Pfeiffer Vacuum adixen ATH 500 M User manual

Translated from original versionBetriebBtib
Operating instructions
Operating instructions
Translated from original version
Translated from original version
BetriebB
e
t
r
i
e
b
ATH 500 M/MT
Magnetically levitated turbopumps
EN
EN

GB 03357 - Edition 04 - June 12
1/2
ATH 500 M-MT
Magnetically levitated turbo pumps
Welcome
Dear Customer,
You have just purchased
an adixen magnetically
levitated turbo pump.
We would like to thank
you and are proud to
count you as one of our
customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field
of turbomolecular pump
design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation
and start-up section.
This pumping component is designed to gererate vacuum by pumping
on gases, but no liquids neither solids. It is dedicated for running in
industrial environments.
The integrator of this component must provide all operator safety
measures mainly against hot surfaces.
This pumping component must not operate in an area with risk of
explosion. Consult us to study a solution.
SEMICONDUCTOR APPLICATIONS : plasma etching, Ion implantation,
sputtering, plasma deposition.
OTHER APPLICATIONS: research and development, high energy
physics, space simulation, accelerators.
OTHER INDUSTRIES: glass-coating, flat panel display, leds, deposition
coating, hard disk manufacturing.
ADVANTAGES:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
APPLICATIONS:
adixen Vacuum Products - Operating instructions - ATH 500 M-MT

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ATH 500 M-MT
Magnetically levitated turbo pumps
GB 03357 - Edition 04 - June 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole
or any part without prior written authorization from adixen
Vacuum Products.
Specifications and information are subject to change without
notice by adixen Vacuum Products.
This product complies with the requirements of European
Directives, listed in the Declaration of Conformity contained in
G 100 of this Manual.
adixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03358 - Edition 04 - June 12
1/3
Manual reference: 114436
Edition: 04 - June 2012 General contents
ATH 500 M-MT Operating instructions
Translated from
original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 500 M-MT
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - The technical characteristics
A 510 - The accessories of the pump
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the controller
B 300 - Pump connections to an installation
B 310 - Inlet connections
B 330 - Nitrogen connection on the purge port
B 333 - Assembly of the purge kit
B 340 - Water cooling connection
B 350 - Air cooling connection
B 400 - Safety instructions and electrical connections
B 430 - «Remote control» connection wiring
B 450 - RS 232 or RS 485 link wiring
Chapter C OPERATION
C 100 - Safety instructions for product use
C 200 - The front panel with operating status
C 300 - Configuring the ATH500 M-MT pump for the application
C 800 - Detailed description of RS232 and RS485 commands
Chapter D MAINTENANCE
D 100 - Safety instructions for product maintenance
D 150 - Maintenance frequency
D 200 - Diagnosis and troubleshooting
Chapter E MAINTENANCE INSTRUCTIONS
E 100 - Shipping procedure for contaminated pumps
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 200 - First level maintenance parts
Chapter G APPENDIX
G 100 - Declaration of conformity
G 150 - Pumping curves
G 200 - Safety Questionnaire
G 1000 - Hand Held Remote (HHR)
adixen Vacuum Products - Operating instructions - ATH 500 M-MT

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General contents
ATH 500 M-MT Operating instructions
GB 03358 - Edition 04 - June 12
Manual reference: 114436
Edition: 04 - June 2012
Translated from
original version
Indicated an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the pro-
duct.
Before switching on the appliance, study the user’s manual and make sure
you follow the safety instructions it gives. You can recognise these by the
‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
adixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03358 - Edition 04 - June 12
3/3
Manual reference: 114436
Edition: 04 - June 2012 General contents
ATH 500 M-MT Operating instructions
Translated from
original version
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
Operating status
48 V 12 A Power supply
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
LOCK
Lock the electrical connector before using the
pump and during operation
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
PWR Pump power on
Direction of rotation of the pump
adixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03359 - Edition 02 - Jan. 12
1/1
Introduction
ATH 500 M-MT User’s Manual
Detailed contents
A
A 150 Introduction to the ATH 500 M-MT
A 200 Control loop of the pump
- 5 active axis
- Unbalanced force rejection control
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The back-up bearings
- Variation of the pump rotational speed
A 400 The technical characteristics
- The performances of the pump
- The technical characteristics of the electronic
- The dimensions
A 510 The accessories of the pump
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03360 - Edition 03 - May 11
1/4
A 150
Introduction to the ATH 500 M-MT
A magnetically
levitated hybrid
turbo pump
Five active axes
Rotor position control in 5 directions.
Unbalanced force rejection control
Lowest possible levels of noise and vibration.
Compensation for any unbalance of the rotor.
Maintenance free
Inert gas purge
Eliminate corrosion of the motor and magnetic bearing coils.
Battery free
In case of a power failure, the pump motor acts like a generator
to transform the rotor energy into electrical power to supply the
electronic.
ATH 500 M with
integrated electronic
Electrical power supply 48 V DC (accessory) A 510.
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

