Ulvac UK-2 User manual

AUTO REGENERATION CONTROLLER
Model UK-2
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Instruction Manual
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Export Control Policy
We recommend that ALL UCI customers be sure to
follow all rules and regulations such as Foreign
Exchange and Foreign Trade Law when exporting or
reexporting UCI products.
D/N.MFUK200E, 2018JE05 ULVAC CRYOGENICS INCORPORATED

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5
Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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MZIW001E,2010.01 ULVACCRYOGENICSINCORPORATED IW-1
Disposal Consideration
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump or refrigerator has been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING

IW-2 ULVAC CRYOGENICS INCORPORATED
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Auto Regeneration Controller UK-2 Instruction Manual
TABLE OF CONTENTS
Section 1 Featrures･･････････････････････････････････････1
Section 2Specifications･･････････････････････････････････ 2
Section 3Part Names and Descriptions････････････････････ 4
3.1FrontPanelDescription･････････････････････ 4
3.2RearPanelDescription･･････････････････････ 6
Section 4DIP Switch Specifications････････････････････････11
Section 5Accessories and Optional Cables･･････････････････12
Section 6Installation･････････････････････････････････････15
6.1Installationmethod･････････････････････････ 15
Section 7Wiring･････････････････････････････････････････16
Section 8Operation･････････････････････････････････････ 22
8.1RemoteOperation･･････････････････････････ 22
8.2LocalOperation････････････････････････････ 22
Section 9 Parameter Setting･･････････････････････････････ 26
9.1 Parameter Setting method･･･････････････････ 26
9.2 Factory Setting･････････････････････････････ 27
Section10Troubleshooting････････････････････････････････29
Appendix1 UK-2ExternalDrawing････････････････････････32
ULVAC CRYOGENICS INCORPRATED Ⅰ

Table of contents
ⅡULVAC CRYOGENICS INCORPORATED
FIGURES & TABLES
Figure 1-1 UK-2 External View･･････････････････････････････1
6-1 Panel Cut Dimensions and installation････････････ 15
7-1 UK-2 Wiring Diagram････････････････････････････ 18
7-2 Optional Cable Wiring････････････････････････････19
7-3 Connector PinAssignment of VALVE and ATM･････ 21
8-1 Mode 1 (FULL REGEN) Operation Flow Chart･････ 23
8-2 Mode 2 (WARM UP) Operation Flow Chart･････････24
8-3 Mode 3 (COOL DOWN) Operation Flow Chart･･････25
Table 3-1 Part Names and Descriptions (Front panel)････････ 4
3-2 Part Names and Descriptions (Rear panel)･････････ 6
3-3 Connectable Plugs and Pin Descriptions･･･････････ 7
3-4 SYSTEM I/F Connection Pin Descriptions･･････････9
3-5 Serial Communication RS I/F･････････････････････ 10
4-1 DIP Switch Descriptions･･････････････････････････11
5-1 UK-2 Accessories･････････････････････････････････12
5-2 Optional Cables･･････････････････････････････････13
9-1 Parameter factory Setting････････････････････････ 27
10-1 Troubleshooting List
(Error descriptions and corrective actions)･･････････ 29
10-2 Troubleshooting List (other errors) ･･･････････････ 30

Auto Regeneration Controller Model UK-2 Instruction Manual
1. Features
Regeneration controller UK-2 enables automatic cryopump regeneration in combination
with devices listed below.
Code Name Note
A CRYO METER MBS-C
B PIRANI GAUGE (WP-01) & G-TRAN（SP-1）
C N2 IN VALVE
PR UNIT
D N2 OUT VALVE
E ATM(Atmospheric Sensor)
F ROUGH VALVE
G BAND HEATER Not necessary.
H INNER HEATER Not necessary.
I COMPRESSOR UNIT
Three regeneration modes below are available to operate UK-2.
Mode1 (FULL REGEN)：Cryopump warm up→Rough pumping→Cooldown （See Fig.8-1.）
Mode2 (WARM UP) ：Cryopump warm up→Roughpumping （See Fig.8-2.）
Mode3 (COOL DOWN)：Cooldown only.（See Fig.8-3.）
The 1st and the 2nd stage temperatures and pressure of cryopump will bedisplayed on the
7 segment display of the front panel.
Figure 1-1 shows external view of UK-2.
Figure 1-1 UK-2 External view
ULVACCRYOGENICSINCORPORATED 1

Auto Regeneration Controller Model UK-2 Instruction Manual
2. Specifications
○Dimensions 240mm(W) × 100mm(H) × 300mm(D)
(See Appendix 1 UK-2 Dimensional Drawing for detail.)
○WeightApprox. 3.0kg
○Input powerSOURCE INPUT：Single phase AC100〜220V ±10% 50Hz/60Hz
(AC100V when using INNER HEATER)
BANDHEATER：Single phase AC200〜220V ±10% 50Hz/60Hz

