Ulvac FR-E720 User manual

D/N.MGINV00E, 2018MH06 ULVAC CRYOGENICS INCORPORATED
INVERTER
Instruction Manual
Export Control Policy
We recommend that ALL customers be sure to follow all
rules and regulations such as Foreign Exchange and
Foreign Trade Law when exporting or reexporting our
products.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5
Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

F-6 ULVAC CRYOGENICS INCORPORATED
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MZIW001E,2010.01 ULVACCRYOGENICSINCORPORATED IW-1
Disposal Consideration
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump or refrigerator has been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING

IW-2 ULVAC CRYOGENICS INCORPORATED
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Inverter Instruction Manual
TABLE OF CONTENTS
CHAPTER 1 Descriptions･････････････････････････････････････ 1
CHAPTER 2 Specifications････････････････････････････････････ 1
CHAPTER 3 Protective Functions･･････････････････････････････1
CHAPTER 4 Setting the Inverter･･････････････････････････････ 2
CHAPTER 5 Dimensions･･････････････････････････････････････ 4
CHAPTER 6 External View････････････････････････････････････5
CHAPTER 7 Schematic Diagram･･･････････････････････････････7
FIGURES & TABLES
Figure 1．Dimensions･･･････････････････････････････････････････4
2．External View････････････････････････････････････････ 5
Table 1．Protective Functions･･････････････････････････････････ 1
ULVAC CRYOGENICS INCORPORATED Ⅰ

Inverter Instruction Manual
ⅡULVAC CRYOGENICS INCORPORATED
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Inverter Instruction Manual
1. Descriptions
The inverter is used to change the cold head motor rotation to the frequency different
from that of the power supply in order to improve performance, reduce vibration and
cooldown time, and optimize cryopumps, cold traps and refrigerators.
(Please refer to the specifications or external drawings for the information on the set
frequency.)
2. Specifications
Model ：FR-E720 – 0.4K …… for C30VR, C30PVRT, C15R, C10
：FR-E720 – 0.75K …… for C30MVR, C30MVRT
Manufacturer ：Mitsubishi Electric Corporation
Default ：Settings will be done by Ulvac Cryogenics Inc. based on the
customers’ specifications.
3. Protective Function (Refer to the manufacturer’s instruction manual for
details.)
Table 1 shows the functions to protect the inverter itself. These functions may also
be activated by a failure of the inverter. For information on functions other than
listed below, please refer to the instruction manual of the manufacturer.
Table 1 Protective Functions
Name Description Indication
Overcurrent
shut-off
When the inverter output current reaches
or exceeds approximately 230% of the
rated current during constant speed,
acceleration or deceleration, the
protective circuit is activated to stop the
inverter output.
During acceleration E.OC1(OC1)
During constant
speed
E.OC2(OC2)
During deceleration E.OC3(OC3)
Regenerative
overvoltage
shut-off
If regenerative energy causes the
inverter’s internal main circuit DC voltage
to reach or exceed the specified value,
the protective circuit is activated to stop
the inverter output. It may also be
activated by a surge voltage generated in
the power supply system.
During acceleration E.OV1(OV1)
During constant
speed
E.OV2(OV2)
During deceleration E.OV3(OV3)
NOTE: When the protective function is activated, a cryopump(cold head motor), a cold trap, or a
refrigerator stops operation and the output signal of the compressor unit remains ON mode.
ULVACCRYOGENICSINCORPORATED 1

Inverter Instruction Manual
2ULVAC CRYOGENICS INCORPORATED
4. Setting the inverter (Refer to the manufacturer’s instruction manual)
The procedure to input 60Hz as the third speed (low speed) is explained below as an
example of the settings.
Acceleration time is required to be changed to avoid output stop with “E.OC1” display
resulting from activated overcur er nt breaker during acceleration.
CAUTION
Since the inverter is mounted on outside of the compressor unit, parameter input should be
disabled to avoid modification after installation at customers’ sites.
CAUTION
When the compressor stops, the current to the inverter is cutoff, but it takes 2 to 3 seconds for
the condenser inside the inverter to discharge (LED indicator light goes off). Conduct the
steps (1) and (18) a few seconds after stopping the compressor.
CAUTION
Cha
make
nging the value settings occasionally results in malfunction. Please contact us when you
changes to the settings.
CAUTION