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A 150
Introduction to the ATH 500 M-MT
GB 03360 - Edition 03 - May 11
ATH 500 M Model For OEM version, see its own specific technical sheet.
Integrated
electronic
23
1
6 7
54 8
9
1
Exhaust port DN25 ISO KF
2
Integrated purge (50 sccm) 1/8 ‘‘BSPP female equipped with a filter
B 330
3
Water fittings 1/8 NPT female B 340
4
Service Used by service and HHR.
5
RS232 or RS485 serial links The serial link RS 232 or RS 485 is used
to monitor and control the pump from a
computer.
The serial link RS 485 allows the installation
and the control of many pumps in a network.
B 450 and C 800
6
Remote connector The remote control connector is used for
the remote control of START/STOP/STANDBY
functions to allow the copy of pump status
via dry contact outputs. B 430
7
Pump status indicator
lights C 200
8
Power supply connector Used to plug a 48 VDC power supply
B 400
Profibus- Devicenet
connectors
Industrial network connectors and indicator
areas (Profibus - Devicenet)
9
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03360 - Edition 03 - May 11
3/4
A 150
Introduction to the ATH 500 M-MT
ATH 500 MT Model
1
Exhaust port DN40 ISO KF
2
Integrated purge (50 sccm) 1/4 VCR B 330
3
Water fittings 1/4 double ring B 340
4
Service Idem ATH 500 M
5
RS232 or RS485 serial links Idem ATH 500 M
6
Remote connector Idem ATH 500 M
7
Pump status indicator
lights Idem ATH 500 M
8
Power supply connector Idem ATH 500 M
9
Heater band
The heating band keeps the inner surface of
the pump up to 65 °C to avoid condensation
effects. The temperature is controlled by the
controller.
Supply heater band Connect the heater band to the controller
11
Supply water valve Connect the water valve to the controller
10
Water out
Water in
1
2
3
4
5
67
8
10
11
3
9
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A 150
Introduction to the ATH 500 M-MT
GB 03360 - Edition 03 - May 11
Air cooled
ATH 500 M Model
The fan must be supplied by an external power supply 48 VDC,
either ordered as an accessory ( A510), or provided by the
customer.
Fan
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

5 active axis The mobile assembly formed by the turbo rotor and the shaft is
known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has 5 axes of freedom monitored by 5 active
magnetic bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
+
Correction
+
Position
sensor
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded, the
controller corrects differences to bring the rotor back to its
optimum position, by varying the current in electro-magnets.
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
A 200
Control loop of the pump
1/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

