Pfeiffer Vacuum HiPace 300 P User manual

OPERATING INSTRUCTIONS
EN
Original
HIPACE 300 P
Turbopump

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Related documents 7
1.1.2 Product variants affected 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
2 Safety 10
2.1 General safety instructions 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of the product 14
2.5 Proper use 15
2.6 Foreseeable improper use 15
3 Product description 17
3.1 Function 17
3.1.1 Cooling 17
3.1.2 Rotor bearing 17
3.1.3 Drive 18
3.2 Shipment 18
3.3 Identifying the product 18
3.3.1 Product types 18
3.3.2 Product features 18
4 Transportation and Storage 19
4.1 Transport 19
4.2 Storage 19
5 Installation 20
5.1 Preparatory work 20
5.2 Connecting the high vacuum side 20
5.2.1 Requirements for the dimensioning of a counter flange 20
5.2.2 Considering earthquake protection 21
5.2.3 Using a splinter shield or protective screen 22
5.2.4 Using the vibration compensator 22
5.2.5 Mounting orientations 22
5.2.6 Attaching ISO-K flange onto ISO-K 23
5.2.7 Attaching ISO-K flange to ISO-F 23
5.2.8 Attach ISO-F flange to ISO-F 25
5.2.9 Fastening CF flange to CF-F 26
5.3 Connecting the fore-vacuum side 27
5.4 Cooling water connection 28
5.5 Connecting accessories 30
5.5.1 Connecting accessories to the turbopumps 30
5.5.2 Connecting the venting valve 31
5.5.3 Connecting the air cooling 31
5.5.4 Connecting sealing gas 32
5.5.5 Installing a heating jacket 32
5.6 Connecting the electrical supply 33
5.6.1 Earthing the pump 34
5.6.2 Create electrical connection 34
Table of contents
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6 Operation 36
6.1 Commissioning 36
6.2 Operating modes 37
6.2.1 Operation without operating unit 37
6.2.2 Operation via multi-function connection "remote" 37
6.2.3 Operation via connection "E74" 37
6.2.4 Operation via Pfeiffer Vacuum display and control unit 37
6.2.5 Operation via field bus 37
6.3 Switching on the turbopump 38
6.4 Operation monitoring 38
6.4.1 Operating mode display via LED 38
6.4.2 Temperature monitoring 39
6.5 Switching off and venting 39
6.5.1 Switching off 39
6.5.2 Venting 40
7 Maintenance 41
7.1 General maintenance information 41
7.2 Maintenance intervals and responsibilities 41
7.3 Replacing the operating fluid reservoir 41
7.4 Replacing the electronic drive unit 43
7.5 Confirming the rotation speed specification 44
8 Decommissioning 46
8.1 Shutting down for longer periods 46
8.2 Recommissioning 46
8.3 Disposing of the vacuum pump 47
9 Malfunctions 48
10 Service solutions from Pfeiffer Vacuum 50
11 Spare parts HiPace 300 P 52
12 Accessories 53
13 Technical data and dimensions 54
13.1 General 54
13.2 Technical data 54
13.3 Dimensions 58
Declaration of conformity 59
Table of contents
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List of tables
Tbl. 1: Abbreviations used in this document..........................................................................9
Tbl. 2: Permissible ambient conditions................................................................................15
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps...................................18
Tbl. 4: Turbopump features................................................................................................. 18
Tbl. 5: Requirements for the dimensioning of customer-specific high vacuum connection....
21
Tbl. 6: Reduction of the pumping speed when using a splinter shield or protective screen....
