SCS G3 Series User manual

G3 Spin Coater Series
Model G3P-8
Operator’s Manual
System Serial Number; ________________
Prepared for: ________________________
Make certain that everyone associated with this machine
becomes knowledgeable about the material contained in this manual
before using the equipment.
7645 Woodland Drive, Indianapolis, IN 46278-2707
Customer Service: P317. 244.1200 F317.240.2073
E [e-mail]
COPYRIGHT SPECIALTY COATING SYSTEMS

7645 WOODLAND DRIVE,
-
INDIANAPOLIS, IN 46278
-
2707
–
PH. 800
-
356
-
8260
VOLTS
AMPS
PHASE
HZ
INT. CAPACITY
AMP MFG. DATE
SCHEMATICS
MODEL NO.
SERIAL NO.
G3P
-
8

05/27/10

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER TABLE OF CONTENTS I
TABLE OF CONTENTS
SECTION 1 SAFETY.....................................................................................................................1
1.1 STANDARDS STATEMENT ....................................................................................................1
1.2 GENERAL HAZARDS ..............................................................................................................1
1.2.1 Hazard Icons.......................................................................................................................2
1.3 POWER CORD (SHOCK) SAFETY..........................................................................................2
1.4 SERVICING...............................................................................................................................2
SECTION 2 OVERVIEW..............................................................................................................3
2.1 DESCRIPTION..........................................................................................................................3
SECTION 3 SPECIFICATIONS....................................................................................................5
SECTION 4 INSTALLATION.......................................................................................................7
SECTION 5 OPERATION.............................................................................................................9
5.1 PRE-START...............................................................................................................................9
5.2 FACILITIES PANEL .................................................................................................................9
5.3 VACUUM CHUCK..................................................................................................................10
5.4 LID...........................................................................................................................................10
5.5 PROGRAMMING THE G3P....................................................................................................11
5.5.1 G3P Control Panel............................................................................................................11
5.5.2 G3P Programming............................................................................................................12
5.5.3 Programming Hints and Tricks..........................................................................................13
5.5.4 Recipe Example.................................................................................................................14
5.6 SELECTING A PROGRAM TO RUN......................................................................................16
5.7 RUNNING ...............................................................................................................................16
5.8 ERROR MESSAGES ...............................................................................................................17
5.9 TROUBLESHOOTING............................................................................................................18
5.10 SHUTDOWN...........................................................................................................................18
SECTION 6 MAINTENANCE.....................................................................................................19
6.1 CLEANING..............................................................................................................................19
6.2 DRAIN OPTION...................................................................................................................... 19
6.3 MAINTENANCE SCHEDULE................................................................................................19
6.4 VACUUM SWITCH ADJUSTMENT ......................................................................................20
6.5 FLOW SWITCH ADJUSTMENT.............................................................................................20
6.6 CHANGING THE FUSES........................................................................................................21
SECTION 7 REPLACEMENT PARTS........................................................................................23
OPTIONAL VACUUM CHUCKS........................................................................................................ 23
APPENDIX 27
LIMITED WARRANTY POLICY........................................................................................................27

Rev 13 Operator’s Manual OM-812-1027
II TABLE OF CONTENTS G3P-8 SPIN COATER
FORMS.................................................................................................................................................29
About You….......................................................................................................................................29
About the Equipment… ...................................................................................................................... 29
About Us…........................................................................................................................................ 29
VENDOR LITERATURE.....................................................................................................................31
DRAWINGS.........................................................................................................................................33
INDEX .................................................................................................................................67

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER TABLE OF CONTENTS III
TABLE OF FIGURES
Figure 5-1: Facilities (Back) Panel...........................................................................................................9
Figure 5-2: G3P Control Panel...............................................................................................................11
Figure 5-3: G3P Display........................................................................................................................12
Figure 5-4: Example G3P Program........................................................................................................15
Figure 6-1: Vacuum Switch Adjustment ................................................................................................20
Figure 6-2 Fuse Replacement ................................................................................................................21

