Quorum SC7610 User manual

SC7610 Sputter Coater
Operating Manual
Document Number OM-SC7610
Issue 1 (01/02)

Quorum Technologies Ltd. Company No. 4273003. Registered offices 30/34 North Street Hailsham, East Sussex, England, BN27 1DW
Quorum Technologies Ltd is the owner and manufacture of the range of EM
preparation equipment.
Unit 15A
Euro Business Park
New Road
Newhaven
East Sussex
U.K. tel: ++44(0) 1273 510535
BN9 0DQ fax: ++44(0) 1273 510536
Email : [e-mail]
http:///www.quorumtech.com
For further information regarding any of the other products designed and manufactured by Quorum
Technologies, contact your local representative or directly to Quorum Technologies at the address
above.
•Carbon and Sputter Coaters
•Plasma Reactor for ashing and etching
•High Vacuum Bench Top Evaporators
•Cryo Transfer Systems
•Critical Point Dryers
•Service and Spares
Disclaimer
The components and packages described in this document are mutually compatible and guaranteed to meet
or exceed the published performance specifications. No performance guarantees, however, can be given in
circumstances where these component packages are used in conjunction with equipment supplied by
companies other than Quorum Technologies

OM-SC7610 Contents
Issue 1 3 SC7610 Sputter Coater
1 Contents
1.1 Manual Layout
This Operating Manual is divided up into the following major section, each chapter dealing with
specific topics, as follows:
Chapter 1 - Contents
Chapter 2 - Health and Safety
General section which applies to all Quorum Technologies products detailing the very
important issues of Health and Safety applicable when using sample preparation
equipment.
Chapter 3 - Introduction
Introduces this manual.
Chapter 4 - General Description
Identifies each of the equipment items and provides an overview of their functions and
how they work.
Chapter 5 - Installation
Instructions on how this Instrument should be installed and the connections which should be
made between the equipment items.
Chapter 6 - Operation
Instructions on how to start-up and run the instrument.
Chapter 7 - Maintenance
Instructions on how to check the system is functioning correctly, and how to change
consumable items. Details of appropriate Spare parts.
Chapter 8 - Fault Finding
Information on how to identify faults in the system and how to rectify these faults.
Chapter 9 - Agents
List of agents supporting Quorum Technologies products.
Chapter 10 - Index

Contents OM-SC7610
SC7610 Sputter Coater 4 Issue 1
1.2 Chapter Contents
Chapter 1 - Contents ................................................................................................3
1.1 Manual Layout ................................................................................3
1.2 Chapter Contents ...........................................................................4
1.3 Illustrations .....................................................................................6
1.4 Tables ............................................................................................6
Chapter 2 - Health and Safety .................................................................................7
2.1 Control of Substances Hazardous to Health (COSHH) .................7
2.2 Safety Policy ...................................................................................7
2.3 Conformity ......................................................................................7
2.4 Servicing ........................................................................................8
2.4.1 Disclaimer ...............................................................................8
2.4.2 Operators and Service Engineers ..........................................8
2.5 Hazard Signals and Signs ..............................................................8
2.5.1 Hazard Signal Words .............................................................8
2.5.2 Hazard Labels used on Equipment ........................................8
2.5.3 Hazard Warning Labels used in Equipment Manuals ............9
2.5.4 Instrument Functionality Signs ...............................................9
2.5.5 Serious Damage to Instruments .............................................9
2.5.6 Hazard to Operator .................................................................9
2.6 Risk Analysis ..................................................................................10
2.6.1 Personal Operational Risks ....................................................10
2.6.2 Hazardous Materials ...............................................................10
2.7 Good Working Practices ................................................................11
2.8 SC7610 Sputter Coater Specific Safety Hazards ...........................11
2.8.1 Contamination ........................................................................11
Chapter 3 - Introduction............................................................................................12
3.1 Return of Goods..............................................................................12
3.2 Returns Procedure..........................................................................12
Chapter 4 - Description ............................................................................................13
4.1 Equipment ......................................................................................13
4.1.1 Optional Items ........................................................................13
4.1.2 Accessories ............................................................................13
4.2 Overview ........................................................................................14
4.3 Technical Specification ..................................................................14
4.3.1 SC7610 Sputter Coater Specification .....................................14
4.4 Physical Description .......................................................................15
4.4.1 Operational Description ..........................................................16
4.4.2 Pumping Requirements ..........................................................16
4.5 Interlocks ........................................................................................16
4.6 SC7610 Panel Details ....................................................................17
4.6.1 SC7610, Front Panel Controls ................................................17
4.6.2 SC7610, Rear Panel Connections ..........................................18
Chapter 5 - Installation .............................................................................................19
5.1 Unpacking Checklist ......................................................................19
5.1.1 Preparation .............................................................................19
5.2 SC7610 Installation ........................................................................20
5.2.1 Connections ............................................................................20