22
Tbl. 7: Requirements on the cooling water composition......................................................29
Tbl. 8: Requirements on the cooling water connection........................................................29
Tbl. 9: Factory pre-set accessory connections on the electronic drive unit......................... 30
Tbl. 10: Tightening torque for heating jacket fastening screws............................................. 33
Tbl. 11: Factory setting of the electronic drive unit when delivered.......................................36
Tbl. 12: Behavior and meaning of the LEDS of the electronic drive unit............................... 39
Tbl. 13: Factory settings for delayed venting of turbopumps.................................................40
Tbl. 14: Characteristic nominal rotation speeds of the turbopumps...................................... 44
Tbl. 15: Troubleshooting turbopumps....................................................................................49
Tbl. 16: Overview of the spare parts available for the HiPace 300 P.................................... 52
Tbl. 17: Conversion table: Pressure units..............................................................................54
Tbl. 18: Conversion table: Units for gas throughput.............................................................. 54
Tbl. 19: Technical data for HiPace 300 P | 24 V....................................................................56
Tbl. 20: Technical data for HiPace 300 P | 48 V....................................................................57
List of tables
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List of figures
Fig. 2: Position of the labels on the product.......................................................................... 9
Fig. 3: Design 300 P (example DN 100 ISO-K and DN 100 CF-F)......................................17
Fig. 4: Example: Safety connections................................................................................... 21
Fig. 5: Recommended alignment when using oil-sealed backing pumps............................22
Fig. 6: Flange connection ISO-K to ISO-F, bracket screws.................................................23
Fig. 7: Flange connection ISO-K with ISO-F, hexagon head screw and tapped hole......... 24
Fig. 8: Flange connection ISO-K with ISO-F, stud screw and tapped hole......................... 24
Fig. 9: Flange connection ISO-K with ISO-F, stud screw and through hole........................ 24
Fig. 10: Flange connection ISO-F, hexagon head screw and tapped hole............................25
Fig. 11: Flange connection ISO-F, stud screw and tapped hole............................................25
Fig. 12: Flange connection ISO-F, stud screw and through hole.......................................... 26
Fig. 13: Flange connection CF-F, hexagon head screw and through hole............................26
Fig. 14: Flange connection CF-F, stud screw and tapped hole............................................. 26
Fig. 15: Flange connection CF-F, stud screw and through hole............................................27
Fig. 16: Example of fore-vacuum connection on HiPace 300................................................28
Fig. 17: Connecting the cooling water supply........................................................................29
Fig. 18: Connecting the air cooling........................................................................................31
Fig. 19: Connection of the heating jacket.............................................................................. 33
Fig. 20: Example: Connecting the grounding cable...............................................................34
Fig. 21: Connecting the electronic drive unit to a power supply pack....................................35
Fig. 22: Removing the operating fluid reservoir.....................................................................42
Fig. 23: Installing and removing the electronic drive unit TC 400..........................................44
Fig. 24: Spare parts HiPace 300 P........................................................................................52
Fig. 25: HiPace 300 | TC 400 | DN 100 ISO-K...................................................................... 58
Fig. 26: HiPace 300 | TC 400 | DN 100 ISO-F...................................................................... 58
Fig. 27: HiPace 300 | TC 400 |DN 100 CF-F.........................................................................58
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the
designated product and provide the most important information for safe usage of the product. The de-
scriptions comply with applicable directives. All information provided in these operating instructions refer
to the current development status of the product. The documentation remains valid as long as the cus-
tomer does not modify the product in any way.
1.1.1 Related documents
Document Number
Operating instructions, Electronic drive unit TC 400. standard PT 0203 BN
Operating instructions, Electronic drive unit TC 400 PB, profibus PT 0244 BN
Operating instructions, Electronic drive unit TC 400 E74, according to
Semi E74
PT 0302 BN
Operating instructions, Electronic drive unit TC 400 DN, DeviceNet PT 0352 BN
Operating instructions, Electronic drive unit TC 400 EC, EtherCat PT 0452 BN
Declaration of conformity A component of these in-
structions
Current documents are available from the Pfeiffer Vacuum Download Center.
1.1.2 Product variants affected
●HiPace 300 P, DN 100 ISO-K, TC 400
●HiPace 300 P, DN 100 CF-F, TC 400
●HiPace 300 P, DN 100 ISO-F, TC 400
1.2 Target group
This operating instructions are aimed at all persons performing the following activities on the product:
●transport,
●setup (installation),
●usage and operation,
●decommissioning,
●maintenance and cleaning,
●storage or disposal.
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
About this manual
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►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
C US
TÜV Rheinland
Oil
S/N
Mod.
HiPace 300 P
PM P04 710 C
- - - - - - - -
P/N
n, f
Mass Made in Germany 2018/11
PM 203 410 -T
60000 1/min, 1000 Hz
6.4 kg
D-35614 Asslar
Rating plate
The rating plate of the turbopump is located on the lower part
of the vacuum pump.
Do not open!
before having read the
operating instructions
Nicht öffnen!
Erst Betriebsanweisung lesen
Prima d’aprire,
leggerele instruzioni d’uso
Pas ouvrir !
il faut lire d’abord
l’instruction de
service
Operating instructions note
This sticker indicates that this operating instructions must be
read before performing any tasks.
Protection class
This sticker describes protection class 1 for the product. The
positioning indicates the position for the ground connection.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging or removing a clo-
sure seal results in loss of the warranty.
About this manual
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1
34
2
Fig. 2: Position of the labels on the product
1 Operating instructions note 3 Note for ground connection
2 Closure seal 4 Rating plate of the turbopump
1.3.4 Abbreviations
Abbreviation Meaning in this document
CF Flange: Metal-sealed connector in accordance with ISO 3669
dDiameter value (in mm)
DC Direct current
DCU Display Control Unit (Pfeiffer Vacuum display and control unit).
