Pfeiffer Vacuum ATH 2800 MT User manual

Operating instructions
Operating instructions
Translated from original version
Translated from original version
ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
EN
EN

Welcome
Dear Customer,
You have just purchased
an adixen Magnetically
levitated turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field
of turbopump design.
Applications:
Semiconductor applications, Plasma etching, Ion implantation,
Sputtering, Plasma deposition.
Other Applications:
Research and development, High energy physics, Space simulation,
Accelerators.
Advantages:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
This pumping component is designed to generate vacuum by pumping
on gases, but no liquids neither solids. It is dedicated for running in
industrial environments.
The integrator of this component must provide all operator safety
measures mainly against hot surfaces.
This pumping component must not operate in an area with risk of
explosion. Consult us to study a solution.
This operating manual includes only the instructions to connect the
maglev pump to the equipment. Refer to the controller operating
manual to power and use the pump (chapters B, C and D).
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
GB 03394- Edition 02 - Apr 12
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ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

Copyright/Intellectual property:
The use of adixen products are subject to copyright and intellectual
property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole or
any part without prior written authorization from adixen Vacuum
Products.
Specifications and information are subject to change without
notice by adixen Vacuum Products.
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in
G 100 of the controller’s operating instructions.
2/2
ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
GB 03394- Edition 02 - Apr 12
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03395- Edition 04 - October 12
1/2
MANUAL REFERENCE: 113190
EDITION: 04 - January 2013 General contents
ATH 2800 M/MT - ATH 3200 M/MT
operating instructions
Translated from original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 2800 M/MT- ATH 3200 M/MT pumps
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Technical characteristics of the pumps
A 510 - The accessories of the pumps
A 515 - Accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and air inlet valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product removal
D 150 - Maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 50 - Replacement of the water valve coil
E 100 - Shipping procedure for contaminated pumps
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 200 - First level maintenance parts
Chapter G APPENDIX
G 150 - Pumping curves
G 200 - Service
Indicates a potentially hazardous situation which, if not avoided,
could result in property damage.
Indicates a potentially hazardous situation which, if not avoided,
could result in moderate or minor injury. It may also be used to alert
against unsafe practices.
Indicates a potentially hazardous situation which, if not avoided,
could result in death or severe injury.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

2/2
General contents
ATH 2800 M/MT - ATH 3200 M/MT
operating instructions
GB 03395- Edition 04 - October 12
MANUAL REFERENCE: 113190
EDITION: 04 - January 2013
Translated from original version
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the pro-
duct.
Before switching on the product, study the Operating instructions and make
sure you follow the safety instructions it gives. You can recognise these by
the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
ON
OFF
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
Electrical connector locking
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
Direction of rotation of the pump
LOCK
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03396 - Edition 03 - January 13
1/1
Introduction
ATH 2800 M/MT - ATH 3200 M/MT
Operating instructions
Detailed contents
A
A 150 Introduction to the ATH 2800 M/MT, ATH 3200 M/MT pumps
A 200 Control loop of the pump
- 5 active axis
- Unbalanced force rejection control
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The back-up ball bearings
- No maintenance
- Battery free
- Variation of the pump rotational speed
A 400 Technical characteristics of the pumps
A 510 The accessories of the pumps
A 515 Accessory dimensions
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03397 - Edition 03 -April 12
1/1
A 150
Introduction to
ATH 2800 M/MT - ATH 3200M/MT pumps
A magnetically
levitated turbopump
MT models
Controller The ATH 2800 M/MT and ATH 3200 M/MT pumps work with OBC
controller or with the MAGPOWER controller.
(refer to the operating instructions corresponding).
Integrated band heater
Maintaining the pumps internal surface up to 75 °C to prevent the
condensation effect.
Temperature regulated by the controller. The MT versions are
supplied with a water valve.
Five active axes
Rotor position control in 5 directions.
Unbalanced Force Rejection Control
Lowest possible levels of noise and vibration.
Automatic adjustment to any imbalance of the rotor, from very low
speed.
Maintenance free
Inert gas purge
Protects from corrosion the magnetic spindle.
Battery free
In case of a power failure, the pump motor acts like a generator
to transform the rotor energy into electrical power to supply the
controller.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

