Tektronix Keithley 6517B User manual

Reference Manual
6517B-901-01 Rev. EAugust 2022
*P6517B-901-01E*
6517B-901-01E
tek.com/keithley
Model 6517B
Electrometer

Electrometer
Reference Manual
Model 6517B

© 2022, Keithley Instruments, LLC
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments, LLC, is strictly prohibited.
These are the original instructions in English.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective
holders.
Document number: 6517B-901-01 Rev. E August 2022

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits —including the power
transformer, test leads, and input jacks —must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2018.

Introduction............................................................................................................... 1-1
Welcome .............................................................................................................................. 1-1
Extended warranty ............................................................................................................... 1-1
Contact information.............................................................................................................. 1-1
Remote operations ...................................................................................................2-1
Introduction .......................................................................................................................... 2-1
Select the communications interface ................................................................................... 2-1
GPIB communications interface........................................................................................... 2-2
IEEE-488 bus connections........................................................................................................2-2
Select the GPIB primary address..............................................................................................2-4
Select the GPIB data elements.................................................................................................2-4
IEEE-488 front-panel operation.................................................................................................2-5
General bus commands............................................................................................................2-6
RS-232 serial interface......................................................................................................... 2-8
RS-232 interface connections...................................................................................................2-8
RS-232 6517B configuration.....................................................................................................2-9
RS-232 computer configuration...............................................................................................2-10
Select the RS-232 data elements............................................................................................2-10
RS-232 operating considerations............................................................................................2-11
Program examples............................................................................................................. 2-13
Changing the function and range............................................................................................2-13
One-shot triggering .................................................................................................................2-14
Continuous triggering 1...........................................................................................................2-15
Continuous triggering 2...........................................................................................................2-15
Generating SRQ on buffer full.................................................................................................2-16
Store readings in the buffer..................................................................................................... 2-17
Making readings with the scanner card...................................................................................2-18
Using the staircase sweep test sequence...............................................................................2-20
Measurement options...............................................................................................3-1
Introduction .......................................................................................................................... 3-1
Integration time .................................................................................................................... 3-1
Display resolution................................................................................................................. 3-3
Line synchronization ............................................................................................................ 3-4
Voltage source ..................................................................................................................... 3-5
Voltage source configuration.....................................................................................................3-6
Sourcing options .......................................................................................................................3-6
Setting voltage source value.....................................................................................................3-9
Voltage and current limit .........................................................................................................3-10
Operate and standby............................................................................................................... 3-11
Analog outputs ................................................................................................................... 3-12
2 V analog output....................................................................................................................3-12
Preamplifier output.................................................................................................................. 3-14
Using external feedback..................................................................................................... 3-17
Table of contents

Table of contents Model 6517B Electrometer Reference Manual
6517B input circuitry................................................................................................................ 3-17
Shielded fixture construction................................................................................................... 3-18
External feedback procedure ..................................................................................................3-20
Nonstandard coulombs ranges ...............................................................................................3-20
Logarithmic currents................................................................................................................3-21
Nondecade current gains........................................................................................................3-22
Measurement range........................................................................................................... 3-23
Range messages....................................................................................................................3-24
Damping............................................................................................................................. 3-27
Zero check ......................................................................................................................... 3-28
Relative offset .................................................................................................................... 3-29
Configuring relative offset manually........................................................................................3-30
Enabling relative offset and setting relative offset automatically ............................................. 3-30
Display reading with and without relative offset applied..........................................................3-31
Zero correct........................................................................................................................ 3-31
Specification considerations....................................................................................................3-32
Accuracy calculations......................................................................................................... 3-32
Calculating voltage accuracy...................................................................................................3-32
Calculating current accuracy...................................................................................................3-32
Calculating resistance accuracy..............................................................................................3-33
Calculating charge accuracy...................................................................................................3-33
Calculating resistance/resistivity accuracy and repeatability using the alternating
polarity method.......................................................................................................................3-34
Measurement considerations ..................................................................................4-1
Introduction .......................................................................................................................... 4-1
Voltage measurement considerations.................................................................................. 4-1
Loading effects..........................................................................................................................4-1
Guarding ...................................................................................................................................4-2
Cable leakage resistance..........................................................................................................4-4
Input capacitance...................................................................................................................... 4-4
Current measurement considerations.................................................................................. 4-4
Input bias current ......................................................................................................................4-4
Voltage burden..........................................................................................................................4-5
Noise......................................................................................................................................... 4-5
Guarding ...................................................................................................................................4-7
Resistance measurement considerations.......................................................................... 4-10
Leakage resistance................................................................................................................. 4-10
Voltage coefficient...................................................................................................................4-11
Test voltage and electrification time........................................................................................4-11
Current measurement considerations.....................................................................................4-11
Charge measurement considerations................................................................................ 4-11
Input bias current ....................................................................................................................4-12
External voltage source...........................................................................................................4-12
Measurement times.................................................................................................................4-12
Zero check hop and autodischarge hop..................................................................................4-12
Other measurement considerations................................................................................... 4-12
Ground loops...........................................................................................................................4-13
Triboelectric effects.................................................................................................................4-14
Piezoelectric and stored charge effects ..................................................................................4-14
Electrochemical effects ...........................................................................................................4-14

