Sumitomo Marathon CP-8 User manual

Marathon®CP-8 Cryopump
Technical Manual
Sumitomo (SHI) Cryogenics of America, Inc.
1833 Vultee Street
Allentown, PA 18103-4783
U.S.A.
Revision D: April 2012 266810A

TABLE OF CONTENTS
i
Page
SAFETY.......................................................................................................................... 1
SERVICE ............................................................................................................................ 3
INTRODUCTION ............................................................................................................ 5
Cryopumps.......................................................................................................... 5
PRINCIPLES OF OPERATION ...................................................................................... 7
DESCRIPTION ............................................................................................................... 9
Cryopump Components..................................................................................... 10
SPECIFICATIONS........................................................................................................ 11
Cold Head ........................................................................................................ 11
Pumping Speeds ............................................................................................... 11
Throughput........................................................................................................ 11
Capacity ............................................................................................................ 11
Crossover Rating............................................................................................... 11
Cooldown Time ................................................................................................. 11
Weight............................................................................................................... 11
Mounting Flange................................................................................................ 11
Connections ...................................................................................................... 11
Gas Line Couplings ........................................................................................... 11
Cold Head Cable Receptacle ............................................................................ 11
Standard Single Silicon Diode Temperature Sensor and Optional Dual
Temperature Sensor (for MCC) ......................................................................... 11
Standard Single Temperature Sensor Connector .............................................. 12
Optional Dual Temperature Sensor Connector (for MCC).................................. 12
Alternate Single Silicon Diode Temperature Sensor .......................................... 12
Compressor....................................................................................................... 12
Refrigerant Quality............................................................................................. 12
Adapter Fittings (Optional Accessories)............................................................. 13
Environmental Requirements ............................................................................ 13
Maintenance Interval ......................................................................................... 13
Supplier Name and Address.............................................................................. 13
Regulatory Compliance ..................................................................................... 14
INSTALLATION............................................................................................................ 15
Introduction ...................................................................................................... 15
Unpacking, Inspection and Pressure Check..................................................... 15
Cryopump Lifting Instructions........................................................................... 17
Compressor Position........................................................................................ 18
Compressor Checkout ..................................................................................... 18
Remove the Existing Pumping System ............................................................ 19
Temperature Sensor Cable Assembly (Optional Accessory) ............................ 20
Install the Cryopump ........................................................................................ 20
Install the Gas Manifolds (if used) .................................................................... 21
Install the Gas Lines ........................................................................................ 22
Install the Cold Head Cable.............................................................................. 24
Connect the Purge Gas, Vacuum and Vent Lines ............................................ 24
Remote On/Off Cable (Optional Accessory)..................................................... 26

TABLE OF CONTENTS
(continued)
ii
Page
ACCESSORIES............................................................................................................ 27
Installation ......................................................................................................... 27
Pumpout/Nitrogen Purge Adapter...................................................................... 28
Silicon Diode or Hydrogen Vapor Bulb Temperature Sensor ............................. 28
OPERATION ................................................................................................................ 29
Prestart Check................................................................................................... 29
Startup............................................................................................................... 30
Cold Head Orifice Adjustment ........................................................................... 32
Crossover Pressure Determination.................................................................... 33
Regeneration..................................................................................................... 33
Regeneration: Warm-Up Phase.................................................................... 33
Regeneration: Purge Phase ......................................................................... 34
Regeneration: Evacuation Phase ................................................................. 35
Regeneration: Cooldown Phase ................................................................... 35
Vacuum Baking ................................................................................................. 35
Restarting after a Power Failure ........................................................................ 36
System Shutdown ............................................................................................. 36
Shutdown: One Cryopump in a Multiple Cryopump System............................... 37
MAINTENANCE ........................................................................................................... 39
Cryopump Handling and Shipping ..................................................................... 39
Compressor Adsorber Replacement.................................................................. 41
Remove the Cryopump from the Vacuum Chamber .......................................... 41
Disconnect the Gas Lines.................................................................................. 42
Cryopanel Maintenance..................................................................................... 43
Disassemble and Clean the Cryopanels ....................................................... 44
Reassemble the Cryopanels......................................................................... 44
Clean the Relief Valve....................................................................................... 45
Clean the Relief Valve’s Filter Screen ............................................................... 45
Rupture Disc...................................................................................................... 45
Standard Silicon Diode ...................................................................................... 46
Functional Check.......................................................................................... 46
Optional Dual Silicon Diode used with a Marathon®Cryopump Controller
(MCC)........................................................................................................... 46
Functional Check of the Dual Silicon Diode .................................................. 47
Hydrogen Vapor Bulb ........................................................................................ 47
Cold Head Maintenance .................................................................................... 48
Cold Head Removal from the Cryopump ...................................................... 48
Cold Head Installation into the Cryopump..................................................... 48
Charging and Venting........................................................................................ 49
Charging Procedure ..................................................................................... 49
Venting Procedure to Adjust the Equalization Pressure................................ 49
Gas Cleanup ..................................................................................................... 50
Gas Cleanup of the Gas Lines...................................................................... 50
Gas Cleanup of the Cold Head..................................................................... 50
Gas Cleanup of the Compressor .................................................................. 51
Leak Check the Refrigeration System ............................................................... 51
Leak Repair....................................................................................................... 53