5 active axis The mobile assembly formed by the turbo rotor and the shaft is
known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has 5 axes of freedom monitored by 5 active
magnetic bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
+
Correction
+
Position
sensor
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded, the
controller corrects differences to bring the rotor back to its
optimum position, by varying the current in electro-magnets.
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
A 200
Control loop of the pump
1/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

Unbalanced force
rejection control
The unbalanced force rejection control is an electronic
function, that monitors the rotor position, allowing it to rotate
in its own axis of inertia.
Changes in the rotor balance, due to deposit built-up during
the life time of the pump, are automatically compensated by
the unbalanced force rejection control.
It ensures the lowest possible levels of noise and vibration.
Stator geometric axis
Rotor geometric axis
Rotor inertia axis
A 200
Control loop of the pump
2/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03411 - Edition 04 - November 12
1/3
A 210
The pump operating principle
Pumping principle The ATHM pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section.
The turbomolecular section provides high pumping speeds and
high ultimate vacuum. The molecular drag section provides a high
compression ratio and extends forevacuum tolerance.
INLET
Dry back-up bearings
EXHAUST
Cooling
Magnetic
levitated
bearings
Motor
Molecular
drag
Stator
Rotor
Gas purge*
* The gas purge provides an excellent protection of the maglev
bearings for corrosive applications and ensures the rotor cooling.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

2/3
A 210
The pump operating principle
GB 03411 - Edition 04 - November 12
The hybrid-
turbopump in an
installation
At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
The ATHM compression ratio is set by the design. The pumping
performances depend of the primary pump and of the installation.
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Primary
pumping
Rough vacuum
High vacuum
The built-in heater band
allows pump heating up
to 75 °C, which is sufficient
to avoid the condensation
effect.
This device is controlled by
the controller.
The MT version must be
equipped with its water
valve (the water valve
is supplied with the MT
model).
The built-in heater band
(on MT model)
Heater
band
At high pressure and high throughput processes such as metal etch,
deposit can build up in the lower compression stages of the rotor,
leading the pump to early failure.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03411 - Edition 04 - November 12
3/3
A 210
The pump operating principle
The back-up ball
bearings
They are dry-lubricated ceramic ball bearings.
They are never used in normal operation, since the rotor is not in
contact with the ball bearings.
The back-up ball bearings are only used to protect the pump in
accidental air in-rushes, accidental shocks or power failure.
No maintenance By design, the pump doesn’t include parts liable to wear and doesn’t
need preventive maintenance. However, the back-up ball bearings
used in case of accidental shut-downs have to be changed when
the controller indicates it: the percentage of landing time to be
deducted depends on the number of incidents. The maximum life
time of the rotor is described in D 150.
Battery free In case of a power failure, the motor acts like a generator, supplying
enough power for the magnetic bearings.
When the rotation speed is too low, the pump shuts down and lands
on the back-up ball bearings.
Variation of the pump
rotational speed
The ATHM pump rotation speed can be selected and set between
a minimum speed and the maximum speed. This makes it possible
to optimize pumping characteristics according to each customer
application (for example, high pressure pumping).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set between the
low speed value and the nominal speed.
- nominal speed preselected at factory.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

The performances
of the pumps
CHARACTERISTICS UNITS ATH 2800 M ATH 2800 MT ATH 3200 M ATH 3200 MT
Flange (in) DN 250 ISO F / VG 250 DN 320 ISO F / VG 350
Flange (out) DN 40 ISO KF (DN 50 ISO KF optional)
Pumping speed*
Ar l/s 2100 2700
H2 l/s 1550 1700
He l/s 2400 2500
N2 l/s 2200 2800
Compression ratio
Ar > 1·108
H2 > 2·103
He > 3·104
N2 > 1·108
Gas throughput (1) (2)
Ar sccm 2200 700 2200 700
H2 sccm > 5000 > 1000 > 5000 > 1000
He sccm > 5000 > 1000 > 5000 > 1000
N2 sccm 5000 1000 5000 1000
Fore vacuum max.(3)
Ar hPa 2.8
H2 hPa 0.4
He hPa 1.3
N2 hPa 2.1
Inlet vacuum max. (2) AR hPa 0.026 0.006 0.026 0.006
N2 hPa 0.26 0.01 0.26 0.01
Ultimate pressure (4) hPa < 6·10-9
Nominal rotation speed rpm (Hz) 25000 (417)
Standby speed rpm (Hz) From 15000 (250) to nominal speed 25 000 (417)
Sound pressure level db(A) < 45
Pump protection index IP 42
Controller power supply V AC 200-240
Leak tightness hPa·l/s < 5 · 10-8
Max. start-up power ** W < 1100 < 1500 < 1100 < 1500
Power consumption at ultimate
pressure W < 130 < 520 < 130 < 520
Standby power W < 100 < 350 < 100 < 350
Max. apparent start-up power ** VA < 1800 < 2100 < 1800 < 2100
Mounting orientation Any
Maximum heating temperature °C - 75 - 75
Heating power of the heating band
(the same input voltage as the
controller)
W - 380 - 380
N2 purge flange DN16 ISO-KF
* Without inlet screen.
** With the Magpower controller.
(1) At nominal rotational speed, water temperature = 25 °C (M = cold ; MT = 65 °C).
(2) With a low exhaust pressure, depends on external conditions (water temperature, water flow, ambient temperature).
(3) With ratio inlet pressure/exhaust pressure >100, max. throughput reduced.
(4) With ISO-K, ISO-F flange ; better with CFF flange.
GB 03398 - Edition 04 - April 12
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A 400
Technical characteristics of the pumps
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

