Spellman EBM30N/TEG User manual

© 2021 Spellman High Voltage Electronics Corporation
Tel : [phone]
[e-mail]
Broomers Park, Pulborough,
W. Sussex, UK. RH20 2RY
Product:
EBM30N/TEG
Title:
Installation and User Guide
Document Number:
81773-4
Issue:
2
Date:
10/August/2021

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 2 of 16
Change History
Contents
1Description .................................................................................................................................................5
1.1 Rated Outputs...................................................................................................................................5
1.2 Bias Output and Bias Cancellation Supply .......................................................................................5
1.3 Block Diagram ..................................................................................................................................6
1.4 Environmental Conditions.................................................................................................................6
2Safety .........................................................................................................................................................7
2.1 Meaning of Symbols .........................................................................................................................7
3Installation of the HV Unit ..........................................................................................................................8
3.1 Mechanical Installation .....................................................................................................................8
3.2 Electrical Installation .........................................................................................................................8
3.3 Connecting the Power Supply ..........................................................................................................8
3.3.1. Input Power Connector - PL1 ......................................................................................................8
3.3.2. Control Connectors –PL2 and PL3.............................................................................................9
3.3.3. Input Power and Control Connectors Accessory Kit ................................................................ 10
3.3.4. High Voltage Connector and Cables ........................................................................................ 10
3.3.5. Scintillator Output and Cables .................................................................................................. 11
3.3.6. PMT and Collector Outputs ...................................................................................................... 11
4Operation of the HV Unit ......................................................................................................................... 12
4.1 Control Signals .............................................................................................................................. 12
4.2 Monitor Signals .............................................................................................................................. 12
5Protection ................................................................................................................................................ 13
Appendix 1 –EBM30N/TEG Outline Drawing ................................................................................................. 14
Appendix 2 - HV Cable Assembly ................................................................................................................... 15
Appendix 3 –Scintillator Cable Assembly ....................................................................................................... 16
ISSUE
DATE
NAME
SECTION
CHANGE
1
02/Aug/21
JS
All
Created from 80463-4
2
10/Aug/21
JS
1, 3.3.2
1.2
3.3.1, 3.3.2
Output name updated to “Bias Cancellation” to distinguish from Bias output
Bias and Bias Cancellation description updated
Pinout indication added to low voltage receptacles

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 3 of 16
SAFETY
DANGER
HIGH VOLTAGE
RISK OF ELECTROCUTION
Observe extreme caution when working with this equipment
High voltage power supplies must always be connected to
protective earth
Do not touch connections unless equipment is turned off and
the capacitance of both the load and power supply are grounded
Allow adequate time for discharge of internal capacitance of the
power supply
Do not ground yourself or work under wet or damp conditions
Servicing Safety
Maintenance may require removing the Instrument cover with
the power on
Servicing should only be done by qualified personnel aware of
the hazards
Return to supplier for servicing

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 4 of 16
SÉCURITÉ
DANGER
HAUTE TENSION
RISQUE D'ÉLECTROCUTION
Observez une extrême prudence lorsque vous travaillez avec cet équipement
Les alimentations haute tension doivent toujours être connectées
au conducteur de protection.
Ne pas toucher les connexions à moins que l'équipement soit
éteint et que la capacité de la charge et de l'alimentation
électrique ne soit mise à la terre.
Prévoir un temps suffisant pour la décharge de la capacité
interne de l'alimentation.
Ne pas vous mettre à la terre ou travailler dans des conditions
humides.
Sécurité d'entretien
L'entretien ne doit être effectué que par un personnel qualifié et
conscient des dangers.
Il n'y a pas de piéce remplaçables par l'utilisateur dans l'unité,
retourner au fournisseur pour l'entretien.