Model 6517B Electrometer Reference Manual Table of contents
Humidity..................................................................................................................................4-14
Light........................................................................................................................................ 4-15
Electrostatic interference.........................................................................................................4-15
Magnetic fields........................................................................................................................4-15
Electromagnetic interference...................................................................................................4-16
Test sequences.........................................................................................................5-1
Introduction .......................................................................................................................... 5-1
Diode leakage current test................................................................................................... 5-2
Diode leakage current test connections....................................................................................5-3
Run the diode leakage current test ...........................................................................................5-4
Capacitor leakage current test............................................................................................. 5-5
Capacitor leakage current test connections ..............................................................................5-5
Run the capacitor leakage current test......................................................................................5-6
Cable insulation resistance test ........................................................................................... 5-7
Cable insulation resistance test connections............................................................................. 5-7
Run the cable insulation resistance test....................................................................................5-8
Resistor voltage coefficient test ........................................................................................... 5-9
Resistor voltage coefficient test connections.............................................................................5-9
Run the resistor voltage coefficient test ..................................................................................5-10
Standard method resistivity tests....................................................................................... 5-11
Resistivity test connections.....................................................................................................5-11
Run the surface or volume resistivity test................................................................................5-12
Alternating polarity resistance/resistivity test..................................................................... 5-13
Run the alternating polarity resistance/resistivity test..............................................................5-14
Surface insulation resistance (SIR) test............................................................................. 5-16
Surface insulation resistance connections..............................................................................5-16
Run the surface insulation resistance test...............................................................................5-18
Square wave sweep test.................................................................................................... 5-19
Run the square wave sweep test............................................................................................ 5-19
Staircase sweep test.......................................................................................................... 5-20
Run the staircase sweep test..................................................................................................5-21
Configure sequence menu................................................................................................. 5-22
Triggering..................................................................................................................6-1
Introduction .......................................................................................................................... 6-1
Trigger configuration menu.................................................................................................. 6-1
Basic trigger model .............................................................................................................. 6-3
Basic trigger model configuration..............................................................................................6-4
Advanced trigger model....................................................................................................... 6-5
Front-panel trigger model.......................................................................................................... 6-5
IEEE-488 trigger model............................................................................................................. 6-7
Idle............................................................................................................................................6-9
Trigger model layers ................................................................................................................. 6-9
Advanced trigger model configuration.....................................................................................6-10
Control sources.......................................................................................................................6-12
Source bypasses.....................................................................................................................6-14
Delays.....................................................................................................................................6-15

Table of contents Model 6517B Electrometer Reference Manual
Output triggers ........................................................................................................................6-15
Counters..................................................................................................................................6-16
Continuous initiation................................................................................................................6-16
Halting triggers........................................................................................................................6-16
Device action...........................................................................................................................6-17
External triggering.............................................................................................................. 6-17
Trigger-link connector .............................................................................................................6-17
Asynchronous operation .........................................................................................................6-18
Semi-synchronous operation...................................................................................................6-23
Buffer (data store).....................................................................................................7-1
Buffer overview .................................................................................................................... 7-1
Set the type of buffer control................................................................................................ 7-1
Buffer control step sequence.....................................................................................................7-2
Set up a fill-and-stop buffer.......................................................................................................7-3
Set up a pretrigger buffer..........................................................................................................7-3
Set up a continuous buffer........................................................................................................7-4
Set the number of readings to store..................................................................................... 7-4
Set the real-time clock.......................................................................................................... 7-5
Set up timestamps ............................................................................................................... 7-6
Include data elements in the buffer reading......................................................................... 7-7
Clear all buffer readings....................................................................................................... 7-8
Reading buffer display during storage ................................................................................. 7-8
Data store configuration menu............................................................................................. 7-9
View buffer readings from the front panel.......................................................................... 7-10
Filters and math........................................................................................................ 8-1
Introduction .......................................................................................................................... 8-1
Filters.................................................................................................................................... 8-1
Digital filters...............................................................................................................................8-1
Median filter...............................................................................................................................8-5
Configuring the filters................................................................................................................8-5
Math ..................................................................................................................................... 8-7
Polynomial.................................................................................................................................8-7
Percent...................................................................................................................................... 8-8
Percent deviation ......................................................................................................................8-9
Deviation...................................................................................................................................8-9
Ratio........................................................................................................................................8-10
Logarithmic..............................................................................................................................8-10
Set up no math function ..........................................................................................................8-11
Math annunciators...................................................................................................................8-11
Math and actual reading display..............................................................................................8-11
View math readings from the front panel.................................................................................8-12
Limits, digital I/O, and scanning..............................................................................9-1
Introduction .......................................................................................................................... 9-1

