Tescan MIRA3 User manual

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We have checked the contents of this manual for agreement with the hardware and software described. Since
deviations cannot be precluded entirely, we cannot guarantee full agreement.
© 2013 TESCAN, a.s., Brno, Czech Republic

Contents
1
MIRA3
FEG
-
SEM
Contents
Contents ........................................................................................................................... 1
1 Introduction ............................................................................................................... 3
2 Safety Information ...................................................................................................... 4
3 Installation and Microscope Repairs ............................................................................ 5
3.1 Transport and Storage .............................................................................................. 5
3.2 Installation Instructions ............................................................................................ 5
3.3 Fuse Replacement ..................................................................................................... 5
3.4 Instrument Repair and the Spare Parts Usage ............................................................ 5
4 Description of the Microscope .................................................................................... 6
4.1 Electron Column ....................................................................................................... 6
4.1.1 Electron Column Displaying Modes................................................................... 9
4.1.2 Electron Column Centering ............................................................................. 14
4.1.2.1 Centering of the Electron Gun ..................................................................... 14
4.1.2.2 Automatic Centering ................................................................................... 15
4.1.2.3 Manual Centering ........................................................................................ 15
4.1.2.4 Electron Column Precentering ..................................................................... 16
4.1.3 Angular Intensity Calibration .......................................................................... 17
4.2 Chamber and Sample Stage .................................................................................... 20
5 Vacuum Modes ........................................................................................................ 21
5.1 High Vacuum Mode ................................................................................................. 21
5.2 Low Vacuum Mode .................................................................................................. 21
6 Detectors ................................................................................................................. 22
6.1 SE Detector ............................................................................................................. 22
6.2 In-Beam SE Detector ............................................................................................... 22
6.3 LVSTD Detector ....................................................................................................... 23
6.4 BSE Detector ........................................................................................................... 24
6.5 CL Detector ............................................................................................................. 24
6.5.1 Exchange of CL for BSE Lightguide ................................................................. 24
6.6 Other Detectors ...................................................................................................... 25
7 Control Elements ...................................................................................................... 26
7.1 Keyboard ................................................................................................................ 26
7.2 Mouse ..................................................................................................................... 26
7.3 Trackball ................................................................................................................. 27

Contents
2
MIRA3 FEG
-
SEM
7.4 Control Panel .......................................................................................................... 27
8 Getting Started ......................................................................................................... 28
8.1 Microscope Starting ................................................................................................ 28
8.2 Specimen Exchange ................................................................................................ 29
8.3 Images at Low Magnification ................................................................................... 30
8.4 Imaging in Low Vacuum Mode ................................................................................ 33
8.5 Images at High Magnification .................................................................................. 35
8.6 Electron Beam Lithography ..................................................................................... 38
8.7 Microscope Stopping .............................................................................................. 43
9 Microscope Maintenance .......................................................................................... 44
9.1 Basic Microscope Accessories ................................................................................. 44
9.2 Insertion of the Final Aperture for the Low Vacuum Mode ...................................... 45
9.3 Cleaning of the Final Aperture ................................................................................ 45
9.4 Specimen Holders ................................................................................................... 46

Introduction
3
MIRA3
FEG
-
SEM
1 Introduction
The MIRA3 series is a family of high-quality; fully PC-controlled scanning electron
microscopes equipped with a Schottky Field Emission electron gun designed for high vacuum
or variable pressure operations.
The most important features of the microscope are:
 High brightness Schottky emitter for high-resolution/high-current/low-noise
imaging.
 Unique three-lens Wide Field OpticsTM design offering the variety of working and
displaying modes embodying the Tescan proprietary Intermediate Lens for the beam
aperture optimization.
 Real time In-Flight Beam TracingTM for the performance and spot optimization
integrating the well established software Electron Optical Design .
 A powerful In-Beam detector of secondary electrons located in the objective lens
enabling work at very short working distances for high resolution.
 Fast imaging rate.
 High-throughput large-area automation, e.g., automated particle location and
analysis.
 Fully automated microscope set-up including electron optics set-up and alignment.
 Sophisticated software for SEM control, image acquisition, archiving, processing and
analysis.
 Network operations and built-in remote access/diagnostics.
This manual provides an overview of the components, the operational principles and the use
of MIRA3 scanning electron microscopes. Not all parts of this manual may apply to a given
installation nor should be taken laterally in all cases. Details of the MiraTC software may also
vary according to the actual setting and thereby differ slightly from what is shown in the
figures.
Since MIRA3 is installed and maintained by trained specialists, technical details and
installation procedures are limited to a short overview. In case of necessary maintenance,
reinstallation, hardware changes, etc. the appropriate service authorities or your local
supplier must be contacted for further assistance and instructions.