Siargo MFC3000 Series User manual

Mass flow controller
VA.1
MFC3000 SERIES
@ 2022 Siargo Ltd.
www.Siargo.com

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www.Siargo.com Mass flow controller MFC3000 User Manual
Gas Mass Flow Controller
with proprietary MEMS flow sensing and IO-Link
MFC3000 Series
User Manual
Document No. 03-2022-MFC1 EN
Issue date: 2022.03
Revision: VA.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: [phone]
Email: [email protected]
© Copyright 2022 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descripti
ons
without prior notice. For further information and updates, please visit: www.Siargo.com

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Attention!
Use with caution!
xPlease carefully read this manual prior to operating this product.
xDo not open or modify any hardware which may lead to irrecoverable
damage.
xDo not use this product if you suspect any malfunctions or defection.
xDo not use this product for corrosive media or in a strong vibration
environment.
xUse this product according to the specified parameters.
xOnly the trained or qualified personnel shall be allowed to perform
product services.
xBe cautious for the electrical safety, even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
xThe gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.
xDo not apply for any unknown or non-specified gases that may
damage the product.
x
For remote data, please be sure the meter is properly con
figured.

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T
Table of Contents
1. Overview.................................................................................................. 4
2. Receipt / unpack of the products ................................................................ 5
3. Knowing the products ............................................................................... 6
3.1.
Product description
...................................................................................................6
3.2. Power and data cable description ...............................................................................6
3.3. Mechanical dimensions..............................................................................................7
4. Installation............................................................................................... 8
5. Operation................................................................................................. 9
5.1 Check the product specifications ................................................................................9
5.2 Check the leakage .....................................................................................................9
5.3 Power the product and digital data connection ...........................................................9
5.4 IO-Link communication ........................................................................................... 10
6. Product selection .....................................................................................13
7. Techn
ical specifications
............................................................................14
8. Technical notes for the product performance .............................................15
8.1 Measurement principle ............................................................................................ 15
8.2 Precautions for the best performance of the product ................................................. 15
8.2.1 Comparison with a third-party reference meter ................................................... 15
8.2.2 Particle contamination and fluidic cleanness .......................................................16
8.2.3 Apply to a different gas medium.........................................................................16
9. Troubleshooting ......................................................................................17
10. Warranty and Liability............................................................................. 18
11. Service/order contact and other information..............................................20
Appendix: Document history
.........................................................................21

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1. Overview
This manual provides essential information for the operation of the MFC3000 series of gas mass flow
controllers for non-corrosive gas flow control applications with the full-scale mass flow rate of from
30sccm up to 20
0 SLPM, and both analog
set point and IO-Link or RS485 Modbus interface for the
mass flow control. The product performance, maintenance, and trouble-shooting as well as the
information for product order, technical support, and repair are also included.
MFC3000 mass flow controller can be applied for process control with a 100:1 dynamic range and it
controls in a pressure range of 0.1 to 1MPa (15 to 150 PSI), and a compensated temperature ranging
from 0 to 50°C.
The products are designed with an easy change of mechanical connectors. The standard connectors
are
NPT 1/8” to 1/2”, and other customized ones are available upon request.
The products are operated with Siargo’s proprietary MEMS thermal calorimetric with time-domain
sensing technology together with smart control electronics. Compared to the conventional
calorimetric flow sensing technology on the market, this unique mass flow sensing technology
removes gas sensitivity for some common gases and allows gas identification once programmed.
The sensor surface is passivated with silicon nitride ceramic materials together with a water/oil proof
nano-coating for performance and reliability. This technology also offers better linearity and
improves temperature performance. It is the first of the kind in the industry that senses the mass
flow with multiple gases without a manual gas conversion factor. As such, it ensures high precision
for gas process control with air calibration.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shal
l find the product. The
power and data cable (part number: M12-5-100) as shown below may also be found according to the
same packing materials.
Figure 2.1: MFC3000 IO-Link Model Figure 2.2: power and data cable M12-5-100
Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange
shall be arranged immediately via the original
sales channel. This user manual shall also either be included in the packing box or via an online
request for an electronic version. In most cases, this manual shall be made available to the customer
before the actual order.
The standard cable (part number: M12-5-100) has an M12 or compatible connector with a length of
1.0 m.