OM-SC7610 Contents
Issue 1 5 SC7610 Sputter Coater
Chapter 6 - Operation ..............................................................................................22
6.1 Test Procedure ...............................................................................22
6.2 Coating Process .............................................................................23
6.3 Coating Specimens ........................................................................23
6.4 Sputtering Rates ............................................................................25
Chapter 7 - Maintenance ..........................................................................................26
7.1 Maintenance - General ..................................................................26
7.2 Cleaning .........................................................................................26
7.2.1 Vacuum Chamber Cleaning ...................................................26
7.3 Target Replacement ......................................................................27
7.3.1 Target Removal ......................................................................27
7.3.2 Refit New Target ....................................................................27
7.4 No Discharge Current ....................................................................28
7.5 Spare Parts.....................................................................................28
Chapter 8 - Fault Finding .........................................................................................29
8.1 Trouble Shooting / Fault Finding ....................................................29
8.2 Fault Prevention .............................................................................29
Chapter 9 - Agents ...................................................................................................30
Chapter 10 - Index ....................................................................................................31

Contents OM-SC7610
SC7610 Sputter Coater 6 Issue 1
1.3 Illustrations
Figure 2.1 - Hazard Warning Symbols .......................................................................8
Figure 2.2 - International Warning Symbols ...............................................................9
Figure 2.3 - Typical Signs as shown in this Manual ....................................................9
Figure 2.4 - Typical Signs as shown in this Manual ...................................................9
Figure 2.5 - Typical Warnings, as shown in this Manual ............................................9
Figure 4.1 - SC7610 Sputter Coater ...........................................................................15
Figure 4.2 - SC7610 Sputter Coater Operation...........................................................16
Figure 4.3 - SC7610 Sputter Coater, Front Panel Controls ........................................17
Figure 4.4 - SC7610 Sputter Coater, Rear Panel Connections ..................................18
Figure 5.1 - SC7610 Connections ..............................................................................21
Figure 6.1 - SC7610 Sputtering Rates .......................................................................25
Figure 7.1 - Target Replacement ...............................................................................27
1.4 Tables
Table 2.1 - Personal Operational Risks ......................................................................10
Table 4.1 - SC7610 Sputter Coater, Front Panel Control Descriptions ......................17
Table 4.2 - SC7610 Sputter Coater, Rear Panel Connection Descriptions ................18
Table 7.1 - Spare Parts ..............................................................................................28
Table 8.1 - Trouble Shooting ......................................................................................29
Table 8.2 - Fault Prevention .......................................................................................29

OM-SC7610 Health and Safety
Issue 1 7 SC7610 Sputter Coater
2 Health and Safety
Safety is very important when using any instrumentation and this chapter should be read by all
users of our equipment.
This section of the Manual applies to all surface analysis and surface preparation equipment
supplied by Quorum Technologies Polaron range of products, not just the particular instrument for
which the manual refers.
Included in this chapter are details on warning notations, good working practices and information on
European Community (EC) legislation regarding “Control Of Substances Hazardous to Health”
(COSHH) and risk analysis.
2.1 Control of Substances Hazardous to Health (COSHH)
The E.C. legislation regarding the “Control of Substances Hazardous to Health” requires Quorum
Technologies to monitor and assess every substance entering or leaving their premises.
Consequently any returned goods of whatever nature must be accompanied by a declaration form
available from Quorum Technologies, reference number SP-100. Without this declaration Quorum
Technologies reserves the right not to handle the substance/item. Also in accordance with E.C.
regulations we will supply on request hazard data sheets for substances used in our instruments.
2.2 Safety Policy
This section contains important information relating to all health and safety aspects of the
equipment. As such it should be read, and understood, by all personnel using the instrument
whether as an operator or in a service capacity.
Quorum Technologies is committed to providing a safe working environment for its employees and
those that use it's equipment and conducts its business responsibly, and in a manner designed to
protect the health and safety of its customers, employees and the public at large. It also seeks to
minimise any adverse effects that its activities may have on the environment.
Quorum Technologies regularly reviews its operations to make environmental, health and safety
improvements in line with UK and European Community legislation.
The equipment has been designed as free-standing bench mounted instruments. Quorum
Technologies cannot be held responsible for any damage, injury or consequential loss arising from
the use of its equipment for any other purposes, or any unauthorised modifications made to the
equipment.
All service work carried out on the equipment should only be undertaken by suitably qualified
personnel. Quorum Technologies is not liable for any damage, injury or consequential loss resulting
from servicing by unqualified personnel. Quorum Technologies will also not be liable for damage,
injury or consequential loss resulting from incorrect operation of the instrument or modification of
the instrument.
2.3 Conformity
This instrument is supplied in a form that complies with the protection requirements of the EC
Electromagnetic Compatibility Directive 89/336/EEC and the essential health and safety
requirements of the low voltage directive 72/23/EEC both as amended by 92/31/EEC. Any
modifications to the equipment, including electronics or cable layout may affect the compliance with
these directives.