Rev 13 Operator’s Manual OM-812-1027
IV TABLE OF CONTENTS G3P-8 SPIN COATER

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 1: SAFETY 1
SECTION 1 SAFETY
1.1 STANDARDS STATEMENT
This equipment is designed to be used as described here. Operator safety and safe reliable product
coating were key elements in the design. The equipment complies with all applicable sections of the
NFPA article 79, the National Electric Code (NEC). All commercially standard components used in this
machine have a minimum of UL and/or CSA ratings. Components built to CE standards have been used
wherever possible. Any local or regional certifications required above and beyond the aforementioned
are the responsibility of the customer.
1.2 GENERAL HAZARDS
WARNING: Improper operation or service of this equipment can result in serious
injury or death. Read and understand this manual before operating or servicing
this equipment.
DANGER: This machine is not classified as "Intrinsically Safe." DO NOT use the G3 series
spin coater in the presence of an explosive atmosphere.
DANGER: Use only under an exhaust hood.
WARNING: To avoid severe injury, do not touch or hold the shaft or chuck while it is rotating.
WARNING: Purging is required as a safety factor to fill the interior of the machine and exclude
dangerous gasses. N2or clean, dry air can be used when purging.
WARNING: In case of a "Motion Error" (see page 17) the motor will spin freely, and will not
be stopped by opening the lid. Wait until you are sure the chuck has stopped spinning before you
open the lid.
WARNING: Do not operate without lid in place to protect operator and others from injury as
wafers or wafer parts may fly off rotating chuck.
WARNING: To avoid electrical shock or injury, do not remove lid or try to access any internal
parts, while machine is still plugged in. Before servicing the G3, DISCONNECT power cord
from outlet and wait 10 minutes (high voltage may exist in the machine for some time after
removal of power).
CAUTION: The G3 series spin coater uses a ground type power plug, which must be connected
to a grounded outlet to prevent electrical shock.
IMPORTANT: Do not operate the spin coater with the drain hose disconnected or drained
material may not go where it should.
IMPORTANT: If the machine is purchased with an external vacuum pump, you must add oil
to the pump. Let the pump sit for six hours with the oil prior to starting the pump. See the pump
manual for additional details. Pump seals will burn out if proper instructions are not followed.
CAUTION: Do not lift the machine using the control panel (keyboard) as a handle. Doing so
could damage the machine and cause injury.
CAUTION: Consult your Material Safety Data Sheets for information about any chemicals you
use in your process, and their possible toxicity or reaction with the spin coater bowl or drain.

Rev 13 Operator’s Manual OM-812-1027
2SECTION 1: SAFETY G3P-8 SPIN COATER
1.2.1 HAZARD ICONS
The following symbols may occur at points throughout the rest of the manual. Note and read each
warning before attempting any operations associated with it.
This symbol warns of the potential for an ELECTRICAL SHOCK.
This symbol signifies a GENERAL WARNING, which accompanying text will explain.
1.3 POWER CORD (SHOCK) SAFETY
Emergency Power Disconnect options: Use the power cord as a disconnecting device.
To facilitate disconnect, make sure the power outlet for this cord is readily accessible to the
operator.
NOTE for international users: Select the plug that is rated for the supply circuit voltage that is available.
The supply circuit must be overcurrent protected at a value not exceeding 6 amps.
1.4 SERVICING
Before servicing, remove all power. NOTE: High voltage may still be present after
shutdown and disconnecting line power. Allow machine to set without power for 10
minutes before servicing. If it becomes necessary to perform diagnostic service while
certain areas of the machine still have power, use only qualified personnel. Follow all
normal industrial safety practices when dealing with electrical components. Review and
understand the electrical schematic before attempting any electrical diagnostic service.

