SevenStar D07-60B User manual

D07 –60B
Mass Flow controller
D07-60BM
Mass Flow Meter
INSTRUCTION MANUAL
2017.03

ANOTE TO OUR CUSTOMERS
The Sevenstar D07 series Mass Flow Meter/Controller you have just received is of the leading quality available. It
includes excellent high degree of accuracy and repeatability, in addition to the variety of operation pressure available.
It offers soft-start, tightly controlled response and maximum applications flexibility.
We strongly recommend that you read this manual thoroughly before performing any operation. This manual will
enable the full information necessary for installation, operation and ease of maintenance to be realized.
Should you require any additional information concerning the Sevenstar D07 series Mass Flow Controller or Mass
Flow Meter, please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at:
(8610)--- 6436 2939.
We appreciate this opportunity to service your Mass Flow Meter/Controller, and hope we will be able to provide you
with further assistance in future.
Yours sincerely,
Sevenstar

目录
1. APPLICATION & FEATURES…………….
1
5.2.2 Zero Test and Adjustment…………………..
16
2. SPECIFICATION…………………………..
2
5.2.3 Gas Supply………………………………….
16
3. STRUCTURE & PRINCIPLE……………...
3
5.2.4 Shut Off…………………………………….
16
3.1 Structure…………………………………….
3
6. CAUTION……………………………………
16
3.2 Operation Principle…………………………
3
6.1 Medium Forbidden …………………………...
16
4. INSTALLATION & CONNECTION ……..
5
6.2 Corrosive Gas ………………………………..
16
4.1 Dimension…………………………………..
5
6.3 Valves Dynamic Sealing ……………………..
16
4.2 Fittings………………………………………
9
6.4 Valves Operating …………………………….
17
4.3 Electrical Interfacing………………………..
10
6.5 Installation Position ……………….................
17
4.4 PC Connection………………………………
11
6.6 Operation Pressure Resistance……………….
17
4.5 Zero Adjustment…………………………….
13
6.7 Calibration and Conversion…………………..
17
5. OPERATION INSTRUCTIONS…………..
14
6.8 D07-60B, 60BM Ordering Code….. …………
18
5.1 MFC Operation……………………………..
14
7. TROUBLESHOOTING……………………..
21
5.1.1 Start Up……………………………………
14
8. WARRANTY & SERVICE…………………..
23
5.1.2 Purge………………………………………
15
8.1 Product Warranty……………………………..
23
5.1.3 Readout Box & PC Connection…………...
15
8.2 Specific warranty requirements ………………
23
5.1.4 PC Connection…………………………….
15
8.3 Service…………………..……………………
23
5.1.5 Valves Control…………………………….
15
9. APPENDIX…………………………….…….
24
5.1.6 Shut Off Operation………………………..
15
9.1 Mass Flow Conversion factors…………….....
24
5.2 MFM Operation……………………………..
16
9.2 Conversion factors Introduction.......................
26
5.2.1 Start Up …………………………………..
16
MASS FLOW CONTROLLER & MASS FLOW METER

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Operating Instruction
1. APPLICATION & FEATURES
Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures
and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are
widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry,
petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The
typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment,
mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.
D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability,
wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple
convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’
system.
D07-60B、D07-60BM all use ±15 VDC power supply, and they are better connected together with D08 series
Readout Box, the cable connection is showing as following (Figure 1):
Figure 1 D07-60B MFC and Readout Box

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2. SPECIFICATION
Table 1. Specifications of D07-60B MFC and D07-60BM MFM
NO
Item
D07-60B
D07-60BM
1
Flow Ranges
300，500，750，1000，1500，2000SLM
2
Accuracy
±2% F.S.
3
Linearity
±1% F.S.
4
Repeatability
±0.2%F.S.
5
Response-Time
＜10 sec
6
Operation
Pressure
(0.25 ~ 0.5) MPa （≤1000SLM）
(0.4 ~ 0.6) MPa （＞1000SLM）
＜0.2 MPa
7
Max Pressure
3 MPa
8
Operation
Temperature
5~ 45 ℃
9
Input Signal
0 ~ 5.00 V (Input Resistance > 500K)
NO
10
Output Signal
0V ~ 5.00 V (Output Electric Current ≤3mA)
11
Valve Type
N.C. Solenoid
NO
12
Power Supply
+15V 50 mA
-15V 200 mA
+15V 50 mA
-15V 50 mA
13
Dimension (mm)
According to Figure 3a、3b、3c、3d
14
Weight (kg)
6
5
Notes :
MFC/MFM is calibrated by N2as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem —273.15K ( 0 ºC );
Air Pressure —101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM

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is identical to “L/min, 0 ºC ,1atm”.
F.S. : Full Scale
3. STRUCTURE & OPERATION PRINCIPLE
3.1 Structure
The MFM consists of flow sensor, flow-splitter bypass and flow amplifying circuit. If add Control valves and PID
control circuit to MFM will compose a MFC.
3.2 Operation Principle
According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory, the flow sensor measures the
mass flow without pressure compensation. The sensor heated the flow signal which was measured by electric bridge
and amplified it through amplifier, the amplified flow testing voltage is compared with presetting voltage, the
differential signal will control valve after amplified, then the flow rate of closed loop control will be as same as
presetting flow rate. The bypass divider controls the flow rate. The corresponding D08 series Flow Readout Boxes
have stabilized power supply, 3 and 1/2 digital voltage meter, presetting potentiometer, external & internal
converters and three-phase switches. Figure 2 is exactly showing the operating principle while MFC is connecting
with Flow Readout Box.

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INT
out
INLET
I
Bypass
Sensor
Ru Rd
MASS FLOW
CONTROLLER
Power
Readout
100.0
~220V
+15V
Power Com.
-15V
Amplifier
+5.00V
+15V
Override
Valve
Valve
Drive
OUTLET
AUTO
PURGE
-15V
OFF
FLOW READOUT BOX
(0 ~ +5.00V)
Comparator
set
EXT
SET (0 ~ +5.00V)
Signal Com.
Output
Setpoint
Figure2. Principle of MFC
The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting
signal is 0~5VDC. The Flow control ranges of MFC is (2~100) %F.S., flow resolving power is 0.1% F.S..
Attention:
When Valve controller of MFC is posited on position of “PURGE”, it can be functioned as a MFM. In that
case, the maximum flow testing voltage could reach beyond +10V, please be careful, while flow is beyond
F.S. +5V(Full Scale), the real flow will have no linearity corresponding with flow testing voltage. While it’s
purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be
sure it’ll be no damaged to device itself.

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Operation control could accomplish by Flow Readout Box. When set point is turned on the “INT”, flow rate will be
under controlled by the presetting potentiometer; when setpoint is turned on the “EXT”, flow rate will be controlled
by set signal which is supplied by users.
There are three valves control switches on the panel of D08 series Flow Readout Box: CLOSE, PURGE and AUTO.
In case of CLOSE, Valves of MFC will shut off; in case of PURGE, Valve will open reach to the tip to purge the
Gas systems or could be functioned as a MFM; when set to AUTO, Valve can control the flow rate automatically.
4. INSTALLATION & CONNECTION
4.1 Dimension
Dimensions and installations are showing as following figure 3a、3b、3c、3d:
Figure 3a. Dimension of D07-60B MFC With 1/2″/φ10 Compression Fitting Fitting

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Flange
D
K
L
DIN DN15- PN40
95
65
14
DIN DN20- PN40
105
75
14
DIN DN25- PN40
115
85
14
Figure 3b. Dimension of D07-60B MFC With Flange

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Figure 3c. Dimension of D07-60BM MFM With 1/2″/φ10 Compression Fitting Fitting

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Figure 3d. Dimension of D07-60BM MFC With Flange
Attention:
The height of figure 3a、3b、3c、3d are height without electric connectors of cable. It should be added
around 50mm more after adding the electric connector.