Health and Safety OM-SC7610
SC7610 Sputter Coater 8 Issue 1
2.4 Servicing
2.4.1 Disclaimer
All service work on the equipment should be carried out by qualified personnel. Quorum
Technologies cannot be liable for damage, injury or consequential loss resulting from servicing from
unqualified personnel. Quorum Technologies will also not be liable for damage, injury or
consequential loss resulting from incorrect operation of the instrument or modification of the
instrument.
2.4.2 Operators and Service Engineers
A normal operator of the equipment will not be trained in or qualified for service work on the
equipment and may cause a hazard to himself/herself or others if such work is attempted.
Operators should therefore restrict themselves to the normal operation of the equipment and not by
removing covers from the electronic equipment or dismantling of the instruments.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical and vacuum
hazards should be the only personnel who access the equipment.
2.5 Hazard Signals and Signs
2.5.1 Hazard Signal Words
The standard three hazard signal words are defined as follows:
◆DANGER - imminently hazardous situation or unsafe practice that, if not avoided, will
result in death or severe injury.
◆WARNING - potentially hazardous situation or unsafe practice that, if not avoided, could
result in death or severe injury.
◆CAUTION - potentially hazardous situation or unsafe practice that, if not avoided, may
result in minor or moderate injury or damage to equipment.
2.5.2 Hazard Labels used on Equipment
Several hazard symbols may be found on the equipment, they are shown below with their meaning:
Caution, risk of electric shock Caution (refer to accompanying documents)
Easily touched higher temperature parts Warning, risk of electric shock
Figure 2.1 - Hazard Warning Symbols

OM-SC7610 Health and Safety
Issue 1 9 SC7610 Sputter Coater
2.5.3 Hazard Warning Labels used in Equipment Manuals
The international warning signs used in equipment manuals as shown in Figure 2.2.
Figure 2.2 - International Warning Symbols
Where appropriate these are used when a specific identifiable risk is involved in either using or
maintaining the instrument. These take the form of warning triangles or signs with a graphical
description of the hazard.
2.5.4 Instrument Functionality Signs
CAUTION
Do NOT depress button “P” as this will change the program
Figure 2.3 - Typical Warning sign as shown in this Manual
This typical sign applies to cautions where there is a risk to the functionality of equipment due to
incorrect operation. These cautions or warnings will be contained in a box and be accompanied by
a circular warning symbol as shown in Figure 2.3.
2.5.5 Serious Damage to Instruments
WARNING
Do NOT operate without first filling the reservoir with water as
this will damage both the pump and the heater.
Figure 2.4 - Typical Warning sign as shown in this Manual
This typical caution sign is used where serious damage will be caused by incorrect operation of
instrumentation. They will follow the same form as functionality warnings but with a triangular
warning symbol as shown in Figure 2.4.
2.5.6 Hazard to Operator
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Before making / breaking connections to the equipment, ensure power
is off and that it is safe to proceed.
Figure 2.5 - Typical Warning as shown in this Manual
These warnings will generally occur in relevant installation and maintaining sections where there
exists a potential hazard to the engineer working on the instrument. They will take the form of the
triangular warning symbol accompanied by an international warning sign and bold type lettering
beginning with “WARNING-HAZARD TO HEALTH!” as shown in Figure 2.5.