Unbalanced force
rejection control
The unbalanced force rejection control is an electronic
function, that monitors the rotor position, allowing it to rotate
in its own axis of inertia.
Changes in the rotor balance, due to deposit built-up during
the life time of the pump, are automatically compensated by
the unbalanced force rejection control.
It ensures the lowest possible levels of noise and vibration.
Stator geometric axis
Rotor geometric axis
Rotor inertia axis
A 200
Control loop of the pump
2/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03361 - Edition 02 - June 09
1/3
A 210
The pump operating principle
Pumping principle The ATH 500 M pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section.
The turbomolecular section provides high pumping speeds and
high ultimate vacuum. The molecular drag section provides a high
compression ratio and extends the forevacuum tolerance up to the
range of mbar.
Dry back-up bearings
Exhaust
Cooling
Magnetic levitated
bearings
Motor
Molecular drag
Gas purge*
* The gas purge provides an excellent protection for corrosive
applications and the rotor cooling.
Inlet
Flow restriction
Rotor
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A 210
The pump operating principle
GB 03361 - Edition 02 - June 09
The hybrid-
turbo pump in an
installation
At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
The ATHM compression ratio is set by the design. The pumping
performances depend on the primary pump and on the installation.
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE ATMOSPHERIC
PRESSURE
Primary
pumping
Primary vacuum
Secondary vacuum
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03361 - Edition 02 - June 09
3/3
A 210
The pump operating principle
The back-up ball
bearings
They are dry-lubricated ball bearings.
They are never used in normal operation, since the rotor is not in
contact with the ball bearings.
The back-up bearings are only used to protect the pump in
accidental air in-rushes, accidental shocks or power failure.
No maintenance By design, the pump doesn’t include parts liable to wear and doesn’t
need preventive maintenance. However, the back-up ball bearings
used in case of accidental shut-downs have to be changed when
the controller indicates it: the percentage of landing time to be
deducted depends on the number of incidents. For maximum life
time of the rotors, see ( D 150).
Battery free In case of a power failure, the motor acts like a generator, supplying
enough power for the magnetic bearings.
When the rotation speed is too low, the pump shuts down and lands
on the back-up ball bearings.
Variation of the
pump rotational
speed
The ATHM pump rotation speed can be selected and set between
a minimum speed and the maximum speed. This makes it possible
to optimize pumping characteristics according to each customer
application (for example, high pressure pumping ( A 400).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set between the
low speed value and the maximum speed.
- nominal speed preselected at factory.
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03362 - Edition 03 -- Jan 12
1/4
A 400
Technical characteristics of the pumps
The performances
of the pumps
Characteristics UNITS ATH 500 M ATH500MT
Flange (in) DN 100 ISO-F DN 160 ISO-F DN 160 ISO-F
Flange (out) DN 25 ISO-KF DN 40 ISO-KF
N2 purge flange 1/8 BSPP (ISO 228) 1/4VCR
Rotation speed rpm 50000
Standby speed rpm (Hz) 15 000 (250) to 50 000 (833)
Pumping speed *
N2 l/s 330 520
Ar l/s 300 500
He l/s 280 350
H2 l/s 170 190
Compression ratio (ISO 5302)
N2 2x107
Ar 8x106
He 1x104
H2 2x102
Inlet vacuum max (3)
N2 mbar 1 0.04
Ar mbar 1.0 0,02
He mbar 10 > 0.1
H2 mbar 10 > 0.1
Gas throughput (3) **
N2 SCCM 4000 500
Ar SCCM 2500 300
He SCCM > 10000 > 1000
He SCCM > 10000 > 1000
Maximum continuous exhaust pressure
(4)
N2 Torr/mbar 1,28/1,7 1,35/1,8 1,28/1,7
Maximum permanent premissible
exhaust pressure (4)
N2 Torr/mbar 3,5/4,65 1,28/1,7
Maximum heating temperature °C N/A 65
Leaktightness mbar/l/s <5.10-8
Ultimate pressure (1) Torr/mbar < 1.10-8
Maximum baking temperature °C 120
Recommanded purge flow rate SCCM 50
Sound level : EN ISO 2151 (1m distance) at
nominal speed
dBA < 42
Vibration level at nominal speed μm < 0.01
Mounting orientation Any
Pump Protection Index better than IP 42
(1) With ISO-K, ISO-F flange, better with CF-F flange.
(3) With a low exhaust pressure, depends on external conditions of water temperature, water flow, environment
temperature.
(4) Reduced max. flow, ultimate pressure without flow speed loss ; depends on environment conditions.
* Without inlet sreen
** At full rotational speed (cold for M, at 65°C for MT) water temperature = 25 °C
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A 400
Technical characteristics of the pumps
GB 03362 - Edition 03 - Jan 12
Characteristics UNITS ATH 500 M ATH500MT
Run-up TIME mn < 2.0
Power consumption max. starting up power watt 560
Nominal power watt 100
Standby power watt < 50
Controller power supply 48 VDC
Maximum leakage current mA not applicable ; polarity connected to the
earth
Recommanded cooling water flow rate l/hour 60
Maximum water line pressure bar 7
Cooling water temperature (5) °C 15 - 25
OBC (on-board-control) control option
Profibus in option no
Remote yes
Devicenet no
Weight kg (lb) 17 (37) 18(39)
Recommended backing pump ACP 40
Air cooling option yes no
Environmental conditions :
Use of the product
Ambient operating temperature
Maximum altitude
Transient overvoltages typically present on
the mains supply
Pollution degree applicable
Maximum relative humidity
Accept temporary overvoltages on the
power line
•
•
•
•
•
•
•
-
°C
m/ft
-
-
-
Indoor only
5 < T < 45
2000/6562
Category II
2
Maximum relative humidity of 80 % for tem-
perature until 31°C with a linear decrease
until 50 % relative humidity at 40°C
Three phase motor characteristics
(Max. values) :
Voltage between phases
Supply frequency
Phase current
•
•
•
Vrms
Hz
A
29
1666
9.5
The performances
of the pumps
(5) > 25 °C : apply a derating. Change the operating conditions to reduce the nominal power. Contact the Customer Service.
Value for pump and controller. Not all the leakage current is necessary evacuated through the earth wire; it depends on
the pump earth connection regarding the equipment to which the pump is connected.
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