The performances
of the pumps
CHARACTERISTICS UNITS ATH 2800 M ATH 2800 MT ATH3200 M ATH3200 MT
Run-up time up to 90% of nominal rotation
speed, with exhaust pressure < 0.1 hPa ** min < 10
Maximum baking temperature °C 120
Recommended purge flow rate sccm 50
Vibration level at nominal speed μm < 0.01
Maximum leakage current (5) mA < 12
Maximum water line pressure hPa 7 · 103
Weight of the pump kg 85 82
Recommended backing pump - adixen ADP / ADS
Cooling water flow rate l/h 60
Water temperature (6) °C 15 < T < 40 15 < T < 25 15 < T < 40 15 < T < 25
Environmental conditions :
- Ambient operating temperature
- Use of the product
- Maximum altitude
- Accept transient over voltages typically
present on the main supply
- Pollution degree applicable
- Maximum relative humidity (7)
°C
-
m/ft
-
-
-
5 < T < 45 | 5 < T < 25 | 5 < T < 45 | 5 < T < 25
Indoor only
2000 / 6562
Category II
2
80 %
Three phase motor characteristics
(Max. values) :
Voltage between phases
Supply frequency
Phase current
Vrms
Hz
A
35
834
17.5
** With the Magpower controller.
(5)
Not all leakage current is necessarily evacuated through the earth wire ; it depends on the pump earth connect regarding the
equipment to which the pump is connected.
(6) >25 °C : apply a derating on continuous max flow. Change the operating conditions to reduce the nominal power. Contact the
Customer Service.
(7) Maximum relative humidity 80 % for temperatures up to 31 °C, decreasing linearly to 50 % relative humidity at 40 °C.
2/4
A 400
Technical characteristics of the pumps
GB 03398 - Edition 04 - April 12
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

A 400
Technical characteristics of the pumps
GB 03398 - Edition 04 - April 12
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ATH 2800 M/MT
Dimensions
Inlet flange E H I J1 J2 K L M D d1 d2 N A° CG
DN 250 ISO-F 16,00 292,90 376,30 351,00 398,00 382,90 408,60 389,90 335,00 310,00 11,00 12 15 206,30
/ 0,63 /11,54 /14,83 /13,83 /15,68 / 15,09 /16,10 /15,36 /13,20 /12,21 / 0,43 / 8,13
VG 250 16,00 292,90 376,30 351,00 398,00 382,90 408,60 389,90 350,00 320,00 15,00 12 15 204,00
/ 0,63 /11,54 /14,83 /13,83 /15,68 /15,09 /16,10 /15,36 /13,79 /12,61 /0,59 / 8,04
Dimensions in mm / inch
129.5
5.1
HEATED VERSION
(MT model)
UNHEATED VERSION
(M model)
M3 fixing hole to connect
the pump to the earth
203.5
/8.1
Exhaust
DN40 ISO-KF
168
/6.61 146
/5.75
182
/7.17
Available to connect a
functional earth
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