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 2: OVERVIEW 3
SECTION 2 OVERVIEW
2.1 DESCRIPTION
The G3 series is family of compact spin coaters for low production spin coating applications and
experimentation.
The G3's provide the ability to hold your product wafer with a vacuum chuck and spin that chuck at
precise speeds and for controlled periods of time. Operations are extremely repeatable and are settable to
0.1 second. The chuck is indexed back to its initial position at the end of each cycle, so that each wafer
may be oriented the same way on the chuck. See §3 for actual specifications.
Operation of the spin coater is controlled by a custom-designed controller. During a cycle, the product
recipe number, spinning speed, and remaining time are displayed on a user interface screen. The
acceleration and deceleration rates are calculated by the controller to provide various ramp profiles.
Programmable machines have provisions to connect a foot pedal as a starter.
The G3 (without the "P") holds a single recipe at a time. The recipe determines ramp up time, speed and
dwell time at speed, and ramp down time. The G3 is available in the 8-inch bowl size only.
The G3P can store up to 30 product recipes (programs). Each recipe offers a single setup step plus 20
action steps, with each action step including the ability to specify RPM 1) a speed to attain; ramp 2) how
quickly to change to that speed; and dwell 3) how log to remain at the desired speed.
In addition, if the optional equipment is present, the G3P's steps can control dispense switching and
timing for each of four optional external operations (dispense coating material, dispense solvent, N2
release, and edge bead removal). Switching begins at the start of the step’s Dwell. The machines are
available in bowl sizes of 8, 12, and 15 inches. Also available are interchangeable vacuum chucks.
Use of this machine for anything but its intended purpose may create a safety hazard and voids the
equipment warranty.

Rev 13 Operator’s Manual OM-812-1027
4SECTION 2: OVERVIEW G3P-8 SPIN COATER

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 3: SPECIFICATIONS 5
SECTION 3 SPECIFICATIONS
The G3P-8 spin coater can store 30 recipes with a maximum of 20 action steps each.
Speed 0—9999 RPM
Acceleration/ Deceleration <1—25.5 Seconds (in 0.1 Sec. Increments)
Dwell (Spin Time) each step Up to 999 Seconds (in 1.0 Sec. Increments)
Dispense (switch) times (†) <1—10 seconds (in 0.1-Sec. Increments)
Dimensions 11.8" H (30 cm)
12.0" W (30.5.6cm)
16.5" D (41.9cm)
Weight 38 Lbs. (17.3kg)
Power Input 115/230VAC, 1 Phase, 300VA
Vacuum Input (required) 430 to 635 mm Hg
(17" to 25" Hg)
Purge Input (required) 0.55 scfm - at 2 psi (N2or clean, dry air)
5 psi maximum (external)
OR 2.2 scfm @ 60 to 80 psi if using internal vacuum pump
Drain 0.75” OD outlet at rear of machine
Optional Features:
Foot Switch
External Vacuum Pump (external) 115VAC 60Hz / 230VAC 50 Hz
5.5A 1 Phase
Internal Vacuum Pump Pneumatically powered
Manual Dispense Bar
Computer Interface for Programming and Operation.
Single point manual dispensing unit with syringe
Additional Specifications:
It is recommended that a shut-off valve be installed upstream of the unit on the N2or clean, dry
air supply. SCS does not supply a shut-off valve.
The spin coater will not operate without vacuum.
For safety reasons, the machine will not power up without a purge flow of at least 0.55 scfm of
N2or clean, dry air.
Purging (using N2or clean, dry air) is required as a safety factor to fill the interior of the machine
with inert N2or clean, dry air and exclude dangerous gasses.

Rev 13 Operator’s Manual OM-812-1027
6SECTION 3: SPECIFICATIONS G3P-8 SPIN COATER

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 4: INSTALLATION 7
SECTION 4 INSTALLATION
Note for international applications: The spin coater is provided to international users with an
unterminated power cord so that the appropriate power plug (non-locking 250V, 10A), may be attached.
The plug must meet the requirements of IEC227 or IEC245. NOTE: The supply circuit must be
overcurrent protected at a value not exceeding 6 amps.
Do not apply power until all other connections have been made.
•Place the machine on a solid, level surface, free from vibration and temperature extremes. For
optimum performance, make sure the chuck is level.
•Refer to the Specifications section or to the nameplate on the machine for electrical requirements.
•Position the bowl with its drain hole aligned over the drainway.
•The machine will not operate without purging N2or clean, dry air (0.55 scfm) connected to the
“N2” port in the back of the machine. Purging N2or clean, dry air is required as a safety factor to
fill the interior of the console and exclude dangerous gasses.
•Vacuum (internal or external) is also required for the machine to operate. Connect external
vacuum to the “Vacuum” port on the Utility Panel, or use the optional pneumatic-powered
vacuum pump.
•Install and connect options before connecting the spin coater power
•NOTICE: See startup instructions for the optional external vacuum pump in the technical
section. Improper oil levels may damage the pump. After filling, let the pump sit for six hours
before using it.
Note that the machine is not for use in a hazardous atmosphere.