Health and Safety OM-SC7610
SC7610 Sputter Coater 10 Issue 1
2.6 Risk Analysis
2.6.1 Personal Operational Risks
The following is a list of tasks carried out by both the operator and service engineer where
recognised risks have been observed, listed is the personnel protection equipment (PPE) which is
suggested for use for various tasks on any surface analysis equipment and systems:
Task Carried out by Nature of Hazard Recommended PPE
Cleaning of parts /
samples with
isopropanol (IPA)
Operator / Service
engineer Splash hazard to eyes, drying of skin Protective goggles, protective gloves.
Use of Liquid
Nitrogen in sample
cooling etc.
Operator / Service
engineer Burn risk Thermally protective gloves and goggles should be worn.
Lifting of Heavy Items Service engineer Dropping on foot. Protective footware.
Table 2.1 - Personal Operational Risks
2.6.2 Hazardous Materials
◆Isopropanol (IPA)
For certain service tasks isopropanol is suggested for cleaning components before use in the
vacuum system. It should be noted that isopropanol is a flammable liquid and as such should
not be used on hot surfaces. In addition it is recommended that protective gloves are worn
when using isopropanol.
◆Compressed Air
Compressed air can be a potential hazard if handled inappropriately. A compressed air line
may be fed from some instruments to the customers supply, and the customer should ensure
that this and any other service pipes and cables are maintained in good condition.
◆Nitrogen, Argon and Helium Gas Supplies
Instruments may use nitrogen, argon or helium gas supplies for their operation, the customer
is responsible for maintaining the supply to the instrument. This supply should be regulated
and kept to the lowest pressure and flow rate as is practical to minimise the effects of any
leaks.
◆Hazardous Gases
Quorum Technologies has no control over the gases used within the system. It is therefore
viewed as the customers responsibility to assess the hazards involved and take appropriate
precautions when using explosive, toxic or corrosive gases or gases which may result in
hazardous products as a result of a chemical reaction.

OM-SC7610 Health and Safety
Issue 1 11 SC7610 Sputter Coater
2.7 Good Working Practices
It is essential that good hygienic working practices are adopted at all times especially in an ultra
high vacuum or cleanroom environment and are generally of the “Common sense” type. Some
simple good practice rules are:
◆If in doubt don't.
◆If in doubt ask.
◆When handling solvents wear face mask, gloves, apron and work only in a well ventilated
area.
◆Mop up any spillages immediately.
◆When handling or decanting mineral oils wear protective clothing.
◆Aerosols of mineral oils, such as that produced by gas ballasting, can prove to be hazardous
and an exhaust is recommended.
◆Before attempting to service electrical apparatus, isolate from the mains.
◆Treat all unknown substances as hazardous.
◆Dispose of substances in an appropriate manner.
◆Use the correct tool for the job.
◆Keep a straight back and bend from the knees when lifting heavy objects.
◆Wear protective clothing when using liquid nitrogen.
◆Affix pressurised gas cylinders firmly to walls or racks. Use the correct regulating valves on
gas cylinders and always transport cylinders using the appropriate specialist trolley.
◆Obey safety regulations regarding lifts, hoists and machine tools.
◆Always make sure you understand a procedure well before attempting it for the first time.
2.8 SC7610 Specific Safety Hazards
The following Safety Hazards are specific to the SC7610 Sputter Coater.
WARNING
HAZARD TO HEALTH!
The Power Supply used in the Model SC7610 unit can
operate at up to 1200V D.C
HAZARDOUS VOLTAGE OUTPUTS of up to 1200V. D.C.
2.8.1 Contamination
Contamination can seriously affect the sputtering process. To reduce the possibility of
contamination by airborne particles, minimise the time the vacuum chamber is open to the
atmosphere.