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 5 of 16
1 Description
The EBM30N/TEG consists of one chassis containing a complete high voltage power supply to power
the main components within a Scanning Electron Microscope (SEM).
The chassis is approximately 105mm x 190mm x 250mm.
1.1 Rated Outputs
Output
Rating
Notes
Accelerator
-30kV, 170µA
Internal Supply. Voltages up to 32kV can be
generated.
Bias Cancellation
3.5kV, 150µA
Internal Supply. Referenced to Accelerator
output.
Bias
N/A
See section 1.2
Filament
15W max into 1Ω
Referenced to Accelerator output.
P.M.T.
1.3kV, 1mA
Referenced to ground.
Scintillator
11kV, 250 µA
Referenced to ground.
Collector
500V, 5mA
Referenced to ground.
The ‘source’ outputs (accelerator, bias and filament) are provided at a Claymount mini 75 receptacle.
The P.M.T. and Collector outputs are provided at BNC.HT connectors (Radiall R316 553)
The Scintillator output is provided at a bespoke ‘poke-home’ receptacle.
All control and monitoring is by analogue and TTL level signals.
1.2 Bias Output and Bias Cancellation Supply
The Bias Output is not controlled directly: it is referenced to the Accelerator Output and varies with the
load current and the Bias Cancellation Supply as described below.
The negative Bias voltage is generated by the feedback resistor current and the load current flowing
from the accelerator through a 20MΩ +/-5% resistor to the filament centre tap. See the block diagram in
the next section. The maximum off-load Bias voltage is therefore dependent upon the accelerator
voltage and the 500MOhm feedback resistor as shown in the block diagram.
Beam (emission) current conduction is achieved by cancelling this bias voltage with the positive polarity
Bias Cancellation supply.
An Accelerator output of -30kV will generate a current of -60uA feedback into the 500M feedback
resistor, which is equal to a voltage of -1200V generated across the 20MΩresistor.
So, the Bias sits at -31200V which blocks the flow of electrons. The positive Bias Cancellation voltage
reduces the negative Bias output allowing the emission current to flow.

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 6 of 16
1.3 Block Diagram
A block diagram of the unit and its interconnection with the SEM is shown below.
1.4 Environmental Conditions
Operating Temperature: 10°C to +45°C for normal operation, however the unit will operate from
0°C but with an extended warm up period.
Storage Temperature: -20°C to +75°C
Humidity: 0% to 85% RH (non-condensing)
Accelerator
Bias
Cancellation
Filament
Filament -
Filament +
Bias
500MFeedback
Resistor
20M
100
100
PMT
Scintillator
Collector
Electron Gun
Detector
EBM30N/XXX
Power Supply Unit
2kV
[Pin C]
[Pin G]
[Pin L]
[Pin S]

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 7 of 16
2 Safety
The conditions of this manual must be complied with to maintain safety. Operating the unit in a manner
not specified in this manual may impair the protection against electric shock provided by the unit.
The unit is UL listed to UL61010-1 and CE marked to EN60101-1.
The following outputs are classed as hazardous, as defined by 61010-1:
•Accelerator
•Bias
•P.M.T
•Collector
•Scintillator
The unit is contained in an earthed case. The earth stud of the unit shall be properly bonded to the main
protective earth termination in the end product.
The unit has been evaluated for use in a Pollution Degree 2, Installation Category II environment.
Consideration should be given to conducting the following tests with the unit installed in the end product:
•Dielectric Voltage Withstand Test, between live parts of the unit and the end product chassis.
•Permissible Limits Tests with the unit installed in the end product.
•Temperatures on power electronic components, transformer windings and accessible surfaces.
The unit must be terminated safely before operation. Hazardous voltages will be exposed if the
connector is removed whilst the unit is enabled. The Earth stud of the unit is a protective earth and must
be connected to the earth of the system.
The unit must be switched off for at least one minute before disconnecting any of the connectors
or removing the access panel.
The unit is intended for use as a component and no surface of the unit should be accessible in the end
product.
Note: Failure to comply with the above could compromise the safe operation of the unit and
invalidate the warranty.
2.1 Meaning of Symbols
SYMBOL
MEANING
Refer to manual before operating
Caution, possibility of electric shock
Protective conductor terminal (PE)
Functional Earth