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4.2 Fittings
Four models of external diameters connectors could be provided:
Table2. Connectors & Dimensions of D07-60B、D07-60BM
No
MFC/MFM
Model
Compression Fitting
Note
Φ10 (300SLM)
1/2" (≤1000SLM)
1
D07—60B
○
○
Mark"○" means could be
selected, but each model
only could be selected one
connector type at a time.
2
D07—60BM
○
○
Using standard Compression Fitting connectors, general speaking, stainless steel tube was used to connect MFC and
Gas System, matching to the different request, other materials also could be used as nylon tube or hard flexible
plastic hose. Figure 4 is an example to showing the fitting structure, please be careful, the flow input & output
direction should not be inversed fitted.
Figure 4. Compression Fitting Connector Installation
Attention:
For installing the fittings, you should manually use spanner to wrench it tighten by 1/2 turn pulling up,
(imported Compression Fitting should use spanner to be tighten in 1.25 turns) to prove its not blow-by after
your installing the front ferrule, back ferrule and nut. Please note you should use two spanners to
operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when
you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible
Nut
Back Ferrule
Front Ferrule
Fittings
Tube

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which will affect its airproof function.
4.3 Electrical Interfacing
MFC could begin operating after it was well connected with professional cable and corresponding Flow Readout
Box. The electrical interfacings of each MFC and MFM are showing as following figures (Figure 5 ~ Figure 6).
Figure 5. Connection of D07-60B MFC Electrical Interfacing
Figure 6. Connection of D07-60BM MFM Electrical Interfacing
D07-60BM MFM electrical interfacings (figure6) is as same as connector of D07-60B MFC, only compared with
MFC accessories that lacks of “Valve Control”and “Setpoint”two wires.
4.4 PC Connection
3
4
5
6
7
8
9
10
11
12
13
14
15
1
2
Set(0-5VDC)
Valve test point
-15VDC
+15VDC
Valve OFF
Zero adjustment
Signal commmon
GND
Valve drive
Common
Power common
Valve drive
Output(0-5VDC)
+15V
-15V
+15V
-15V
OFF
PURGE
AUTO
+15V
-15V
3
4
5
6
7
8
9
10
11
12
13
14
15
1
2
-15VDC
+15VDC
Zero adjustment
Signal commmon
GND
Common
Power common
Output(0-5VDC)

Page 11 of 26
a.Connection through Flow Readout Box with PC or other external signal. (Figure 7)
Figure 7. Connection with PC through Readout Box
When need test the output signal Voltage(0-5VDC), users could connect to the “Flow Signal Output”and the
“Signal common”of external control signal socket of Flow Readout Box, also could directly connect with PC
modulus (A/D) converter, +5.00 V output voltage is corresponding as full scale rating flow rate of MFC. Please be
sure the flow testing output electric current will be no more than 3mA.
When the flow is setting by external signals, it should be turned the switch on “OUT”, meanwhile, it should be input
0-5.00VDC external voltage from external control socket to the Flow Readout Box. In case of user’s external
potentiometer had settled, it could be used a 3.3K multi-turn potentiometer to connect to the external control signal
socket of “+5.00V” and “signal common”. It also could be directly connecting with modulus (D/A) converter of PC
to achieve auto-control, please be sure the flow setting input resistance should be higher than 100 KΩ.
If PC or PLC need perform the OFF and PURGE function of valve control, it could be accomplished by use two
RELAYS (two sets) transfer contacts. One relay controls OFF and anther one controls PURGE, when these two
relays are not operating then it reaches to auto-control mode. Please be careful, it should be not caused short circuit
by two relays simultaneously operating. Suggested relays connection as method as showing in Figure 7.
MFC or
MFM
Readout Box
Connection
Cable
Output I
EXT
Signal common
OFF
A/D In
Signal common
D/A Out
Signal common
Valve Off
COMPUTER
Or PLC
(ATTENTION:
No “Valve OFF/ON”
and “Set” in MFM )
INT
SET
V/I
I/V
4~20mA
4~20mA
Set

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b. PC Directly Connections (Figure 8)
Figure 8. PC Directly Connection
Under the case of MFM/MFC directly connects to PC without Flow Readout Box, ±15V power supply with good
anti-jamming should be provided by user itself; connects SET with PC D/A output; connects “Flow Testing”with
PC A/D input; “Signal common”connects signal reference point; low-current “common”and heavy-current “power
common”-down lead separately, and connects together to the ±15V power supply common port.
If users need PC performs AUTO, OFF and PURGE functions, we suggested connection as showing as in Figure 8.
Flow Signal Output
Set
Signal common
Valve drive
A/D In
Signal common
D/A Out
Signal common
+15V
Off
-15V
Purge
PC or PLC
(ATTENTION: No “Valve drive”
and “Set” in MFM )
Auto
+15V
-15V
common
power common
+15V
-15V
POWER
COM
0~+5.00
V
0~+5V
MFC or MFM