A 400
Technical characteristics of the pumps
GB 03362 - Edition 03 - Aug. 11
3/4
Dimensions
mm (inch)
ATH 500M
(7.09)180
(4.05)
103
(8.94)227
(5.94)151
42°
CG1
E
D
J
CG
H
K
L
62 MAXI
(2.44)
d2
90
90
(5.98)152
35
55
75,8 (2.98)
75,8
(2.98)
Inlet flange E H J K L D d1 d2 N CG CG1
DN 160 ISO F mm 16 159.3 182.5 182.2 254.9 225 200 11 8 112.6 9.7
inch 0.63 6.27 7.18 7.17 9.94 8.86 7.87 0.43 - 4.43 0.38
DN 160 ISO K mm 12 159.3 182.5 182.2 254.9 180
---
128.6 11.3
inch 0.47 6.27 7.18 7.17 9.94 7.09
---
5.06 0.44
DN 160 CF-F mm 20 180.3 203.5 203.2 275.9 198 181.1 8.6 20 114.1 10.1
inch 0.79 7.1 8.01 8 10.76 7.79 7.13 0.34 - 4.49 0.39
DN 100 ISO K mm 12 199.3 222.5 222.2 294.5 130
---
116.1 10.2
inch 0.47 7.85 8.76 8.75 11.48 5.12
---
4.57 0.4
DN 100 CF-F mm 16 209.3 232.5 232.2 304.9 148.5 130.2 8.6 16 109.5 9.8
inch 0.63 8.24 9.15 9.14 11.89 5.85 5.13 0.34 - 4.31 0.39
d1
ELECTRONIC FRONT PANEL
in mm (inches)
VERSION REMOTE
N = Nr equidistant holes
3 x M8
FOR HANDLING EQUIPMENT
LED Rotating
|at speed
|stand by
|fault
Electrical power supply 48 VDC |A+
|B-
|C PE
SUB D 15HD / Remote dry contact control
LED / Power supply
SUB D 9 / RS 232 - 485
RJ 45 / Service and HHR
EXHAUST
DN 25 ISO KF
PURGE FITTING
1/8 BSPP FEMALE (ISO 228)
IF DISMONTED FILTER
WATER COOLIG IN/OUT
1/8 NPT FEMALE
FACE : Z
WATER COOLING IN/OUT
1/8 NPT FEMALE
center of gravity
135
40
141
93
155
AIR COOLING VERSION
25°
M4 holes
to connect
the pump
to the
hearth
(on D152)
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT

GB 03362 - Edition 03 - Aug. 11
A 400
Technical characteristics of the pumps
4/4
J
J’
D
L
72.5 (2.85)
62 (2.44) MAXI
227 (8.94)
151 (5.94)
E
147 (5.79)
152 (5.98)
132 (5.2)
42
90
90
CG
CG1
135 (5.31) MAXI
162,6 (6.4)
30
84 (3.31)
182 (7.16)
N
x d2 on d1
+0,27
0
()
INLET PURGE GAZ
1/4 VCR
ELECTRONIC FRONT PANEL
Dimensions in mm (inches)
center of gravity
INLET WATER COOLING
TUBE 1/4"
EXHAUST
DN 40 ISO KF
WATER ELECTRICAL VALVE
LED | rotating
|at speed
|stand by
|fault
ELECTRICAL POWER SUPPLY 48 VDC | A+
| B-
| C PE
D-SUB 15HD / REMOTE DRY CONTACT CONTROL
HEATER CABLE
D-SUB 9/RS 232-485
RJ 45 / HHR & ADIXEN SERVICE
LED POWER
OUTLET WATER COOLING
TUBE 1/4"
DN 160 ISO F
WITH INLET MESH SCREEN
WATER CABLE
Ra1.6
25°
M4 hole to connect the
pump to the earth
on D152
Dimensions
mm (inch)
ATH 500 MT
Inlet flange E H J K L D d1 d2 N CG CG1
DN 160 ISO F mm 16 159.3 182.5 182.2 254.9 225 200 11 8 112.6 9.7
inch 0.63 6.27 7.18 7.17 9.94 8.86 7.87 0.43 - 4.43 0.38
DN 160 ISO K mm 12 159.3 182.5 182.2 254.9 180 ---
128.6 11.3
inch 0.47 6.27 7.18 7.17 9.94 7.09 ---
5.06 0.44
DN 160 CF-F mm 20 180.3 203.5 203.2 275.9 198 181.1 8.6 20 114.1 10.1
inch 0.79 7.1 8.01 8 10.76 7.79 7.13 0.34 - 4.49 0.39
DN 100 ISO K mm 12 199.3 222.5 222.2 294.5 130 ---
116.1 10.2
inch 0.47 7.85 8.76 8.75 11.48 5.12 ---
4.57 0.4
DN 100 CF-F mm 16 209.3 232.5 232.2 304.9 148.5 130.2 8.6 16 109.5 9.8
inch 0.63 8.24 9.15 9.14 11.89 5.85 5.13 0.34 - 4.31 0.39
adixen Vacuum Products - Operating instructions - ATH 500 M-MTadixen Vacuum Products - Operating instructions - ATH 500 M-MT