Introduction OM-SC7610
SC7610 Sputter Coater 12 Issue 1
3 Introduction
This manual is intended for all users of the SC7610 Sputter Coater manufactured by Quorum
Technologies from the POLARON range and provides information on the installation, operation and
maintenance of the instrument.
Please note that the servicing and maintenance procedures should only be carried out by qualified
service personnel and it is essential that all users should read the Health and Safety section of this
manual.
3.1 Return of Goods
If goods are to be returned to Quorum Technologies for repair or servicing the customer should contact
their local distributor or the factory direct before shipment. A "Returns Authorisation Number" should be
obtained in advance of any shipment. This number is to be clearly marked on the outside of the
shipment. Complete the returned equipment report form, number SP-106 with as much detail as
possible and return with the goods.
All returned goods are to be accompanied by a completed "Returned Goods Health and Safety
Clearance" form SP-100 attached to the outside of the package (to be accessible without opening the
package) and a copy of the forms should be faxed in advance to the factory.
When goods are to be returned under warranty refer to the “Warranty Claim, Repair and Returns
Procedure” form number SP-105
Copies of all these three forms can be found in the documentation pack supplied with the instrument
or direct from Quorum Technologies, the details can be found on page two of this document.
3.2 Return Procedure
Warranty Claim
Electronic and basic servicing capabilities exist at most in-country Thermo companies and at
appointed agents, however all components are sold with a return to factory warranty (unless
otherwise stated) which covers failure during the first 12 months after delivery.
Returns must be sent carriage paid, Quorum Technologies will cover the return carriage costs.
This covers defects which arise as a result of a failure in design or manufacturing. It is a condition
of warranty that equipment must be used in accordance with the manufacturers instructions and
not have been subjected to misuse. This warranty does not cover consumable items such as
sputter coating targets and carbon evaporation material. To make a claim under the terms of this
warranty provision contact the Customer Service Department at your local Quorum Technologies
Representative in the first instance.
Chargeable Repairs
Always contact your in-country Quorum Technologies Representative in the first instance. They
will be pleased to assist you and will be able to provide an estimate of repair costs, many offer
local repair facilities.
For routine repairs where down-time is not critical. The target standard return time at Quorum
Technologies is 20 working days.
Returns
All returns to Quorum Technologies require the following procedure to be followed:
1. Contact the local Quorum Technologies Representative and request a Returns
Authorisation Number.
2. Complete a Returned Goods Health and Safety form and returned equipment fault report
form.
3. Attach a copy of the completed form to the outside of the package with the usual shipping
documents.
Packaging and Carriage
All goods shipped to the factory must be sealed inside a clean plastic bag and packed in a
suitable carton. If the original packaging is not available Quorum Technologies should be
contacted for advice. Quorum Technologies will not be responsible for damage resulting from
inadequate returns packaging or contamination of delicate structures by stray particles under any
circumstances. All non-warranty goods returned to the factory must be sent carriage pre-paid,
(Free Domicile). They will be returned carriage forward (Ex-Works).

OM-SC7610 Description
Issue 1 13 SC7610 Sputter Coater
4 Description
4.1 Equipment
Each SC7610 Sputter Coater when supplied as a complete package, includes the basic unit, a Gold
Palladium target, a start up kit and operation manual. Items can be ordered as a full package or
separately against the following numbers:
SC7610 Sputter Coater 220-240V complete, consisting of the following:
LA761002D Sputter Coater 220-240V. With Gold/Palladium target
SC7610-STARTUP Start up Kit
OM-SC7610 Operation Manual
SC7610/110V Sputter Coater 110-120V complete, consisting of the following:
LA761003D Sputter Coater 110-120V. With Gold/Palladium target
SC7610-STARTUP Start up Kit
OM-SC7610 Operation Manual
4.1.1 Optional items
The following optional items are available from Quorum Technologies:
SC502-314A Gold Target
SC502-314B Gold/Palladium Target (1 off supplied with Sputter Coater)
SC502-314C Platinum Target
SC502-314D Nickel Target
SC502-314E Silver Target
SC502-314G Palladium Target
4.1.2 Accessories
The following accessories are available from Quorum Technologies:
E5005G Rotary Pump, 90 1/m, 110/240 Volt, 50/60Hz, fitted with E5004 rotary pump
exhaust filter.
WS7608 A kit of parts to add a water cooled specimen stage to a SC7610 Sputter Coater,
the kit contains: Water Cooled Stage, Inlet and Outlet Connectors, Piping and
Fixings.
CA7615 A carbon coating accessory which can be associated with any of the following
sputter coaters manufactured by Quorum Technologies is available:
SC7620 or SC7640.
This accessory which makes use of the vacuum pump and vacuum control
facilities of the associated sputter coaters, utilises either carbon fibre or carbon
rods in the evaporation process.
A 110 volt version is available as part number CA7615/110V
CA076R Carbon Rod Head for use with the CA7615.
CA076F Carbon Fibre Head for use with the CA7615.
For further information about the CA7615 carbon coating accessory refer to operating manual OM-
CA7615.