Model 6517B Electrometer Reference Manual Table of contents
Limits.................................................................................................................................... 9-1
Setting limits..............................................................................................................................9-2
View limit test 1 results on the front panel.................................................................................9-2
Limits example.......................................................................................................................... 9-4
Digital I/O ............................................................................................................................. 9-5
Controlling digital circuitry .........................................................................................................9-6
External voltage supply.............................................................................................................9-6
Outputs used as logic inputs.....................................................................................................9-8
Scanning .............................................................................................................................. 9-9
Internal scanning.......................................................................................................................9-9
External scanning......................................................................................................................9-9
Introduction to SCPI commands............................................................................ 10-1
Programming syntax.......................................................................................................... 10-1
Command words.....................................................................................................................10-1
Query commands....................................................................................................................10-3
Program messages.................................................................................................................10-4
Response messages...............................................................................................................10-6
Multiple response messages...................................................................................................10-6
Message exchange protocol ...................................................................................................10-6
Using the SCPI command reference ................................................................................. 10-7
Command name and summary table...................................................................................... 10-8
Command usage.....................................................................................................................10-9
Command details.................................................................................................................... 10-9
Example section....................................................................................................................10-10
Related commands list..........................................................................................................10-10
SCPI command reference.......................................................................................11-1
Introduction ........................................................................................................................ 11-1
Signal-oriented measurement commands......................................................................... 11-1
:CONFigure:<function> ...........................................................................................................11-2
:FETCh?..................................................................................................................................11-3
:MEASure[:<function>]?..........................................................................................................11-3
:READ?...................................................................................................................................11-4
SCPI conformance and command summary..................................................................... 11-5
General notes.......................................................................................................................... 11-6
CALCulate command summary ..............................................................................................11-6
DISPlay command summary...................................................................................................11-9
FORMat command summary................................................................................................11-10
OUTPut command summary.................................................................................................11-10
ROUTe command summary..................................................................................................11-11
SENSe command summary - general commands ................................................................11-11
SENSe command summary - voltage commands.................................................................11-12
SENSe command summary - current commands.................................................................11-13
SENSe command summary - resistance commands............................................................11-14
SENSe command summary - charge commands ................................................................. 11-17
SOURce command summary................................................................................................11-18
STATus command summary.................................................................................................11-19
SYSTem command summary ...............................................................................................11-21
TRACe command summary..................................................................................................11-22
TRIGger command summary - general commands ..............................................................11-23
TRIGger command summary - ARM commands ..................................................................11-23

Table of contents Model 6517B Electrometer Reference Manual
TRIGger command summary - SEQuence commands.........................................................11-24
TSEQuence command summary..........................................................................................11-25
UNIT command summary .....................................................................................................11-28
CALCulate subsystem...................................................................................................... 11-28
CALCulate[1] subsystem.......................................................................................................11-28
:CALCulate[1]:DATA?...........................................................................................................11-29
:CALCulate[1]:FORMat .........................................................................................................11-29
:CALCulate[1]:IMMediate......................................................................................................11-30
:CALCulate[1]:KMATh:MA0Factor ........................................................................................11-31
:CALCulate[1]:KMATh:MA1Factor ........................................................................................11-31
:CALCulate[1]:KMATh:MA2Factor ........................................................................................11-32
:CALCulate[1]:KMATh:PERCent...........................................................................................11-32
:CALCulate[1]:REFerence.....................................................................................................11-33
:CALCulate[1]:STATe............................................................................................................11-33
CALCulate2 subsystem.........................................................................................................11-34
:CALCulate2:DATA?.............................................................................................................11-34
:CALCulate2:FORMat...........................................................................................................11-34
:CALCulate2:IMMediate........................................................................................................11-35
:CALCulate2:STATe..............................................................................................................11-36
CALCulate3 subsystem.................................................................................................... 11-36
:CALCulate3:BSTRobe:STATe.............................................................................................11-36
:CALCulate3:CLIMits:FAIL?..................................................................................................11-37
:CALCulate3:IMMediate........................................................................................................11-37
:CALCulate3:LIMit2:CLEar:AUTO.........................................................................................11-38
:CALCulate3:LIMit2:CLEar[:IMMediate] ................................................................................11-39
:CALCulate3:LIMit2:FAIL?.....................................................................................................11-39
:CALCulate3:LIMit2:LOWer:SOURce....................................................................................11-40
:CALCulate3:LIMit2:LOWer[:DATA]......................................................................................11-41
:CALCulate3:LIMit2:STATe...................................................................................................11-41
:CALCulate3:LIMit2:UPPer:SOURce ....................................................................................11-42
:CALCulate3:LIMit2:UPPer[:DATA]....................................................................................... 11-43
:CALCulate3:LIMit[1]:CLEar:AUTO....................................................................................... 11-44
:CALCulate3:LIMit[1]:CLEar[:IMMediate] ..............................................................................11-44
:CALCulate3:LIMit[1]:FAIL?...................................................................................................11-45
:CALCulate3:LIMit[1]:LOWer:SOURce..................................................................................11-45
:CALCulate3:LIMit[1]:LOWer[:DATA] ....................................................................................11-46
:CALCulate3:LIMit[1]:STATe.................................................................................................11-47
:CALCulate3:LIMit[1]:UPPer:SOURce ..................................................................................11-48
:CALCulate3:LIMit[1]:UPPer[:DATA]..................................................................................... 11-49
:CALCulate3:PASS:SOURce................................................................................................11-49
DISPlay subsystem.......................................................................................................... 11-51
:DISPlay:CNDisplay..............................................................................................................11-51
:DISPlay:ENABle...................................................................................................................11-51
:DISPlay:SMESsage.............................................................................................................11-52
:DISPlay:WINDow2:ATTRibutes?.........................................................................................11-52
:DISPlay:WINDow2:DATA?...................................................................................................11-53
:DISPlay:WINDow2:TEXT:DATA ..........................................................................................11-53
:DISPlay:WINDow2:TEXT:STATe.........................................................................................11-54
:DISPlay[:WINDow[1]]:ATTRibutes?.....................................................................................11-55
:DISPlay[:WINDow[1]]:DATA?...............................................................................................11-55
:DISPlay[:WINDow[1]]:TEXT:DATA ......................................................................................11-56
:DISPlay[:WINDow[1]]:TEXT:STATe.....................................................................................11-56
FORMat subsystem ......................................................................................................... 11-57
:FORMat:BORDer................................................................................................................. 11-57
:FORMat:ELEMents..............................................................................................................11-58
:FORMat[:DATA]...................................................................................................................11-60

