Quorum SC7610 User manual

SC7610 Sputter Coater
Operating Manual
Document Number OM-SC7610
Issue 1 (01/02)

Quorum Technologies Ltd. Company No. 4273003. Registered offices 30/34 North Street Hailsham, East Sussex, England, BN27 1DW
Quorum Technologies Ltd is the owner and manufacture of the range of EM
preparation equipment.
Unit 15A
Euro Business Park
New Road
Newhaven
East Sussex
U.K. tel: ++44(0) 1273 510535
BN9 0DQ fax: ++44(0) 1273 510536
Email : [e-mail]
http:///www.quorumtech.com
For further information regarding any of the other products designed and manufactured by Quorum
Technologies, contact your local representative or directly to Quorum Technologies at the address
above.
•Carbon and Sputter Coaters
•Plasma Reactor for ashing and etching
•High Vacuum Bench Top Evaporators
•Cryo Transfer Systems
•Critical Point Dryers
•Service and Spares
Disclaimer
The components and packages described in this document are mutually compatible and guaranteed to meet
or exceed the published performance specifications. No performance guarantees, however, can be given in
circumstances where these component packages are used in conjunction with equipment supplied by
companies other than Quorum Technologies

OM-SC7610 Contents
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1 Contents
1.1 Manual Layout
This Operating Manual is divided up into the following major section, each chapter dealing with
specific topics, as follows:
Chapter 1 - Contents
Chapter 2 - Health and Safety
General section which applies to all Quorum Technologies products detailing the very
important issues of Health and Safety applicable when using sample preparation
equipment.
Chapter 3 - Introduction
Introduces this manual.
Chapter 4 - General Description
Identifies each of the equipment items and provides an overview of their functions and
how they work.
Chapter 5 - Installation
Instructions on how this Instrument should be installed and the connections which should be
made between the equipment items.
Chapter 6 - Operation
Instructions on how to start-up and run the instrument.
Chapter 7 - Maintenance
Instructions on how to check the system is functioning correctly, and how to change
consumable items. Details of appropriate Spare parts.
Chapter 8 - Fault Finding
Information on how to identify faults in the system and how to rectify these faults.
Chapter 9 - Agents
List of agents supporting Quorum Technologies products.
Chapter 10 - Index

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1.2 Chapter Contents
Chapter 1 - Contents ................................................................................................3
1.1 Manual Layout ................................................................................3
1.2 Chapter Contents ...........................................................................4
1.3 Illustrations .....................................................................................6
1.4 Tables ............................................................................................6
Chapter 2 - Health and Safety .................................................................................7
2.1 Control of Substances Hazardous to Health (COSHH) .................7
2.2 Safety Policy ...................................................................................7
2.3 Conformity ......................................................................................7
2.4 Servicing ........................................................................................8
2.4.1 Disclaimer ...............................................................................8
2.4.2 Operators and Service Engineers ..........................................8
2.5 Hazard Signals and Signs ..............................................................8
2.5.1 Hazard Signal Words .............................................................8
2.5.2 Hazard Labels used on Equipment ........................................8
2.5.3 Hazard Warning Labels used in Equipment Manuals ............9
2.5.4 Instrument Functionality Signs ...............................................9
2.5.5 Serious Damage to Instruments .............................................9
2.5.6 Hazard to Operator .................................................................9
2.6 Risk Analysis ..................................................................................10
2.6.1 Personal Operational Risks ....................................................10
2.6.2 Hazardous Materials ...............................................................10
2.7 Good Working Practices ................................................................11
2.8 SC7610 Sputter Coater Specific Safety Hazards ...........................11
2.8.1 Contamination ........................................................................11
Chapter 3 - Introduction............................................................................................12
3.1 Return of Goods..............................................................................12
3.2 Returns Procedure..........................................................................12
Chapter 4 - Description ............................................................................................13
4.1 Equipment ......................................................................................13
4.1.1 Optional Items ........................................................................13
4.1.2 Accessories ............................................................................13
4.2 Overview ........................................................................................14
4.3 Technical Specification ..................................................................14
4.3.1 SC7610 Sputter Coater Specification .....................................14
4.4 Physical Description .......................................................................15
4.4.1 Operational Description ..........................................................16
4.4.2 Pumping Requirements ..........................................................16
4.5 Interlocks ........................................................................................16
4.6 SC7610 Panel Details ....................................................................17
4.6.1 SC7610, Front Panel Controls ................................................17
4.6.2 SC7610, Rear Panel Connections ..........................................18
Chapter 5 - Installation .............................................................................................19
5.1 Unpacking Checklist ......................................................................19
5.1.1 Preparation .............................................................................19
5.2 SC7610 Installation ........................................................................20
5.2.1 Connections ............................................................................20

