Ulvac DEPOX VTR-350M/ERH User manual

No.35046-2-03-6
Instruction Manual
Compact Vacuum Evaporator
DEPOX
(VTR-350M/ERH)
ULVAC KIKO, Inc.
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.

Table of Contents
Highlighting indicates safety-critical items.
To Safely Use This Equipment
(1) Before Using ---------------------------------------------------------------------------------------------- 1
1. Target Users ----------------------------------------------------------------------------------------- 1
2. Read the Manual Thoroughly -------------------------------------------------------------------- 1
3. Keep This Manual in a Safe Place ------------------------------------------------------------- 1
4. Warranty ---------------------------------------------------------------------------------------------- 1
5. Statutory Requirements for Disposal ---------------------------------------------------------- 1
6. Safety during repair -------------------------------------------------------------------------------- 1
(2) Overview of the product -------------------------------------------------------------------------------- 2
1. The purpose of the product and general prohibitions ------------------------------------- 2
2. Safety devices, their purpose and functionality --------------------------------------------- 2
3. Product Specifications ----------------------------------------------------------------------------- 3
4. Specifications for component parts ------------------------------------------------------------ 4
5. Standard accessories ------------------------------------------------------------------------------ 5
6. Using the switch, handle, and operating lever ----------------------------------------------- 6
7. Switch, handle, and operating lever layout --------------------------------------------------- 7
Evacuation system schematic-------------------------------------------------------------------- 8
Electrical system schematic---------------------------------------------------------------------- 8
(3) Unpacking and installation ---------------------------------------------------------------------------- 9
1. General precautions ------------------------------------------------------------------------------- 9
2. Packaging at time of delivery -------------------------------------------------------------------- 9
3. Location ----------------------------------------------------------------------------------------------- 9
4. Power source ---------------------------------------------------------------------------------------- 10
Evaporator power source schematic----------------------------------------------------------- 11
5. Required Tool List ---------------------------------------------------------------------------------- 12
(4) Operation -------------------------------------------------------------------------------------------------- 12
1. Potential dangers and safety precautions during operation ----------------------------- 12
2. Evacuation device operation ---------------------------------------------------------------------13
2-1 Preparation ----------------------------------------------------------------------------------------- 13
2-2 Operation ------------------------------------------------------------------------------------------- 13
2-3 Shut down------------------------------------------------------------------------------------------- 13

3. Vapor deposition operation -----------------------------------------------------------------------14
3-1 Opening the vacuum chamber-------------------------------------------------------------- 14
3-2 Vacuum chamber evacuation----------------------------------------------------------------14
4. Creating a film --------------------------------------------------------------------------------------- 15
4-1 Preparation -------------------------------------------------------------------------------------- 15
4-2 Creating a film ---------------------------------------------------------------------------------- 15
5. Handling malfunctions ----------------------------------------------------------------------------- 16
5-1 Instantaneous loss of power----------------------------------------------------------------- 16
5-2 Long term loss of power---------------------------------------------------------------------- 16
5-3 Operation after power is restored-----------------------------------------------------------16
(5) Maintenance and repair---------------------------------------------------------------------------------17
1. Potential dangers and safety precautions during maintenance and repair ---------- 17
2. Maintenance and repairs that the customer can perform -------------------------------- 18
3. Removal, maintenance, and reinstallation of devices ------------------------------------- 18
3-1 Oil rotary vacuum pump ----------------------------------------------------------------------18
3-2 Turbo molecular pump ------------------------------------------------------------------------19
3-3 Oil mist trap --------------------------------------------------------------------------------------20
3-4 Glass bell jar O-ring --------------------------------------------------------------------------- 20
3-5 Glass bell jar ------------------------------------------------------------------------------------ 20
4. Maintenance and inspection --------------------------------------------------------------------- 21
5. Troubleshooting ------------------------------------------------------------------------------------- 22
6. Storage ------------------------------------------------------------------------------------------------ 23
7. List of consumable parts -------------------------------------------------------------------------- 23
(6) Disposal ----------------------------------------------------------------------------------------------------25
1. Precautions during disposal ----------------------------------------------------------------------25
(7) Optional Parts -------------------------------------------------------------------------------------------- 25
1. List of standard optional parts ------------------------------------------------------------------- 25

