rbd instruments IG2 User manual
IG2 Manual
(For Use With the 32-175 Control)
RBD Instruments, Inc.
2437 NE Twin Knolls Dr
Suite 2
Bend, OR 97701
541-330-0723
WWW.RBDINSTRUMENTS.COM
1
Table of Contents
....................................................................................................................................2
Limited Warranty...............................................................................................................................3
IG2 .................................................................................................................................3
RBD Model 04- .....................................................................................5
04-......................................................................................................................5
04- ..............................................................................................................................6
RBD Model 32-175 2 kV Ion Source Control ....................................................................................7
32-17......................................................................................................................7
Unpacking the IG2 ............................................................................................................................8
.............................................................................................................................9
-165 Ion Source..........................................................................................................9
04-165 Ion Source Control...........................................................................................10
..................................................................................................10
-175 Controller...............................................................................11
32-.......................................................................................11
--165 Ion Source ................................................................................12
--165 Ion Source.............................................................12
..............................................................................................12
Using the 04-165 with a PHI 20-045 Control ..................................................................................13
Using the 32-175 with a PHI 04-161 or PHI 04-162 Ion Source......................................................13
IG2-EAPR Equipment Aligner ..........................................................................................................13
....................................................................................................................14
Appendix – Cable Diagrams ............................................................................................................14
2
Authorized Personnel
•
•
•
t.
3
Limited Warranty
Customer Remedies
No Liability for Damages
-
Product Service
4
5
-
-17
---
32-17-
----
-17
RBD Model 04-
--
-5
K
-
-to-
-
04-165 Specifications
Specification
Description
Source Type
Hot electron
Beam Energy
.5 to 2
Minimum Beam Diameter
» at 25 mm working distance
2.5
» at 50 mm working distance
3.5
Maximum Total Target Current
B= 2
Maximum Current Density
» at 25 mm working distance
2 B
= 2
» at 50 mm working distance
2 B
= 2
Mounting
CF OD, ID
Flange to End of Optics
or less -
Working Distance
50 end--optics-to-
6
04-165 Diagram
-
04-165 X-Y
-
7
Model 32-175 2 kV Ion Source Control
32-175 2 Ion Source Control currents
-16 -
or .
current, to ensure
conditions.
32-175 Specifications
Specification
Description
Input Power
120 or 230 @ 47-63
Output Voltage
.5
Ripple-to-Noise
-to-
Focus Voltage
0 to 100%
Front Panel Controls
» Beam Control
» Beam Voltage Control 4-position
» Focus Voltage Control 1-turn
» Filament Current Control 10-turn
Remote Input (on Back Panel); BNC-
type connector
= ON
Filament Current Limit
2.5 A
Filament Voltage
1.7 A
Front Panel Emission Current Monitor
Cooling
Dimensions
Unpacking the IG2
1.
2.
3.
541-330-0723 or e-
•04-165 Ion Source
•32-175 Control
•-
•AC Power Cord
• -
9
Install the 04-165 Ion Source
1. -165.
pins on 04-165 ion source.
pins to B B to less 1
c. All
d. All pins -
Pin
Description
A
B
C
D Focus
E
F
10
2. port into ion
source.
3. Insert .
4. ion source .
5. -
165.
Install the 32-175 Ion Source Control
1. -
.
2. ---
3. C -
DO NOT TURN ON THE POWER to the 32-.*
4. -
c.
d.
5. -
6. The IG2 is now ready for use.
* It is recommended that the AC power to the 32-175 is interlocked to your ion gauge so that
the 32-175 cannot be turned on if your vacuum chamber is up to air.
Remote Switching of the Ion Beam
-175. A low -
ON, high will turn OFF.
11
32-175 Controller
32-175 Front Panel Controls and Meter
•Main power ON / OFF-
•Beam voltage ON / OFF / Remote Switch
In the remote mode TTL low (or shorted relay contacts) = Beam ON
•Beam Voltage KnobSets
•Focus
•
•Emission Meter: D
-gassing of the 04-165 Ion Source
IG2 packages and 04-
procedure performed. If the 04-165 Ion Source is up-to-
NOTE: Before outgassing the 04-165 ion source the vacuum chamber needs to be baked out to
remove water vapor from the ion source.
If at any me during out-gassing the emission meter starts to climb rapidly, turn the Emission
Potenometer down unl the emission current stabilizes. Then resume the procedure.
1. -
s
2.
3. -
4.
. Watch the
meter – if it spikes, turn down immediately unl you are back between 1 and 2 mA.
5.
6.
12
7.
9.
10.
11.
12.
13.
14. -
15. -
The 32-175 and 04-165 ion source are now ready to operate
-175 Control and 04-165 Ion Source
1.
2.
3.
4.
5. -to 6 X 10-5 To rr.
6.
7. -
Ion Beam Diameter (Focus)
Method 1 - Measure the Target Current:
32-
Method 2 – Focus on a Phosphor Sample:
-175 Focus
de-
d.
13
Using the 04-165 with a PHI 20-045 Control
--045 -
current, not 25 04- in 04-165 is
so
Using the 32-175 with a PHI 04-161 or PHI 04-162 Ion Source
32-15 is used 04-161 or 04-162 in it is used RBD 04-165.
IG2-EAPR Equipment Aligner
- -Y
----
2.25 Note -EAPR ID
---
2.75- CF on large ID
unit is to its own standard X-Y
- EAPR.
-EAPR is C.
to Connect RBD PHI
RBD 04-165 RBD 32-175, use -CA1 is included
Between These Components
RBD Part Number
RBD 32-175 and PHI 04-161/04-162
-CA2
RBD 04-165 and PHI 20-045
-CA3
14
Principles of Operation
--175 Ion Source
-
to sputter- inert-
ions. ion
- -
sputter- solid In test is to
pressure 10-5 torr inert ions electron
ion ions
is is no
direct line to
on -175 Ion Source Control. Focus, selection,
selection, controlled ion control.
Appendix – Cable Diagrams
included is in We
04--17
.
15
16
17
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