OM-SC7610 Contents
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Chapter 6 - Operation ..............................................................................................22
6.1 Test Procedure ...............................................................................22
6.2 Coating Process .............................................................................23
6.3 Coating Specimens ........................................................................23
6.4 Sputtering Rates ............................................................................25
Chapter 7 - Maintenance ..........................................................................................26
7.1 Maintenance - General ..................................................................26
7.2 Cleaning .........................................................................................26
7.2.1 Vacuum Chamber Cleaning ...................................................26
7.3 Target Replacement ......................................................................27
7.3.1 Target Removal ......................................................................27
7.3.2 Refit New Target ....................................................................27
7.4 No Discharge Current ....................................................................28
7.5 Spare Parts.....................................................................................28
Chapter 8 - Fault Finding .........................................................................................29
8.1 Trouble Shooting / Fault Finding ....................................................29
8.2 Fault Prevention .............................................................................29
Chapter 9 - Agents ...................................................................................................30
Chapter 10 - Index ....................................................................................................31

Contents OM-SC7610
SC7610 Sputter Coater 6 Issue 1
1.3 Illustrations
Figure 2.1 - Hazard Warning Symbols .......................................................................8
Figure 2.2 - International Warning Symbols ...............................................................9
Figure 2.3 - Typical Signs as shown in this Manual ....................................................9
Figure 2.4 - Typical Signs as shown in this Manual ...................................................9
Figure 2.5 - Typical Warnings, as shown in this Manual ............................................9
Figure 4.1 - SC7610 Sputter Coater ...........................................................................15
Figure 4.2 - SC7610 Sputter Coater Operation...........................................................16
Figure 4.3 - SC7610 Sputter Coater, Front Panel Controls ........................................17
Figure 4.4 - SC7610 Sputter Coater, Rear Panel Connections ..................................18
Figure 5.1 - SC7610 Connections ..............................................................................21
Figure 6.1 - SC7610 Sputtering Rates .......................................................................25
Figure 7.1 - Target Replacement ...............................................................................27
1.4 Tables
Table 2.1 - Personal Operational Risks ......................................................................10
Table 4.1 - SC7610 Sputter Coater, Front Panel Control Descriptions ......................17
Table 4.2 - SC7610 Sputter Coater, Rear Panel Connection Descriptions ................18
Table 7.1 - Spare Parts ..............................................................................................28
Table 8.1 - Trouble Shooting ......................................................................................29
Table 8.2 - Fault Prevention .......................................................................................29

OM-SC7610 Health and Safety
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2 Health and Safety
Safety is very important when using any instrumentation and this chapter should be read by all
users of our equipment.
This section of the Manual applies to all surface analysis and surface preparation equipment
supplied by Quorum Technologies Polaron range of products, not just the particular instrument for
which the manual refers.
Included in this chapter are details on warning notations, good working practices and information on
European Community (EC) legislation regarding “Control Of Substances Hazardous to Health”
(COSHH) and risk analysis.
2.1 Control of Substances Hazardous to Health (COSHH)
The E.C. legislation regarding the “Control of Substances Hazardous to Health” requires Quorum
Technologies to monitor and assess every substance entering or leaving their premises.
Consequently any returned goods of whatever nature must be accompanied by a declaration form
available from Quorum Technologies, reference number SP-100. Without this declaration Quorum
Technologies reserves the right not to handle the substance/item. Also in accordance with E.C.
regulations we will supply on request hazard data sheets for substances used in our instruments.
2.2 Safety Policy
This section contains important information relating to all health and safety aspects of the
equipment. As such it should be read, and understood, by all personnel using the instrument
whether as an operator or in a service capacity.
Quorum Technologies is committed to providing a safe working environment for its employees and
those that use it's equipment and conducts its business responsibly, and in a manner designed to
protect the health and safety of its customers, employees and the public at large. It also seeks to
minimise any adverse effects that its activities may have on the environment.
Quorum Technologies regularly reviews its operations to make environmental, health and safety
improvements in line with UK and European Community legislation.
The equipment has been designed as free-standing bench mounted instruments. Quorum
Technologies cannot be held responsible for any damage, injury or consequential loss arising from
the use of its equipment for any other purposes, or any unauthorised modifications made to the
equipment.
All service work carried out on the equipment should only be undertaken by suitably qualified
personnel. Quorum Technologies is not liable for any damage, injury or consequential loss resulting
from servicing by unqualified personnel. Quorum Technologies will also not be liable for damage,
injury or consequential loss resulting from incorrect operation of the instrument or modification of
the instrument.
2.3 Conformity
This instrument is supplied in a form that complies with the protection requirements of the EC
Electromagnetic Compatibility Directive 89/336/EEC and the essential health and safety
requirements of the low voltage directive 72/23/EEC both as amended by 92/31/EEC. Any
modifications to the equipment, including electronics or cable layout may affect the compliance with
these directives.