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3. Knowing the products
3.1.Product description
Figure 3.1: MFC3000 product with IO-Link description
3.2.Power and data cable description
Table 3.1: MFC3000 pin/wire assignments.
Figure 3.2: MFC3000 connection and cable
Note: 1. The standard cable (part number: M12-5-100) has an M12 or compatible connector with a length of
1.0 meters. The other end for customer connection is open wires.
2. The
company’s IO
-Link ID is 65534.
Wire
Color
Definition
1
Brown
Power supply, 8 ~ 24Vdc
2
White
Set point voltage, 0 ~ 5 Vdc
3
Blue
Ground
4
Black
IO-Link
5
Gray
Analog output, 0 ~ 5Vdc
Flow direction
Electrical
interface
Flow inlet
Installation thread
4-M4x6
Controller body
Electrical wire pin
description

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3.3.Mechanical dimensions
Figure 3.3: MFC3100 dimensions with NPT 3/8” connectors, 100 SLPM model
Note: * Other
model dimensions and o
ther threads or compressive types can be customized.
** The mounting screw length is <6mm; and the suggested mounting torque is <0.35 N·m.

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4. Installation
Do not open or alter any part of the product which would lead to malfunction and irrecoverable
damage. It will also forfeit the terms of the warranty and cause liability.
The product at the time of shipment is fully inspected for its quality and meets all safety requirements.
Additional safety measures during the installation should be applied. This includes, but is not limited
to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, and DC
voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance
must only be performed by trained personnel. Upon request, the manufacturer will provide
necessary technical support and/or training for the personnel.
There are no preferred space directions for the installation. Flow direction should be aligned with the
arrow mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a)
Upon opening the package, the product
's physical integrity should be inspected to ensure no
visual damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Close the upstream valve, if any, completely.
d) During installation, please make sure no foreign materials (such as water, oil, dirt, particles, etc.)
enter the installation pipeline.
e) Connect electrical wires per the wire definition in Table 3.1. Please be sure of the power supply
range (i.e., 8
~ 24 VDC) and power supply polarization.
If an adapter is used, make sure the
adapter meets industrial standards and has all safety certifications. Alternatively, this product
can also be powered by a 9Vdc battery.
f) For the data communication wire connection, please follow the description in Table 3.1 and make
sure that the wires are correctly connected to the proper ports on your data device/equipment.
Please make sure the data cable meets industrial standards with proper shielding.
g) This will conclude the installation.
Cautions
a) Don't alter any part
s
of the product.
b) Ensure the electrical connection is properly done per the instructions.
c) Make sure no mechanical stresses in the connections.
d) The strong electromagnetic interference sources close by or any mechanical shocks at the
pipeline may also create malfunctioning of the product.

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5. Operation
5.1 Check the product specifications
Before starting to use this product, check the product specifications that can be found in this manual
or the basic information from the datasheet at the company’s website www.Siargo.com.
The detailed product technical specifications can be found in Section 7. For a specific application,
the pressure rating must not be higher than the system pressure to be measured, and the flow range
should also be within the specified ones. The gas medium to be for the controller must also be
consistent with that specified by the product. Be particularly cautious about the supplied voltage
indicated in the specification. A higher voltage may lead to irrecoverable damage, and a lower
voltage will not power the product for any desired functions.
For the best performance of the product, it is advised that the gas to be applied must be clean and
free of particles or other foreign materials.
5.2 Check the leakage
Check gas leakage in the pipe system before the operation. If it is needed, pressurized nitrogen or
air can be used for the leakage check.
5.3 Power the product and digital data connection
Although this product complies with the CE-required EMC regulations, it also requires the product to
be used according to the standard electrical device practice. Before connecting the product with
external DC power, make sure the supply voltage is within the range of the specified ones in Section
7. Be cautious that
the standard electrical device precautions such as EDS (electrostatic discharge)
and DC voltage are observed. Excessive electrostatic discharge may damage the product.
The manufacturer-supplied power and data cable have a locking fixture. Lock the cable and make
sure it is properly engaging and will not be accidentally got unplugged.
IO-Link is used for digital data communication. Make sure the wires are properly connected to your
equipment side.

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5.4 IO-Link communication
The digital communication protocol is based on the IO-Link interface. Refer to Table 3.1 for cable
connection, and the following information to establish the communication:
Vendor information
Vendor ID 1624 / 0x0658 – Bytes: 006 088 / 0x06 0/58
Device ID 2 / 0x000002 – Bytes: 00 00 02 / 0x00 0x02
Vendor name Siargo Ltd.
Vendor text www.siargo.com
Communication
IO-Link revision V1.1
Bit rate COM2
Minimum cycle time 5.000 msec
SIO mode support
Yes
Features
Block parametrization No
Data storage No
Device variant
Refer to Table 3.1.
Process data Total bit length = 32
(Process data input)
Name
Description
Data type
Bit offset
Bit length
Value range
Gradient
Offset
Unit
Flowrate
Ins. flowrate
IntegerT
0
32
0~110000
0.001
0
SLPM
PLC input mapping (flowrate)
PLC-In, Word0
PLC-In, Word 2