Rev 13 Operator’s Manual OM-812-1027
8SECTION 4: INSTALLATION G3P-8 SPIN COATER

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 5: OPERATION 9
SECTION 5 OPERATION
This machine is designed for use in a normal laboratory or manufacturing working environment. In
addition, the installation should be free from temperature extremes and vibration.
5.1 PRE-START
1. Connect the N2or clean, dry air purge supply and vacuum (if the optional internal pneumatic-
powered vacuum pump is used, only the N2or clean, dry air purge is needed).
NOTE: The machine will not operate without the vacuum and N2or clean, dry air purge.
2. Connect any optional devices: footswitch, dispensers, N2, etc.
3. Attach power cord (spin coater, and external vacuum pump if so equipped) to properly grounded
outlet. (See technical section, and pump operation instructions for starting the vacuum pump.)
4. Verify that the vacuum chuck is secure.
5. Turn power On using the POWER switch located on the rear panel.
Remember that the machine will not run unless programmed, and that the top must be opened and closed
before each cycle (indicating that material has been placed in the spin coater).
5.2 FACILITIES PANEL
FOOTSWITCH/ DISPENSER:
1. Accepts a foot pedal/switch (if desired, to start the cycle).
Figure 5-1: Facilities (Back) Panel
Fuse F1
Pry Slot
Voltage
Indicator
Window
Power
Switch
Computer
Interface

Rev 13 Operator’s Manual OM-812-1027
10 SECTION 5: OPERATION G3P-8 SPIN COATER
2. On the G3P spin coater only, provides control signals for an (optional) unit for dispensing materials
during the cycle. Note: On the G3P, the foot pedal may be connected through the dispenser.
FUSE/VOLTAGE SLOT
Use this for access to the F1 Fuse Carrier.
POWER SWITCH
The switch turns the machine power ON and OFF.
FUSE F1:
Line fuse. Replace with an exact electrical equivalent only.
FUSE F2:
Secondary (70 VDC) fuse. Replace with an exact electrical equivalent only.
FUSE F3:
Secondary (18.5 VDC) fuse. Replace with an exact electrical equivalent only.
COMPUTER INTERFACE
A projected future option that would allow access to programming and operation directly from computer.
VACUUM:
The external vacuum supply connects here, using 1/4" OD tube fitting (430 to 635 mm Hg or 17 to 25
inches Hg). NOTICE: The machine will not complete a cycle without vacuum or the optional vacuum
pump.
If the optional internal vacuum pump is present, this port becomes the exhaust port for that pump (and
external pumps cannot be used).
NOTICE: See startup instructions for optional vacuum pump in the technical section. Improper oil levels
may damage pump. After filling, let the pump sit for six hours before using the pump.
N2 SUPPLY:
This is the connection for the N2or clean, dry air supply to maintain positive pressure in the enclosure
(0.55 scfm at 2 psi nitrogen or clean, dry air). NOTICE: The machine will not operate without N2or
clean, dry air.
5.3 VACUUM CHUCK
The chucks are machined to close tolerances and provide an exceptionally flat, rigid surface for mounting
wafers of different sizes, weights, and shapes. The cross scroll pattern distributes the vacuum over the
chuck surface to hold the wafer while spinning at high RPM. This pattern also allows rapid vacuum
release.
Proper chuck selection should be based upon wafer size and rigidity. The proper chuck diameter is 1/4 to
1 inch (0.6 to 2.5cm) smaller than the wafer diameter. The entire wafer should be supported if it is
flexible, fragile, or when it is to be wiped or brushed during cleaning.
Proper centering is done manually, but the use of templates and measurements can aid in this operation.
Chuck size and weight affect the spin coater. You must program the chuck size into the recipes for the
programmable spin coater, in "Step 0." See §5.5.2 and §5.5.4.
5.4 LID
The lid has an Open/Close switch. You cannot run a recipe with the lid open. In addition, you must open
the lid after each cycle is completed. This helps the operator avoid accidentally dispensing twice on the