Inverter Instruction Manual
【1. Prior to change the settings】
1) Open the front cover of the inverter and disconnect STF signal wire.
2) Turn on the compressor and follow the steps below.
【2. Select operation mode】
3) Display parameter “P79” in flash.
4) Press SET key. When “2” is displayed in flash, turn the dial to display “1”.
5) Press SET key again to blink “P79” and “1” alternately.
【3. Cancel the parameter write inhibit setting】
6) Display parameter “P77” in flash.
7) Press SET key. When “1” is displayed in flash, turn the dial to display “2”.
8) Press SET key again to blink “P77” and “2” alternately.
【4. Cancel the parameter write inhibit setting】
9) Display the parameter you wish to change (in this case “P6”)
10) Press SET key to display the default value in flash. Turn the dial to change the
value (in this case select “60”).
11) Press SET key again to blink “P6” and “60” alternately.
【5. Select the parameter write inhibit setting】
12) Display parameter “P77” in flash.
13) Press SET key. When “2” is displayed in flash, turn the dial to display “1”.
14) Press SET key again to blink “P77” and “1” alternately.
【6. Select the operation mode】
15) Display parameter “P79” in flash.
16) Press SET key. When “1” is displayed in flash, turn the dial to display “2”.
17) Press SET key again to blink “P79” and “2” alternately.
【7. Change of the settings complete】
18) Shut down the compressor and return the STF wiring to the original state
(short-circuit of STF-SD).
19) Turn on the compressor and confirm that 60Hz is displayed (When RH signal is
OFF) on the LED indicator.
The setting is completed by the procedures above. Once completed, no additional
changes can be made from the key.
Close the front cover of the inverter.
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Inverter Instruction Manual
4ULVAC CRYOGENICS INCORPORATED
56
68
5
D
D1 4
118
128
5
5
φ5穴
5. Dimensions
(Unit：mm)
Figure 1 Dimensions
Capacity D D1
0.4K
0.75K
113
133
42
62
φ5 hole
Holes for wiring.

Inverter Instruction Manual
6. External View (When mounted on a C30VR series compressor)
344
75
585
510
680607
73
453
【Side View】
【Rear View】
INVERTER
C30VR/C30PVRT: 0.4kW
C30MVR/C30MVRT:0.75kW
207
76
120
130
57
160
【Front View】
Figure 2 External View
ULVACCRYOGENICSINCORPORATED 5

Inverter Instruction Manual
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IN2IN1
22
21
UL1015 #10
BKWTRD
96
95
OL1
IN1IN2
SD
MRS
YW/GN
E
UL1007 #18
RD
W
V
U
T
S
R
INV
TB2
UL1015 #10
YW/GN
Magnetic Valve
INPUT POWER
COMPRESSOR
COMPRESSOR
COMPRESSOR
CN5
REMOTE RESPONSE
CN6 CONNECTOR
TS3
TS2
LPS
TS1
TB1
V VV
VR2 VR3VR1
13
14
43
44
UL1007 #24
E5
E5
RD
4
3
2
1
107431 2
RD
WT
BK
１ ２
２１
ＣＮ1 16
11
12
13
15
14
9
8
7
RD
UL1007 #24
No.1
POWER
×2
UL1007 #16YW/GN
1
2
3
4
FG BAR
YW/GN
YW/GN
YW/GN
BK BK
RD RD
UL1007 #18
UL1007 #18
4
2
RD WT BK BK
WT RD
BK WT RD
AC200V 3φ
8 965
FG
YW/GNUL1007 #16
COMPRESSOR
GN YW/GN
UL1007 #18
BK
RD
BE
YW
YW
YW
BE
BE
BE
YW
E4
BK RD
ETSR
WVU
M
COMPRESSOR MOTER
TB2
COLD HEAD
UL1015 #14
YW
BE
BE
YW
BE
YW
BE
YW
YW
BE
UL1007 #18
UL1007 #18
UL1007 #24
UL1007 #24
UL1007 #24
UL1007 #24
BK
BK
RD
RD
UL1007 #18
UL1007 #18
YW/GNBKWTRD
UL1015 #10
UL1015 #10
Cold Head No.1
UL1007 #18
UL1007 #24
UL1007 #24
UL1007 #18
UL1007 #18
UL1007 #20
YW
BE
YW
BE
YW
BE
YW
BE
BE
YW
BK
BK
RD
BK
RD
YW/GN
YW/GN
BK
BK
RD
RD
RD
BK
BK
WT
RD
YW/GN
WT
BK
BK
WT
RD
RD
WT
BK
BKWTRD
5
3
4
2
1
5
E1
CP2
A2
A1
CR
MV1 MV2
MV1MV2
100
T2
120144
173 0
200
0
0
100
144
173
200
T1
0120
4321
13
14
1211109
8765
LOAD
LINE
COM
NO
RY1
E4E1
MC
CP1
CN1
CN2
TB1
HOUR METER
CPU BOARDRELAY BOARD
PS1
TB3
2
4
5
3
7
6
9
8
12
11
14
13
16
15
10
1
10
2
5
4
7
6
9
8
3
1
CN5
2 1
CN2
4
3
1
2
CN1
1
3
1
CN1
3
2
6
5
4
431 2
1
CN3
3
2
4
CN9
1
2
4
3
CN3
2
3
5
4
1
7
8
9
6
CN8
1
3
2
6
5
4
1
CN7
4
3
6
5
9
8
11
10
7
2
15
16
13
14
18
19
20
17
12
1
CN4
4
3
6
5
8
7
2
1
CN6
4
3
5
6
2
(C30VR＋INVERTER)
7. SCHEMATIC DIAGRAM
Substrate mounting hole (TH)
Substrate mounting hole (TH)
26-core flat cable
Answer back output
ON Command
OFF Command
C20 mode
ON/OFF Command
ALARM output
Female
Male