A 400
Technical characteristics of the pumps
GB 03398 - Edition 04 - April 12
4/4
Inlet flange E H I J1 J2 K L M D d1 d2 N A° CG
DN 320 ISO-F 20 235,7 319,1 293,8 340,4 325,7 351,4 332,7 425 395 13,5 12 15 152,9
/0,79 /9,29 /12,57 /11,58 /13,41 /12,83 /13,85 /13,11 /16,75 /15,56 /0,53 /6,02
VG 350 20 235,7 319,1 293,8 340,4 325,7 351,4 332,7 450 420 15 12 15 149,9
/0,79 /9,29 /12,57 /11,58 /13,41 /12,83 /13,85 /13,11 /17,73 /16,55 /0,59 /5,91
Dimensions in mm / inch
UNHEATED VERSION
(M model)
HEATED VERSION
(MT model)
203.5
/8.1
182
/7.17
168
/6.61 146
/5.75
131
/5.16
M3 fixing hole to connect
the pump to the earth
Available to connect a
functional earth
ATH 3200 M/MT
Dimensions
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03399 - Edition 03 - April 12
1/3
A 510
The accessories of the pump
This screen protects the pump against solid particles.
It is integrated into the pump housing.
Purge flow reduction
device
This device is used
to reduce the purge
gas flow rate in
some processes.
Flow Reduction device
DN 16 P/N
50 SCCM 066752
Isolation valve
at inlet pump
The secondary isolation
valve is used to maintain
the vacuum in the chamber
while the pump is reset to
atmospheric pressure.
See the Manufacturer’s catalog.
Water valve The water valve is used to
regulate the water flow.
The water valve is connected
to the controller with the
thermostatic cable.
( A 500 in the controller
Operating instructions.
Water valve P/N
24 VDC 108668
Bolt and washer kit for
pump installation Pumps DN P/N for
ISO F
P/N for VG Description
ATH 2800 250 110675
110676S -12 CHC M10x30 12 CHC M10x35*
ATH 3200 320 113189 - 12 CHC M12x45
350 - 113189 12 CHC M12x45
* With centering ring
DN 250 (S. Steel) P/N
Bent screen + bored clip (mesh size 8 mm) 112128
DN 320 (S.Steel) P/N
Bent screen + bored clip (mesh size 8 mm) 112132
VG 350 (S.Steel) P/N
Bent screen + bored clip 114683
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

2/3
A 510
The accessories of the pump
GB 03399 - Edition 03 - April 12
Length P/N
1 m A462403-010
3.5 m A462403-035
5 m A462403-050
10 m A462403-100
20 m A462403-200
Air inlet valve cables and
purge valve cables
(for pumps controlled by
Magpower)
Purge valve (50 sccm)
(operate only by the
customer tool) *
The purge flow warranties a gas
flushing for back-up ball bearing
protection from the pumped
process gases.
The purge of this valve can be
isolated during an air tightness
test.
Purge valve P/N
24 VDC 111921S
Dust filter
* Provide a power line compatible with extra low voltage and safety
standards (SELV).
Air inlet valve *
The air inlet valve, powered by the
controller, is installed on the pump
exhaust port. It allows to reduce
the braking time of the pump to
put it at the atmospheric pressure.
It is a NC valve which is activated
when the pump nominal speed is
below 10 000 rpm.
Air inlet valve P/N
24 VDC 114280
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03399 - Edition 03 - April 12
3/3
A 510
The accessories of the pump
Thermostatic cable for
(MT Models) Length P/N
1 m A460082-010
3.5 m A460082-035
5 m A460082-050
10 m A460082-100
20 m A460082-200
Water valve cable
Length P/N
1 m A462401-010
3.5 m A462401-035
5 m A462401-050
10 m A462401-100
20 m A462401-200
An entire range of connection accessories is available in the catalog (clamping
ring, centering ring, etc.).
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 04430 - Edition 04 - January 13
1/2
A 515
Accessory dimensions
Purge valve (50 sccm)
dimensions mm (inch)
30 (1.18)
22 (0.86)
83.3 (3.28)
32 (1.26)
1/8 NPT
Can rotate Plug coil
Pump connection
62 (2.44)
82 (3.23)
65,5 (2.58)
18,5 (0.73)
65 (2.56)
1/8NPT female
connector
(air inlet)
DN 40 ISO KF
Pump connection
Connector for coil
(possible to rotate)
1/8 NPT female connector
Dust filter
Air inlet valve
dimensions
mm (inch)
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT