SevenStar CS100D MFC User manual

CS100D MFC/MFM
User’s Manual
July. 2020

Contents
SECTION 1 INTRODUCTION
1.1 Declaration ...................................................
1
3.4 Customer Ground Correction(CGC)............
15
1.2 Attention.......................................................
2
3.5 Soft-Start .........................................................
15
1.3 The notice of safety ......................................
2
3.6 Delay................................................................
15
1.4 General .........................................................
4
3.7 Valve Command Mode ...................................
16
1.5 Specification .................................................
5
3.8 Valve Type........................................................
16
1.6 Calibration features.....................................
6
3.9 Multi-Gas and Multi-Flow.............................
16
SECTION 2 INSTALLATION
3.10 Total Flow Accumulator.................................
17
2.1 General .........................................................
7
3.11 Alarm .............................................................
17
2.2 Unpacking.....................................................
7
3.12 LED................................................................
18
2.3 Mechanical Installation ...............................
8
SECTION 4 MAINTENANCE
2.3.1 General........................................................
8
4.1 General ............................................................
18
2.3.2 Installation ..................................................
10
4.2 Caution ............................................................
18
2.3.2.1 1/4VCR Installation .................................
10
SECTION 5 TROUBLESHOOTING
2.3.2.2 Compression Fitting Installation..............
11
5.1 Initial check.....................................................
19
2.4 Electrical Installation...................................
12
5.2 Troubleshooting ..............................................
19
2.5 Checking Before Operation.......................
12
SECTION 6 WARRANTYAND SERVICES
6.1 Guarantee of Sevenstar..................................
20
SECTION3 FUNCTIONS
6.2 Product Warranty…………………………...
21
3.1 General...........................................................
14
6.3 Services............................................................
22
3.2 Control Mode ...............................................
14
6.4 Disclaimer........................................................
23
3.3 Zero...............................................................
15
APPENDIX I.........................................................
24
APPENDIXⅡ.......................................................
27
APPENDIXⅢ.......................................................
30

1 of 30
Instruction of MFC/MFM
1.1 Declaration
The copy right of The user’s manual of mass flow controller and mass flow meter is
subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not
allowed to duplicate, store and distribute any part of this manual in mean of electric,
mechanical, photocopy, recording or other way without permission of Sevenstar. This
manual is not assured that there is no mistake and missing in which have been corrected
strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the
publisher is not in charge of any loss that this manual leads to.
Beijing Sevenstar Flow Co. , Ltd

2 of 30
1.2 Attention
Dear customer, thanks for using CS mass flow controller and mass flow meter. This
manual describes in detail important issues about correct and safe operations of the
product.
User of the product should read and comprehend this manual and pay attention to the
text with labels and notices.
Sevenstar assumes no liability for the customer’s failure to comply with this manual.
This manual is necessary for your installation and maintenance, please keep it carefully.
1.3 The notice of safety
Please pay attention to the below notices when reading this manual. We are not responsible
for any result without abiding by the below notices.
a) Do not replace any components or disassemble instrument.
Do not replace any components, or disassemble the instrument without any authorized
and make sure that the label or/and seal of product is not removed when returning for
reworking, recalibration and maintenance.
b) Please contact professional for technical service.
Do not replace any components. Any technical support is provided by professional who
must be authorized by Sevenstar.
c) Please pay more attention to use dangerous gas.
Instrument should be purged completely and keep safety if dangerous gas is used.
Meanwhile make sure that moist gas must not react with material of seal and
instrument.
d) Please pay attention to purging instrument.
The whole system should be purged by dry gas after and before the instrument is
installed.
e) Please abide by proper steps of purging.
Product should be purged and handled with gloves.
f) Do not use the instrument in explosive environment.
Do not use the instrument in explosive environment, unless the safety certificate is

3 of 30
available.
g) Please use proper fittings and keep the rules.
All fittings of instrument must be matched according to the listing in manual. Please
read manual carefully before screwing tightly.
h) Please do leakage check.
Please check carefully all of vacuum parts and make sure that there is not leakage in
the system.
i) Please make sure that instrument is working under safe pressure.
Please make sure that the pressure of inlet gas is less than maximum working pressure
(referring to maximum working pressure in manual).
j) Please keep the whole system away from pollution.
When system running, do not use polluting gas, such as particle of dust, dirt, fibre,
glass or scrap iron.
k) Please do warm-up instrument before working.
Please do warm-up instrument, especially in using dangerous gas. Please close valve
completely to make sure that there is not error flow.
1.4 General
Mass flow controller (MFC) accurately measures and controls mass flow rates, which
is widely applied in the fields as: semiconductor and IC fabrication, special materials
science, chemical industry, petrolic industry, pharmaceutical industry, environmental
protecting and vacuum system researching, etc.. The typical applications include:
microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting,
micro-reaction equipment, mixing & matching gas system, capillary flow control system,
gas chromatograph and other analytical instruments.
The CS100D MFC/MFM are a latest generation MFC for use in semiconductor

4 of 30
applications and demanding industrial uses where its high accuracy and flexibility in
interfacing are required.
The CS100D MFC/MFM incorporate a dual interface, voltage and RS-485. It is
possible to operate the instrument completely digitally or it can be operated in analog
mode .
In addition, auto-alarm, change of operating gas and range available through the
digital interface. Customer Secondary Development of control and sample software is
available through the open protocol.
CS100D MFC default setting：
MAC address：32；
RS485 baud rate：19200；
Control mold：0-5V analog signal control.
For more information, please refer to www.mfcsevenstar.cn
Path: Service >> Downloads>>Software download>>Communication Protocol .

5 of 30
1.5 Specification
CS100
Type
CS100D
Valve
Rest Position
Normally Closed
No Valve
Full scale range
(N2)
(0～10,20,30,50,100,200,300,500) SCCM
(0～1,2,3,5,10,20,30) SLM
Accuracy
±1.0% S.P. (≥35% F.S.)；±0.35% F.S.(＜35% F.S.)
Linearity
±0.5% F.S.
Repeatability
±0.2% F.S.
Response
Time
≤ 1sec
Differential
Pressure
0.05～0.35MPa；FLOW≤10 SLM
0.1～0.35MPa；10＜FLOW≤30 SLM
＜0.02 MPa
Temperature
Coefficient
Zero: ≤±0.05% F.S/℃； Span: ≤±0.1% F.S/℃
Max
Pressure
3MPa
10MPa
Leak integrity
1×10-9 Pa·m3/ sec He（1×10-8 atm·cc / sec He）
Wetted
Materials
Metal
maximum
operating
pressure
0.45MPa
Operation
Temperature
（5～45）℃
Input Signal
Analog:
(0～5)VDC
Digital: RS485
N/A
N/A
Output
Signal
Analog:
(0～5)VDC
Digital: RS485
Analog:
(0～5)VDC
Digital: RS485
Electronic
Connector
9 pin male
sub-D；
15 pin
male
sub-D
15 pin
male
sub-D
9 pin male
sub-D；
15 pin
male
sub-D
9 pin
male
sub-D；
3 pin
male O
15 pin
male
sub-D
Power
Supply
±15V
±15V
±15V
±15V
+24V
ATUO ZERO
SUPPORT
Surface
Finish
25μinch Ra
Fittings
VCR1/4″male
Weight
1.2Kg
1Kg

6 of 30
Notes :
MFC/MFM is calibrated by N2as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem —273.15K ( 0 ºC );
Air Pressure —101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM
is identical to “L/min, 0 ºC ,1atm”.
F.S. : Full Scale
1.6 Calibration Features
Normally, the MFC are calibrated close to customer’s requirement ( the requirement
should be accorded with the specification). Without customer’s information, the MFC are
calibrated under standard conditions.
1.6.1 Standard conditions
Without special conditions specified by the customer, the MFC is calibrated under the
following standard conditions:
Pressure Outlet: Atmospheric.
Normally gas mass flow rate is transferred to gas volume flow rate at standard state.
Mass flow rate unit:
SCCM——standard cubic centimeter per minute.
SLM——standard liter per minute.
Standard state：Temperature —— 0ºC (273.15K)
Pressure —— 101325Pa (760mmHg)
At standard state, the gas density will be constant. The multiplication of density and
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume

7 of 30
flow rate can represent mass flow rate.
The standard mounting position is horizontal, And other positions such as
vertical(inlet up or down)，flatwise or customized position are optional. The mounting
position should be specified by the customer to ensure the best accuracy.
1.6.2 Manufacturing Environment
The MFC are assembled in a class 100 clean room, calibrated, packaged and
controlled in class 1000 environment. The temperature is 22±2 ℃.
1.6.3 Precision Adjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a different
calibration bench. The accuracy, the dynamic response, the stability to pressure
variations is double checked, only qualified product available for sale.
SECTION 2 INSTALLATION
2.1 General
WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.
After installing the MFC, the system should be thoroughly checked to ensure it is leak-free.
Purge the MFC with a dry inert gas for one hour before using corrosive gases.
IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit
in the same direction as the gas flow.
2.2 Unpacking

8 of 30
The CS100D MFC/MFM are assembled，calibrated and clean packaged under clean
room conditions. These series products are packaged with two separately sealed plastic
bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be
removed in the entrance to the clean room. In order to minimize the contamination, the
second clean bag should be removed in the clean room when MFC installed in the system.
2.3 Mechanical Installation
2.3.1 General
Most applications will require a positive shutoff valve in line with the MFC.
Pressurized gas trapped between the two devices can cause purge effects, and consideration
must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the
process sequencing. It is recommended that you install an in-line filter upstream to the
controller in order to prevent MFC from contamination.
CS100D should be mounted in the position accord with the requirement in the
purchase order. The gas should be clean and dry. The mounting should be free from shock
or vibration. The dimensions of the product are shown in figure2-1. Different
fittings(Compression Fittingφ6, Compression Fitting1/4″, VCR1/4″M,) are optional
for customer, The length of the product L are shown in Table 2-1. Do not remove the
protective end caps of the fittings until installation.

