Pfeiffer Vacuum HIPACE 10 User manual

OPERATING INSTRUCTIONS
EN
Original
HIPACE 10 ►
Turbopump

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Product variants affected 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Pictographs 7
1.3.2 Stickers on the product 7
1.3.3 Abbreviations 8
1.3.4 Instructions in the text 9
2 Safety 10
2.1 General safety instructions 10
2.2 Safety instructions 10
2.3 Safety precautions 13
2.4 Limits of use of the product 14
2.5 Proper use 15
2.6 Foreseeable improper use 15
3 Product description 16
3.1 Identifying the product 16
3.1.1 Product types 16
3.1.2 Product features 16
3.2 Functional properties 16
3.2.1 Cooling 17
3.2.2 Rotor bearing 17
3.2.3 Drive 17
3.3 Shipment 17
4 Transportation and Storage 18
4.1 Transport 18
4.2 Storage 18
5 Installation 19
5.1 Preparatory work 19
5.2 Connecting the high vacuum side 19
5.2.1 Requirements for the dimensioning of a counter flange 19
5.2.2 Consider the earthquake protection 20
5.2.3 Using a mesh screen 20
5.2.4 Mounting orientations 21
5.2.5 Attaching ISO-KF flange to DN 25 21
5.3 Connecting the fore-vacuum side 22
5.4 Connecting accessories 23
5.5 Connecting the electrical supply 24
5.5.1 Grounding the vacuum pump 24
5.5.2 Connecting the power supply pack 24
6 Operation 26
6.1 Commissioning 26
6.2 Operating modes 27
6.2.1 Operation without operating unit 27
6.2.2 Operation via multi-function connection "X3" 27
6.2.3 Operation via Pfeiffer Vacuum display and control unit 27
6.2.4 Operation via field bus 27
6.3 Switching on the turbopump 28
6.4 Operation monitoring 28
6.4.1 Operating mode display via LED 28
Table of contents
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6.4.2 Temperature monitoring 28
6.5 Switching off and venting 29
6.5.1 Switching off 29
6.5.2 Venting 29
7 Maintenance 30
7.1 General maintenance information 30
7.2 Maintenance intervals and responsibilities 30
7.3 Replacing the operating fluid reservoir 30
7.4 Replacing the electronic drive unit 33
7.5 Confirming the rotation speed specification 34
8 Decommissioning 36
8.1 Shutting down for longer periods 36
8.2 Recommissioning 36
8.3 Disposing of the vacuum pump 37
9 Malfunctions 38
10 Service solutions from Pfeiffer Vacuum 41
11 Spare parts HiPace 10 43
12 Accessories 44
13 Technical data and dimensions 45
13.1 General 45
13.2 Technical data 45
13.3 Dimensions 47
Declaration of conformity 48
Table of contents
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List of tables
Tbl. 1: Product stickers..........................................................................................................8
Tbl. 2: Abbreviations used in this document..........................................................................9
Tbl. 3: Permissible ambient conditions................................................................................14
Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps...................................16
Tbl. 5: Turbopump features................................................................................................. 16
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection....
20
Tbl. 7: Behavior of the pumping speed using a mesh screen..............................................21
Tbl. 8: Preconfigured setting values as shipped..................................................................26
Tbl. 9: Behavior and meaning of the LEDS of the electronic drive unit............................... 28
Tbl. 10: Characteristic nominal rotation speeds of the turbopumps...................................... 34
Tbl. 11: Troubleshooting turbopumps....................................................................................40
Tbl. 12: Available spare parts................................................................................................43
Tbl. 13: Conversion table: Pressure units..............................................................................45
Tbl. 14: Conversion table: Units for gas throughput.............................................................. 45
Tbl. 15: HiPace 10.................................................................................................................47
List of tables
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List of figures
Fig. 1: Position of the stickers on the product........................................................................8
Fig. 2: HiPace 10 design..................................................................................................... 17
Fig. 3: Example: Secure against displacement and tipping caused by external vibrations....