A
To Safely Use This Equipment
Thank you for purchasing our product. This pump is designed exclusively for vacuum
evacuation, and it may malfunction or cause accidents if operated inappropriately.
Please read the manual thoroughly, and pay specific attention to inspection,
maintenance and safety guidelines. Read and fully understand the description of this
manual to prevent serious accidents from occurring.
The copyright of this user’s manual and safety guides are reserved by Technical
Division of Ulvac Kiko.
No part of this document, in whole or part may be reproduced without permission of
Ulvac Kiko Inc.
Read this section before using the VTR-350M/ERH. Follow the instructions below to
safely use the device and prevent personal injuries from occurring.
Please comply with them all the time.
The symbols below have the following meaning
This indicates action or practice that should be
made.
Always make connection with the earth.
This indicates the action or practice that should be
prohibited.
Do not disassemble.
Do not touch.
Danger Incorrect handling of the equipment is very likely
to result in death or serious injury to the operator.
Warning Incorrect handling of the equipment may result in
death or serious injury to the operator.
Caution
Incorrect handling of the equipment may result in
light or medium injuries to the operator or damage
to the equipment.

B
CAUTION
Check label
Warning labels have been applied to the following
locations.
1) Glass bell jar (PL001, PL005)
For units with a liquid nitrogen trap,
2) Near the liquid nitrogen funnel (PL006)
For units with a bell jar cover (holder),
3) Bell jar cover (PL001, PL005)
For units with a lifter,
4) Lifter (PL003)
In the event that a label becomes illegible or begins to peel off,
please contact your sales representative.
Warning
Check the
capacity
Primary power supply
Prepare the following.
Single-phase 100 V, 14.0 A or more
Single-phase 200 V, 7.5 A or more
Failure to use the correct power supply could result in circuit
breakers tripping during operation due to overcurrent.
Do not share
Primary electric power supply should be reserved
exclusively for this equipment and not shared with any
other device.
Lack of circuit breaker capacity could result in the circuit breakers
tripping during operation due to overcurrent.
Ground the
grounding wire
Always make sure that the equipment is properly
connected to a type D ground.
Ground cables are color-coded green.
A faulty ground connection could result in electrical shock or damage
to equipment.
Check the
cable
capacity
A
void using extension cables if possible. In the event that
an extension cable must be used, be sure it conforms to
the following:
100 V, 3.5 mm2or larger
200 V, 2.0 mm2or larger
A cable that is too small could easily overheat and result in a fire.
Avoid this
action
Do not place objects on top of primary power supply
cables.
To do so could result in electrical shock or cause a fire.
Avoid electrical
shock
Even after opening the main circuit breakers, the cables
are live up to the breaker itself. Do not touch the
terminals.
To do so could result in electrical shock.
Power Supply
Warning Label

C
Warning
Avoid this
action
This equipment is not equipped with an explosion-proof
structure and should not be used any area where it would
be exposed to an open flame.
To do so could results in an explosion, fire, or personal injury.
Avoid this
action
The area near the pump is subject to high temperatures
during operation. Do not place flammable substances
anywhere near the pump.
To do so could result in a fire.
Do not touch
During rough vacuum operations, an oil mist could
escape from the oil rotary vacuum pump evacuation port.
Be sure to equip the device with an oil mist trap.
Failure to do so could result in a contaminated interior that could
affect the health of the operator.
Caution
Oil mist trap
in use
Oil mist will be spread from the evacuation outlet of the
oil sealed rotary vacuum pump during roughing
operation. Use an oil mist trap (sold separately).
Otherwise, oil spread may contaminate the room or affect human
health.
Requires
ventilation
The pump emits heat while the device is operating.
Room temperature will rise.
Warning
Check the
environment
Install the equipment where the following conditions are
satisfied.
1) Flat surface
2) Floor with sufficient strength
3) Well-ventilated place
4) Place without direct sunlight
5) Room with temperatures between 7°C and 30°C.
6) Location where there is no risk of fire
7) Location where no corrosive chemicals or gases are
present.
8) Place without electrical noises, which may cause
adverse effect to the product.
Otherwise, operation failure or durability degradation may occur.
Caution
Work by two or
more people
Lifting and moving of the equipment should be made by
two or more people.
Otherwise, you could injure your back.
Work by two or
more people
Installation or removal of lift (sold separately) should be
made by two or more people.
Otherwise, you could injure your back.
Fix the
product
After installation, secure the device in place using the
adjusters.
This is made to prevent movement or damage upon earthquake.
Environment
Installation