Model 6517B Electrometer Reference Manual Table of contents
OUTPut subsystems........................................................................................................ 11-63
:OUTPut1[:STATe]................................................................................................................ 11-63
:OUTPut2:TTLX:LSENse ......................................................................................................11-64
ROUTe subsystem........................................................................................................... 11-65
:ROUTe:CLOSe.................................................................................................................... 11-65
:ROUTe:CLOSe:STATe?......................................................................................................11-66
:ROUTe:OPEN......................................................................................................................11-66
:ROUTe:OPEN:ALL ..............................................................................................................11-67
:ROUTe:SCAN:EXTernal......................................................................................................11-67
:ROUTe:SCAN:LSELect .......................................................................................................11-68
:ROUTe:SCAN:SMEThod.....................................................................................................11-68
:ROUTe:SCAN:STIMe ..........................................................................................................11-69
:ROUTe:SCAN:VSLimit......................................................................................................... 11-69
:ROUTe:SCAN[:INTernal] .....................................................................................................11-70
SENSe[1] subsystem ....................................................................................................... 11-71
[:SENSe[1]]:<function>:APERture.........................................................................................11-71
[:SENSe[1]]:<function>:APERture:AUTO.............................................................................. 11-72
[:SENSe[1]]:<function>:AVERage:ADVanced:NTOLerance .................................................11-73
[:SENSe[1]]:<function>:AVERage:COUNt ............................................................................11-74
[:SENSe[1]]:<function>:AVERage:TCONtrol.........................................................................11-75
[:SENSe[1]]:<function>:AVERage:TYPE...............................................................................11-76
[:SENSe[1]]:<function>:AVERage[:STATe]...........................................................................11-77
[:SENSe[1]]:<function>:DAMPing.......................................................................................... 11-78
[:SENSe[1]]:<function>:DIGits...............................................................................................11-79
[:SENSe[1]]:<function>:DIGits:AUTO....................................................................................11-80
[:SENSe[1]]:<function>:MEDian:RANK.................................................................................11-81
[:SENSe[1]]:<function>:MEDian[:STATe].............................................................................. 11-82
[:SENSe[1]]:<function>:NPLCycles.......................................................................................11-83
[:SENSe[1]]:<function>:NPLCycles:AUTO............................................................................11-84
[:SENSe[1]]:<function>:RANGe:AUTO .................................................................................11-85
[:SENSe[1]]:<function>:RANGe:AUTO:LLIMit.......................................................................11-86
[:SENSe[1]]:<function>:RANGe:AUTO:ULIMit......................................................................11-87
[:SENSe[1]]:<function>:RANGe[:UPPer]............................................................................... 11-88
[:SENSe[1]]:<function>:REFerence.......................................................................................11-89
[:SENSe[1]]:<function>:REFerence:ACQuire........................................................................11-90
[:SENSe[1]]:<function>:REFerence:STATe ..........................................................................11-91
[:SENSe[1]]:CHARge:ADIScharge:LEVel .............................................................................11-92
[:SENSe[1]]:CHARge:ADIScharge[:STATe]..........................................................................11-92
[:SENSe[1]]:CHARge:RANGe:AUTO:LGRoup......................................................................11-93
[:SENSe[1]]:DATA:FRESh? ..................................................................................................11-93
[:SENSe[1]]:DATA[:LATest]?.................................................................................................11-94
[:SENSe[1]]:FUNCtion...........................................................................................................11-95
[:SENSe[1]]:RESistance:IREFerence....................................................................................11-96
[:SENSe[1]:RESistance:MANual:CRANge:AUTO.................................................................11-97
[:SENSe[1]]:RESistance:MANual:CRANge[:UPPer] .............................................................11-98
[:SENSe[1]]:RESistance:MANual:VSOurce:OPERate ..........................................................11-98
[:SENSe[1]]:RESistance:MANual:VSOurce:RANGe.............................................................11-99
[:SENSe[1]]:RESistance:MANual:VSOurce[:AMPLitude]......................................................11-99
[:SENSe[1]]:RESistance:MSELect......................................................................................11-100
[:SENSe[1]]:RESistance:RESistivity:FSELect.....................................................................11-100
[:SENSe[1]]:RESistance:RESistivity:M8009:RSWitch?.......................................................11-101
[:SENSe[1]]:RESistance:RESistivity:STHickness................................................................11-102
[:SENSe[1]]:RESistance:RESistivity:USER:KSURface.......................................................11-102
[:SENSe[1]]:RESistance:RESistivity:USER:KVOLume.......................................................11-103
[:SENSe[1]]:RESistance:RESistivity:USER:RSELect..........................................................11-103
[:SENSe[1]]:RESistance:VSControl ....................................................................................11-104
[:SENSe[1]:RESistance[:AUTO]:RANGe:AUTO..................................................................11-104
[:SENSe[1]]:RESistance[:AUTO]:RANGe:AUTO:LLIMit......................................................11-105