20
Fig. 4: Recommended alignment of the fore-vacuum connection when using oil-sealed
backing pumps......................................................................................................... 21
Fig. 5: Flange connection for DN 25 onto DN 25 ISO-KF....................................................22
Fig. 6: Example of fore-vacuum connection on HiPace 10..................................................23
Fig. 7: Example: Accessory connection for adapter TCS 12 to TC 110.............................. 23
Fig. 8: Example: Connecting the grounding cable...............................................................24
Fig. 9: Connecting the electronic drive unit to a power supply pack....................................25
Fig. 10: Operating fluid reservoir bearing side 1....................................................................31
Fig. 11: Operating fluid reservoir bearing side 2....................................................................32
Fig. 12: Installing and removing the electronic drive unit TC 110..........................................34
Fig. 13: Spare parts HiPace 10............................................................................................. 43
Fig. 14: HiPace 10 | TC 110 | DN 25 ISO-K.......................................................................... 47
List of figures
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1 About this manual ►
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity ►
These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the
designated product and provide the most important information for safe usage of the product. The de-
scriptions comply with applicable directives. All information provided in these operating instructions refer
to the current development status of the product. The documentation remains valid as long as the cus-
tomer does not modify the product in any way.
1.1.1 Applicable documents ►
Document Number
Electronic drive unit TC 110. standard PT 0204 BN
Electronic drive unit TC 110 PB, profibus PT 0245 BN
Electronic drive unit TC 110 RS PT 0351 BN
Declaration of conformity A component of these instructions
1.1.2 Product variants affected ►
●HiPace 10, DN 25, TC 110
1.2 Target group ►
This operating instructions are aimed at all persons performing the following activities on the product:
●transport,
●setup (installation),
●usage and operation,
●decommissioning,
●maintenance and cleaning,
●storage or disposal.
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions ►
1.3.1 Pictographs ►
Pictographs used in the document indicate useful information.
Note
Tip
1.3.2 Stickers on the product ►
This section describes all the stickers on the product along with their meaning.
About this manual
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CUS
TÜV Rheinland
Oil
S/N
Mod.
HiPace 10
PM P03 960 A
- - - - - - - -
P/N
n, f
Mass
D-35614 Asslar
Made in Germany 2018/06
PM 083 373 -T
90000 1/min, 1500 Hz
1.8 kg
Rating plate
The rating plate is located beneath the high vacuum connection and
to the left of the TC adapter.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging or removing a closure
seal results in loss of the warranty.
Do not open!
before having read the
operating instructions
Nicht öffnen!
Erst Betriebsanweisung lesen
Prima d’aprire,
leggerele instruzioni d’uso
Pas ouvrir !
il faut lire d’abord
l’instruction de
service
Operating manual note
This sticker indicates that this operating manual must be read before
performing any tasks.
Protection class
The sticker describes protection class III for the product. Its place-
ment indicates the position for the ground connection.
Warning
This sticker warns against risk of injury with the high vacuum con-
nection open.
Tbl. 1: Product stickers
1
2
3
4
5
6
Fig. 1: Position of the stickers on the product ►
1 Banner with Pfeiffer Vacuum logo 4 Operating manual note
2 Closure seal 5 Rating plate
3 Warning sign "Risk of injury with high vacuum connec-
tion open"
6 Information regarding ground connection
1.3.3 Abbreviations ►
Abbreviation Meaning in this document
dDiameter value (in mm)
DC Direct current
About this manual
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Abbreviation Meaning in this document
DCU Display Control Unit (Pfeiffer Vacuum display and control unit).
DN Nominal diameter as size description
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Illuminating diode
PE Earthed conductor (protective earth)
[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
S1 S1 switch on power supply pack
TTemperature (in °C)
TC Turbopump electronic drive unit (turbo controller)
TCS Interface adapter
RS-485 Communications interface
TPS Voltage supply (turbo power supply)
VV Fore-vacuum flange, fore-vacuum connection
X3 15-pole D-Sub connecting socket on the turbopump electronic drive unit
Tbl. 2: Abbreviations used in this document
1.3.4 Instructions in the text ►
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
About this manual
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2 Safety ►
2.1 General safety instructions ►
This document includes the following four risk levels and one information level.
