Pfeiffer Vacuum Hipace 80 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 80
Turbopump

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/56

Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Product variants affected 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 9
2 Safety 10
2.1 General safety instructions 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of the product 14
2.5 Proper use 15
2.6 Foreseeable improper use 15
2.7 Personnel qualification 15
2.7.1 Ensuring personnel qualification 16
2.7.2 Personnel qualification for maintenance and repair 16
2.7.3 Advanced training with Pfeiffer Vacuum 16
3 Product description 17
3.1 Function 17
3.1.1 Cooling 17
3.1.2 Rotor bearing 17
3.1.3 Drive 17
3.2 Scope of delivery 18
3.3 Identifying the product 18
3.3.1 Product types 18
3.3.2 Product features 18
4 Transportation and Storage 19
4.1 Transport 19
4.2 Storage 19
5 Installation 20
5.1 Preparatory work 20
5.2 Connecting the high vacuum side 20
5.2.1 Requirements for the dimensioning of a counter flange 20
5.2.2 Considering earthquake protection 21
5.2.3 Using a splinter shield or protective screen 22
5.2.4 Using the vibration compensator 22
5.2.5 Mounting orientations 23
5.2.6 Installation of ISO-KF flange 23
5.2.7 Attaching ISO-K flange onto ISO-K 24
5.2.8 Installation of ISO-K flange onto ISO-F 24
5.2.9 Attaching CF flange to CF-F 25
5.3 Connecting the fore-vacuum side 27
5.4 Connecting accessories 28
5.5 Connecting the electrical supply 29
5.5.1 Earthing the turbopump 29
5.5.2 Establishing the electric connection 29
6 Operation 31
Table of contents
3/56

6.1 Commissioning 31
6.2 Operating modes 32
6.2.1 Operation without operating unit 32
6.2.2 Operation via multi-function connection "X3" 32
6.2.3 Operation via Pfeiffer Vacuum display and control unit 32
6.2.4 Operation via field bus 32
6.3 Switching on the turbopump 33
6.4 Operation monitoring 33
6.4.1 Operating mode display via LED 33
6.4.2 Temperature monitoring 34
6.5 Switching off and venting 34
6.5.1 Switching off 34
6.5.2 Venting 34
7 Maintenance 36
7.1 General maintenance information 36
7.2 Maintenance intervals and responsibilities 36
7.3 Replacing the operating fluid reservoir 37
7.3.1 Removing the operating fluid reservoir 37
7.3.2 Installing the operating fluid reservoir 38
7.4 Replacing the electronic drive unit 39
7.5 Confirming the rotation speed specification 40
8 Decommissioning 42
8.1 Shutting down for longer periods 42
8.2 Recommissioning 42
8.3 Disposing of the vacuum pump 43
9 Malfunctions 44
10 Service solutions from Pfeiffer Vacuum 46
11 Spare parts HiPace 80 48
12 Accessories 49
12.1 Accessory information 49
12.2 Ordering accessories 49
13 Technical data and dimensions 51
13.1 General 51
13.2 Technical data 51
13.3 Dimensions 53
Declaration of conformity 55
Table of contents
4/56

List of tables
Tbl. 1: Abbreviations used in this document 9
Tbl. 2: Permissible ambient conditions 15
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 18
Tbl. 4: Turbopump features 18
Tbl. 5: Requirements for the dimensioning of customer-specific high vacuum con-
nection
21
Tbl. 6: Effect of splinter shield or protective screen on pumping speed 22
Tbl. 7: Factory setting of the electronic drive unit for turbopumps when delivered 31
Tbl. 8: Behavior and meaning of the LEDs on the electronic drive unit 34
Tbl. 9: Factory settings for delayed venting in turbopumps 35
Tbl. 10: Characteristic nominal rotation speeds of the turbopumps 41
Tbl. 11: Troubleshooting turbopumps 45
Tbl. 12: Overview of the spare parts available for the HiPace 80 48
Tbl. 13: Accessories 50
Tbl. 14: Conversion table: Pressure units 51
Tbl. 15: Conversion table: Units for gas throughput 51
Tbl. 16: Technical data for HiPace 80 | 24 V 53
List of tables
5/56