procedure
Valve Unit Drive Unit On Switch-Off Or
Power Failure
TSF 010 Unnecessary Independent Immediate;
venting valve remains
open
TSF 012 Unnecessary TCP 380 Delayed (venting
begins at approx. 20%
of rated rotation speed);
venting valve remains
open.
TVF 012 TCF/TCV 103 TCP 380 Delayed; adjustable
(with TCS 304)
33
31
32
3
34
Cooling from the water mains
3 Cooling water connection
31 Fore-line
32 Return line
33 Dirt trap
34 Cooling Water Monitor TCW 002
3
34 35
TZK
Cooling with the Water Recycling Unit TZK
3 Cooling water connection
34 Cooling Water Monitor TCW 002 in the return line
35 Water recycling unit TZK
Connecting to the water mains
➡Fit dirt trap (accessory) in the fore-line.
➡Using circlips, connect fore-line to one of the two cooling
water connections.
➡Fit Cooling Water Monitor TCW 002 (accessory) in return
line.
➡Connect return line to the other turbo pump cooling water
connection.
➡Thighten the hollow screws on the cooling water connec-
tion to a torque of 20 Nm.
➡Tighten all circlips and ensure hose lines are seated
firmly.
Cooling With The Water Recycling Unit TZK
(Accessory)
Connecting to the TZK
A dirt trap in the fore-line is not permissible.
All other steps: As for connection to the water mains.
3.5. Connecting The Venting Valves
The venting valve (Accessory) provides automatic venting in
the event of a power failure and switching off.
Connecting the venting valve
See operating instructions for the respective unit.
– Connect venting valve with G1/8" connecting thread
directly.
– Use Adapter PM 033 737-T for flange size DN 10-KF.
43
42
41
44
F
Connecting the venting valve
41 Valve control unit
42 Venting valve
43 Connecting hose
44 Drier TTV 001
Electrical connections
See operating instructions for the respective unit.

8
3.6. Connecting The Electronic Drive Unit
Voltages of > 100 V can be present on the open
electrical contacts on a running down pump.
There is danger of an electrical shock if the
contacts are touched.
Disconnect the plug to the electronic drive unit
only once the pump is completely at rest and the electronic
drive unit has been disconnected from the mains.
➡Plug in connecting cable with integrated lubricant monitor
(accessory) between the electronic drive unit, turbo pump
and lubricant pump. For details please see the operating
instructions for the electronic drive unit.
3.7. Connecting The Sealing Gas Valve
To protect turbo pump, particulary where corrosive or dust
produsing processes are involved, it is necessary to use sea-
ling gas.
Connection is made via the sealing gas valve (please see
”Accessories”).
Please refer to Operating Instructions PM 800 229 BN for
details on installing the sealing gas valve and adjusting the
sealing gas flow.
Connecting the electronic drive unit to the turbo pump
50 Electronic Drive Unit TCP
51 Male multipoint connector -->TCP
52 Connecting cable
53 Bayonet plug --> turbo pump
54 Lubricant monitor

9
4. Operations
4.1 Lubricant Filling
The pumps are designed to operate with Lubricant "F3" (not
supplied with the pump); "F3" must be ordered separately
(see Section 9.1.).
The pumps must be filled with Lubricant "F3"
before operating.
If "F3" is heated to over 300 °C, poisonous gases
damaging to the respiratory system are produ-
ced. "F3" must not be allowed to come into
contact with tobacco products (danger of
poisoning when lighting!).
When handling chemicals, the relevant manufacturer's
instructions must be followed.
➡Unscrew lubricant filler screw and, using the syringe pro-
vided, fill in approx. 35 cm3Lubricant "F3".
➡Screw in lubricant filler screw with O-ring.
When the pump is operating, the sight glass must be at least
one third full of lubricant.
– If a Pumping Station Control Unit TCS 303/304 is in use,
switch S1 on the electronic drive unit starts turbopump,
backing pump and recycled water cooling unit (if fitted)
jointly.
Take care when pumping hazardous gases.
Comply with all the gas manufacturer's safety
instructions.
4.4. Heating (Only Pumps With Heating
Jackets)
Heating turbo pumps and vacuum chambers accelerates the
attainment of final pressures.
The heating period is dependent on the level of contamination
and the required final pressure. Heat for at least four hours.
➡Switch on turbo pump heating via switch S2 on the
electronic drive unit.
High temperatures are generated when turbo
pump or vacuum chamber are baked out.
Contact with hot parts can cause burns, even
after the heating has been switched off.
Heating jackets, pump casing and vacuum
chamber should all be insulated when fitting.
Do not touch heating jackets, pump casing and vacuum
chambers during baking out.
S2 S1
Electronic drive unit switches (schematically)
S1 Turbopump ON/OFF
S2 Heating ON/OFF
4.2. Before Switching On
➡Open sealing gas supply.
➡Open cooling water supply and check flow.
4.3. Switching ON
Turbo pump rotors rotate at high speed. When
the high vacuum flange is open there is a
danger of injury. In addition, objects can fall
into the pump and cause serious damage.
Therefore never operate the pump with open
high vacuum flange.
➡Switch on turbopump with switch S1 on the electronic
drive unit.
Lubricant filling
71 Lubricant filler screw
73 Sight glass
75 O-ring

10
4.5. Circulatory Lubrication
The ball bearing on the fore-vacuum side is supplied by lubri-
cant via the lubricant pump. Lubricant circulation is
monitored by means of a contact which transmits signals to
the electronic drive unit which shuts down the turbopump in
the event of a lubricant deficiency. Monitoring is active from
45% of final rotation speed. If at rotation speeds of >45% of
final rotation speed (e.g. resulting from lubricant degassing)
the contact is open ≥2 minutes, the electronic drive unit iden-
tifies lubricant deficiency and shuts down the turbopump.
➡Check lubricant filling level.
➡Re-start turbopump with "reset" (S3 on electronic drive
unit).
➡Check lubricant pump function.
4.6. Switching Off And Venting
To avoid contamination occurring when switching off, the
pump should be vented before shut-down.
➡Close vacuum safety valve in the fore-vacuum line.
➡Operate turbopump at least a further 15 minutes with
sealing gas.
➡Switch off both turbo pump and backing pump at the same
time with switch S1.
➡Open locking screw or venting valve in venting connection.
(With PFEIFFER venting valves and respective control
units, venting proceeds automatically).
➡Shut off water supply.
➡Close sealing gas supply.
4.7. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a
danger of personal injury resulting from coming
into contact with process gases.
Before removing a turbo pump from the system,
first:
– Vent the turbo pump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbo pump is to be shut down for more than a year:
➡Remove turbo pump from the system.
➡Replace lubricant (see Section 7.1.).
➡Close high vacuum flange and evacuate pump via the
fore-vacuum flange.
➡Vent turbo pump via the venting connection with nitrogen
or dry air.
➡Close fore-vacuum and venting connections by blank
flanging.
➡Place the pump vertically on its rubber feet.
➡In rooms with moist or aggressive atmospheres, the turbo
pump must be air-sealed in a plastic bag together with a
bag of dessicant, e.g silicagel.