PI Q-Motion Q-632 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP129E
Q
-632 Miniature Rotation Stage
User Manual
Version: 1.1.2
Date: 16.05.2019
This document describes the following product:

Q-632.930
Q-Motion® rotation stage, piezoelectric inertia
drive, >360° rotation range, incremental
encoder, 0.75 µrad resolution, 6 mNm drive
torque, 30 mm diameter, vacuum compatible
to 10-6 hPa

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 16.05.2019
Document number: MP129E, KSch, version 1.1.2
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Product View .............................................................................................................. 7
3.2 Product Labeling......................................................................................................... 8
3.3 Scope of Delivery........................................................................................................ 9
3.4 Accessories ............................................................................................................... 10
3.5 Suitable Electronics .................................................................................................. 10
3.6 Technical Features.................................................................................................... 11
3.6.1 Linear Encoder (Sensor)............................................................................... 11
3.6.2 Reference Point Switch................................................................................ 11
3.6.3 ID Chip.......................................................................................................... 11
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Mounting the Q-632 onto an Underlying Surface and Connecting it to a
Protective Earth Conductor...................................................................................... 16
5.3 Fixing the Load to the Q-632 .................................................................................... 19
5.4 Connecting the Q-632 to the Electronics ................................................................. 20
5.4.1 Overview: Connecting for Atmospheric Operation..................................... 21
5.4.2 Overview: Connecting for Operating in a Vacuum...................................... 21
5.4.3 Connecting the Q-632 to the Electronics .................................................... 22
Contents

6Startup and Operation 25
6.1 General Notes on Startup and Operation ................................................................ 25
6.2 Starting and Operating the Q-632............................................................................ 28
7Maintenance 31
7.1 General Notes on Maintenance ............................................................................... 31
7.2 Performing a Maintenance Run ............................................................................... 31
7.3 Cleaning the Q-632................................................................................................... 31
8Troubleshooting 33
9Customer Service 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 Data Table.................................................................................................... 37
10.1.2 Maximum Ratings........................................................................................ 38
10.1.3 Ambient Conditions and Classifications ...................................................... 39
10.2 Operating Time......................................................................................................... 39
10.3 Dimensions ............................................................................................................... 40
10.3.1 Q-101.AP1 Adapter Plate............................................................................. 41
10.3.2 C-815.VF Vacuum Feedthrough for 10-6 hPa ............................................... 42
10.4 Pin Assignment ......................................................................................................... 44
10.4.1 Q-632.930 (Vacuum Compatible to 10-6 hPa).............................................. 44
10.4.2 C-815.VF Vacuum Feedthrough................................................................... 45
11 Old Equipment Disposal 47
12 EU Declaration of Conformity 49

1 About this Document
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information necessary for the intended use of the Q-632.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injuries or damage to equipment.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning sign affixed to the product that refers to
detailed information in this manual.
1.3 Definition of Terms
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the rotation
stage is mounted horizontally. The contact point of the load is in the
center of the motion platform.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Description Document
E-873.1AT Q-Motion® controller, 1 channel,
USB interface
PZ274E User Manual
E-873.3QTU Q-Motion® controller for
piezoelectric inertia drives, 3 axes, benchtop
device (industry), TCP/IP, USB, I/O, joystick
PZ273E User Manual
E-873.10C885 Q-Motion® controller module
for PIMotionMaster, 1 axis, for systems with
piezoelectric inertia drive
E873T0002 Technical Note
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.

1 About this Document
4 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The Q-632 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
In accordance with its design, the Q-632 is intended for positioning, adjusting and rotating loads
in a rotational axis at different velocities in interval operation. The Q-632 uses a piezoelectric
inertia drive. The drive is self-locking at rest, requires no current, generates no heat, and
maintains its position.
The Q-632 can be mounted in any orientation. The specifications of the Q-632 apply to
horizontal mounting (p. 37).
The Q-632 is not intended for applications in areas where failure would be a considerable risk
for people or the environment. The Q-632 is not intended for continuous operation. For further
information on the operating conditions of the Q-632, see "Technical Data" (p. 37).
The Q-632 has a linear encoder for direct position detection and is designed for an ambient
pressure to 10-6 hPa.
It is only possible to use the Q-632 as intended when it is completely mounted and connected.
The Q-632 must be operated with suitable electronics (p. 10). The electronics are not in the
scope of delivery of the Q-632.
2.2 General Safety Instructions
The Q-632 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-632.
Use the Q-632 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any faults and malfunctions likely to affect safety immediately.
The operator is responsible for the correct installation and operation of the Q-632.
2
Safety