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4.5 Zero Adjustment
It could be zero adjusted in case of zero excursions while the first time operates or a long period operating. Users
could adjust Zero Potentiometer from side face (showing in figure 9) or adjust it while removed its overall. Please
note it should be sure that gas flow tube could not be open while zero adjustment (or shutoff the valves); it should
be warming up not less than 15 minutes, adjustment performs after its zero moving to the stable stop. Users should
not adjust zero except zero potentiometer, otherwise it will affect device accuracy.
Figure 9. The Position of Potentiometer of D07-60B & D07-60BM

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There is another external zero adjustment function, while MFC connected with our new zero adjustment functional
D08 Flow Readout Box, it could be achieved by zero potentiometer of display panel. The important is the ranges of
external zero adjustment is narrow, when there is big zero excursion happened, it should be better adjust zero from
zero potentiometer of MFC.
5. OPERATING INSTRUCTIONS (Together with Flow Readout Box)
5.1 MFC Operation
5.1.1 Start up (Reference to Figure 10)
The main operating should perform in the Flow Readout Box. Valve Control Switches and flow setting
potentiometer are in the front of Readout Box panel, the flow setting internal or external signal control switches are
on the back of panel of Readout Box. When the switch is turned on the INT position, the potentiometer will control
flow rate; when the switch is turned on EXT position, the external signal will control flow rate (Please check out the
details in Flow Readout Box Instruction).
Figure 10. Flow Readout Box Operating Panel
a. When valve switch is on the position of AUTO, gas supply should be open first and then turn on the power supply,
the flow rate will not be beyond 5% of presetting after flow soft-start about 20 seconds. General speaking it should
Flow Display
Zero potentiometer
Valve Drive Switch
Flow Unit
Flow Set potentiometer

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be warming up around 15 minutes in case valves shut off and gas flow cut off, after stable zero movement, normal
operation could begin. If there is big zero excursion, please see the reference 4.5, in the case of non-gas flow, it’s
better adjust zero by zero potentiometer.
b. If Valve switch is on the position of OFF, after power supplying, gas supplying and warming-up, turn switch to
AUTO position, flow rate will reach the presetting 2%(or lower) after a few seconds, which is the suggested
operating method.
c. If Valve switch is on the position of PURGE, the flow rate will reach up to the maximum value after gas and power
supplying, which will have the function of air blasting to the gas circuit.
d. If Valve switch is on the position of AUTO and presetting is not zero, open the gas after power supply, the flow rate
will have a big overshoot and then rapidly reach to the stable presetting value, this kind of operation should better be
avoided.
e. The best operating sequence should be:
1.Open the power supply; 2. Turn the Valve switch on OFF position; 3. Open the gas supply; 4. Warm up for
minutes to have stable zero point movement; 5. Turn the switch on AUTO position; 6. Set flow rate under request.
This is the best way to operate without an overshooting.
5.1.2 PURGE
When need air blasting and cleaning bypass and tube, users could turn the switch on PURGE position, during the
purging, flow rate value should reach up to times or even several decuples of the full scale flow value. If shutoff gas
supplying, it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas matching request.
And then shut off valves, open gas supply again and turn it to AUTO position.
5.1.3 Readout Box &PC Connections
Please find the reference in Figure 5 and Figure 10，it should set the switch of Readout Box to the “External”and
turn the switch to the position of “CONTROL”, and then startup PC.
5.1.4 PC Connections
Please have the reference in Figure 7 and Figure 8, after MFC warming up, it could have PC startup.
5.1.5 Valves Control
When the valve switch sets to “CONTROL”position, users could perform valves control by “CONTROL”wire of
external control signal socket, please find the reference in Figure 2 and Figure 5. When valve drive wire connects
with +15 V, valves will be shutoff; when valve drive wire connects with –15 V, valves will be turned to the top of
maximum to purge position; when valve drive wire hangs in the air, it’s in the auto-control situation.
5.1.6 Shut Off Operation
After shutoff power supply, flow will be cut off automatically. It should be better shut off gas supply (Turn valve
switch to OFF position and close the cut-off valve of gas circuit) before power supply.