DANGER
Imminent danger
Indicates a hazardous situation which, if not avoided, will result in death or serious injury.
►Instructions on avoiding the hazardous situation
WARNING
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in death or serious injury.
►Instructions on avoiding the hazardous situation
CAUTION
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.
►Instructions on avoiding the hazardous situation
NOTICE
Danger of property damage
Notice is used to address practices not related to physical injury.
►Instructions on avoiding property damage
Notes, tips or examples indicate important information on the product or on this
document.
2.2 Safety instructions ►
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING ►
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
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Risks during installation
DANGER ►
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severest injuries up to
death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010
and IEC 60950.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING ►
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
Opening the high vacuum flange enables access to sharp-edged parts. A manual rotation of the rotor
increases the danger situation. There is a risk of cut injuries up to a piece of your body being severed
of (e.g. finger tips). There is a risk of hair and loose clothing being drawn in. Objects dropping into the
turbopump will destroy the pump in subsequent operation.
►Remove the original protective cover only immediately prior to connecting the high vacuum
flange.
►Never reach into the high vacuum connection.
►Wear protective gloves during installation.
►Never start the turbopump operation while the vacuum connections are open.
►Always carry out the mechanical installation before connecting the electrics.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING ►
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
WARNING ►
Risk of danger to life through missing mains disconnection device
The turbopump and electronic drive unit are not equipped with a mains disconnection device (mains
switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING ►
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
Safety
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Risks during operation
WARNING ►
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING ►
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
WARNING ►
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
►Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
►Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
WARNING ►
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
Risks during maintenance and decommissioning
WARNING ►
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
►Before performing all work, switch off the main switch.
►Wait until the turbopump comes to a standstill (rotation speed =0).
►Remove the mains plug from the device.
►Secure the device against unintentional restarting.
Safety
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WARNING ►
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING ►
Risk of poisoning from contact with harmful substances
The operating fluid reservoir and parts of the turbopump may contain toxic substances from pumped
media.
►Decontaminate affected parts before carrying out maintenance work.
►Prevent health hazards or environmental impacts with adequate safety precautions.
►Observe the operating fluid safety data sheet.
►Dispose of the operating fluid reservoir according to applicable regulations.
Risks in the event of malfunctions
WARNING ►
Danger to life from the turbopump breaking away in the event of a fault
Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it will tear off. The energy released in this way can propel the en-
tire turbopump or shattered pieces from its interior through the surrounding area. Potentially danger-
ous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equip-
ment damage.
►Follow the installation instructions for this turbopump.
►Observe the requirements regarding stability and design of the counter flange.
►Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING ►
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
2.3 Safety precautions ►
Duty to provide information on potential dangers ►
The product holder or user is obliged to make all operating personnel aware of dan-
gers posed by this product.
Every person who is involved in the installation, operation or maintenance of the
product must read, understand, and adhere to the safety-related parts of this docu-
ment.
Safety
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Infringement of EU conformity due to modifications to the product ►
The Declaration of Conformity from the manufacturer is no longer valid if the opera-
tor changes the original product or installs additional equipment.
●Following installation into a system, the operator is required to check and re-
evaluate as necessary the conformity of the overall system in the context of the
relevant EU Directives before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
►Never put the device into operation with the high vacuum connection open.
►Keep lines and cables away from hot surfaces (> 70°C).
►Never fill or operate the unit with cleaning agents or cleaning agent residues.
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product ►
Installation location weatherproof (internal space)
Air pressure 770 hPa to 1060 hPa
Installation altitude max. 5000 m
Rel. air humidity max. 80%, at T <31°C,
up to max. 50% at T <40°C
Protection class III
Excess voltage category II
Permissible protection class IP54
Degree of contamination 2
Ambient temperature 5 ℃ to 35 °C
Permissible surrounding magnetic field 3 mT
Maximum irradiated thermal output 0.6 W
Maximum permissible rotor temperature of the turbopump 90 °C
Tbl. 3: Permissible ambient conditions
Notes on ambient conditions ►
The specified permissible ambient temperatures apply to operation of the turbo-
pump at maximum permissible backing pressure or at maximum gas throughput,
depending on the cooling type. The turbopump is intrinsically safe thanks to redun-
dant temperature monitoring.