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2.4 Servicing
2.4.1 Disclaimer
All service work on the equipment should be carried out by qualified personnel. Quorum
Technologies cannot be liable for damage, injury or consequential loss resulting from servicing from
unqualified personnel. Quorum Technologies will also not be liable for damage, injury or
consequential loss resulting from incorrect operation of the instrument or modification of the
instrument.
2.4.2 Operators and Service Engineers
A normal operator of the equipment will not be trained in or qualified for service work on the
equipment and may cause a hazard to himself/herself or others if such work is attempted.
Operators should therefore restrict themselves to the normal operation of the equipment and not by
removing covers from the electronic equipment or dismantling of the instruments.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical and vacuum
hazards should be the only personnel who access the equipment.
2.5 Hazard Signals and Signs
2.5.1 Hazard Signal Words
The standard three hazard signal words are defined as follows:
◆DANGER - imminently hazardous situation or unsafe practice that, if not avoided, will
result in death or severe injury.
◆WARNING - potentially hazardous situation or unsafe practice that, if not avoided, could
result in death or severe injury.
◆CAUTION - potentially hazardous situation or unsafe practice that, if not avoided, may
result in minor or moderate injury or damage to equipment.
2.5.2 Hazard Labels used on Equipment
Several hazard symbols may be found on the equipment, they are shown below with their meaning:
Caution, risk of electric shock Caution (refer to accompanying documents)
Easily touched higher temperature parts Warning, risk of electric shock
Figure 2.1 - Hazard Warning Symbols

OM-SC7610 Health and Safety
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2.5.3 Hazard Warning Labels used in Equipment Manuals
The international warning signs used in equipment manuals as shown in Figure 2.2.
Figure 2.2 - International Warning Symbols
Where appropriate these are used when a specific identifiable risk is involved in either using or
maintaining the instrument. These take the form of warning triangles or signs with a graphical
description of the hazard.
2.5.4 Instrument Functionality Signs
CAUTION
Do NOT depress button “P” as this will change the program
Figure 2.3 - Typical Warning sign as shown in this Manual
This typical sign applies to cautions where there is a risk to the functionality of equipment due to
incorrect operation. These cautions or warnings will be contained in a box and be accompanied by
a circular warning symbol as shown in Figure 2.3.
2.5.5 Serious Damage to Instruments
WARNING
Do NOT operate without first filling the reservoir with water as
this will damage both the pump and the heater.
Figure 2.4 - Typical Warning sign as shown in this Manual
This typical caution sign is used where serious damage will be caused by incorrect operation of
instrumentation. They will follow the same form as functionality warnings but with a triangular
warning symbol as shown in Figure 2.4.
2.5.6 Hazard to Operator
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Before making / breaking connections to the equipment, ensure power
is off and that it is safe to proceed.
Figure 2.5 - Typical Warning as shown in this Manual
These warnings will generally occur in relevant installation and maintaining sections where there
exists a potential hazard to the engineer working on the instrument. They will take the form of the
triangular warning symbol accompanied by an international warning sign and bold type lettering
beginning with “WARNING-HAZARD TO HEALTH!” as shown in Figure 2.5.

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2.6 Risk Analysis
2.6.1 Personal Operational Risks
The following is a list of tasks carried out by both the operator and service engineer where
recognised risks have been observed, listed is the personnel protection equipment (PPE) which is
suggested for use for various tasks on any surface analysis equipment and systems:
Task Carried out by Nature of Hazard Recommended PPE
Cleaning of parts /
samples with
isopropanol (IPA)
Operator / Service
engineer Splash hazard to eyes, drying of skin Protective goggles, protective gloves.
Use of Liquid
Nitrogen in sample
cooling etc.
Operator / Service
engineer Burn risk Thermally protective gloves and goggles should be worn.
Lifting of Heavy Items Service engineer Dropping on foot. Protective footware.
Table 2.1 - Personal Operational Risks
2.6.2 Hazardous Materials
◆Isopropanol (IPA)
For certain service tasks isopropanol is suggested for cleaning components before use in the
vacuum system. It should be noted that isopropanol is a flammable liquid and as such should
not be used on hot surfaces. In addition it is recommended that protective gloves are worn
when using isopropanol.
◆Compressed Air
Compressed air can be a potential hazard if handled inappropriately. A compressed air line
may be fed from some instruments to the customers supply, and the customer should ensure
that this and any other service pipes and cables are maintained in good condition.
◆Nitrogen, Argon and Helium Gas Supplies
Instruments may use nitrogen, argon or helium gas supplies for their operation, the customer
is responsible for maintaining the supply to the instrument. This supply should be regulated
and kept to the lowest pressure and flow rate as is practical to minimise the effects of any
leaks.
◆Hazardous Gases
Quorum Technologies has no control over the gases used within the system. It is therefore
viewed as the customers responsibility to assess the hazards involved and take appropriate
precautions when using explosive, toxic or corrosive gases or gases which may result in
hazardous products as a result of a chemical reaction.