Description OM-SC7610
SC7610 Sputter Coater 14 Issue 1
4.2 Overview
The SC7610 Sputter Coater is a compact magnetron sputter coater, primarily designed for
depositing thin conductive metal coatings on to Scanning Electron Microscopy (SEM) samples.
Thickness of metal deposition will be determined by the operator, but will typically be in the region of
1 - 20 nanometers.
The SC7610 uses a basic magnetron sputter head with a simple to replace disc target
(gold/palladium is supplied as standard, but others metals are available as options). The head is
hinged for easy operation and fitted with electrical safety interlocks. The plasma current is variable
by adjustment of the vacuum level using an Argon leak valve; the plasma voltage is pre-set.
The 150mm (6") diameter Pyrex cylinder is mounted on an aluminium collar and sealed “L” shaped
seals. The small vacuum chamber means pump down times and cycle times are fast; it also allows
a small economical rotary to be used. The sample stage is height adjustable over a large range and
can easily be removed to accommodate large samples.
For SEM X-ray microanalysis applications the SC7610 can be simply converted to deposit carbon
by the addition of an optional carbon evaporation attachment, consisting of a switchable Voltage
power supply (CA7615) and a Carbon fibre head (CA076F) or Carbon rod head (CA076R).
The SC7610 comes complete with a one metre of 20mm bore vacuum hose and fittings and
requires only the addition of a rotary pump with a capacity of 50 litres / minute or greater (see
"options and accessories”).
4.3 Technical Specification
4.3.1 SC7610 Sputter Coater Specification
Unit dimensions: 340mm wide x 330mm deep x 330mm high (including vacuum chamber).
Vacuum chamber: 150mm internal diameter x 135mm high.
Weight: 25 kg (55lbs).
Power requirement: Available for either 230V (13 amp) or 110V (20 amp) operation at
50/60Hz.
Target distance: Normally 45mm (adjustable).
Power supply output: Normal operation is up to 800V D.C. at 20mA. Maximum output 1200V
D.C.
System control: Manually by a 180 second timer with 15 second resolution.
Pumping requirements: Pump to evacuate >10-3 mbar.
Sputtering rates: Refer to Table 6.1, example with a gold/palladium target and current of
25mA a rate of 6nm per minute is achieved.
Coating thickness: Dependant on time and current, normally between 50 and 300 Angstrom
(å) units for SEM investigations, but will typically be in the region of 1 - 20
nanometers.
Coating uniformity: Better than 10%.
Gas medium: Argon.

OM-SC7610 Description
Issue 1 15 SC7610 Sputter Coater
4.4 Physical Description
The SC7610 Sputter Coater is a simple to operate compact magnetron sputtering system designed to
be used for coating Scanning Electron Microscopy (SEM) specimens. The system can only be
operated in manual mode.
The SC7610 Sputter Coater is comprised of three main parts:
The Cabinet assembly
The Vacuum chamber
The Sputter head
The cabinet assembly, which supports the vacuum chamber, contains a high voltage power supply,
vacuum manifold and gauging. Mounted on the front panel of the cabinet are switches and meters
which provide the operator interface to the system. All service connections to the system are made via
the rear panel. The cabinet is constructed in a manner so as to comply with the European EMC
regulations.
The vacuum chamber is formed by the sputter head top plate assembly, the glass work chamber and
the baseplate assembly mounted on the top panel of the cabinet. A safety interlock, conforming to IEC
204, is also incorporated. The integrity of the vacuum is maintained by circular "L" gaskets either end
of the vacuum chamber.
The top plate supports the cathode (target) and magnetic deflection system incorporating a dark space
shield and a radially magnetised 6 pole magnet which confines the plasma within the target area.
Connectors (secured to the top plate), provide the necessary electrical and gas connections between
the top plate and the rear panel connectors of the cabinet.
The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications. The sputter
head operates at fixed voltage of 800V DC. Coating time is controlled by a 180 second solid state timer
with 15 second resolution. The vacuum level and plasma current are monitored by analogue meters.
The standard adjustable height specimen stage can be replaced by an optional water cooled stage.
The front panel, includes the chamber pressure and plasma current analogue meters, the timer select
switch, the pump start switch, the process (coat) start switch, the set plasma current momentary action
switch, and the argon leak and vent valves.
The rear panel incorporates the power on/off switch, the rotary pump electrical outlet socket, the
vacuum hose connection port, the argon inlet nipple connected internally to the leak and vent valves,
the HV and ground connection sockets, the hose connection nipple for the pressure safety switch and
the various fuses. The water connectors are only incorporated when the water cooled stage is
incorporated into the baseplate.
For carbon coating (SEM applications only), the top plate assembly can be replaced with an optional
carbon rod or carbon fibre evaporation source operated from a low voltage, high current power supply
(10V/100A (rod), 20V/50A(fibre)). The sputter head, for safety reasons, is vacuum interlocked to
prevent operation of the integral HV Power Supply when the Carbon Evaporation Top plate is used.
Figure 4.1 SC7610 Sputter Coater