Inverter Instruction Manual
ULVAC CRYOGENICS INCORPORATED 9/10
IN2IN1
22
21
BKWTRD
96
95
IN1IN2
SD
MRS
YW/GN
E
UL1007 #18
W
V
U
T
SR
INV
RD
UL1007 #18
RD WT BK
FG
UL1007 #18
Magnetic Valve
UL1015 #10
YW/GN
１ ２
１ ２
オス側
メス側
ＣＮ1
VVV
13
14
43
44
E5
E5
1071 2 3 4
BK
WT
RD
4
3
2
1
14
15
13
12
11
16
9
8
7
RD
UL1007 #24
CONNECTOR
COLD HEAD
No.3
POWER
COLD HEAD
No.2
POWER
No.1
POWER
×2
UL1007 #16YW/GN
1
2
3
4
FG BAR
VR2VR1 VR3
TB1
YW/GN
YW/GN
YW/GN
BK BK
RD RD
UL1007 #18
RD
4
2
RD WT BK BK WT RD BK WT RD
BK
WT
RD RD
WT
BK
BK WT RD
BK WT RD
AC200V 3φ
8 965
YW/GNUL1007 #16
COMPRESSOR
CH3
CH2
COMPRESSOR
COMPRESSOR
COMPRESSOR
CH1
YW/GN GN YW/GN YW/GN
UL1007 #18
BK
RD
BE
YW
YW
YW
BE
BE
BE
YW
E4
BK RD
ETSR
WVU
M
COMPRESSOR MOTER
YW
BE
YW
BE
YW
BE
TB2
CN5
CN6
REMOTE RESPONSE
INPUT POWER
COLD HEAD
UL1015 #14
YW
BE
BE
YW
BE
YW
BE
YW
YW
BE
YW
BE
UL1007 #18
UL1007 #18
UL1007 #24
UL1007 #24
UL1007 #24
UL1007 #24
BK
BK
RD
RD
UL1007 #24
UL1007 #18
UL1007 #18
YW/GNBKWTRD
UL1015 #10
UL1015 #10
UL1015 #10
Cold Head No3Cold Head No.2Cold Head No.1
UL1007 #24
UL1007 #18
UL1007 #18
UL1007 #24
UL1007 #24
UL1007 #18
UL1007 #18
UL1007 #20
YW
BE
YW
YW
BE
BE
YW
BE
YW
BE
BE
YW
BE
YW
BK
BK
RD
BK
RD
YW/GN
YW/GN
YW
BE
BK
BK
RD
RD
RD
BK
BK
WT
RD
YW/GN
WT
BK
BK
WT
RD
RD
WT
BK
BKWTRD
5
3
4
2
1
5
E1 E2
CP2
A2
A1
CR
MV1 MV2
MV1MV2
100
T2
120144
173 0
200
0
0
100
144
173
200
T1
0120
4321 431 2
13
14
1211109
8765
13
14
12119 10
875 6 8765 14
12119 10 13
LOAD
LINE
COM
NO
RY1 RY2
RY3
TS3
LPS
TS2
TS1
E3
E4E3E2E1
MC
CP1
CN1
CN2
TB1
HOUR METER
CPU BOARDRELAY BOARD
PS1
TB3
24
23
22
21
2
4
5
3
7
6
9
8
12
11
14
13
17
16
19
18
15
10
20
1
10
2
5
4
7
6
9
8
3
1
CN5
2 1
CN2
4
3
1
2
CN1
1
3
1
CN1
3
2
6
5
4
431 2
1
CN3
3
2
4
CN9
1
2
4
3
CN3
2
3
5
4
1
7
8
9
6
CN8
1
3
2
6
5
4
1 2 3 4
1
CN7
4
3
6
5
9
8
11
10
7
2
15
16
13
14
18
19
20
17
12
1
CN4
4
3
6
5
8
7
2
1
CN6
4
3
5
6
2
(C30MVR＋INVERTER)
Flat Cable
CH1 Command
CH2 Command
CH3 Command
ON Command
OFF Command
ON/OFF Command
ALARM OUTPUT
7. SCHEMATIC DIAGRAM
Answer Back Output
Answer Back Output
Answer Back Output
Answer Back Output
C20 mode
Substrate mounting hole (TH)
Substrate mounting hole (TH)