●The reduction in backing pressure or gas throughput permits operation of the
turbopump at higher ambient temperatures as well.
●If the maximum permissible operating temperature of the turbopump is exceed-
ed, the electronic drive unit first reduces the drive output and switches it off
where necessary.
Safety
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2.5 Proper use ►
►Use the turbopump only for generating vacuum.
►Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
►Use the turbopump only in closed indoor areas.
►Use the turbopump only for the evacuation of dry and inert gases.
2.6 Foreseeable improper use ►
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:
●Establishing the voltage supply without correct installation
●Installation with non-specified fastening material
●Pumping explosive media
●Pumping of corrosive media
●Pumping of condensing vapors
●Pumping of fluids
●Pumping of dust
●Operation with impermissible high gas throughput
●Operation with impermissible high fore-vacuum pressure
●Operation with excessively high irradiated heat output
●Operation in impermissible high magnetic fields
●Operation in an incorrect gas mode
●Venting with impermissible high venting rates
●Use for pressure generation
●Use in areas with ionizing radiation
●Operation in explosion-hazard areas
●Use in systems in which sporadic loads and vibrations or periodic forces act on the device
●The causing of hazardous operating conditions by a presetting on the electronic drive unit that is
contrary to the process
●Use of accessories or spare parts that are not listed in these instructions
Safety
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3 Product description ►
3.1 Identifying the product ►
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
►Learn about certifications through test seals on the product or at www.tuvdotcom.com with com-
pany ID no. 000021320.
3.1.1 Product types ►
The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the
family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an
additional feature description.
Family Size/model Property, attribute, feature
HiPace 10 to 2800 none = Standard version
mini = Compact version
U = Overhead version
C = Corrosive gas version
P = Process
M = Active magnetic bearing
T = Temperature management
E = High efficiency
H = high compression
I = ion implantation
Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps
3.1.2 Product features ►
Feature Version
HV flange DN 25 DN 40
Flange material Aluminium Aluminium
Tbl. 5: Turbopump features
3.2 Functional properties ►
The turbopump forms a compact unit with the electronic drive unit TC 110. The Pfeiffer Vacuum power
supply packs serve as voltage supply.
Product description
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7
8 9
6
1 2
5
4
3
Fig. 2: HiPace 10 design ►
1 Electronic drive unit TC 110 6 Fore-vacuum connection adapter
2 Screw caps (Bearing sides) 7 Protective cover (fore-vacuum coonection)
3 Pump housing 8 Ground terminal
4 Fixing holes 9 Multifunction connection "X3"
5 Protective cover (high vacuum connection)
3.2.1 Cooling ►
●Convection cooling
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.2.2 Rotor bearing ►
Ball bearing-mounted turbopump
●One ball bearing is fitted at each shaft end in the fore-vacuum area respectively.
Permanent lubrication and performance of the ball bearings is ensured by two operating fluid reservoirs.
3.2.3 Drive ►
Various connection panels are available for the integrated electronic drive unit, depending on the re-
spective application:
●TC 110 in standard design
●TC 110 PB for Profibus
●TC 110 RS with RS-485 interface
3.3 Shipment ►
●Turbopump with electronic drive unit
●Protective cover for the high vacuum connection
●Protective cover for the fore-vacuum connection
●Operating instructions
Product description
17/50

4 Transportation and Storage ►
4.1 Transport ►
WARNING ►
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Pfeiffer Vacuum recommends keeping the transport packaging and original protec-
tive cover.