TABLE OF CONTENTS
(continued)
iii
Page
TROUBLESHOOTING.................................................................................................. 55
Troubleshooting Guide ...................................................................................... 55
PARTS ......................................................................................................................... 63
Ordering ............................................................................................................ 63
Parts Identification and Numbers....................................................................... 63
ILLUSTRATIONS LIST
Figure 1 Typical Cryopump Systems........................................................................... 6
Figure 2 Equilibrium Vapor Pressure vs. Temperature ................................................ 7
Figure 3 Parts Identification and Stages of Freezing during Cryopumping................... 9
Figure 4 Typical Adapter Fitting................................................................................. 13
Figure 5 Restricted Areas When Lifting Cryopump.................................................... 17
Figure 6 Lifting the Cryopump with Commercial Lifting Equipment............................ 18
Figure 7 Prepare Sensor Cable................................................................................. 20
Figure 8 Cryopump Mounting .................................................................................... 21
Figure 9 Attach Identification Label ........................................................................... 22
Figure 10 Connect Gas Line to Compressor or Cryopump ........................................ 23
Figure 11a Relief Valve Vent Connection Detail .......................................................... 25
Figure 11b Vent Adapter (Optional)............................................................................. 26
Figure 12 Evacuate the Cryopump Vacuum Enclosure ............................................... 31
Figure 13 Evacuate the Vacuum Chamber and Cool Down the Cryopump.................. 31
Figure 14 Steady State Cryopumping.......................................................................... 32
Figure 15 Warm-Up the Cryopump.............................................................................. 34
Figure 16 Break the Gas Line Connection from the Cold Head ................................... 42
Figure 17 Disconnect the Gas Line from the Cold Head.............................................. 42
Figure 18 Check the Standard Silicon Diode ............................................................... 46
Figure 19 Check the Dual Silicon Diodes .................................................................... 47
Figure 20 Possible Points of Gas Leaks...................................................................... 53
SJM P/N 266810A

iv
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SAFETY
1
GENERAL
SCAI equipment is designed to operate safely when the installation, operation and servicing are
performed in accordance with the instructions in this technical manual. Consult the nearest
SCAI Service Center with any questions you may have concerning the operation or
maintenance of this equipment. For Service Center locations, see the Service section, which
follows.
SPECIAL NOTICES
Three types of special notices, WARNING, CAUTIONS and NOTES are used in this technical
manual.
WARNINGS call attention to actions or conditions that can result in serious injury or death.
CAUTIONS call attention to actions or conditions that can result in damage to the equipment or
in abnormal performance.
NOTE
NOTES give important, additional information, explanations or recommendations related to the
procedure or discussion presented.
WARNINGS and CAUTIONS appear in rectangles in the text where they are applicable.
Before installing and operating this equipment, be sure to read the Safety section in the
General Technical Manual for Cryopump Systems, 261802A
Pay particular attention to the Section SPECIAL PROCEDURES for CRYOPUMPING
OXYGEN or OZONE.
AVOID INJURY. Failure to operate this equipment in the manner specified in
this manual may create a hazardous condition resulting in serious injury to the
operators and/or damage to the equipment.
NOTE
Parallel lines (||) in the right margin identify changes from the previous revision.