Table of contents Model 6517B Electrometer Reference Manual
[:SENSe[1]]:RESistance[:AUTO]:RANGe:AUTO:ULIMit .....................................................11-106
[:SENSe[1]]:RESistance[:AUTO]:RANGe[:UPPer]..............................................................11-106
[:SENSe[1]]:VOLTage[:DC]:GUARd....................................................................................11-107
[:SENSe[1]]:VOLTage[:DC]:XFEedback .............................................................................11-107
SOURce subsystem.......................................................................................................11-108
:SOURce:CURRent:LIMit[:STATe]?....................................................................................11-108
:SOURce:CURRent:RLIMit:STATe.....................................................................................11-108
:SOURce:TTLX:[LEVel].......................................................................................................11-109
:SOURce:VOLTage:LIMit:STATe........................................................................................11-110
:SOURce:VOLTage:LIMit[:AMPLitude] ...............................................................................11-110
:SOURce:VOLTage:MCONnect..........................................................................................11-111
:SOURce:VOLTage:RANGe ...............................................................................................11-112
:SOURce:VOLTage[:LEVel][:IMMediate][:AMPLitude]........................................................ 11-112
STATus subsystem........................................................................................................ 11-113
:STATus:MEASurement:CONDition?..................................................................................11-113
:STATus:MEASurement:ENABle ........................................................................................11-114
:STATus:MEASurement:NTRansition.................................................................................11-116
:STATus:MEASurement:PTRansition .................................................................................11-118
:STATus:MEASurement[:EVENt]?......................................................................................11-120
:STATus:OPERation:ARM:CONDition? ..............................................................................11-122
:STATus:OPERation:ARM:ENABle.....................................................................................11-123
:STATus:OPERation:ARM:NTRansition..............................................................................11-124
:STATus:OPERation:ARM:PTRansition..............................................................................11-125
:STATus:OPERation:ARM:SEQuence:CONDition?............................................................11-126
:STATus:OPERation:ARM:SEQuence:ENABle...................................................................11-127
:STATus:OPERation:ARM:SEQuence:NTRansition ...........................................................11-128
:STATus:OPERation:ARM:SEQuence:PTRansition............................................................11-129
:STATus:OPERation:ARM:SEQuence[:EVENt]? ................................................................11-130
:STATus:OPERation:ARM[:EVENt]?...................................................................................11-131
:STATus:OPERation:CONDition?.......................................................................................11-132
:STATus:OPERation:ENABle..............................................................................................11-132
:STATus:OPERation:NTRansition.......................................................................................11-134
:STATus:OPERation:PTRansition.......................................................................................11-135
:STATus:OPERation:TRIGger:CONDition?.........................................................................11-137
:STATus:OPERation:TRIGger:ENABle...............................................................................11-137
:STATus:OPERation:TRIGger:NTRansition........................................................................11-138
:STATus:OPERation:TRIGger:PTRansition........................................................................11-139
:STATus:OPERation:TRIGger[:EVENt]?............................................................................. 11-140
:STATus:OPERation[:EVENt]?............................................................................................11-141
:STATus:PRESet ................................................................................................................11-143
:STATus:QUEStionable:CONDition? ..................................................................................11-144
:STATus:QUEStionable:ENABle.........................................................................................11-144
:STATus:QUEStionable:NTRansition..................................................................................11-146
:STATus:QUEStionable:PTRansition..................................................................................11-147
:STATus:QUEStionable[:EVENt]?.......................................................................................11-149
:STATus:QUEue:CLEar ......................................................................................................11-151
:STATus:QUEue:DISable.................................................................................................... 11-151
:STATus:QUEue:ENABle....................................................................................................11-152
:STATus:QUEue[:NEXT]?...................................................................................................11-153
SYSTem subsystem....................................................................................................... 11-154
:SYSTem:ARSPeed............................................................................................................11-154
:SYSTem:CLEar..................................................................................................................11-154
:SYSTem:DATE.................................................................................................................. 11-155
:SYSTem:ERRor?...............................................................................................................11-155
:SYSTem:HLControl............................................................................................................11-156
:SYSTem:HSControl...........................................................................................................11-157
:SYSTem:INTerlock? ..........................................................................................................11-157
:SYSTem:KEY.....................................................................................................................11-158