D
Warning
Avoid this
action
Do not apply any shock to the glass bell jar, and avoid
heating it to 50°C or higher.
In a case of explosion upon vacuum condition, the
exploded pieces will spread.
This may cause a serious damage to the product.
Check
ventilation
Please make sure to ventilate the room when using liquid
nitrogen.
The nitrogen can potentially reduce the oxygen in the
room.
This may cause an oxygen deficiency accident.
Caution
Wear gloves
When using liquid nitrogen, wear gloves to protect your
hands.
If liquid nitrogen splashes and adheres to your skin, you may feel
acute pain momentary.
Confirm
complete
close
A
fter confirming complete closure of the main valve, let
out the air in the vacuum chamber.
Air entering the turbo molecular pump during operation could result in
damage to the pump.
An inflow of air during liquid nitrogen injection will cause condensable
gases to adhere to the trap excessively, thus degrading the
performance.
Operations

E
WARNING
Wear protective
equipment
A
lways wear gloves and a protective mask when
cleaning the thin film that forms on the bell jar and
feed-through collar.
The thin film comprises fine particulate that could become
suspended in the air and enter the lungs while breathing.
Wear protective
equipment
Always wear gloves and a protective mask when
changing the oil to the oil rotary vacuum pump.
Failure to do so could result in illness.
Be careful
The glass bell jar weighs approximately 7 kg. Always
maintain proper posture when attaching it to or removing
it from the device.
Failure to do so could result in injuries to the spine or pelvis as well
as damage to the bell jar.
Inspection
If the lifter (optional) is installed, inspect the eyebolt and
attachment clip at the end of the wire rope for looseness
on a daily basis.
Failure to do so could result in damage to the glass bell jar.
CAUTION
Requires more
than one person
Installation or removal of the oil diffusion pump or oil
rotary vacuum pump is to be performed by two or more
people.
Take the necessary precautions to avoid dropping it or hurting your
back.
Periodic
replacement
Replace the oil mist trap element once every 6 to 12
months.
A clogged element will cause higher evacuation resistance and
could result in leakage from the spindle seal or damage to the oil
level gauge.
Abide by the law
Proper disposal of this device and its pumps as industrial
waste is stipulated by law.
Dispose of properly in accordance with all
applicable laws and local regulations.
Prohibited
Do not modify this device in anyway.
We cannot be responsible for modifications.
Maintenance, Repair, and Disposal

１
(1) Before Using
1. Target Users
Only persons who have used vacuum deposition equipment or trained based on this
manual may operate this equipment.
2. Read the Manual Thoroughly
Please read this manual thoroughly in order to use the equipment in a safe and correct
manner.
Please pay particular attention when reading the section “To Safely Use This Equipment”.
3. Keep This Manual in a Safe Place
Keep this manual in a safe place.
After reading this manual, be sure to keep it in a safe place where it is readily accessible
to other users.
4. Warranty
(1) The warranty for this pump (this equipment) extends for a period of one year from the
date of shipment.
(2) Any malfunctions or defects which occur under normal usage conditions during the
warranty period will be repaired free of charge.
Note, the warranty stated here is an individual warranty covering the pump. In addition,
the scope of the warranty coverage concerning repairs is limited to the repair and/or
replacement of parts.
Normal usage conditions refer to the following:
a) Ambient temperature and humidity during operation: 7 - 30°C, below 85% RH
b) Operation in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage,
inflammable gas, corrosive gas, radiation or pollution.
c) Malfunctions caused by usage conditions that differ from those stated in the user
manual (performance specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modifications or repairs carried out by a party other than
the manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f) Malfunctions that occur when not using a rated power supply.
g) Malfunctions that occur when there is an abnormal rise in internal pressure due to
the pump exhaust outlet being blocked during operation, etc.
h) Malfunctions that occur, when the pump is damaged as a result of being dropped
or falling, etc.
i) Malfunctions which are determined by the manufacturer’s technical personnel to be
caused by conditions that do not comply with the usage conditions for this vacuum
pump.
j) Malfunctions due to the replacement of consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions of our products caused by the customer,
regardless if the malfunction does not fall within the warranty period, nor shall we
be liable for any loss of opportunity for the customer’s clients or for compensation
for any damages to other products, labor costs, production loss, transportation
expenses and other related work.
b) We shall not be liable for any claims and patent infringements, including secondary
damages, filed a claim by a third party against the customer.
5. Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this equipment
including used oil.
Comply with regulations upon disposal.
6. Safety during Repair
When requesting repairs to this product, provide a full description of the conditions of use
(particularly any use of dangerous materials) for the safety of repair personnel.
In this case, fill in the Use Condition Check Sheet and attach to the product.
If the use conditions are unknown, repair may be refused.