9 of 30
Figure 2-1 Product dimensio

10 of 30
Length
Fitting
Compression Fittingφ6mm;
Compression Fittingφ3mm;
Compression Fitting1/4;
Compression Fitting1/8;
VCR1/4〞M
φ6(inner)x1hose;
φ5(inner)x1.5hose;
Φ4(inner)x1hose
L（mm）
113
124
122.2
115.5
Table 2-1 The length of the product with different fittings
Attention :
The height (which is showing in figure 2-1 ) of 132mm are height without electric connectors of cable. It
should be added around 50mm more after adding the electric connector.
2.3.2 Installation
Place MFC according to the flow direction.
2.3.2.1 1/4VCR Connection
Refer to figure 2-2 and figure 2-3. Check the gland to gland space, including the
gaskets. Remove the plastic gland protector caps. When using loose VCR original style
gaskets, inserting the gasket into the female nut. For VCR retainer gaskets, snap the gasket
onto the male coupling. Tighten the nuts finger tight. Scribe both nut and body in order to
mark the position of the nut. While holding the body with a wrench, tighten the nut: 1/8
turn past finger tight for 316L stainless steel and nickel gaskets.
Figure 2-2 VCR original style gasket

11 of 30
Figure 2-3 VCR retainer gasket
2.3.2.2 Two-ferrule (Compression Fitting) Connection
Refer to figure 2-4. Check the gland to gland space. Remove the gland protector caps.
Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned
as shown in figure2-4. Tighten the nuts finger tight. Use two spanners, one spanner locking
the fitting stable, wrench another one to tighten in 1.25 turns to prove it’s not blow-by after
installing the front ferrule, back ferrule and nut.
Figure 2-4 Compression Fitting Connector Installation
Attention :
When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up,
(imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by
after your installing the front ferrule 、back ferrule and nut. Please note you should use two spanners to
operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when
you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible
which will affect its airproof function.
Gland
Nut
Back ferrule
Front ferrule
Fitting

12 of 30
2.4 Electrical Installation
2.4.1 General
CS100D MFC/MFM are available for ±1 5 VDC . Customer can choose 9 pin male
Sub-D or 15 pin male sub-D connector.
CS100D MFC/MFM can communicate with PC via RS485 .
2.4.2 Connections
The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485 connector , 3
pin male O connector and 15 pin male D-sub（Digital，+24V）connector are shown in figure2-5,
figure2-6, figure 2-7 , figure 2-8 and figure 2-9.
Attention :
Although sharing with the same appearance of CS100D MFC, the 0~5V Setpoint Input and the valve
Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin8 and pin12 of D-sub 15
are not available.

13 of 30
Figure 2-5 9 pin male D-sub connector Figure 2-6 15 pin male D-sub connector
Figure 2-7 RS485 connector Figure 2-8 3 pin male O connector
Figure 2-9 15 pin male D-sub（Digital，+24V）connector
Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and
some accessories. For more details, contact Sevenstar or its local agent.

14 of 30
2.5 Checking Before Operation
Before operating the MFC the following checks should be completed:
2.5.1 Check that tubing is leak free.
2.5.2 Check the process sequence and proper function of all other gas components
involved.
2.5.3 Check the voltage of command signals and power supply to the MFC/MFM.
2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure.
2.5.5 Allow the MFC to warm up for 20 minutes, and then check the zero level output.
2.5.6 Use dry inert gas for test runs.
2.5.7 Prior to using the MFC for extremely corrosive gases, purge MFC with a dry inert
gas for one hour.
SECTION3 FUNCTIONS
3.1 General
Based on new sensor driver technology, zero balance technology and VCP technology,
CS100MFC/MFM presents high performance and reliability. And more digital functions
are developed in CS100 products.
3.2 Control Mode
CS100 MFC/MFM are available for digital，0-5V voltage control mode and output.
When customer chooses one of the three control modes, the others will be screened. The
analog output will be available at all times. The flow output of the CS100 MFC/MFM will
be available through the RS485 interface, even in the analog control mode. The setting of
the CS100 MFC/MFM can be provided to the MFC through one of three sources, in digital