Instructions for safe transport
1. Transport the turbopump only within the permissible temperature limits.
2. Observe weight specified on the rating plate.
3. Where possible, always transport or ship the turbopump in its original packaging.
4. Always carry the turbopump with both hands.
5. Remove the protective cover only immediately prior to installation.
4.2 Storage ►
Pfeiffer Vacuum recommends storing the products in their original transport pack-
aging.
Storing the turbopump
1. Close all flange openings with the original protective caps.
2. Close all other connections (e.g. venting connection) with the respective original parts.
3. Store the turbopump only indoors within the permissible temperature limits.
4. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
Transportation and Storage
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5 Installation ►
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blade) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Preparatory work ►
WARNING ►
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
Opening the high vacuum flange enables access to sharp-edged parts. A manual rotation of the rotor
increases the danger situation. There is a risk of cut injuries up to a piece of your body being severed
of (e.g. finger tips). There is a risk of hair and loose clothing being drawn in. Objects dropping into the
turbopump will destroy the pump in subsequent operation.
►Remove the original protective cover only immediately prior to connecting the high vacuum
flange.
►Never reach into the high vacuum connection.
►Wear protective gloves during installation.
►Never start the turbopump operation while the vacuum connections are open.
►Always carry out the mechanical installation before connecting the electrics.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
General notes for the installation of vacuum components ►
►Choose an installation location that permits access to the product and to supply lines at all times.
►Observe the ambient conditions given for the area of use.
►Provide the highest possible level of cleanliness during assembly.
►Ensure that flange components during installation are grease-free, dust-free and dry.
Select the installation location
1. Observe the instructions for transport to the installation location.
2. Make sure that there are sufficient cooling options for the turbopump.
3. Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.
4. Install suitable shielding so that the irradiated thermal output does not exceed the permissible val-
ues when high temperatures occur due to the process.
5. Observe the permissible temperatures for the vacuum connection.
5.2 Connecting the high vacuum side ►
5.2.1 Requirements for the dimensioning of a counter flange ►
NOTICE ►
Risk of damage due to incorrect counter flange design
Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing,
even when properly attached. This can produce leakage or negative changes in running characteris-
tics.
►Adhere to the shape tolerances for the counter flange.
►Observe the maximum flatness deviations over the entire surface.
Installation
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The assembly of vertical superstructural parts on the high vacuum connection is the
responsibility of the operating company. The loading capacity of the high vacuum
flange is specific for the turbopump used. The total weight of superstructural parts
must not exceed the maximum values specified.
If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must
be absorbed. The installation elements for turbo pumps are special designs by Pfeiffer Vacuum.
Maximum tor-
que occur-
ring in the
event of a
burst1)
Maximum permis-
sible axial load on
the high vacuum
flange2)
Flatness Minimum tensile
strength of the
flange material in
all operating con-
ditions
Engage-
ment depth
of the fixing
screws
Maximum
permissible
surrounding
magnetic
field
Maximum
permissible
irradiated
thermal out-
put
80 Nm 200 N
(equivalent to 20 kg)
± 0.05 mm 170 N/mm22.5 x d 3.0 mT 0.6 W
270 N/mm21.5 x d
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection
5.2.2 Consider the earthquake protection ►
NOTICE ►
Vacuum pump damage caused by external vibrations
In the event of earthquakes or other external vibrations, there is the risk of the rotor coming into con-
tact with the safety bearings, or the housing wall touching the turbopump. This can produce mechani-
cal loads up to and including destruction of the turbopump.
►Make sure that all flange and safety connections absorb the resulting forces.
►Secure the vacuum chamber against displacement or tipping.
VACUUM CHAMBER
Fig. 3: Example: Secure against displacement and tipping caused by external vibrations ►
Safety connection, customer-side
5.2.3 Using a mesh screen ►
Pfeiffer Vacuum centering rings with mesh screen in the high vacuum flange protect the turbopump
against foreign matter from the chambers. The pumping speed of the turbopump reduces according to
the passage guide values and the size of the high vacuum flange.
1) The theoretically calculated torque in the event of a burst (rotor shaft breakage) according
to ISO 27892 was not reached in any experimental test.
2) A one-sided load is not permitted.
Installation
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