2
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SERVICE
3
HEADQUARTERS
Sumitomo (SHI) Cryogenics of America, Inc.
1833 Vultee Street
Allentown, PA 18103-4783
Sales and Parts
TEL: [phone]
or
[phone]
FAX: [phone]
Service
TEL: [phone]
or
TEL: [phone]
SERVICE CENTERS
Eastern
U.S.A
Sumitomo (SHI) Cryogenics of America, Inc.
1833 Vultee Street
Allentown, PA 18103-4783
TEL: [phone]
or
[phone]
FAX: [phone]
Western
U.S.A.
Sumitomo (SHI) Cryogenics of America, Inc.
456 Oakmead Parkway
Sunnyvale, CA 94085
TEL: [phone]
FAX: [phone]
Europe
Sumitomo (SHI) Cryogenics of Europe, Ltd.
3 Hamilton Close
Houndmills Industrial Estate
Basingstoke
Hampshire RG21 6YT
United Kingdom
TEL: [phone]
FAX: [phone]
Sumitomo (SHI) Cryogenics of Europe, GmbH
Daimlerweg 5a
D-64293 Darmstadt
Germany
TEL: [phone]
FAX: [phone]
Asia
Sumitomo Heavy Industries, Ltd.
Service Section
Cryogenics Division
2-1-1 Yato-Cho Nishitokyo-City
Tokyo 188-8585
Japan
TEL: [phone]
FAX: [phone]
Sumitomo (SHI) Cryogenics Korea, Co., Ltd.
Room 619-620, Venture Valley
#958 Goseck-Dong, Kwonsun-Gu
Suwon-City, Gyeonggi-Do
South Korea
TEL: [phone]
FAX: [phone]
Sumitomo Heavy Industries (Shanghai) Ltd.
Room 105, Xingdi Business Building
No. 1698 Yishan Road
Shanghai 201103
People’s Republic of China
TEL: [phone]
FAX: [phone]

4
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INTRODUCTION
5
Cryopumps
SCAI Cryopumps produce clean, fast vacuum for high-vacuum applications. The cryopump
does not contribute any contamination to the vacuum chamber because it functions by capturing
gases, and no moving parts or lubricants are exposed to the vacuum.
Figure 1 shows the major components of typical cryopump systems:
•helium compressor
•cryopump(s)
•gas lines
•cold head cable(s)
•optional gas manifold for connecting multiple cryopumps to the compressor.
The Marathon®CP-8 Cryopump uses a model CH-204S Cold Head. Both are designed to
metric standards.
The information in this manual pertains only to the Marathon®CP-8 Cryopump System.
Pressures are stated as gauge, not absolute. Psig is pounds per square inch gauge and
kPa is Kilopascals gauge.
kPa = 6.895 Psig
Symbols on the equipment and descriptions:

Introduction
6
Figure 1 Typical Cryopump Systems
S R
1 Nitrogen Purge
2 To Rough Pump
3 Vent Relief Valve to a Safe Location
4 To Temperature Monitor
Gas Lines
Cold Head Cable
Marathon CP-8 Cryopump
Helium Compressor
Gas Lines
Cold Head Cables
Helium Compressor
2 or 3 Marathon CP-8 Cryopumps
2
1
3
4
Multiple Cryopump Application
SR
Single Cryopump Application

PRINCIPLES OF OPERATION
7
A cryopump creates a vacuum by capturing gases from the vacuum chamber. The pump does
this by solidifying gases onto cold surfaces. See Figure 3.
Typical cryopumps have a cryogenic refrigerator (cold head) that produces refrigeration at two
temperature levels and cools two, extended-surface cryopanels onto which the gases can
freeze. The first stage of the cold head, operating in the range of 50 to 75 K, cools the outer
cryopanel that shields the colder, second-stage cryopanel against radiant heat and cools the
louver across the inlet of the pump. Water vapor freezes out when it hits the louver.
The second stage of the cold head, which operates between 10 and 20 K, cools the inner
cryopanel that freezes out nitrogen, oxygen and argon after they pass through the louver. On
the inside of the cold cryopanel, charcoal adsorbs gases that will not freeze at second-stage
temperatures.
A cryopump can reduce the pressure in a vacuum chamber to very low levels. Figure 2 shows
the relationship between the equilibrium vapor pressures and temperatures of frozen gases.
Because the equilibrium vapor pressures for neon, hydrogen and helium are too high at 20 K to
freeze these gases onto a bare surface, charcoal is used to adsorb them.
Figure 2 Equilibrium Vapor Pressure vs. Temperature
1E-13
1E-12
1E-11
1E-10
1E-9
1E-8
1E-7
1E-6
1E-5
1E-4
1E-3
1E-2
1E-1
1E+0
1E+1
1E+2
1E+3
1 10 100 1000
Temperature (K)
Vapor Pressure (torr)
He
H
2
N
2
Ne CH
4
O
2
Ar
CO
2
H
2
O

8
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DESCRIPTION
9
Figure 3 Parts Identification and Stages of Freezing during Cryopumping
Second Stage Cryopanel
10K to 20K
Nitrogen, Oxygen, Argon
First Stage Cryopanel
50K to 90K
Vacuum Enclosure
Hydrogen
Adsorber on
Charcoal
Cold Head
Cylinder
Pumpout
Port
Purge Port
Relief Valve
Port
Gas Return Coupling
Gas Supply Coupling
Cold Head
Cold Head Receptacle
Mounting Flange
Louver, Water
Variable Orifice
(135°from Gas
Return Coupling)

Description
10
Cryopump Components (See Figure 3)
Cold Head: Provides the refrigeration necessary to cool the cryopanels.
Cold Head Cylinder: This part of the cold head includes the heat station flanges onto which the
cryopanels are mounted.
First-Stage Cryopanel: Shields the second-stage cryopanel from radiant heat:
Louver: A series of concentric rings that captures water vapor and shields the second-stage
panel from radiant heat.
Mounting Flange: ISO 200 mm, mates the cryopump assembly to the operator's vacuum
chamber.
Nitrogen Purge Port: Nitrogen supply connection for regeneration purge and hazardous gas
dilution.
Pressure Relief Devices: Two types of pressure relief devices, a pressure relief valve or a
rupture disc, are available.
A pressure-relief valve is attached to the vacuum enclosure. The valve is
designed to open and vent gases if the pressure rises to 7 kPa (1 psig).
A rupture disc, instead of a relief valve, is used in an ultra-high vacuum
(UHV) system. The disc will burst if the internal pressure of the cryopump
exceeds 124 kPa (18 psia).
Pumpout Port: Allows the operator to connect a roughing pump to the cryopump for evacuating
the cryopump vacuum enclosure. Close the vacuum valve after the initial evacuation.
Second-Stage Cryopanel: Captures nitrogen, oxygen and argon by solidification on copper
surfaces and captures hydrogen and helium by adsorption in charcoal.
Temperature Sensors: Two types of sensors, encapsulated silicon diode or hydrogen vapor
bulb, are available to measure second-stage temperature. For a cryopump connected to a
Marathon®Cryopump Controller, an alternate dual diode is furnished to measure first-stage and
second-stage temperatures.
The silicon diode is encapsulated in a cartridge and the diode wires are
covered with tubing to prevent the diode from becoming an ignition source.
Sensor lead wires exit the vacuum enclosure through a hermetically-sealed
connector so the sensor can be monitored remotely.
The vapor-bulb sensor is filled with hydrogen gas. The pressure gauge,
calibrated in degrees K, monitors the vapor pressure of the gas. The
gauge is mounted locally on the vacuum enclosure. The sensor has
a useful temperature range indication of 14 K to 24 K.
Vacuum Enclosure: Forms the vacuum boundary around the cryopanels.

Specifications
11
Cold Head SCAI model CH-204S.
Pumping Speeds
Air 1500 liters/second
Water 4200 liters/second
Argon 1250 liters/second
Hydrogen 2300 liters/second
Nitrogen 1470 liters/second
Throughput Argon, 11.0 Torr-liters/sec or 870 sccm.
Capacity Argon, 1200 std. liters
Hydrogen, 25 std. liters
Crossover Rating 220 torr-liters (air)
Cooldown Time 75 minutes to 20 K
Weight 16 kg (35 lbs.)
Mounting Flange ISO 200 mm, ANSI 6” or CF 10”
Connections Pumpout Port: ISO NW25
Nitrogen Purge Gas Port: Parker UltraSeal, size 6
Relief Valve Vent Connection: See Figure 9b
Temperature Sensor Port: 5 pin electrical receptacle
Gas Line Couplings
Supply and return helium gas connections are size 8, male (8M) Aeroquip self-sealing
couplings.
Cold Head Cable Receptacle
The receptacle is a 4 pin, 8 shell Detoronics connector.
Standard Single Silicon Diode Temperature Sensor and Optional Dual Temperature
Sensor (for MCC)
With a 10 µA DC current excitation, the encapsulated silicon diodes supplied with the cryopump
have the following voltage/temperature characteristics:
Temperature
(K)
Output
(Volts)
Temperature
(K)
Output
(Volts)
8 1.4723 24 1.1146
10 1.3956 40 1.0855
12 1.3385 60 1.0530
14 1.2918 80 1.0190
16 1.2517 100 0.9832
18 1.2151 160 0.8655
20 1.1759 200 0.7806
22 1.1293 300 0.5567