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Variables
Name Description Index Subindex Data type Length Access rights Default Value range Gradient Offset Unit
Vedor name
10 Sub 0 String T max 10 Byte Read only Siargo Ltd
Vendor text
11 Sub 0 String T max 10 Byte Read only www.Siargo.com
Product name
12 Sub 0 String T max 6 Byte Read only MFC3100
Product ID
13 Sub 0 String T max 6 Byte Read only MFC3100
Product text
14 Sub 0 String T max 11 Byte Read only MassFlowContr
Serial number
15 Sub 0 String T max 12 Byte Read only **00000000**
Hardware revision
16 Sub 0 String T max 7 Byte Read only HWT0100
Firmware revision
17 Sub 0 String T max 7 Byte Read only SWV0108
Setpoint source
186 Sub 0 UIntegerT 1 Byte Read/write 1
(0) Analog input (1) Unsaved digital
Setpoint
187 Sub 0 UIntegerT 2 Byte Read/write 0
0 to 65535 (0) 0%; (64000) 100%
Setpoint flow
188 Sub 0 UIntegerT 4 Byte Read only 0.000L/min Std. 0 to 110000 0.001
P Grain
190 Sub 0 UIntegerT 2 Byte Read/write 15 0 to 9999
D Grain
191 Sub 0 UIntegerT 2 Byte Read/write 25 0 to 9999
Valve preload offset
192 Sub 0 UIntegerT 2 Byte Read/write 2000
0 to 9999 Valve preloaded to 20%
Exhaust mode
193 Sub 0 UIntegerT 1 Byte Read/write 0
(0) Valve under PD control (1) Valve in full open exhaust
Exhaust value
194 Sub 0 UIntegerT 2 Byte Read/write 10000 0 to 10000
Valve status
195 Sub 0 UIntegerT 2 Byte Read only 0.00%
0.00% to 100.00% (0) 0.00%; (65535) 100.00%
Gas temperature
64 Sub 0 UIntegerT 2 Byte Read only 20.00 °C 0.00 to 125.00 °C
Gas conductivity
90 Sub 0 UIntegerT 2 Byte Read only 2.500 mA 0.000 to 11000 mA
High flow alarm
152 Sub 0 UIntegerT 4 Byte Read/write 100.000L/min std. 0 to 110000 0.001
Low flow alarm
154 Sub 0 UIntegerT 4 Byte Read/write 0.000L/min std. 0 to 110000 0.001
Alarm events
1335 Sub 0 RecordT 16 Bit Read only
Bit_13
High flow flag Bitoffset13 BooleanT 1 Bit 0 (0) Inactive; (1) Active
Bit_14
Low flow flag Bitoffset14 BooleanT 1 Bit 0 (0) Inactive; (1) Active
Sensor error
1334 Sub 0 RecordT 16 Bit Read only
Bit_3
Sensor error flag Bitoffset3 BooleanT 1 Bit 0 (0) Normal; (1) Error

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Additional descriptions for the variables
Setpoint source This allows switches between digital and analog mode. Default is 1 or digital control.
Setpoint Set the flow rate in percentage of the full-scale flow, where 0 is zero flow or 0% and
64000 corresponds to the full scale of 100%. The default value is 0, or zero flow.
Setpoint flow Read the current flow rate set by the user. The default value is 0.000 SLPM with a
resolution of 0.001 SLPM.
P Gain PLD proportional control of the valve/flow rate, values: 0 to 9999. Default is 15.
D Gain PLD differential control of the valve/flow rate, values: 0 to 9999. Default is 25.
Valve preload offset Default or preloaded valve opening. The default value is 20% or 2000. The available
values are 0 to 9999.
Exhaust mode This option is for open-loop control. The valve can be fully open.
Exhaust value The value available for the valve is 0 to 10000. Default is 10000 or fully open (100%).
Valve status The value provides the percentage of the opened valve, where 0 is fully closed or 0%
and 65535 is fully open or 100%.
Gas temperature Offers the gas (flow media) temperature data from 0…125°C.
Gas conductivity Offers a value that is proportional to the gas thermal conductivity. Additional
circuitry will be added for more precise measurement, stay tuned.
High flow alarm User to set a flow rate value, and when the flow rate measured is above this value,
an alarm will be triggered.
Low flow alarm User to set a flow rate value, and when the flow rate measured is below this value,
an alarm will be triggered.
Alarm events The data stored will be either 0 or 1. 1 means an alarm was triggered, and o means
none, data at Bit_13 and Bit_14 correspond to high and low flow rate alarm status.
Sensor errors The data stored will be either 0 or 1, 1 means the sensor was malfunctioning, and 0
means the sensor works as specified. Examples are heavy contamination, sensor
damage, or connectivity failure.
A future upgrade will include pressure data and other customized ones.