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5.2 MFM Operation
5.2.1 Start Up
Please warm up for 15 minutes by power supply before MFM operating.
5.2.2 Zero Testing and Adjustment
Please check up zero point of MFM after its warming up (especially for the first time operating), it could have
reference in 4.5, without gas supplying, which could adjust zero by zero potentiometer.
5.2.3 Gas Supply
After zero movement reaches stable, MFM Could have gas supply. Please pay attention to the flow rate, it should be
better operate not beyond full scale range.
5.2.4 Shut Off
Turn off the power supply, which means MFM operating will be terminated, it could not affect the flow rate of
bypass.
6. CAUTION
6.1 Medium Forbidden
The gas of using should be purified without dust、liquid and oil stain. When necessary, it should be added filter to
gas circuit to make sure gas purified. If the outlet of MFC connects with liquid sources, which should be added
simple directional valve of MFC outlet to avoid the liquid is refluent to the tube to destroy MFC.
6.2 Corrosive Gas
The materials of bypass are anti-caustic materials like 00Cr17Ni14Mo2(same as 316Lstainless steel), Teflon, and
Viton. When users operate in condition of without vapor, low leakage, regular cleaning and proper operating, MFC
could possible control the normal corrosive gas. Using ammonia, organic solvent gas such as acetone or other strong
caustic gas (like BC13 and BBr3), please informed in your order statements. Valves Dynamic sealing materials
usually are Viton. There maybe leakage happened of valve port, valve sealing leakage rate will lower than 2% of
full scale flow rate; when use the special caustic gas, all sealing materials should be changed relatively.
For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure
that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge
the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections.
Failure to purge the controller could cause a fire or explosion resulting in death.
6.3 Valves Dynamic Sealing
The Valve of MFC is an electric-magnetic valve for adjustment, which is not a solenoid plug valve so that could not

Page 17 of 26
perform that kind of function. Users should better have that plug valve by themselves. Especially when users
operate with caustic gas, general speaking, it should separately add one cut-off valve of MFC inlet and outlet to
protect operating security. After a long period operating, if the leakage rate of MFC valve outlet is not beyond 2%
F.S., it is the standard situation. Otherwise, it should be under maintaining.
6.4 Valves operating
When valve is operating PURGE, which should not be directly turned to AUTO, operation should be turned the
switch to OFF position and then turn it intoAUTO to operating.
6.5 Installation Position
Keeping installation surface horizontal while installation. Please provide the installation position when ordering the
MFC. We will calibrate products according to the requirement of customers. The MFC might show the zero drift if
it is not installed as the same position of calibration. Customer can adjust zero to fix it.
6.6 Operation Pressure Resistance
Please be caution for the medium operating pressure of MFC, it should not be beyond the rage of specification of
inlet and outlet. Especially while operating under the high-pressure situation, the big differential pressure will affect
flow fail to shut off or lower adjustment. In case of using heavy flow rate of MFC, please be sure appropriately
widen tube and reduce gas internal resistance, if operating differential pressure is lower than the value of request, it
might could not be reach to the full scale flow rate value.
6.7 Calibration and Conversion
D07 series is calibrated by nitrogen. Other gas calibrations please inform in your order statements. When the
nitrogen calibration users use other gas operating, it could convert and calculate used gas flow rate by conversion
factors of appendix 8.1. Which means users could multiply the readout flow rate from MFC Readout Box with the
used gas corresponding conversion factors, the result will be the used gas corresponding mass flow rate of standard
situation.
For example, there is 1000 SLM (N2) calibrated MFC, the flow rate is displayed 860 SLM while firedamp
flowing, the conversion factors of firedamp is 0.719 from reference of appendix 9.1, the real firedamp
flow rate is 860 * 0.719= 618 SLM.
If users use the mixture gas, it could be calculated the conversion factors by the method which introducing in
appendix 9.2.