Model 6517B Electrometer Reference Manual Table of contents
:SYSTem:LLOCkout............................................................................................................11-160
:SYSTem:LOCal..................................................................................................................11-160
:SYSTem:LSYNc:STATe.....................................................................................................11-161
:SYSTem:POSetup.............................................................................................................11-161
:SYSTem:PRESet...............................................................................................................11-162
:SYSTem:REMote...............................................................................................................11-162
:SYSTem:RNUMber:RESet.................................................................................................11-163
:SYSTem:TIME...................................................................................................................11-163
:SYSTem:TSControl............................................................................................................11-164
:SYSTem:TSTamp:RELative:RESet...................................................................................11-164
:SYSTem:TSTamp:TYPE....................................................................................................11-165
:SYSTem:VERSion?...........................................................................................................11-165
:SYSTem:ZCHeck...............................................................................................................11-166
:SYSTem:ZCORrect:ACQuire.............................................................................................11-166
:SYSTem:ZCORrect[:STATe]..............................................................................................11-167
TRACe subsystem .........................................................................................................11-168
:TRACe:CLEar....................................................................................................................11-168
:TRACe:DATA?...................................................................................................................11-168
:TRACe:ELEMents..............................................................................................................11-169
:TRACe:FEED:CONTrol...................................................................................................... 11-170
:TRACe:FEED:PRETrigger:AMOunt:READings..................................................................11-171
:TRACe:FEED:PRETrigger:AMOunt[:PERCent].................................................................11-171
:TRACe:FEED:PRETrigger:SOURce..................................................................................11-172
:TRACe:FREE?...................................................................................................................11-173
:TRACe:LAST? ...................................................................................................................11-173
:TRACe:POINts...................................................................................................................11-174
:TRACe:POINts:ACTual?....................................................................................................11-175
:TRACe:POINts:AUTO........................................................................................................ 11-176
:TRACe:TSTamp:FORMat..................................................................................................11-177
TRIGger subsystem .......................................................................................................11-177
:ABORt................................................................................................................................11-177
:ARM:[SEQuence[1]]:LAYer2:TIMer....................................................................................11-178
:ARM[:SEQuence[1]]:LAYer2:COUNt .................................................................................11-178
:ARM[:SEQuence[1]]:LAYer2:DELay..................................................................................11-179
:ARM[:SEQuence[1]]:LAYer2:IMMediate ............................................................................11-180
:ARM[:SEQuence[1]]:LAYer2:SIGNal .................................................................................11-180
:ARM[:SEQuence[1]]:LAYer2:SOURce...............................................................................11-181
:ARM[:SEQuence[1]]:LAYer2:TCONfigure:ASYNchronous:ILINe.......................................11-182
:ARM[:SEQuence[1]]:LAYer2:TCONfigure:ASYNchronous:OLINe.....................................11-182
:ARM[:SEQuence[1]]:LAYer2:TCONfigure:DIRection.........................................................11-183
:ARM[:SEQuence[1]][:LAYer[1]]:COUNt .............................................................................11-184
:ARM[:SEQuence[1]][:LAYer[1]]:IMMediate ........................................................................11-184
:ARM[:SEQuence[1]][:LAYer[1]]:SIGNal .............................................................................11-185
:ARM[:SEQuence[1]][:LAYer[1]]:SOURce...........................................................................11-185
:ARM[:SEQuence[1]][:LAYer[1]]:TCONfigure:ASYNchronous:ILINe...................................11-186
:ARM[:SEQuence[1]][:LAYer[1]]:TCONfigure:ASYNchronous:OLINe .................................11-187
:ARM[:SEQuence[1]][:LAYer[1]]:TCONfigure:DIRection.....................................................11-187
:ARM[:SEQuence[1]][LAYer[1]]:RTCLock:DATE.................................................................11-188
:ARM[:SEQuence[1]][LAYer[1]]:RTCLock:TIME..................................................................11-189
:INITiate:CONTinuous.........................................................................................................11-189
:INITiate:POFLag................................................................................................................11-190
:INITiate[:IMMediate]...........................................................................................................11-190
:SYSTem:MACRo:TRIGger:MODE.....................................................................................11-191
:SYSTem:MACRo:TRIGger:SOURce .................................................................................11-191
:SYSTem:MACRo:TRIGger:TIMer......................................................................................11-192
:SYSTem:MACRo:TRIGger[:EXECute]...............................................................................11-193
:TRIGger:[SEQuence[1]]:TIMer...........................................................................................11-193
:TRIGger[:SEQuence[1]]:COUNt.........................................................................................11-194
:TRIGger[:SEQuence[1]]:DELay .........................................................................................11-194