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6. Product selection
The product part number is composed of the product model number and suffixes indicating the full-
scale flow rate, as well as the other parameters. Refer to the following for details.
MFC3
Gas (A – air; N2; O2; Ar; B – N2O; C – CO2, for other
gases, please contact the manufacturer.
Output (B – RS485; I – IO-Link; V – 0 ~ 5 Vdc.
Available: B, I, BV, IV.)
Maximum full scale flow rate :
030C - 30sccm
050C - 50sccm
100C - 100 sccm
200C - 200 sccm
500C - 500 sccm
102C - 1000 sccm
202C - 2000 sccm
502C - 5000 sccm
Mechanical connection (N – NPT; R – Rc; S – SAE; X –
customized)
001 - 1 SLPM
002 - 2 SLPM
005 - 5 SLPM
010 - 10 SLPM
020 - 20 SLPM
050 - 50 SLPM
100 - 100 SLPM
200 - 200 SLPM

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7. Technical specifications
All specifications listed in the following table unless otherwise noted apply for calibration conditions at 20°C
and 101.325 kPa absolute pressure with air. The product is horizontally mounted at the time of calibration.
Value
Unit
Full-scale range
0 ~ 30 sccm…0 ~ 1000 sccm
0 ~ 2 … 0 ~ 200 SLPM
Accuracy
± (1.0 + 0.2FS)
%
Repeatability
0.50
%
Turn-down ratio
100:1
Max control range
102
%FS
Control pressure range
0.1~1.0
MPa
Setpoint voltage
0~5.0
Vdc
Settling time
100
msec
Working temperature
0 ~ 55
°C
Humidity
<95, no condensation
%RH
Burst pressure
1.5
MPa
Max pressure loss
80 (100 SLPM models)
kPa
Power supply
8 ~ 24
Vdc
Analog output
0 ~ 5.0
Vdc
Max null shift (analog)
±30
mVdc
Digital output
IO-Link; RS485 Modbus
Electrical connector
M12; DB9
Mechanical connection
1/8”… 1/2” FNPT
Protection
IP40
Storage temperature
-20 ~ 70
°C
Reference conditions
20°C, 101.325 kPa, air
Fluid compatibility
Non-corrosive
CE
EN61000-2; -3; -4

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8. Technical notes for the product performance
8.1 Measurement principle
The products utilize the Company’s proprietary micro-machined
(MEMS) thermal calorimetric sensing with time-domain data and data
process technology. A thermal signal generator with a pair of sensing
elements up and downstream of the microheater is precisely
manufactured and separated at predefined micrometer distances on a
chip surface with excellent thermal isolation. When a fluid is flowing
through the sensing chip, the fluid carries the thermal signal
downstream. The sensing elements register the amplitude, time, and
temperature differences, calculating the thermal diffusivity and further
correlated to the fluid mass flow rate via the calibration process.
This unique thermal sensing approach offers a large dynamic range
with a better performance against the environmental parameter
alternations. It is the first of the kind in the industry that offers the gas property independent mass
flow measurements for gases with similar thermal diffusivities. It significantly s
implifies the process
control with high precision and easy maintenance. Please refer to the company's US patents and
other publications made available to the public for additional information.
8.2 Precautions for the best performance of the product
8.2.1 Comparison with a third-party reference meter
It is a general practice that a user may compare the data from the product with a third-party
reference meter, and in many cases, there could be some discrepancies.
When performing such a comparison, please n
ote that the reference meter should have a better
-
specified accuracy (about 1/3 of the product), and pay special attention to the differences in the
reading accuracy and full-scale accuracy.
A full scale accuracy = reading accuracy x (full scale flow rate/ set point (current) flow rate)
Another key point to comparing the different flow meters is that as long as the fluidic flow is a
continuous flow without pulsation, then the fluidic dynamic will have the system following the
Bernoulli equation:
Figure 8.1: Measurement
approach illustration.