CAUTION
To connect our INNER HEATER (1st, 2nd HEATER), always input AC100V to the SOURCE
INPUT or it may result in breakage of the HEATER.
(SOURCE INPUT double as INNER HEATER output power source and the capacity of the
INNER HEATER is AC100V.)
○Power consumption MAX．100W(Except for the power consumption of heater.)
○Operation Environment Temperature：−10〜50℃（No freezing）
Humidity：Below 80%RH （No condensing）
Altitude：1000m or lower
○Input1STTEMP 
The 1st stage temperature of cryopump: K thermocouple input
 2ND TEMP
The 2ND stage temperature of cryopump: MBS-C ANALOG input:0〜5V
PIG
CRYOPUMP inner pressure：PIRANI GAUGEinput:0〜10V
ATM , COMP I/F , SYSTEM I/F
Photo coupler input：DC24V 20mA
○Output POWER OUT
Supply power to MBS-C and PIRANI GAUGE：DC24V MAX 470mA
HEATER
BANDHEATER：AC200〜220V MAX 15A
INNHEATER：AC100V 1st 2nd total MAX 4A
 SYSTEM I/F
 Photo coupler output：DC24V MAX 8mA
 VALVE I/F , COMP I/F
 Relay output：AC240V MAX 2A
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2 ULVAC CRYOGENICS INCORPORATED

Auto Regeneration Controller Model UK-2 Instruction Manual
○Communication RS I/F
RS-485(RS-232Ccanbespecifiedasoptional)
○Insulation Resistance DC 500V20MΩor more
○Withstand Voltage Between power source terminal and earth terminal：
AC 1000V/min
○Display 1ST TEMP3 digit
Display range：45K〜350K
Display accuracy：350K〜123K ±0.5%FS
123K〜73K±3%FS
<73K Out of K thermocouple accuracy range
 2NDTEMP4 digit
Display range：10.0K〜350.0K
Display accuracy：±0.5%FS
 PIG4 digit
Display range：4.0E−01 〜3.0E＋03 Pa
ULVACCRYOGENICSINCORPORATED 3

Auto Regeneration Controller Model UK-2 Instruction Manual
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4 ULVAC CRYOGENICS INCORPORATED
3. Part Names and Descriptions
3.1 Front panel Description
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Table 3-1 Part Names and Descriptions（Front panel）
Name Description
①7 digit
Display
2ND
K
Displays the 2nd stage temperature of cryopump.
(Parameter setting ode: Displays the set command)m
(See section 9.1)
1ST
K
Displays the 1st stage temperature of cryopump.
(Parameter setting mode: Displays the set command)
(See section 9.1)
PIG
Pa
Displays the pressure inside the cryopump
(When Alarm is activated：Displays alarm code)
(See section 10)
②
Status
Display
LED
R-T Lights up when the 2ND TEMP and/or 1ST TEMP exceedeach 2rt
and 1rt set value (300K).
READY Lights up when the 2ND TEMP and/or 1ST TEMP become
lower than each 2rd and 1rd set value(300K).
HIGH Lights up when PIG pressure exceeds the hP set value
(67Pa).
LOW Lights up when PIG pressure becomes lower than the hP set value
(40Pa).
２１
BAND HTR
N2 IN
INN HTR
RV OPEN
CP ON
N2 OUT
READY
R-T
K
READY
HIGH
R-T
K
PIG
CONTROLLER
1ST
REGENERATION
UK-2
HEATER START
WARM UP
BUILD UP
ROUGHING
N2 PURGE
COOL DOWN
20K(2ND)
REMOTE ALARM
ENT DN
REGEN
LOW
UP
Pa
HIGH VAC OK
2ND
３ ４
５

Auto Regeneration Controller Model UK-2 Instruction Manual
Continued from previous page
Name Description
③
Operatio
n Step
Display
LED
HEATER START
Displays each operational step
（See Fig. 8-1, 8-2, and 8-3.）
N2 PURGE
WARM UP
ROUGHING
BUILD UP
COOL DOWN
20K(2ND)
HIGH VAC OK
④
Output
Status
Display
LED
BAND HTR Lights up when BAND HEATER is output
INN HTR Lights up when INNER HEATER (2ND HEATER and 1ST HEATER)
are output.
N2IN Lights up when N2 IN VALVE is OPEN.
N2 OUT Lights up when N2 OUT VALVE is OPEN.
RVOPEN Lights up when ROUGH VALVE is OPEN.
CP ON Lights up when Cryopump is ON.
⑤
Local
Switches
UP/DN
Use it for setting the parameters. (See section 9.1)
ENT
REGEN
Use it when in Local operation mode.（See section 8.2）
REMOTE
ALARM Resets the alarm.
ULVACCRYOGENICSINCORPORATED 5