Table of contents Model 6517B Electrometer Reference Manual
:TRIGger[:SEQuence[1]]:IMMediate ...................................................................................11-195
:TRIGger[:SEQuence[1]]:SIGNal.........................................................................................11-195
:TRIGger[:SEQuence[1]]:SOURce......................................................................................11-196
:TRIGger[:SEQuence[1]]:TCONfigure:ASYNchronous:ILINe..............................................11-197
:TRIGger[:SEQuence[1]]:TCONfigure:ASYNchronous:OLINe ............................................11-197
:TRIGger[:SEQuence[1]]:TCONfigure:DIRection ................................................................11-198
:TRIGger[:SEQuence[1]]:TCONfigure:PROTocol................................................................11-198
:TRIGger[:SEQuence[1]]:TCONfigure:SSYNchronous:LINE...............................................11-199
TSEQuence subsystem ................................................................................................. 11-199
:TSEQuence:ABORt ...........................................................................................................11-200
:TSEQuence:ALTPolarity:ALTVoltage ................................................................................11-200
:TSEQuence:ALTPolarity:DISCard .....................................................................................11-201
:TSEQuence:ALTPolarity:MTIMe........................................................................................11-201
:TSEQuence:ALTPolarity:OFSVoltage................................................................................11-202
:TSEQuence:ALTPolarity:READings...................................................................................11-202
:TSEQuence:ARM...............................................................................................................11-203
:TSEQuence:CIResistance:SPINterval ...............................................................................11-203
:TSEQuence:CIResistance:SPOints...................................................................................11-204
:TSEQuence:CIResistance:SVOLtage................................................................................11-204
:TSEQuence:CLEakage:SPINterval....................................................................................11-205
:TSEQuence:CLEakage:SPOints........................................................................................11-205
:TSEQuence:CLEakage:SVOLtage ....................................................................................11-206
:TSEQuence:DLEakage:MDELay....................................................................................... 11-206
:TSEQuence:DLEakage:STARt ..........................................................................................11-207
:TSEQuence:DLEakage:STEP............................................................................................11-207
:TSEQuence:DLEakage:STOP...........................................................................................11-208
:TSEQuence:RVCoefficient:MDELay2................................................................................11-208
:TSEQuence:RVCoefficient:MDELay[1]..............................................................................11-209
:TSEQuence:RVCoefficient:SVOLtage2 .............................................................................11-209
:TSEQuence:RVCoefficient:SVOLtage[1] ...........................................................................11-210
:TSEQuence:SIResistance:MTIMe .....................................................................................11-210
:TSEQuence:SIResistance:MVOLtage ...............................................................................11-211
:TSEQuence:SIResistance:STIMe......................................................................................11-211
:TSEQuence:SIResistance:SVOLtage................................................................................11-212
:TSEQuence:SQSWeep:COUNt.........................................................................................11-212
:TSEQuence:SQSWeep:HLEVel.........................................................................................11-213
:TSEQuence:SQSWeep:HTIMe..........................................................................................11-213
:TSEQuence:SQSWeep:LLEVel.........................................................................................11-214
:TSEQuence:SQSWeep:LTIMe...........................................................................................11-214
:TSEQuence:SRESistivity:DTIMe .......................................................................................11-215
:TSEQuence:SRESistivity:MTIMe.......................................................................................11-215
:TSEQuence:SRESistivity:MVOLtage.................................................................................11-216
:TSEQuence:SRESistivity:PDTime.....................................................................................11-216
:TSEQuence:SRESistivity:STIMe........................................................................................11-217
:TSEQuence:SRESistivity:SVOLtage..................................................................................11-217
:TSEQuence:STSWeep:STARt...........................................................................................11-218
:TSEQuence:STSWeep:STEP............................................................................................11-218
:TSEQuence:STSWeep:STIMe...........................................................................................11-219
:TSEQuence:STSWeep:STOP............................................................................................11-219
:TSEQuence:TLIne .............................................................................................................11-220
:TSEQuence:TSOurce........................................................................................................11-220
:TSEQuence:TYPE.............................................................................................................11-221
:TSEQuence:VRESistivity:DTIMe .......................................................................................11-222
:TSEQuence:VRESistivity:MTIMe.......................................................................................11-222
:TSEQuence:VRESistivity:MVOLtage.................................................................................11-222
:TSEQuence:VRESistivity:PDTime.....................................................................................11-223
:TSEQuence:VRESistivity:STIMe........................................................................................11-223
:TSEQuence:VRESistivity:SVOLtage..................................................................................11-224

Model 6517B Electrometer Reference Manual Table of contents
UNIT subsystem.............................................................................................................11-224
:UNIT:TEMPerature ............................................................................................................11-224
Common commands ..............................................................................................12-1
Introduction ........................................................................................................................ 12-1
Common command summary............................................................................................ 12-1
Common command descriptions ....................................................................................... 12-2
*CLS........................................................................................................................................12-2
*ESE .......................................................................................................................................12-3
*ESR? .....................................................................................................................................12-5
*IDN? ......................................................................................................................................12-6
*OPC....................................................................................................................................... 12-7
*OPC?..................................................................................................................................... 12-8
*OPT? .....................................................................................................................................12-9
*RCL .....................................................................................................................................12-10
*RST .....................................................................................................................................12-10
*SAV .....................................................................................................................................12-11
*SRE .....................................................................................................................................12-11
*STB?....................................................................................................................................12-13
*TRG.....................................................................................................................................12-15
*TST?.................................................................................................................................... 12-15
*WAI......................................................................................................................................12-16
Status model........................................................................................................... 13-1
Introduction ........................................................................................................................ 13-1
Status structure.................................................................................................................. 13-1
Standard event status registers...............................................................................................13-3
Operation event status registers .............................................................................................13-4
Condition registers................................................................................................................13-10
Transition filters.....................................................................................................................13-10
Event registers......................................................................................................................13-11
Enable registers....................................................................................................................13-11
Queues............................................................................................................................. 13-12
Status byte and service request (SRQ) ........................................................................... 13-13
Status byte register ...............................................................................................................13-14
Service request enable register.............................................................................................13-15
Serial poll and SRQ...............................................................................................................13-16
Calibration procedure............................................................................................. 14-1
Introduction ........................................................................................................................ 14-1
Warmup time and environment.......................................................................................... 14-1
Calibration procedure......................................................................................................... 14-2
Recommended calibration equipment.....................................................................................14-2
Comprehensive calibration procedure.....................................................................................14-3
Restoring factory defaults........................................................................................................14-3
Unlock calibration....................................................................................................................14-3
Voltage offset calibration.........................................................................................................14-3
Current offset calibration.........................................................................................................14-6
Current ranges calibration.......................................................................................................14-7

