SevenStar CS210-C MFC User manual

Security: Unclassified
CS210-C MFC/MFM
User’s Manual
2022.11

Contents
SECTION 1 INTRODUCTION
1.1 Declaration.................................................
1
3.4 Soft-Start ......................................................
22
1.2 Attention....................................................
2
3.5 Delay.............................................................
22
1.3 The notice of safety....................................
2
3.6 Valve Command Mode .................................
22
1.4 General.......................................................
3
3.7 Valve Type.....................................................
22
1.5 Specification...............................................
5
3.8 Multi-Gas and Multi-Flow............................
23
1.6 Calibration features...................................
6
3.9 Total Flow Accumulator ...............................
23
SECTION 2 INSTALLATION
3.10 Alarm..........................................................
23
2.1 General.......................................................
7
3.11 LED.............................................................
24
2.2 Unpacking..................................................
7
SECTION 4 MAINTENANCE
2.3 Mechanical Installation..............................
8
4.1 General.........................................................
24
2.3.1 General.....................................................
8
4.2 Caution.........................................................
25
2.3.2 Installation................................................
15
SECTION 5 TROUBLESHOOTING
2.3.2.1 1/4VCR Installation................................
15
5.1 Initial check..................................................
25
2.3.2.2 Compression Fitting Installation.............
16
5.2 Troubleshooting............................................
25
2.4 Electrical Installation.................................
17
SECTION 6 WARRANTYAND SERVICES
2.5 Checking Before Operation.......................
20
6.1 Guarantee of Sevenstar ................................
27
6.2 Product Warranty…………………………...
29
SECTION3 FUNCTIONS
6.3 Services.........................................................
29
3.1 General...........................................................
21
6.4 Disclaimer.....................................................
29
3.2 ControlMode.............................................
21
APPENDIX I......................................................
32
3.3 Zero............................................................
21
APPENDIXⅡ.....................................................
35
APPENDIXⅢ.....................................................
36

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Instruction of MFC/MFM
1.1 Declaration
The copy right of The user’s manual of mass flow controller and mass flow meter is
subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not
allowed to duplicate, store and distribute any part of this manual in mean of electric,
mechanical, photocopy, recording or other way without permission of Sevenstar. This
manual is not assured that there is no mistake and missing in which have been corrected
strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the
publisher is not in charge of any loss that this manual leads to.
Beijing Sevenstar Flow Co. , Ltd

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1.2 Attention
Dear customer, thanks for using CS mass flow controller and mass flow meter. This
manual describes in detail important issues about correct and safe operations of the
product.
User of the product should read and comprehend this manual and pay attention to the
text with labels and notices.
Sevenstar assumes no liability for the customer’s failure to comply with this manual.
This manual is necessary for your installation and maintenance, please keep it carefully.
1.3 The notice of safety
Please pay attention to the below notices when reading this manual. We are not responsible
for any result without abiding by the below notices.
a) Do not replace any components or disassemble instrument.
Do not replace any components, or disassemble the instrument without any authorized
and make sure that the label or/and seal of product is not removed when returning for
reworking, recalibration and maintenance.
b) Please contact professional for technical service.
Do not replace any components. Any technical support is provided by professional who
must be authorized by Sevenstar.
c) Please pay more attention to use dangerous gas.
Instrument should be purged completely and keep safety if dangerous gas is used.
Meanwhile make sure that moist gas must not react with material of seal and
instrument.
d) Please pay attention to purging instrument.
The whole system should be purged by dry gas after and before the instrument is
installed.
e) Please abide by proper steps of purging.
Product should be purged and handled with gloves.
f) Do not use the instrument in explosive environment.
Do not use the instrument in explosive environment, unless the safety certificate is
available.

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g) Please use properfittings and keep the rules.
All fittings of instrument must be matched according to the listing in manual. Please
read manual carefully before screwing tightly.
h) Please do leakage check.
Please check carefully all of vacuum parts and make sure that there is not leakage in
the system.
i) Please make sure that instrument is working under safe pressure.
Please make sure that the pressure of inlet gas is less than maximum working pressure
(referring to maximum working pressure in manual).
j) Please keep the whole system away from pollution.
When system running, do not use polluting gas, such as particle of dust, dirt, fibre,
glass or scrap iron.
k) Please do warm-up instrument before working.
Please do warm-up instrument, especially in using dangerous gas. Please close valve
completely to make sure that there is not error flow.
1.4 General
Mass flow controller (MFC) accurately measures and controls mass flow rates, which
is widely applied in the fields as: semiconductor and IC fabrication, special materials
science, chemical industry, petrolic industry, pharmaceutical industry, environmental
protecting and vacuum system researching, etc.. The typical applications include:
microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting,
micro-reaction equipment, mixing & matching gas system, capillary flow control system,
gas chromatograph and other analytical instruments.
The CS210-C MFC/MFM are a latest generation MFC for use in semiconductor