２
(2) Overview of the product
1. The purpose of the product and general prohibitions
This device is used to perform vacuum evaporation and deposition, a process for
applying a thin film of material to the solid surface of an object by using an
electrically resistive heater to produce a flux of vapor in a vacuum.
The following prohibitions are intended to ensure proper operation of the device.
Using this device as a vacuum container
Placing substances other than the vapor source and the material to be
coated in the vacuum chamber
Repairing, modifying, or attempting to resell this device without the
approval of the manufacturer.
Prohibited
2. Safety devices, their purpose and functionality
Item Objective Function Confirmation
Electrical
leakage
Prevent electrical
shock
Earth leakage breaker located in
vapor deposition unit main breaker.
Rated capacity: 1 kA
Manual reset after the problem is
rectified
None
Do not operate the device with any of the above
items deactivated.
Prohibited

３
3. Product Specifications
Ultimate pressure 4.0 × 10-4 Pa
(For unloaded, clean vacuum chamber)
2.0 × 10-4 Pa
(Using liquid nitrogen in unloaded, clean vacuum chamber)
During evacuation Up to 4.0 × 10-3 Pa for 10 minutes
(For unloaded, clean vacuum chamber)
Up to 3.0 × 10-3 Pa for 10 minutes
(Using liquid nitrogen in unloaded, clean vacuum chamber)
Required electric power 100 V, single phase, 1.4 kVA
200 V, single phase, 1.5 kVA
External dimensions
Main unit:
Power unit:
Mass
Main unit:
Power unit:
W730 mm × D584 mm × H1,161 mm
W480 mm × D435.3 mm × H149 mm
Approximately 162 kg
Approximately 40 kg
Color of main unit JIS S5-462 baked (Munsell 5GY8/0.5)
Refer to specification sheet for custom-built specifications.
A liquid nitrogen trap (optional) is needed when using liquid nitrogen.

４
4. Specifications for component parts
Device name Model/Specification Qty.
1) Glass bell jar
Internal diameter: 300 mm dia. × H300 mm
Material: hard glass
1
2) Feed-through collar
No. of ports: 12 (8 side ports, 4 bottom ports)
Internal diameter: 305 mm dia. × H100 mm
Material: Nickel-plated steel
Appurtenant devices:
Single point electrode
KF port
Shutter
Service port sealing flange
Base plate sealing flange
1
2
1
1
5
3
3) Evaporator power unit
Model: PSE-150C
Dimensions: W480 mm × D435.3 mm × H149 mm
Input: Single phase 200 V
Output: 150 A max.
Rating: 30 minutes
Control method Thyristor AC phase control method
Output control
Constant power operation
Constant current operation
Constant voltage operation
(Setting when shipped out: constant current)
Appurtenant devices:
Output cable (38 mm2 × 2 m)
1
4) Turbo molecular
pump (TMP)
Model: Turbovac 361
Evacuation flow: 345 l/second of N2
Ultimate pressure: 10-8 Pa
Maximum intake pressure: 53 Pa
Intake and evacuation ports: 100 ISO-K, 25KF
Mass: 12 kg
1

５
Device name Model/Specification Qty.
5) Oil rotary vacuum
pump (RP)
Model: GLD-202B
Evacuation flow: 200 l/minute
Ultimate pressure: 6.7 × 10-2 Pa
Required electric power: 0.55 kW
Hydraulic oil: 1.1 L of SMR-100
1
6) Automatic leak valve
Model: LCLV-25-100V
Caliber: MW-25
1
7) Main valve
Model: SBVM-4AX butterfly valve
Caliber: VG-100
1
8) Three-way valve
Model: 3W-25K
Caliber: 20A
1
9) Vacuum gauge Model: ISG1
Gauge head: M-34／WP-01
1
Refer to specification sheet for custom-built specifications.
5. Standard accessories
1) Electric power cable Main unit: 100 V, single phase, crimped terminals, 4 m
Evaporator unit: 200 V, single phase, crimped terminals, 2 m
1
1
2) Operation manual
Ordinary paper
1
3) Vacuum performance
test sheet
Ordinary paper
1
4) Allen wrench 3 mm 1
5) TMP intake cap Turbo molecular pump intake cap (for shipping) 1
Refer to specification sheet for custom-built specifications.

