SCS G3 Series User manual

G3 Spin Coater Series
Model G3P-8
Operator’s Manual
System Serial Number; ________________
Prepared for: ________________________
Make certain that everyone associated with this machine
becomes knowledgeable about the material contained in this manual
before using the equipment.
7645 Woodland Drive, Indianapolis, IN 46278-2707
Customer Service: P317. 244.1200 F317.240.2073
E [e-mail]
COPYRIGHT SPECIALTY COATING SYSTEMS

7645 WOODLAND DRIVE,
-
INDIANAPOLIS, IN 46278
-
2707
–
PH. 800
-
356
-
8260
VOLTS
AMPS
PHASE
HZ
INT. CAPACITY
AMP MFG. DATE
SCHEMATICS
MODEL NO.
SERIAL NO.
G3P
-
8

05/27/10

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER TABLE OF CONTENTS I
TABLE OF CONTENTS
SECTION 1 SAFETY.....................................................................................................................1
1.1 STANDARDS STATEMENT ....................................................................................................1
1.2 GENERAL HAZARDS ..............................................................................................................1
1.2.1 Hazard Icons.......................................................................................................................2
1.3 POWER CORD (SHOCK) SAFETY..........................................................................................2
1.4 SERVICING...............................................................................................................................2
SECTION 2 OVERVIEW..............................................................................................................3
2.1 DESCRIPTION..........................................................................................................................3
SECTION 3 SPECIFICATIONS....................................................................................................5
SECTION 4 INSTALLATION.......................................................................................................7
SECTION 5 OPERATION.............................................................................................................9
5.1 PRE-START...............................................................................................................................9
5.2 FACILITIES PANEL .................................................................................................................9
5.3 VACUUM CHUCK..................................................................................................................10
5.4 LID...........................................................................................................................................10
5.5 PROGRAMMING THE G3P....................................................................................................11
5.5.1 G3P Control Panel............................................................................................................11
5.5.2 G3P Programming............................................................................................................12
5.5.3 Programming Hints and Tricks..........................................................................................13
5.5.4 Recipe Example.................................................................................................................14
5.6 SELECTING A PROGRAM TO RUN......................................................................................16
5.7 RUNNING ...............................................................................................................................16
5.8 ERROR MESSAGES ...............................................................................................................17
5.9 TROUBLESHOOTING............................................................................................................18
5.10 SHUTDOWN...........................................................................................................................18
SECTION 6 MAINTENANCE.....................................................................................................19
6.1 CLEANING..............................................................................................................................19
6.2 DRAIN OPTION...................................................................................................................... 19
6.3 MAINTENANCE SCHEDULE................................................................................................19
6.4 VACUUM SWITCH ADJUSTMENT ......................................................................................20
6.5 FLOW SWITCH ADJUSTMENT.............................................................................................20
6.6 CHANGING THE FUSES........................................................................................................21
SECTION 7 REPLACEMENT PARTS........................................................................................23
OPTIONAL VACUUM CHUCKS........................................................................................................ 23
APPENDIX 27
LIMITED WARRANTY POLICY........................................................................................................27

Rev 13 Operator’s Manual OM-812-1027
II TABLE OF CONTENTS G3P-8 SPIN COATER
FORMS.................................................................................................................................................29
About You….......................................................................................................................................29
About the Equipment… ...................................................................................................................... 29
About Us…........................................................................................................................................ 29
VENDOR LITERATURE.....................................................................................................................31
DRAWINGS.........................................................................................................................................33
INDEX .................................................................................................................................67

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER TABLE OF CONTENTS III
TABLE OF FIGURES
Figure 5-1: Facilities (Back) Panel...........................................................................................................9
Figure 5-2: G3P Control Panel...............................................................................................................11
Figure 5-3: G3P Display........................................................................................................................12
Figure 5-4: Example G3P Program........................................................................................................15
Figure 6-1: Vacuum Switch Adjustment ................................................................................................20
Figure 6-2 Fuse Replacement ................................................................................................................21

Rev 13 Operator’s Manual OM-812-1027
IV TABLE OF CONTENTS G3P-8 SPIN COATER

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 1: SAFETY 1
SECTION 1 SAFETY
1.1 STANDARDS STATEMENT
This equipment is designed to be used as described here. Operator safety and safe reliable product
coating were key elements in the design. The equipment complies with all applicable sections of the
NFPA article 79, the National Electric Code (NEC). All commercially standard components used in this
machine have a minimum of UL and/or CSA ratings. Components built to CE standards have been used
wherever possible. Any local or regional certifications required above and beyond the aforementioned
are the responsibility of the customer.
1.2 GENERAL HAZARDS
WARNING: Improper operation or service of this equipment can result in serious
injury or death. Read and understand this manual before operating or servicing
this equipment.
DANGER: This machine is not classified as "Intrinsically Safe." DO NOT use the G3 series
spin coater in the presence of an explosive atmosphere.
DANGER: Use only under an exhaust hood.
WARNING: To avoid severe injury, do not touch or hold the shaft or chuck while it is rotating.
WARNING: Purging is required as a safety factor to fill the interior of the machine and exclude
dangerous gasses. N2or clean, dry air can be used when purging.
WARNING: In case of a "Motion Error" (see page 17) the motor will spin freely, and will not
be stopped by opening the lid. Wait until you are sure the chuck has stopped spinning before you
open the lid.
WARNING: Do not operate without lid in place to protect operator and others from injury as
wafers or wafer parts may fly off rotating chuck.
WARNING: To avoid electrical shock or injury, do not remove lid or try to access any internal
parts, while machine is still plugged in. Before servicing the G3, DISCONNECT power cord
from outlet and wait 10 minutes (high voltage may exist in the machine for some time after
removal of power).
CAUTION: The G3 series spin coater uses a ground type power plug, which must be connected
to a grounded outlet to prevent electrical shock.
IMPORTANT: Do not operate the spin coater with the drain hose disconnected or drained
material may not go where it should.
IMPORTANT: If the machine is purchased with an external vacuum pump, you must add oil
to the pump. Let the pump sit for six hours with the oil prior to starting the pump. See the pump
manual for additional details. Pump seals will burn out if proper instructions are not followed.
CAUTION: Do not lift the machine using the control panel (keyboard) as a handle. Doing so
could damage the machine and cause injury.
CAUTION: Consult your Material Safety Data Sheets for information about any chemicals you
use in your process, and their possible toxicity or reaction with the spin coater bowl or drain.

Rev 13 Operator’s Manual OM-812-1027
2SECTION 1: SAFETY G3P-8 SPIN COATER
1.2.1 HAZARD ICONS
The following symbols may occur at points throughout the rest of the manual. Note and read each
warning before attempting any operations associated with it.
This symbol warns of the potential for an ELECTRICAL SHOCK.
This symbol signifies a GENERAL WARNING, which accompanying text will explain.
1.3 POWER CORD (SHOCK) SAFETY
Emergency Power Disconnect options: Use the power cord as a disconnecting device.
To facilitate disconnect, make sure the power outlet for this cord is readily accessible to the
operator.
NOTE for international users: Select the plug that is rated for the supply circuit voltage that is available.
The supply circuit must be overcurrent protected at a value not exceeding 6 amps.
1.4 SERVICING
Before servicing, remove all power. NOTE: High voltage may still be present after
shutdown and disconnecting line power. Allow machine to set without power for 10
minutes before servicing. If it becomes necessary to perform diagnostic service while
certain areas of the machine still have power, use only qualified personnel. Follow all
normal industrial safety practices when dealing with electrical components. Review and
understand the electrical schematic before attempting any electrical diagnostic service.