Description OM-SC7610
SC7610 Sputter Coater 16 Issue 1
4.4.1 Operational Description
The SC7610 operates at a fixed potential of 800 Volts dc.
An HV voltage is applied between the Target (cathode ) and Baseplate (anode) which is at earth
potential. A pressure interlock ensures that the HV supply cannot be activated until vacuum
chamber pressure is reduced to 10-1 mbar or better. Low pressure gas (argon) is leaked into the
vacuum chamber to provide a medium for ionisation. Figure 2.2 shows the principles of operation of
the SC7610.
Electrons emitted by the cathode, concentrated in the vicinity of the target by the magnetic field,
collide with the gas molecules, producing positive ions (due to secondary electron emission).
Positive ions attracted by the negative potential of the cathode, bombard the target, causing erosion
of the target material. The dislodged target atoms falling toward the sample follow multiple paths
due to collisions with the ionized gas, coating the sample on all exposed faces.
A gas discharge glow centered about the cathode is visible.
Figure 4.2 Sputter Coater Operation
4.4.2 Pumping Requirements
The work chamber has to be evacuated to 10-3 mbar which can be achieved in a reasonable time
(depending on the cleanliness of the chamber) using a 90 l/m two stage rotary pump preferably
incorporating an anti-suck back device and fitted with an oil mist filter on the exhaust.
4.5 Interlocks
Safety interlocks are incorporated in the SC7610 Sputter Coater to prevent power being switched
on with the chamber top plate not in the closed position. Also to cut power to the instrument if
vacuum pressure is lost.
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Under no circumstances should interlock connections be over-ridden.

OM-SC7610 Description
Issue 1 17 SC7610 Sputter Coater
4.6 SC7610 Panel Details
The SC7610 Sputter Coater is designed to be bench mounted, it provides 0 - 1.2 kV D.C. output.
Process current of up to 0 - 50 mA is available with a 180 second timer to control the process.
4.6.1 SC7610 Front Panel Controls
The controls and indicators mounted on the SC7610 Sputter Coater front panel are described below
and identified in Figure 4.3 and described in Table 4.1.
Figure 4.3 – SC7610 Sputter Coater, Front Panel Controls
CONTROL or
INDICATOR DESCRIPTION
START PUMP A press to operate / press to release switch sets the vacuum pump to ON. After 10-15
seconds a fall in pressure within the chamber will be indicated on the CHAMBER
PRESSURE meter.
SET PLASMA This non-latching switch (hold to operate) is used during the setting of the LEAK
valve, which is adjusted to set the correct plasma current.
START PROCESS Operation of this non-latching switch initiates the sputtering process, the HV supply is
activated, until disconnected by the timer.
LEAK This valve leaks gas into the vacuum chamber to control the plasma current. Used in
conjunction with the SET PLASMA switch to adjust the correct operating conditions.
VENT This valve is opened to admit air into the system after a sputtering process has been
completed and the vacuum pump has been turned OFF. During the sputtering
process the valve must be SHUT (fully clockwise).
TIME-SECONDS A twelve position rotary switch sets the required process time, between 15 and 180
seconds, in 15 second steps.
CHAMBER
PRESSURE mbar This meter provides an indication of pressure within the chamber. The normal
readings are:
Pressure with leak valve closed 0.03 - 0.04 mbar or better.
Pressure with leak valve adjusted 0.06 mbar (approx).
PROCESS
CURRENT mA This meter provides an indication of plasma current flow. Under the recommended operating conditions:
Plasma current approx. 18 mA.
Table 4.1 – SC7610 Front Panel Control Descriptions

Description OM-SC7610
SC7610 Sputter Coater 18 Issue 1
4.6.2 SC7610 Rear Panel Connections
The connection points and other components mounted on the rear panel of the SC7610 Sputter
Coater are described below and identified in Figure 4.4 and described in Table 4.2.
Figure 4.4 – SC7610 Sputter Coater, Rear Panel Connections.
CONNECTION DESCRIPTION
POWER ON/OFF A vertically operated paddle switch acts as a mains isolator.
POWER IN A flying lead provides the connection of power to the system.
F1 Main supply fuse, (240 Volt, 10 Amp, A/S), (110 Volt, 15 Amp, A/S).
F3 (internal) The 630 mA A/S HT fuse which forms an integral part of the pressure
interlock switch.
Only accessible when the rear panel is removed.
HT High voltage socket, connects a negative supply to the cathode mounted in
the top plate assembly.
F4 Pirani timer/ controller supply fuse, 2 Amp or 3 Amp.
ROTARY PUMP A three way mains outlet socket provides power to the rotary pump.
GROUND Earth connecting point, from the top plate assembly.
GAS IN A 3 mm nipple provides the gas (argon) input connection point.
VACUUM A 20 mm vacuum hose connection point, connects to the vacuum pump.
F2 Power supply PCB fuse, 2 Amp or 3 Amp.
WATER Two 6mm nipples provide Inlet and outlet connections for cooling water
supplies. On systems not equipped with water cooling, panel cut-outs are
fitted with blind grommets.
Table 4.2 – SC7610 Rear Panel Components