Specifications
12
Standard Single Temperature Sensor Connector
The receptacle is a 4 pin, bayonet connector, shell size 10. See Figure 14 for terminal
polarities.
Accuracy: ±2.0 K for 4 K to 25 K, ±5.0 K for 25 K to 450 K
Optional Dual Temperature Sensor Connector (for MCC)
The receptacle is a 10 pin, bayonet connector, shell size 12. See Figure 17 for terminal
polarities.
Accuracy: ±1.0 K for 2 K to 25 K, ±2.0 K for 25 K to 450 K
Alternate Single Silicon Diode Temperature Sensor
With a 10 µA DC current excitation, this alternate encapsulated silicon diode supplied with the
cryopump has the following voltage/temperature characteristics:
Temperature
(K)
Output
(Volts)
Temperature
(K)
Output
(Volts)
10 1.392 24 1.099
12 1.355 40 1.061
14 1.299 60 1.007
16 1.226 80 0.952
18 1.114 100 0.898
20 1.110 200 0.626
22 1.104 300 0.352
Accuracy: ±2.0 K for 16 K to 26 K, ±4.0 K for 26 K to 120 K, ±5.0 K for 120 K to 300 K
Compressor
For Electrical Characteristics, Cooling Requirements, Helium Gas Pressures and other
Compressor characteristics, refer to the Compressor technical manual.
Refrigerant Quality
Refrigerant is 99.995% pure helium gas with a dew point less than -50°C (-58°F) at 2070 kPa
(300 psig).
PRESERVE YOUR WARRANTY. Specifications require the use of 99.995%
pure helium gas. Using a lesser quality of helium can damage the system and
void the warranty.

Specifications
13
Adapter Fittings (Optional Accessories)
The following adapter fittings, required for servicing the MarathonCP-8 Cryopump System, are
available as accessories. Figure 4 shows a typical, valved adapter fitting.
Item
Quantity
Descriptions
Part Number
1 2 Adapter Fitting, 8F(1) with valve 255919B2
2 1 Adapter Fitting, 8M with valve SK8217A2
(1)Denotes size 8, female Aeroquip coupling.
Figure 4 Typical Adapter Fitting
Environmental Requirements
Operating Environment
Storage
Ambient Temperature 4°C to 40°C -23°C to 65°C
(40°F to 104°F) (-10°F to 149°F)
Relative Humidity 30% to 70% 10% to 90%
Atmospheric Pressure 52 kPa to 110 kPa 52 kPa to 110 kPa
(7.5 psia to 16.0 psia) (7.5 psia to 16.0 psia)
Magnetic Field Limits < 150 gauss
Maintenance Interval
Cold head valve and displacer seals: 13,000 operating hours (18 months)
Supplier Name and Address
Sumitomo (SHI) Cryogenics of America, Inc.
1833 Vultee Street
Allentown, PA 18103-4783
U.S.A.
[phone]

14
Regulatory Compliance
Declaration of Conformity
April 2012
Manufacturer’s Name Sumitomo (SHI) Cryogenics of America, Inc.
Manufacturer’s Address 1833 Vultee Street
Allentown, PA 18103
U.S.A.
Authorized Representative’s Name Sumitomo (SHI) Cryogenics of Europe, Ltd.
Authorized Representative’s Address 3 Hamilton Close
Houndmills Industrial Estate
Basingstoke
Hampshire RG21 6YT
United Kingdom
Type of Equipment Cryogenic Refrigeration Systems
Application of Council Directives 2006/42/EC and 2004/108/EC
Product Referenced Standards
Marathon® CP-8 Cryopump
EN 61326-1:2006; Clause 7.2 emissions requirements.
EN 61326-1:2006; Table 2 immunity requirements.
I, the undersigned, hereby declare that the equipment specified conforms to the above
Directives.