2 Safety
6 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-632.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the Q-632 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Use the device only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the Q-632 only after you have read and understood this user
manual.
Personnel qualification
The Q-632 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
Attention must be paid to appropriate cleanliness when the rotation stage is to be used in a
vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during
assembly and measuring.
Touch the rotation stage only with powder-free gloves.
If necessary, wipe the rotation stage clean after unpacking.

3 Product Description
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 7
In this Chapter
Product View.................................................................................................................................. 7
Product Labeling ............................................................................................................................ 8
Scope of Delivery ........................................................................................................................... 9
Accessories................................................................................................................................... 10
Suitable Electronics...................................................................................................................... 10
Technical Features ....................................................................................................................... 11
3.1 Product View
Figure 1: Q-632.930 rotation stage
1ESD protection cap
2Type plate p. 8
3Connector for drive and sensor: D-sub 15 (m)
4Warning sign "Electrostatic sensitive devices"
5Cable exit for connecting the drive and sensor
6Motion platform
7Base body
3
Product Description

3 Product Description
8 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
Figure 2: Direction of motion of the Q-632's platform
The arrow in the figure above shows the direction of motion on positive commanding.
3.2 Product Labeling
Figure 3: Product labeling and type plate of the rotation stage

3 Product Description
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 9
Position Labeling Description
A 113064246 Serial number (example), individual for each
Q-632
Meaning of each position (from the left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive number
A Q-632.930 Product name
A, C Warning sign "Pay attention to the manual!"
A Old equipment disposal
A, C CE conformity mark
A WWW.PIMICOS.COM Manufacturer's address (website)
A, D Manufacturer's logo
A Warning sign "Electrostatic-sensitive devices"
B Symbol for the protective earth conductor,
marks the position of the holes via which the
Q-
632 is to be connected to the protective earth
conductor
3.3 Scope of Delivery
Item
ID
Components
Q-632 Rotation stage according to the order
RPS32.5003
Screw set for mounting the Q-632, consisting of:
2 dowel pins, A2 1.5 m6 × 4 ISO 2338
4 machine screws 1.4567 M2x4 (not required)
4 socket-head screws, A2 M2×6 ISO 4762
MP139EK Short instructions for the Q-5xx / Q-6xx Q-Motion® positioners

3 Product Description
10 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
3.4 Accessories
Order
number Description
E-873.UHV1 Air-side extension cable from the vacuum feedthrough or Q-632 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 1 m
E-873.UHV2 Air-side extension cable from the vacuum feedthrough or Q-632 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 2 m
E-873.UHV3 Air-side extension cable from the vacuum feedthrough or Q-632 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 3 m
Q-101.AP1 Adapter plate for mounting a Q-632 onto an optical table, for use in a
vacuum to 10-6 hPa. Material: Aluminum alloy, anodized; mass: 8 g
C-815.VF Vacuum feedthrough (drive and sensor signals), D-sub 15 (m/f), including
C815T0003 technical note
To order, contact our customer service department (p. 35).
3.5 Suitable Electronics
Electronics
Order number Description
E-873.1AT Q-Motion® controller for piezoelectric inertia drives, 1 axis, benchtop
device (industry), SPI, TCP/IP, USB, RS-232, I/O, connector for joystick
E-873.3QTU Q-Motion® controller for piezoelectric inertia drives, 3 axes, benchtop
device (industry), TCP/IP, USB, I/O, joystick
E-873.10C885 Q-Motion® controller module for PIMotionMaster, 1 axis, for systems
with piezoelectric inertia drive
To order, contact our customer service department (p. 35).