Auto Regeneration Controller Model UK-2 Instruction Manual
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6 ULVAC CRYOGENICS INCORPORATED
3.2 Rear Panel Description
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Table 3-2 Part Names and Descriptions（Rear Panel）Table 3-2 Part Names and Descriptions（Rear Panel）
No.No. NameName DescriptionDescription
①SOURCE POWER Main circuit protector of UK-2.（5A）
②HEATER POWER Circuit protector of BAND HEATER. (15A)
③SOURCE INPUT
Power input of UK-2. AC100〜220V±10%
(Power input must be AC100V ±10% when using INNER HEATER)
To connect our INNER HEATER (1st, 2nd HEATER), always input
AC100V to the SOURCE INPUT or it may result in breakage of the
HEATER.
（SOURCE INPUT double as INNER HEATER output power source
and the capacity of the INNER HEATER is AC100V.）
④BAND HEATER BAND HEATER input and output (AC200〜220V±10% MAX15A).
⑤SENSOR INPUT 1ST TEMP and 2ND TEMP，PIRANI GAUGE input.
⑥ATM DC24V output (For MBS-C, PIRANI GAUGE input power), ATM input.
⑦SYSTEM I/F I/F for remote operation from the equipment.
⑧COMP I/F I/F for the Compressor.
⑨VALVE N2 IN/OUT VALVE, ROUGH VALVE control output.
⑩HEATER Power output of INNER HEATER.
(Output the same voltage as it has input to SOURCE INPUT.)
⑪SW Function choosing Dip SW（See section.4）
１３１２１１ １０
９８７
６５
４３２ １
91012345678
HEATER POWER SOURCE POWER
HEATER
S
R
N/C
V
U
N/C
N/C
N/C
RS I/F
BAND HEATER
AC 220V 15A MAX
SWATM
ID
VALVECOMP I/F
SENSOR INPUT
SYSTEM I/F
SOURCE INPUT
CAUTION

Auto Regeneration Controller Model UK-2 Instruction Manual
Continued from previous page
No. Name Description
⑫ID Communication ID number.
(ID is not necessary for SYSTEM I/F remote operation or localoperation.)
⑬ RS I/F
For serial communication.
Standard UK-2 is equipped with RS-485. (RS-232C can be specified as
optional) Refer to Table 3-5.

UK-2 cable connectable plugs and pin descriptions are shown in Table 3-3.

Table 3-3 Connectable Plugs and Pin Descriptions
No. Name Type of connectable plug Pin No. Description
③SOURCE
INPUT
VM0303B
（HIRAKAWA HEWTECH CORP. ）
L AC100〜220V Input
(AC100V input when using INNER
HEATER)
N
E
④BAND
HEATER
Round crimping terminal φ4
（Terminal width MAX8.1mm）
R
AC200〜220V input
S
U Band Heater output
(AC200〜220V MAX 15A)
V
⑤SENSOR
INPUT
BL3.5/8F
（Weidmuller）
1 K thermocouple input(+)
2 K thermocouple input (-)
3 MBS-C analog input(+)
4 MBS-C analog input(-)
5 PIRANI GAUGE analog input (+)
6 PIRANI GAUGE analog input (-)
7 N/C
8 N/C
⑥ATM BL3.5/5F
（Weidmuller）
1 DC24V output(+) MAX 470mA
2 DC24V output (-) MAX 470mA
3 N/C
4 Atmospheric Sensor input
(Photo coupler input)
5
⑦SYSTEM I/F 17JE-13250-02(D8B) （DDK）See Table 3-4
ULVACCRYOGENICSINCORPORATED 7

Auto Regeneration Controller Model UK-2 Instruction Manual
Continued from previous page
No. Name Type of connectable plug Pin No. Description
⑧COMP I/F 17JE-13090-02(D8B) （DDK）
1 COMP ON
(Relay contact output
A
C240V
MAX 2A)
2
3 COMP ON
(Relay contact output
A
C240V
MAX 2A)
4
5 COMP ON ANS
6 N/C
7 COMP ALARM
8 COM
9 N/C
⑨VALVE BL3.5/9F
（Weidmuller）
1 N2 IN VALVE
(Relay contact output
A
C240V
MAX 2A))
2
3 N2 OUT VALVE
(Relay contact output
A
C240V
MAX 2A)
4
5 N/C
6 ROUGH VALVE
(Relay contact output
A
C240V
MAX 2A))
7
8 N/C
9 N/C
⑩HEATER BL3.5/4F
（Weidmuller）
1 INNER HEATER (2ND) output
(AC100V MAX2A)
2
3 INNER HEATER (1ST) output
(AC100V MAX2A)
4
⑬ RS I/F Round crimp terminal M3
(terminal width MAX6.2mm) Refer to Table 3-5

8 ULVAC CRYOGENICS INCORPORATED