15 of 30
or analog mode.
For more information, please refer to www.mfcsevenstar.cn
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.3 Zero
The Zero function can be commanded through the digital interface or zero-button. Before
zero MFC, please make sure that no gas flow through MFC. Then zero MFC by the digital
interface or zero-button. The zero-button must be pressed continuously for 0.5 seconds in
order to start zero process. The green LED will blink during the zero process. After zero
finished, the green LED will be on constantly. CS Product of the ProfiBus has the Zero
function, but does not have the LED.
3.4 Customer Ground Correction(CGC)
The CS100D can solve the MFC inaccurate problem which is caused by the connection of
the customer ground (connection incorrect or connection line is too long). First of all,
adjust zero by the 3.3 way, if MFC cannot be zero, we need customer ground correction.
Customer ground correction method: Press the zero-button for more than 15 seconds, and
then release the button to complete the customer ground correction.
Note: Please make sure that no gas flow through MFC; The Setpoint must to be zero;
MFC should be warm up not less than 15 minutes.
3.5 Soft-Start
The CS100D MFC/MFM support soft-start function. Soft-start allows customer
change the setting of MFC with definite rate. For more information, please refer to
www.mfcsevenstar.cn.
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.6 Delay
Delay is used to postpone the start of flow from zero flow to the received set-point. It

16 of 30
is programmed in millisecond but the MFC internally rounds up any value to 100ms. For
example, when the delay value is 200, MFC will delay 200ms then receiving the operate
command. When the set point is less than the min control rate, the valve will shut off, and
when larger than the min control rate, MFC will start after the set delay time.
Special default: Values from 1 to 49 ms will be programmed as 100ms. Delay applies
to digital and analog set-points.
3.7 Valve Command Mode
CS100D MFC/MFM are available for valve-close or valve-open by input digital
signal or analog voltage directly. The Valve Command Mode is used to select one of three
ways to interpret the analog signal of Valve Command. For more information, please refer
to www.mfcsevenstar.cn.
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.8 Valve Type
CS100D MFC/MFM the type of valve: Normally closed(NC) . When MFC do not
have power supply, the “NC”type valve is closed and gas can not flow through. Please
mention the valve type when you order the MFC.
3.9 Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS100series
MFC/MFM. Customer can change gas convert factor, full scale of MFC via digital
interface. Full scale of CS100 series MFC/MFM can be re-ranged from 30% to 110%F.S.
For example, an MFC with 100SCCM full scale , the new full scale can be re-ranged
between from 30SCCM to 110SCCM.
CS100 MFC/MFM support customer offset by the target null value. The target null

17 of 30
value is a customer-programmed constant used to offset the flow output independently of
all other sensor offset constants, including the zero process. For example, set Target Null
Value: -20%F.S，then when no flow through MFC/MFM，the reading is -20%F.S，with gas
flow 20%F.S through MFC/MFM，the reading is 0%F.S。Offset range is from -100%F.S
to100%F.S。
For more information, please refer to www.mfcsevenstar.cn
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.10 Total Flow Accumulator
The Total Flow accumulator will record the amount of gas (in SCC) that has been
delivered by CS100MFC/MFM. The amount of purge will not be accumulated in the total
flow amount. For example, the total reading is 3000, means the amount of gas delivered by
MFC is 3000SCC
For more information, please refer to www.mfcsevenstar.cn
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.11 Alarm
The CS100 MFC/MFM will monitor and store certain abnormal conditions as
described below. These conditions can be read and reset from the RS485 interface.
Provisions will be made for masking (disabling) the alarms or warnings on an individual
basis.
Warning and Alarms:
Sensor Zero Output Out of Bounds
EEPROM Failure
Valve Coil Failure or Valve Disconnected
Temperature Out of Operating Range
After power up the LED on the top of the CS100 MFC/MFM is turned GREEN. A

18 of 30
warning condition will be announced by a blinking RED and whenever an alarm condition
is detected it will be set continuously to RED.
For more information, please refer to www.mfcsevenstar.cn
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.12 LED
There is a green-red LED located on the top of the MFC. The constant green LED
indicates the power on. Green blinking indicates that the MFC is zeroing. A blinking red
LED indicates warning condition. Constant red indicates error condition.
Attention :
When the valve of MFC is fully opened , it can be functioned as a MFM. In that case, the maximum flow
testing voltage could reach beyond +10V, please be careful, while flow is beyond F.S. +5V(Full Scale), the
real flow will have no linearity corresponding with flow testing voltage. While it’s purging, flow display will
be inaccurate, even showing “reduce” while the real flow is enhanced, please be sure it’ll be no damaged
to device itself.
SECTION 4 MAINTENANCE
4.1 General
No routine maintenance is required to be performed on the MFM or MFC, Other than
occasional cleaning and re-calibration:
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas.
It can be used about 1 or 2 years with a low purity gas or a corrosive gas.
For any other problems, contact Sevenstar.
4.2 Caution
4.2.1 Medium Forbidden