3 Product Description
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 11
3.6 Technical Features
3.6.1 Linear Encoder (Sensor)
The Q-632 is equipped with an optical linear encoder. Refer to the table in the "Specifications"
section (p. 37) for the encoder resolution.
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
influence the measurement of the position.
3.6.2 Reference Point Switch
The Q-632 also has an optical reference switch.
The commands that use the reference signal are described in the user manual for the controller
and/or in the corresponding software manuals.
3.6.3 ID Chip
The Q-632 has an ID chip in the connector.
The following data is stored as parameters on the ID chip:
Information on the rotation stage: Type, serial number, date of manufacturer, hardware
version
Settings for the sensor: Interpolation rate, corrections to hysteresis, phase and offset,
gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on ID chip detection, see the manual for the controller.

4 Unpacking
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 13
NOTICE
Electrostatic hazard
Touching the pins on the D-sub 15 connector can damage the Q-632's electrostatic-sensitive
(also: ESD) components. For this reason, the Q-632 is supplied with ESD protection.
Remove the ESD protection from the connection only when you connect the Q-632 to the
controller.
INFORMATION
Attention must be paid to appropriate cleanliness when the rotation stage is to be used in a
vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during
assembly and measuring.
Touch the rotation stage only with powder-free gloves.
If necessary, wipe the rotation stage clean after unpacking.
1. Unpack the Q-632 with care.
2. If present, do not remove the ESD protection from the connection of the Q-632.
3. Compare the contents with the items listed in the contract and the packing list.
4. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
5. Keep all packaging materials and the ESD protection in case the product needs to be
returned.
4
Unpacking

5 Installation
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 15
In this Chapter
General Notes on Installation ...................................................................................................... 15
Mounting the Q-632 onto an Underlying Surface and Connecting it to a Protective Earth
Conductor .................................................................................................................................... 16
Fixing the Load to the Q-632 ....................................................................................................... 19
Connecting the Q-632 to the Electronics..................................................................................... 20
5.1 General Notes on Installation
NOTICE
Heating up of the Q-632 during operation!
The heat produced during operation of the Q-632 can affect your application.
Install the Q-632 so that the application is not impaired by the dissipated heat.
Ensure sufficient ventilation at the place of installation.
Make sure that the complete bottom side of the Q-632 is in contact with the surface on
which the Q-632 is mounted.
NOTICE
Unwanted changes in position when mounted vertically!
The motion platform could move unexpectedly if the load exceeds the rotation stage's drive
torque when the Q-632 is mounted vertically (e.g., due to pulling forces on the cable of the
load). Unwanted changes in the position of the motion platform can damage the drive, the
load or the surroundings.
Take suitable measures to make sure that the load is lower than the drive torque (p. 37)
when the rotation stage is mounted vertically, e.g., the cables connected to the load
should have sufficient strain relief.
NOTICE
Lubricants, dirt, condensation!
Dirt, oil, lubricants and condensation will render the motor/drive inoperable.
Keep the Q-632 free from lubricants.
Keep the Q-632 free from dirt and condensation.
5
Installation

5 Installation
16 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage
NOTICE
Damage from unsuitable cables!
Unsuitable cables can damage the electronics.
Use cables provided by PI only for connecting the Q-632 to the electronics.
INFORMATION
The positive direction of motion is a counterclockwise rotation.
INFORMATION
The Q-632 can be mounted on an optical stage with the Q-101.AP1 adapter plate. The adapter
plate is available (p. 9)as an accessory.
5.2 Mounting the Q-632 onto an Underlying Surface and Connecting
it to a Protective Earth Conductor
NOTICE
Protruding screw heads!
Protruding screw heads can damage the Q-632.
Ensure that the screw heads do not protrude from countersunk holes so that they do not
interfere with the motion.
NOTICE
Warping of the Q-632 when mounted on uneven surfaces!
The Q-632 could warp if mounted on an uneven surface. Warping reduces the accuracy.
Mount the Q-632 onto an even surface. The recommended flatness of the surface
is ≤2 µm.
For applications with large temperature changes:
Mount the Q-632 only onto surfaces that have the same or similar thermal expansion
properties as the Q-632.