Table of contents Model 6517B Electrometer Reference Manual
Charge range calibration.........................................................................................................14-9
Voltage measurement ranges calibration..............................................................................14-10
Voltage source calibration..................................................................................................... 14-11
Temperature calibration ........................................................................................................14-12
Humidity calibration...............................................................................................................14-12
Set calibration dates..............................................................................................................14-12
Save calibration.....................................................................................................................14-12
Lock calibration.....................................................................................................................14-13
Partial calibration...................................................................................................................14-13
Calibration command reference....................................................................................... 14-15
Voltage offset calibration commands ....................................................................................14-15
Current offset calibration commands.....................................................................................14-16
Charge calibration commands...............................................................................................14-17
Current calibration commands ..............................................................................................14-17
Voltage measurement calibration commands .......................................................................14-18
Voltage source calibration commands ..................................................................................14-18
Humidity calibration commands ............................................................................................14-19
Temperature calibration commands...................................................................................... 14-19
Miscellaneous calibration commands.................................................................................... 14-19
Calibration error codes..........................................................................................................14-20
Verification procedure............................................................................................ 15-1
Introduction ........................................................................................................................ 15-1
Equipment needed for verification...........................................................................................15-2
Warmup time and environment...............................................................................................15-2
Considerations........................................................................................................................15-3
Verification procedures ...................................................................................................... 15-3
DC voltage verification ............................................................................................................15-4
DC amps verification...............................................................................................................15-5
Charge verification..................................................................................................................15-8
Voltage source verification......................................................................................................15-9
Temperature verification .......................................................................................................15-11
Humidity verification..............................................................................................................15-12
Resistance verification ..........................................................................................................15-13
ASCII character codes............................................................................................16-1
Introduction ........................................................................................................................ 16-1
ASCII character codes (decimal 0 to 31) ........................................................................... 16-1
ASCII character codes (decimal 32 to 95) ......................................................................... 16-2
ASCII character codes (decimal 96 to 127)....................................................................... 16-3
IEEE-488 bus overview...........................................................................................17-1
Introduction ........................................................................................................................ 17-1
Bus description................................................................................................................... 17-2
Bus lines............................................................................................................................. 17-3
Data lines................................................................................................................................17-3
Bus management lines............................................................................................................17-4
Handshake lines...................................................................................................................... 17-4
Bus commands .................................................................................................................. 17-5

Model 6517B Electrometer Reference Manual Table of contents
Uniline commands...................................................................................................................17-6
Universal multiline commands.................................................................................................17-7
Addressed multiline commands ..............................................................................................17-7
Addressed commands ............................................................................................................17-8
Unaddressed commands ........................................................................................................17-8
Common commands...............................................................................................................17-8
SCPI commands.....................................................................................................................17-8
Command codes..................................................................................................................... 17-9
Typical command sequences................................................................................................17-10
IEEE command groups .........................................................................................................17-10
IEEE-488 conformance.................................................................................................... 17-11
IEEE-488 documentation requirements ................................................................................17-12
Coupled commands..............................................................................................................17-13
Interface function codes................................................................................................... 17-15

In this section:
Welcome...................................................................................1-1
Extended warranty....................................................................1-1
Contact information...................................................................1-1
Welcome
The 6½-digit 6517B Electrometer/High Resistance Meter provide reliable measurements of current
levels down to 10 aA (10×10–18 A), charge levels down to 1 fC, and the highest resistance
measurements available up to 1018 Ω. The 6517B can also measure across a large voltage range, up
to 200 V, with an input impedance exceeding 200 TΩ.
Extended warranty
Additional years of warranty coverage are available on many products. These valuable contracts
protect you from unbudgeted service expenses and provide additional years of protection at a fraction
of the price of a repair. Extended warranties are available on new and existing products. Contact your
local Keithley Instruments office, sales partner, or distributor for details.
Contact information
If you have any questions after you review the information in this documentation, please contact your
local Keithley Instruments office, sales partner, or distributor. You can also call the Tektronix
corporate headquarters (toll-free inside the U.S. and Canada only) at 1-800-833-9200. For worldwide
contact numbers, visit tek.com/en/contact-tek.
Section 1
Introduction

In this section:
Introduction...............................................................................2-1
Select the communications interface ........................................2-1
GPIB communications interface................................................2-2
RS-232 serial interface .............................................................2-8
Program examples..................................................................2-13
Introduction
You can use GPIB (IEEE-488) or RS-232 remote communications with the 6517B.
The GPIB interface conforms to the IEEE-488.2-1987 standard and the SCPI 1996 (Standard
Commands for Programmable Instruments) standard. IEEE-488.2 defines a syntax for sending data
to and from instruments, how an instrument interprets this data, what registers exist to record the
state of the instrument, and a group of common commands. The SCPI standard defines a command
language protocol. It goes one step farther than IEEE-488.2 and defines a standard set of commands
to control every programmable aspect of an instrument.
The RS-232 serial interface allows you to send program messages to the instrument and receive
response messages from the instrument. You can use all commands over this serial port. The
RS-232 serial interface is based on the electrical and mechanical characteristics of the RS-232C
standard. Typically, the serial port is used with a controller that cannot accommodate an IEEE-488
bus interface, such as a laptop computer.
Select the communications interface
You can set the communications interface to be GPIB or RS-232.
Changing the communication interface re-initializes the instrument and restores the power-
on defaults.
Section 2
Remote operations