６
6. Using the switch, handle, and operating lever
Always perform a safety check and condition of the device
before operating the switch, handle, or operating lever.
Be careful
Name Operation
Main switch Manual on/off. Lamp comes on.
BACK.P(or R.P) switch Manual on/off. Lamp comes on.
MAIN.P(or TMP) switch Manual on/off. Lamp comes on.
Main valve handle Counterclockwise to open, clockwise to close
Three-way valve Operate by turning lever to fore, close, or rough position.
VENT V Screw type
Counterclockwise to open, clockwise to close
Note: Refer to the appropriate operation manual for details on component device switches.

７
7. Switch, handle, and operating lever layout

８
Evacuation system schematic
Electrical system schematic

９
(3) Unpacking and installation
1. General precautions
1) Verify that the product conforms to what was ordered.
2) Verify that all necessary appurtenant parts are included.
3) To ensure safety during installation, maintain a
1-meter-wide space around the perimeter of the device.
4) Once the location is finalized, secure the device in
place using the adjusters.
Review
2. Packaging at time of delivery
The main unit (with casters) will be packed in a wooden crate and the
appurtenant parts will be packaged in a box at time of delivery.
3. Location
WARNING
Location
Verification
This device is to be installed in an area
that satisfies the following conditions.
1) Has a level floor.
2) Has a floor of sufficient strength.
3) Is well ventilated.
4) Is not subject to direct sunlight.
5) Has a temperature range of 7–30°C.
6) Is not subject to open flame.
7) Is not exposed to chemicals or other
substances likely to cause corrosion.
8) Is not subject to noise or other forms of
electromagnetic interference.
Failure to satisfy these conditions could result in
malfunctions or reduce the durability of the device.
To ensure safety after installation, maintain a 50 cm
clearance to walls and keep all maintenance space free of
obstruction.
Check

１０
4. Power source
WARNING
Check rating
Primary power supply
Prepare the following.
Single-phase 100 V, 14.0 A or more
Single-phase 200 V, 7.5 A or more
Failure to use the correct power supply could result
in the circuit breakers tripping during operation due
to overcurrent.
Primary cable specifications
For single phase, 100 V: 4 m cable with 4 mm dia. crimped terminals
For single phase, 200 V: 2 m cable with 5 mm dia. crimped terminals
WARNING
Exclusive use
The primary electrical power supply should
be reserved for the exclusive use with this
equipment and not shared with any other
device.
Lack of circuit breaker capacity could result in the
circuit breakers tripping during operation due to
overcurrent.
Electrical Ground
Always make sure that the equipment is
properly connected to a type D ground.
Ground cables are color-coded green.
A faulty ground connection could result in electrical
shock or damage to equipment.
Check cable
rating
Avoid using extension cables if possible. In
the event that an extension cable must be
used, be sure it conforms to the following:
100 V, 3.5 mm2or larger
200 V, 2.0 mm2or larger
A cable that is too small could easily overheat and
result in a fire.
Prohibited
Do not place objects on top of primary
power supply cables.
To do so could result in electrical shock or cause a
fire.
Electrical Shock
Even after opening the main circuit
breakers, the cables are live up to the
breaker itself. Do not touch the terminals.
To do so could result in electrical shock.

１１
Evaporator power source schematic

１２
5. Required Tool List
Name Use
Phillips screwdriver Installation of primary power cable
Attaching the Vacuum gauge head
Hexagonal wrench (WAF1.5) Attaching the Vacuum gauge head
Torque wrench or socket (WAF13) Installation of evaporator power cable
(4) Operation
1. Potential dangers and safety precautions during operation
WARNING
Prohibited
The glass bell jar should not be exposed to either
shock or temperatures above 50°C.
Breakage while the bell jar is depressurized could
result in the scattering of glass fragments.
Could result in breakage.
Requires
ventilation
Forced ventilation is required when using liquid
nitrogen (optional).
Gasification of liquid nitrogen could result in
reduced interior oxygen levels.
Could result in illness due to oxygen deficiency.
CAUTION
Wear gloves
When handling liquid nitrogen, always wear rubber
gloves or otherwise protect exposed parts of the
body.
Direct exposure of the skin to liquid nitrogen droplets could
result in momentary but intense pain.
Valve fully
closed
After confirming that the main valve is fully closed,
open the vacuum chamber to the atmosphere.
Air entering the turbo molecular pump during operation could
result in damage to the pump.
If air is mixed in during injection of liquid nitrogen, a
considerable volume of condensable gas will form on the trap,
resulting in significant loss of performance.