OM-SC7610 Installation
Issue 1 19 SC7610 Sputter Coater
5 Installation
Quorum Technologies has carefully packed the SC7610 Sputter Coater instrument so that it will
reach its destination in perfect operating order. Do NOT discard any packing materials until the unit
has been inspected for any transit damage and the instrument has been used to the customers
satisfaction.
If any damage is found, notify the carrier and Quorum Technologies (or local agent) immediately. If
it is necessary to return the shipment, use the packaging as supplied and follow the instructions in
this manual for return of goods paragraph 3.1.
5.1 Unpacking Checklist
The Equipment package will normally be despatched from the factory in one box. Inside the box the
following will be found, refer and check each item off against the supplied packing list.
◆
◆◆
◆SC7610 Sputter Coater - packed in its own internal packaging, (Target fitted to Top
Plate).
◆
◆◆
◆SC7610 Class Cylinder – packed separately.
◆
◆◆
◆SC7610 START-UP kit - packed in a polythene bag.
◆Optional Spares - packed individually.
◆Documentation - Inserted in a folder, containing the operating manual and a standard
forms pack.
5.1.1 Preparation
(a) Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps,
frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the
cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is
250VA excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at
16A. The 240V pump outlet uses a 3-pin plug (404440310) which is supplied or 110V
standard US plug (not supplied).
(b) Ensure that a suitable gas supply is available.
Typically: A commerical cylinder of Argon Gas (Zero Grade), fitted with a two stage regulator,
in order to deliver gas at a pressure around 5-10 psi (0.7bar).
(c) Ensure that a suitable cooling water supply is available.
This service is not required, unless the water-cooled stage option is fitted.
Ensure that a suitable supply of cooling water is available, a flow rate of 1 - 3 litres / minute of
clean water is required. If a closed circuit recirculating chiller is used, avoid operating below
dew point.
(d) Ensure that a suitable vacuum pump is available.
Where a rotary pump is used, ensure that the rotary pump has been filled with oil, in
accordance with the manufacturers instructions. The exhaust should be filtered or expelled to
a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.

Installation OM-SC7610
SC7610 Sputter Coater 20 Issue 1
5.2 SC7610 Installation
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Before making / breaking connections to the equipment, ensure power is
switched off and that it is safe to proceed.
WARNING
HAZARD TO HEALTH!
Precautions to be taken when lifting this equipment.
Weight of unit is 25 Kilograms (55lbs)
(a) Position the Sputter Coater Cabinet on a suitable level working surface, Access to both front
and rear of the cabinet are required.
(b) Clean the ‘L’ section gaskets using a cloth moistened with isopropanol and fit to the glass
cylinder, then position the cylinder centrally on the base plate (mounted on top of the
cabinet).
(c) Position the top plate assembly on the glass cylinder.
(d) Position the vacuum pump as close as possible to the Sputter Coater.
5.2.1 Connections
The connections to be made are described below and illustrated in figure 5.1.
(a) Make the following hose connections to the rear panel of the cabinet.
(i) Connect 3mm bore gas tubing (supplied) from argon cylinder regulator to (GAS IN)
hose nipple.
(ii) Connect 20mm bore vacuum tubing (supplied) from the rotary pump to the (VACUUM)
connector. Ensure the minimum length of hose is used.
(iii) If the system is fitted with water cooling make connections to the WATER hose nipples
using 6 mm bore tubing.
(b) Connect the Top Plate assembly to the rear panel of the cabinet using the attached
connectors:
(i) Connect the HV cable, to the HT socket on rear panel.
(ii) Connect the green/yellow (earth) lead, to the GROUND terminal on the rear panel.
(iii) Connect the 3 mm bore gas tubing, to the hose nipple (identified as F3) on the rear
panel.
(c) Make the following electrical connections to the rear panel of the cabinet:
(i) Connect between the sputter coater power outlet (ROTARY PUMP) socket and the
vacuum pump.
If the rotary pump is supplied with the Sputter Coater a suitable connecting cable is
supplied with the pump, otherwise a suitable 3-way plug (which can be wired by the
user) is supplied.
(ii) Connect the mains (POWER IN) cable via a suitable plug to the local supply, in
accordance with the cable colour coding:
Brown - Live
Blue - Neutral
Green/Yellow - Earth