DN Nominal diameter as size description
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
PProcess execution
HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Illuminating diode
PE Earthed conductor (protective earth)
[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
S1 S1 switch on power supply pack
WAF width across flats
TTemperature (in °C)
TC Turbopump electronic drive unit (turbo controller)
TPS Voltage supply (turbo power supply)
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 1: Abbreviations used in this document
About this manual
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2 Safety
2.1 General safety instructions
This document includes the following four risk levels and one information level.
DANGER
Imminent danger
Indicates a hazardous situation which, if not avoided, will result in death or serious injury.
►Instructions on avoiding the hazardous situation
WARNING
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in death or serious injury.
►Instructions on avoiding the hazardous situation
CAUTION
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.
►Instructions on avoiding the hazardous situation
NOTICE
Danger of property damage
Notice is used to address practices not related to physical injury.
►Instructions on avoiding property damage
Notes, tips or examples indicate important information on the product or on this
document.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
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Risks during installation
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severest injuries up to
death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010
and IEC 60950.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
Safety
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WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling water supply,
there is a risk of scalding from suddenly escaping, hot cooling water at over pressure.
►Prior to installation, ensure that pressure is discharged from the cooling water system, and that it
is cooled down.
►Wear protective equipment, e.g., safety goggles and gloves.
Risks during operation
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
►Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
►Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
Risks during maintenance
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
Safety
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WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
►Wait until the turbopump comes to a standstill (rotation speed f=0).
►Switch the turbopump off properly.
►Secure the turbopump against re-start.
►Close open connections immediately following removal, using the original protective cover.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
CAUTION
Electric shock and damage to the vacuum pump and electronic drive unit due to improper dis-
connection of components
Even after the mains power is switched off, the turbopump continues to deliver electrical energy dur-
ing its run-down period. If the turbopump and electronic drive unit are disconnected prematurely,
there is the risk of electric shock from contact with live components. There is a risk of electric body
contact and, as a result, the destruction of electronic components.
►Never disconnect the turbopump and electronic drive unit from each other if power is still con-
nected or if the rotor is running.
►Monitor the turbopump rotation via the parameters available in the electronic drive unit (e.g., [P:
398]).
►Wait until the turbopump comes to a standstill (rotation speed f=0).
Risks in the event of malfunctions
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it will tear off. The energy released in this way can propel the en-
tire turbopump or shattered pieces from its interior through the surrounding area. Potentially danger-
ous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equip-
ment damage.
►Follow the installation instructions for this turbopump.
►Observe the requirements regarding stability and design of the counter flange.
►Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
Safety
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WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dan-
gers posed by this product.
Every person who is involved in the installation, operation or maintenance of the
product must read, understand, and adhere to the safety-related parts of this docu-
ment.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the opera-
tor changes the original product or installs additional equipment.
●Following installation into a system, the operator is required to check and re-
evaluate as necessary the conformity of the overall system in the context of the
relevant european Directives before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
►Never put the device into operation with the high vacuum connection open.
►Keep lines and cables away from hot surfaces (> 70°C).
►Never fill or operate the unit with cleaning agents or cleaning agent residues.
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product
Installation location weatherproof (internal space)
Air pressure 750 hPa to 1060 hPa
Safety
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Installation altitude max. 5000 m
Rel. air humidity max. 80%, at T < 31°C,
up to max. 50% at T < 40°C
Protection class III
Excess voltage category II
Permissible protection class IP54
Degree of contamination 2
Ambient temperature 5 °C to 30 °C with convection cooling with-
out gas throughput
5°C to 35°C with air cooling
5°C to 40°C with water cooling
Permissible surrounding magnetic field 5.5 mT
Maximum irradiated thermal output 2.4 W
Maximum permissible rotor temperature of the turbo-
pump
110 °C
Tbl. 2: Permissible ambient conditions
Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbo-
pump at maximum permissible backing pressure or at maximum gas throughput,
depending on the cooling type. The turbopump is intrinsically safe thanks to redun-
dant temperature monitoring.
●The reduction in backing pressure or gas throughput permits operation of the
turbopump at higher ambient temperatures as well.
●If the maximum permissible operating temperature of the turbopump is exceed-
ed, the electronic drive unit first reduces the drive output and switches it off
where necessary.
2.5 Proper use
►Use the turbopump only for generating vacuum.
►Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
►Use the turbopump only in closed indoor areas.
►Use the turbopump only for the evacuation of dry and inert gases.
►Use the turbopump for the evacuation of corrosive gases only in conjunction with sealing gas.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse.
