POWATEC P-200 User manual

EPFLCenterofMicroNanoTechnology
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CMi/WafermountingwithPOWATECP‐200andU‐200    Page1/6
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WafermountingwithPOWATECP‐200andU‐200
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WafermounterP‐200
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TheP‐200fromPowatecisamanualwafermounterfittedwithdedicatedframes,cutterdevicesand
padrollerenablingbubblefreemountedwafersorchipsontoUV‐sensitivetape.Todothis,proceed
asfollows:
1‐Makesurethemachineispluggedin.Agreensquarelightshouldbevisiblethroughthelid.
ThisenablescorrectfunctioningofthemotordrivenUV‐taperollers.
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2‐Placeaframe,adjustingitspositionwiththe4alignmentscrewspresentonthesystem.
Smallmagnetsensurefirmnessofsteelframes.
Note:ifusing6’’frames(!!notusablewiththegrinder!!),asizeadapteristobeplacedfirst.
 
Greenlight
Plugthemachinein
Adapterfor6’’frames

EPFLCenterofMicroNanoTechnology
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CMi/WafermountingwithPOWATECP‐200andU‐200    Page2/6
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 
3‐Forwafermounting:placeyourwaferonthevacuumchuck.Thesidetobegroundlateris
facingdown.Thenactivatethevacuum.Usingthescrewnutlocatedbelowthechuck,adjust
theheightofthewafersoitisonthesamelevelastheframe.Usethemanualrollingpadto
checkvisually.
Forchipsmounting:lowerthechuckheightasmuchaspossible.Thechipswillbeplaced
manuallyonthetape,onlyafterthislatestisfullystuckontheframesandcut(i.e.laststep
ofthepresentprocedure).
 
 
4‐Usingbothhands,pullontheextremityoftheUVtapetoreleaseitfromtheroll.Keep
pullinguntilpassingoverthefullframeandbeingabletostickittotheotherendofthe
system.
 
PlaceyourwaferActivatethevacuum
AdjusttheheightCheckvisually
Adapterfor6’’frames
PullthetapeStickittotheblackbar

EPFLCenterofMicroNanoTechnology
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CMi/WafermountingwithPOWATECP‐200andU‐200    Page3/6
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5‐Usethemanualrollingpadtonicelystickthetapetothewafer+theframe.Onesinglepass
isenough.Keeprollinguntilreachingtherollthetapewasinitiallystuckto.
Note:ifthewaferishigherthantheframe,youmayneedtoadjustthetapestickingmanually.
 
6‐Lowerthecuttingsystem.First,cutthetoppartofthetapebygentlypressingdownthe
bladeandgoingbackandforthonthetrack.Then,cutthewholeperipheryoftheframe
usingthecircularcuttingblade.
 
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7‐Liftthecuttingsystembackup.Usingonehandtoholdtheframesteadyagainstthe
machine,usetheotheronetoremovethecutpartofthetape.
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RollallthewayupAdjustmanuallyifneeded
Cutthetoppart
Cuttheperiphery
Removetape

EPFLCenterofMicroNanoTechnology

CMi/WafermountingwithPOWATECP‐200andU‐200    Page4/6
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8‐Turnthevacuumoffandgetyourframereadyforgrinding.
 
9‐Onlyforchipsmounting:manuallystickthechipsonthetape(sidetobegroundfacingup!).
Anylocationontheavailabletapeareaisusable.

Stopthevacuum
Gettheframe

EPFLCenterofMicroNanoTechnology

CMi/WafermountingwithPOWATECP‐200andU‐200    Page5/6
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UVcuringU‐200
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TheU‐200fromPowatecisamanualUVirradiationsystemfittedwith31LED’s(310mW@365nm).
ItisusedtocureUV‐tapetoensureeasyandsaferemovalofthinworkpieces.
1‐OpenthecoverlidandadjustthespeedatwhichtheworkpieceswillpassthroughUV
irradiation.Forverythinworkpieces,theslowerthebetter.Thisenablesfullcuringofthe
tape.
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2‐Puttheframeontheleftpartofthemachine.Stickypartofthetapeisfacingup(waferon
top).Closethelidandstartthesystempressingthegreenbutton.Waitfortheframeto
reachtherightendpartofthetravel.
 
 
Adjustspeed
PlacetheframeSwitchon
Stickypartup!
LetittravelGettheframeout

EPFLCenterofMicroNanoTechnology

CMi/WafermountingwithPOWATECP‐200andU‐200    Page6/6
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3‐Stopthemachinebypressingonthegreenbuttononceagain.Gettheframeoutandclose
thelid.Releasetheframefirstandthengettheworkpieces.AfterUVirradiation,thetapeis
notusableanymore.
 
 
SwitchoffReleasetheframe
Releasethesample