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applications and demanding industrial uses where its high accuracy and flexibility in
interfacing are required.
The CS210-C MFC/MFM incorporate a dual interface RS-485 and EtherCAT digital
interfaces. CS210-C series have wide range of power supply(available for +20.4 ～+26.4
VDC).
In addition, auto-alarm, change of operating gas and range available through the
digital interface. Customer Secondary Development of control and sample software is
available through the open protocol.
CS210-C MFC default setting：
MAC address：32；
RS485 baud rate：19200；
For more information, please refer to www.mfcsevenstar.cn. Path: Service >>
Downloads>>Software download>>Communication Protocol .

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1.5 Specification
Type
CS210C
Full scale range
(N2)
( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30)SLM
Accuracy
±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.)
Linearity
±0.5% F.S.
Repeatability
±0.2% F.S.
Response Time
≤0.8 sec (SEMI E17-0600)
Valve Rest Position
Normally Closed or
Normally Open
No Valve
Differential
Pressure
(0.05～0.35) MPa（≤10slm）
(0.1～0.35) MPa（＞10slm）
＜0.02MPa
Maximum
Operating
Pressure
0.45MPa
Temperature
Coefficient
Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃
Proof Pressure
3MPa (435pisg)
Zero Drift
＜0.6%F.S. per year without autozero
Leak integrity
1×10-10 atm·cc / sec He
Wetted Materials
Metal (Stainless Steel V/V, 5Ra)
Surface Chemistry
——
Surface Finish
10Ra
Operation
（0～50）℃
Temperature
Input Signal
Digital: RS485 or EtherCAT
N/A
Output Signal
Digital: RS485 or EtherCAT
Power Supply
+20.4 ~ +26.4 VDC
Electronic
Connector
9 pin male sub-D , EtherCAT
Fittings
VCR1/4” M;Compression FittingΦ6,
Compression FittingΦ3,
Compression Fitting1/4”，W-seal，
C-seal
Weight
1.2kg
1kg

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Notes :
MFC/MFM is calibrated byN2as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem —273.15K ( 0 ºC );
Air Pressure —101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM
is identical to “L/min, 0 ºC ,1atm”.
F.S. : Full Scale
1.6 Calibration Features
Normally, the MFC are calibrated close to customer’s requirement ( the requirement
should be accorded with the specification). Without customer’s information, the MFC are
calibrated under standard conditions.
1.6.1 Standard conditions
Without special conditions specified by the customer, the MFC is calibrated under the
following standard conditions:
Pressure Outlet: Atmospheric.
Normally gas mass flow rate is transferred to gas volume flow rate at standard state.
Mass flow rate unit:
SCCM——standard cubic centimeter per minute.
SLM——standard liter per minute.
Standard state：Temperature —— 0ºC (273.15K)
Pressure —— 101325Pa (760mmHg)
At standard state, the gas density will be constant. The multiplication of density and
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume
flow rate can represent mass flow rate.
The standard mounting position is horizontal, And other positions such as

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vertical(inlet up or down)，flatwise or customized position are optional. The mounting
position should be specified by the customer to ensure the best accuracy.
1.6.2 Manufacturing Environment
The MFC are assembled in a class 100 clean room, calibrated, packaged and
controlled in class 1000 environment. The temperature is 22±2 ℃.
1.6.3 PrecisionAdjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a different
calibration bench. The accuracy, the dynamic response, the stability to pressure
variations is double checked, only qualified product available for sale.
SECTION 2 INSTALLATION
2.1 General
WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.
After installing the MFC, the system should be thoroughly checked to ensure it is leak-free.
Purge the MFC with a dry inert gas for one hour before using corrosive gases.
IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit
in the same direction as the gas flow.
2.2 Unpacking
The CS210-C MFC/MFM are assembled，calibrated and clean packaged under clean
room conditions. These series products are packaged with two separately sealed plastic
bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be
removed in the entrance to the clean room. In order to minimize the contamination, the