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 8 of 16
3 Installation of the HV Unit
3.1 Mechanical Installation
The EBM30N/TEG unit must be fitted in the end product and secured in position with screws.
The unit should only be used in a Pollution Degree 2 Installation Category II environment.
The unit is intended for use as a component and no surface of the unit should be accessible in the end
product.
The mechanical outline of the unit is shown in Appendix 1 –EBM30N/TEG Outline Drawing.
The EBM30N/TEG must be fitted in a unit and secured in position using the mounting brackets provided.
A safety interlock should be used to prevent access to the unit when it is operating.
The unit should only be used in a Pollution Degree 2 Installation Category II environment.
Weight: 7.5 Kg
3.2 Electrical Installation
Input Rating: The EBM30N/TEG is designed for operation from a UL recognised, double insulated or
SELV 24Vdc (5%) supply, the maximum continuous current requirement is 2.5A.
3.3 Connecting the Power Supply
The input and output connectors are not intended for field connections and should only be connected to
internal wiring in the end use equipment.
The unit is not supplied with cables for power and communications, for installation of the unit into a given
system all cabling must be prepared to suit the respective interfaces.
A low voltage connectors accessory kit, HV Out and Scintillator mating cables are available for order,
see following sections for details.
The power, control and HV connections to the unit are detailed in the following sections of this manual.
3.3.1. Input Power Connector - PL1
Manufacturer JST Model B 5PS-VH
pin#
Signal
I/O
Description
Remarks
1
+24V
I
DC24V Input
Pins connected internally
2
+24V
I
DC24V Input
3
0V
I
DC24V Common
Pins connected internally
4
0V
I
DC24V Common
5
FG
-
Case earth
Internally connected to 0V
Receptacle pinout:
Pin1 Pin2 Pin3 Pin4 Pin5

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 9 of 16
3.3.2. Control Connectors –PL2 and PL3
Analog In/Out Connector PL3
Manufacturer JST Model S15B-EH
pin#
Signal
I/O
Description
Remarks
1
Fil Prog(+)
I
0 to 4V = 0 to 4V Filament output
Differential-input
2
Fil Prog(-)
I
3
Bias Cancel Prog(+)
I
0 to 3.5V = 0 to 3.5kV Bias Cancellation
output
Differential-input
4
Bias Cancel Prog(-)
I
5
Acc Prog(+)
I
0 to 6V = 0 to 30kV Accelerator output
Differential-input
6
Acc Prog(-)
I
7
EMS
O
0 to 10V = 0 to 200uA Emission current.
Limited to 12V maximum. 3% or 0.1V,
whichever is greater
8
EMS 0V
O
9
PMT Prog(+)
I
0 to 6.5V = 0 to 1300V P.M.T output
Differential-input
10
PMT Prog(-)
I
11
Scintillator Prog (+)
I
0 to 5.5V = 0kV to 11kV Scintillator
output
Differential-input
12
Scintillator Prog (-)
I
13
Collector Prog
I
0 to 5V = 0 to 500V Collector output
Differential-input
14
Collector Prog 0V
I
15
-
-
Not Used
Digital In/Out Connector PL2
Manufacturer JST Model S10B-EH
pin#
Signal
I/O
Description
Remarks
1
Remote on/off
I
Outputs 1,2 and 3 (Acc., Bias, Fil.) remote
on/off
High = off
2
Remote 4 on/off
I
Output 4 remote on/off
High = off
3
Remote 5 on/off
I
Output 5 remote on/off
High = off
4
Remote 6 on/off
I
Output 6 remote on/off
High = off
5
Remote signal gnd
I
0V connection for remote controls
6
Filament open cct
O
Open collector logic level
LOW <0.5V at ≤1.6mA
HIGH >2.5V at ≤-180uA
High = failed
7
Filament OC return
O
8
-
-
Not Used
9
-
-
Not Used
10
-
-
Not Used

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 10 of 16
Receptacles pinout:
3.3.3. Input Power and Control Connectors Accessory Kit
An accessory kit is available to order free of charge which contains the mating housings and crimps
for the low voltage connectors.
3.3.4. High Voltage Connector and Cables
The unit uses a standard high voltage receptacle from Claymount: the CA11 (mini 75).
Claymount (www.claymount.com) can also provide mating cable assemblies terminated with mini75
high voltage plug.
Spellman can provide a cable assembly in different lengths, terminated one end in the mini 75 and
the other end open.
Drawing is shown in Appendix 2 - HV Cable Assembly
Part numbers are:
HV Cable Assembly part number
Cable Length
HVC30/3SO/1317
2m
HVC30/3SO/1314
3m
HVC30/3SO/1315
5m
HV Cable Assembly Connector:
Low Voltage Mating Connectors Accessory Kit part number: 13802-27
Pin9……Pin1 Pin15…………Pin1