OM-812-1027 Operator’s Manual Rev 13
G3P-8 SPIN COATER SECTION 5: OPERATION 11
same wafer. If the lid is opened during a cycle, electronic breaking will be applied*. If a dispense action
is in process, it will be terminated.
*In rare instances (heavy chuck, high rotation speed) a "Motion Error" may occur; the chuck will then
coast to a stop. This does not damage the machine.
5.5 PROGRAMMING THE G3P
With the G3P programmable spin coater, you can enter multiple recipes and direct it to do complex
operations.
5.5.1 G3P CONTROL PANEL
•MODE: This pushbutton moves the G3P between the Program/Edit mode and the Run mode.
Each time you press it, you change to the other mode.
In the Run mode, the following G3P spin coater controls are active:
•START: This pushbutton starts a cycle, if all conditions are correct. (For example, the G3P must
be in the run mode, the vacuum and purge N2sensors must be satisfied, and it may be necessary
to open and close the load lid.)
•CLR-ERROR: If the machine is in the error mode, it will not reset or run. This pushbutton
clears (resets) a machine error so that the MODE and START buttons become active again.
•STOP: This pushbutton will stop rotation even if the G3P is in mid-cycle. NOTE: If the chuck
and wafer have unusually great momentum, a Motion Error may occur and the electronic
Figure 5-2: G3P Control Panel

Rev 13 Operator’s Manual OM-812-1027
12 SECTION 5: OPERATION G3P-8 SPIN COATER
breaking may fail; the chuck will coast to a halt. Do not open the lid until you are sure the
rotation has stopped completely.
In the Program/Edit mode, the following G3P controls are active. You are able to enter new recipes
and modify the settings of existing recipes.
•ENTER: This pushbutton "enters" (stores) the data you just entered and advances the cursor to
the next control block. It is important to use ENTER in order to make sure the data is stored in
the recipe. (Without ENTER, the data is ignored.)
•The and ("Set Values"): Like the basic G3, the G3P has arrows that cause the control
variables (seconds or RPM) to increase or decrease. (Press and hold to get bigger changes; the
counter will speed up.)
•The and ("Navigation"): These arrows can move the cursor to the next/previous data block.
NOTE: The arrows are best used when moving around in a recipe to find an item you wish to
change; always use the ENTER button after entering/changing an item, so that the data is stored.
5.5.2 G3P PROGRAMMING
In the Program/Edit mode (see Mode key, above), you can make and save up to 30 recipes (programs,
cycles), and program up to 20 steps into each recipe. A step consists of setting up to five variables
(Ramp, RPM, Dwell, Disp., and Time). See the following and the
example (Figure 5-4). In the following, the text explains each
display item, then the points out how to use that item.
NOTE that you must program for the size of chuck being used; this
affects speed control parameters. Do this by setting the size in
Step 0 (mentioned in the following steps).
1. Enter the Program/Edit mode by pressing the MODE button.
A pointer will appear in the display, next to Recipe. (See the
figure to the right.)
2. Recipe:(30 Recipes, identified by number) Select any recipe number to edit its variables or create a
new set from scratch. [NOTE: To remove all the old programming from a recipe, select the recipe
number and press CLR/ERROR, then press ENTER.]
Use the and to select a recipe number, then press ENTER. The recipe number will be
entered and the pointer will move to Step.
3. Step: (Step 0* plus 20 steps) Each step contains 5 variables, or commands, that you use to program
the spin coater (Ramp, RPM, Dwell, Disp, & Time). Steps are executed in order from 1 to 20;
unlike computer programming, there are no "Do Loops" or "Jump To" commands. (If you don't need
all 20 steps, refer to Programming Hint #2, on the following page.)
The step number will normally increment properly as you program, and won't require changing;
You accept the step # by pressing ENTER and the pointer will move to Ramp. [If you wish to
modify any step, you can simply use the and to set the Step number to the desired step and then
move with the and to any item in that step and change it. Always press ENTER to make sure
the changes are actually stored.]
4. Ramp: (0 to 25.5 seconds) This number tells the spin coater how many seconds to take to accelerate
or decelerate to the new speed (RPM). If Ramp is set to zero, the spin coater will try to comply; but
if the required change of speed is too great, a Motion Error may occur (see "Error Messages," page
17).
Figure 5-3: G3P Display
>
Recipe: _____
Step:_____ Ramp:_____
RPM: _____ Dwell:_____
Disp:_____ Time: _____
Pointer