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second clean bag should be removed in the clean room when MFC installed in the system.
2.3 Mechanical Installation
2.3.1 General
Most applications will require a positive shutoff valve in line with the MFC.
Pressurized gas trapped between the two devices can cause purge effects, and consideration
must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the
process sequencing. It is recommended that you install an in-line filter upstream to the
controller in order to prevent MFC from contamination.
CS210-C should be mounted in the position accord with the requirement in the
purchase order. The gas should be clean and dry. The mounting should be free from shock
or vibration. The pictures of the product are shown in figure2-1 and figure2-3, the
dimensions of the product are shown in figure2-2, figure2-4. Different
fittings(Compression Fittingφ6, Compression Fittingφ3,Compression Fitting1/4 ，
Compression Fitting1/8,VCR1/4 M, Compression Fitting3/8，1.5〞W-seal，1.5〞C-seal)
are optional for customer, The length of the product L are shown in Table 2-1. Do not
remove the protective end caps of the fittings until installation.

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Figure 2-1 CS210-C (RS-485) MFC/MFM

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Figure 2-2 CS210-C(RS-485) Product dimensions

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Figure 2-2a Product with A-seal dimensions

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Figure 2-3 CS210-C (EtherCAT) MFC/MFM

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Figure 2-4 CS210-C(EtherCAT) Product dimensions

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Table 2-1 The length of the product with different fittings
Length
Fitting
Compression Fittingφ6; Compression Fittingφ3
Compression Fitting1/4; Compression Fittingφ10
Compression Fitting1/8; Compression Fitting3/8
Ф4(inner)×1hose
VCR1/4〞M
VCO1/4〞M
Ф6(inner)×1hose
Ф5(inner)×1.5hose
1.5〞
W-seal
1.5〞C-seal
A-seal
L（mm）
112.8
117.6
124
105.2
Attention :
The height(which is showing infigure 2-2 andfigure 2-4 ) of 132mmare height without electric connectors
of cable. It should be added around50mm more after addingthe electric connector.
2.3.2 Installation
Place MFC according to the flow direction.
2.3.2.1 1/4VCR Connection
Refer to figure 2-6 and figure 2-7. Check the gland to gland space, including the
gaskets. Remove the plastic gland protector caps. When using loose VCR original style
gaskets, inserting the gasket into the female nut. For VCR retainer gaskets, snap the gasket
onto the male coupling. Tighten the nuts finger tight. Scribe both nut and body in order to
mark the position of the nut. While holding the body with a wrench, tighten the nut: 1/8
turn past finger tight for 316L stainless steel and nickel gaskets.

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Figure 2-5 VCR original style gasket
Figure 2-6 VCR retainer gasket
2.3.2.2 Two-ferrule (Compression Fitting) Connection
Refer to figure 2-8. Check the gland to gland space. Remove the gland protector caps.
Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned
as shown in figure2-8. Tighten the nuts finger tight. Use two spanners, one spanner locking
the fitting stable, wrench another one to tighten in 1.25 turns to prove it’s not blow-by after
installing the front ferrule, back ferrule and nut.
Figure 2-7 Compression Fitting Connector Installation
Gland
Nut
Back ferrule
Front ferrule
Fitting

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Attention :
When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up,
(imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by
after your installing the front ferrule 、back ferrule and nut. Please note you should use two spanners to
operating, one spanner for locking the fittingstable and another onefor revolving the nut. Especially when
you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible
which will affect its airproof function.
2.4 Electrical Installation
2.4.1 General
The 9 pin male Sub-D connector, RS485 connector , RS232-RS485 connector，and
EtherCAT connector of RJ45 are shown in figure2-8, figure2-9 , figure 2-10, figure 2-11,
figure 2-12, figure 2-13.
Figure 2-8 9 pin male D-sub connector

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Figure 2-9 RS485 connector
1、TX+ 2、TX- 3、RX+ 6、RX-
Figure 2-10 EtherCAT connector of RJ45
2.4.3 Table of Selecting Type of Cable and its Illustration of Connection
Table 2-2 Table of Selecting Type of Cable
D08-
2B/3B/4B
2E/3E/4E
D08- 1/2/4 2F/3F/4F
D08-1F/1FM/1FS/8C/8CM/1G/1GM
Input
+24V
To
Serial of
PC
To USB
of
Computer

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MFC
(DB9 pin)
QCX-20/
QCX-P20
QCX-49
QCX-18/QCX-P18
QCX-47
QCX-34
QCX-50
MFC
（EtherCAT）
QCX-34
QCX-50
Figure 2-11 CS Product and Illustration of Connecting Power D08-1D/1F