Pfeiffer Vacuum ATH 2800 MT User manual

Operating instructions
Operating instructions
Translated from original version
Translated from original version
ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
EN
EN

Welcome
Dear Customer,
You have just purchased
an adixen Magnetically
levitated turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field
of turbopump design.
Applications:
Semiconductor applications, Plasma etching, Ion implantation,
Sputtering, Plasma deposition.
Other Applications:
Research and development, High energy physics, Space simulation,
Accelerators.
Advantages:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
This pumping component is designed to generate vacuum by pumping
on gases, but no liquids neither solids. It is dedicated for running in
industrial environments.
The integrator of this component must provide all operator safety
measures mainly against hot surfaces.
This pumping component must not operate in an area with risk of
explosion. Consult us to study a solution.
This operating manual includes only the instructions to connect the
maglev pump to the equipment. Refer to the controller operating
manual to power and use the pump (chapters B, C and D).
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
GB 03394- Edition 02 - Apr 12
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ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

Copyright/Intellectual property:
The use of adixen products are subject to copyright and intellectual
property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole or
any part without prior written authorization from adixen Vacuum
Products.
Specifications and information are subject to change without
notice by adixen Vacuum Products.
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in
G 100 of the controller’s operating instructions.
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ATH 2800 M/MT - ATH 3200 M/MT
Turbopumps
GB 03394- Edition 02 - Apr 12
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

GB 03395- Edition 04 - October 12
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MANUAL REFERENCE: 113190
EDITION: 04 - January 2013 General contents
ATH 2800 M/MT - ATH 3200 M/MT
operating instructions
Translated from original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 2800 M/MT- ATH 3200 M/MT pumps
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Technical characteristics of the pumps
A 510 - The accessories of the pumps
A 515 - Accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and air inlet valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product removal
D 150 - Maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 50 - Replacement of the water valve coil
E 100 - Shipping procedure for contaminated pumps
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 200 - First level maintenance parts
Chapter G APPENDIX
G 150 - Pumping curves
G 200 - Service
Indicates a potentially hazardous situation which, if not avoided,
could result in property damage.
Indicates a potentially hazardous situation which, if not avoided,
could result in moderate or minor injury. It may also be used to alert
against unsafe practices.
Indicates a potentially hazardous situation which, if not avoided,
could result in death or severe injury.
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT

2/2
General contents
ATH 2800 M/MT - ATH 3200 M/MT
operating instructions
GB 03395- Edition 04 - October 12
MANUAL REFERENCE: 113190
EDITION: 04 - January 2013
Translated from original version
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the pro-
duct.
Before switching on the product, study the Operating instructions and make
sure you follow the safety instructions it gives. You can recognise these by
the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
ON
OFF
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
Electrical connector locking
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
Direction of rotation of the pump
LOCK
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
adixen Vacuum Products - Operating instructions - ATH 2800 M/MT - ATH 3200 M/MT