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 11 of 16
3.3.5. Scintillator Output and Cables
This uses a bespoke ’Poke home’ receptacle manufactured by Spellman HV with an 9mm ISO metric
thread, 39mm deep. See drawing in Appendix 3 –Scintillator Cable Assembly.
Different lenghts scintillator mating cables for the ‘Poke home’ receptacle are available to order.
Scintillator Cable Assembly part number
Cable Length
HVC11/1SO/1320
1m
HVC11/1SO/1316
2m
3.3.6. PMT and Collector Outputs
These outputs use an industry standard BNC.HT connector (i.e. Radiall R316 553)

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 12 of 16
4 Operation of the HV Unit
4.1 Control Signals
The EBM30N/TEG unit is controlled by analogue and digital inputs using the two signal I/O connectors
shown in Section 3.3.2
The following table details the action of each control signal.
Input Signal
Level
(Vdc or TTL)
Control
Accelerator program voltage
0 to 6V
This corresponds to 0 to 30kV Accelerator output
Bias Cancellation program
voltage
0 to 3.5V
This corresponds to 0 to 3.5kV Bias Cancellation
output
Filament program current
0 to 4V
This corresponds to 0 to 4V Filament output
P.M.T program voltage
0 to 6.5V
This corresponds to 0 to 1300V P.M.T output
Scintillator program voltage
0 to 5.5V
This corresponds to 0kV to 11kV Scintillator
output
Collector program voltage
0 to 5V
This corresponds to 0 to 500V Collector output
Accelerator, Bias and Filament
remote on/off
TTL input
Accelerator, Bias and Filament all disabled if
signal is High
P.M.T output remote on/off
TTL input
P.M.T output disabled if signal is High
Scintillator output remote on/off
TTL input
Scintillator output disabled if signal is High
Collector output remote on/off
TTL input
Collector output disabled if signal is High
Note that TTL logic controls use the following levels:
low <0.8V
high >2.4V
High = off
4.2 Monitor Signals
The EBM30N/TEG is monitored by analogue and digital outputs using the two signal I/O connectors
detailed in Section 3.2
The following table details the purpose of each monitor signal.
Output Signal
Level
(Vdc or Logic)
Control
Emission Current
Monitor
0 to 10V 3% or 0.1V,
whichever is greater
This corresponds to 0 to 200uA Emission
current. Limited to 12V maximum
Filament voltage > 6V
i.e. open circuit
Open collector logic level
LOW <0.5V at ≤1.6mA
HIGH >2.5V at ≤-180uA
High means the filament has failed

EBM30N/TEG –Installation and User Guide
Document Number: 81773-4
Issue: 2
Spellman High Voltage Electronics Limited |[phone] |[e-mail] |Broomers Park, Pulborough, W. Sussex, UK. RH20 2RY
TEMPLATE: 40776 ISS A | ECN I-10067 | DATE: 16/04/21
QA/ENG/SAL
© 2021 Spellman High Voltage Electronics Corporation
Page 13 of 16
5 Protection
All outputs are protected from arcs in the load and continuous short circuit.
The unit will withstand maximum voltage arcs with an average repetition rate of up to 0.1Hz.
If the Accelerator has more than 8 arcs in a nominal 10 second period the unit will shut down. If there
are less than 8 arcs the unit will continue to operate. Arc events less than 100ms from the previous
event will be ignored.
A shutdown event maybe reset by toggling the ‘Outputs 1, 2&3 remote on/off’ level off and on again or
toggling the input power off and on again.
All low voltage inputs are protected against over voltage (up to 30V) and negative input voltages (up to
-30V).
The maximum output voltage, even under single fault conditions, is 40kV.

Page 14 of 16
Appendix 1 –EBM30N/TEG Outline Drawing

Page 15 of 16
Appendix 2 - HV Cable Assembly

Page 16 of 16
Appendix 3 –Scintillator Cable Assembly