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where ρis the fluid density; g is the acceleration due to gravity; P1 is the pressure of the reference
meter; P2 is the pressure at the test meter; v1 is the velocity of the reference meter, and v2 is the
velocity of the test meter. h1 and h2 are the corresponding height for the meters which in most cases
is the same in the system. Therefore, it would be very critical to have the system not have a pressure
variation. (This explains our recommendations for the installations in Section 4). Also, the meter
measurement principle is often very important for the understanding of any discrepancies.
Please note for comparison with a rotameter, the reading could have large deviations due to the
different measurement principles, in particular as a rotameter is sensitive to pressure and
temperature variations.
8.2.2 Particle contamination and fluidic cleanness
Any contamination including particles and liquid vapors would be detrimental to the accuracy of the
flow measurement and also to the meter functionality. It is important to ensure the applied flow
medium will be clean and dry. If any contamination is suspected, please allow experienced technical
personnel to have it checked and re-conditioned. Do not use a foreign cleanser or other fluids to
clean the flow path which could bring irrecoverable damage.
8.2.3 Apply to a different gas medium
The product is calibrated with a high precision NIST traceable metrological standard with clean and
dry air. Thanks to the unique thermal sensing technology, the product can be applied to meter and
control the other clean and dry gas with similar thermal diffusivities without losing accuracy. It
effectively solves the nonlinearity issues of applying a gas conversion factor in calorimetric sensing,
making the measurement highly accurate in a large dynamic range. Gases that can be applied
include air, N2, O2, Ar, CH4, and C
O.
This innovative product operates also follows the basic sensing principle described in the
international standard for thermal mass flow meters (ISO 14511:2001 - Measurement of fluid flow in
closed conduits — Thermal mass flowmeters). For gases with different diffusivities, a gas conversion
factor could be applied.

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9. Troubleshooting
Phenomena
Possible causes
Actions
No signal
Power not connected; battery
empty
Connect the power, check the
cable
Cable connection incorrect
Check cable
No flow or clogging
Check flow and c
ontamination
Power regulator failure
Return to factory
Sensor failure
Return to factory
Large errors or unexpected
flow rate
Particles
, fluid type
Check system
Erroneous or large noise
Vibration, unstable flow
Check system
Valve not work
Wire connection, valve
Return to factory
Offset unstable
Circuitry instability
Check system, power off
No digital interface
Wrong
address, software
Check commands, connection

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10.Warranty and Liability
(Effective January 2018)
Siargo warrants the products sold hereunder, properly used, and properly installed under normal
circumstances and service. As described in this user manual, it shall be free from faulty materials or
workmanship for 180 days for OEM products and 365 days for non-OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
Siargo makes no warranty, representation, or guarantee and sh
all not assume any liability regarding
the suitability of the products described in this manual for any purposes that are not specified in this
manual. The users shall be held full responsibility for validating the performance and suitability of
the products for their particular design and applications. For any misusage of the products out of the
scope described herein, the user shall indemnify and hold Siargo and its officers, employees,
subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages, and expenses
or reasonable attorney fees from direct or indirect sources.
Siargo makes no other warranty, express or implied, and assumes no liability for any special or
incidental damage or charges, including but not limited to an
y damages or charges due to installation,
dismantling, reinstallation, etc. other consequential or indirect damages of any kind. To the extent
permitted by law, the exclusive remedy of the user or purchaser, and the limit of Siargo's liability for
any and all losses, injuries, or damages concerning the products, including claims based on contract,
negligence, tort, strict liability, or otherwise shall be the return of products to Siargo, and upon
verification of Siargo to prove to be defective, at its sole option, to refund, repair or replacement of
the products. Regardless of form, no action may be brought against Siargo more than 365 days after
a cause of action has accrued. The products returned under warranty to Siargo shall be at the user or
purchaser's
risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are
deemed to have accepted this limitation of warranty and liability, which contains the complete and
exclusive limited warranty of Siargo. It shall not be amended, modified, or its terms waived except
by Siargo's sole action.
This manual's product information is believed to be accurate and reliable at the time of release or
made available to the users. However, Siargo shall assume no responsibility for any inaccuracies
and/or errors and reserves the right to make changes without further notice for the relevant
information herein.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified, or have been subject to unusual physical or
electrical circumstances indicated but not limited to those stated in this document or any
other actions which cannot be deemed as proper use of the products;

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(2) Products that have been subject to chemical attacks, including exposure to corrosive
substances or contaminants. In the case of battery usage, long-term discharge or leakage
induced damages;
(3) Products that have been opened or dismantled for whatever reasons;
(4) Products that have been subject to working conditions beyond the technical specification as
described by this manual or related datasheet published by the manufacturer;
(5)
Any damages incurred by the incorrect usage of the products;
(6) Siargo does not provide any warranty on finished goods manufactured by others. Only the
original manufacturer's warranty applies;
(7) Products that are re-sold by unauthorized dealers or any third parties.