●Transport, installation or operation of the vacuum pump in an impermissible spatial position
●Establishing the voltage supply without correct installation
●Installing the pump with unspecified mounting material
●Pumping explosive media
●Pumping corrosive media without using sealing gas
●Pumping dust without using sealing gas
●Pumping of fluids
●Operation with impermissible high gas throughput
●Operation with impermissible high fore-vacuum pressure
●Operation with excessively high irradiated heat output
●Operation in impermissible high magnetic fields
●Operation in an incorrect gas mode
Safety
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●Venting with impermissible high venting rates
●Use for pressure generation
●Use in areas with ionizing radiation
●Operation in explosion-hazard areas
●Use in systems in which sporadic loads and vibrations or periodic forces act on the device
●The causing of hazardous operating conditions by a presetting on the electronic drive unit that is
contrary to the process
●Use of accessories or spare parts that are not listed in these instructions
Safety
16/60

3 Product description
3.1 Function
The turbopump forms a compact unit with the electronic drive unit. The Pfeiffer Vacuum power supply
packs serve as voltage supply.
The feature description "P" designates turbopumps suitable for the process. They are insensitive
against dust and corrosive gases.
1312 23
14 1
15
984
7
10 65
11
Fig. 3: Design 300 P (example DN 100 ISO-K and DN 100 CF-F)
1 Pump housing, stainless steel 9 Fore-vacuum connection, DN 16 ISO-KF (with protective
cover)
2 Turbo rotor 10 Connecting panel of the electronic drive unit
3 High vacuum connection, DN 100
CF-F
11 Connecting plug for voltage supply DCin
4 Ground terminal 12 LED operating mode display
5 Pump base 13 Electronic drive unit TC 400
6 Sealing gas connection 14 Protective cover for the high vacuum connection
7 Venting screw 15 Pump housing, aluminum
8 Cooling water connection
3.1.1 Cooling
●Water cooling
●Air cooling (optional)
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.1.2 Rotor bearing
Hybrid-bearing turbopump
●High vacuum side: wear-free permanent magnetic bearing
●Fore-vacuum side: ball bearing with ceramic balls
Permanent lubrication of the rotor bearing on the fore-vacuum side is ensured by an operating fluid res-
ervoir.
Product description
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3.1.3 Drive
●Electronic drive unit TC 400
─Operating voltage 24 V DC
●Electronic drive unit TC 400
─Operating voltage 48 V DC
3.2 Shipment
●Turbopump with electronic drive unit
●Protective cover for the high vacuum connection
●Protective cover for the fore-vacuum connection
●Mating plug for the "remote" connection to the TC 400 (type-dependent)
●Mating plug for the "E74" connection to the TC 400 (type-dependent)
●Operating instructions
3.3 Identifying the product
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
►Learn about certifications through test seals on the product or at www.tuvdotcom.com with com-
pany ID no. 000021320.
3.3.1 Product types
The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the
family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an
additional feature description.
Family Size/model Property, attribute, feature
HiPace 10 to 2800 none = Standard version
mini = Compact version
U = Overhead version
C = Corrosive gas version
P = Process
M = Active magnetic bearing
T = Temperature management
E = High efficiency
H = high compression
I = ion implantation
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps
3.3.2 Product features
Feature Version
HV flange DN 100 ISO-K DN 100 ISO-F DN 100 CF-F
Flange material Aluminium Aluminium Stainless steel
Tbl. 4: Turbopump features
Product description
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4 Transportation and Storage
4.1 Transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Pfeiffer Vacuum recommends keeping the transport packaging and original protec-
tive cover.
Instructions for safe transport
1. Transport the turbopump only within the permissible temperature limits.
2. Observe weight specified on the rating plate.
3. Where possible, always transport or ship the turbopump in its original packaging.
4. Always carry the turbopump with both hands.
5. Remove the protective cover only immediately prior to installation.
4.2 Storage
Pfeiffer Vacuum recommends storing the products in their original transport pack-
aging.
Storing the turbopump
1. Close all flange openings with the original protective caps.
2. Close all other connections (e.g. venting connection) with the respective original parts.
3. Store the turbopump only indoors within the permissible temperature limits.
4. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
Transportation and Storage
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5 Installation
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blade) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Preparatory work
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
General notes for the installation of vacuum components
►Choose an installation location that permits access to the product and to supply lines at all times.
►Observe the ambient conditions given for the area of use.
►Provide the highest possible level of cleanliness during assembly.
►Ensure that flange components during installation are grease-free, dust-free and dry.
Select the installation location
1. Observe the instructions for transport to the installation location.
2. Make sure that there are sufficient cooling options for the turbopump.
3. Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.
4. Install suitable shielding so that the irradiated thermal output does not exceed the permissible val-
ues when high temperatures occur due to the process.
5. Observe the permissible temperatures for the vacuum connection.
5.2 Connecting the high vacuum side
5.2.1 Requirements for the dimensioning of a counter flange
NOTICE
Risk of damage due to incorrect counter flange design
Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing,
even when properly attached. This can produce leakage or negative changes in running characteris-
tics.
►Adhere to the shape tolerances for the counter flange.
►Observe the maximum flatness deviations over the entire surface.
Installation
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