Varian TriScroll 300 Series User manual

D R A F T 4 / 2 9 / 0 4
vacuum technologies
TriScrollTM 300
Series
Dry Scroll
Vacuum Pump
Manual No. 699904260
Revision H
May 2004
MAJOR MAINTENANCE
MANUAL

DRAFT 4/29/04
Copyright 2004
Vacuum Technologies
TriScroll™300 Series
Dry Scroll Vacuum Pump
TriScroll is a trademark of Vacuum Technologies.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
iii
Table of Contents
Declaration of Conformity
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii
Factory Service Options . . . . . . . . . . . . . . . . . . . ix
Serial Number Notes . . . . . . . . . . . . . . . . . . . . . . ix
Contacting Vacuum Technologies . . . . . . . . . . . . ix
Major Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . . . 1
Maintenance Tool Kit . . . . . . . . . . . . . . . . . . . . . 2
Major Maintenance Tool Kit . . . . . . . . . . . . . . . . 4
Tip Seal Tool Kit . . . . . . . . . . . . . . . . . . . . . . . . . 6
TriScroll 300 Disassembly . . . . . . . . . . . . . . . . . . . . 7
Remove and Disassemble the
Outboard Housing . . . . . . . . . . . . . . . . . . . . . . . 7
Remove and Disassemble the Orbiting Plate . . . 13
Remove and Disassemble the
Inboard Housing . . . . . . . . . . . . . . . . . . . . . . . . 21
Crankshaft Assembly . . . . . . . . . . . . . . . . . . . . . . . 31
Crankshaft Exploded View . . . . . . . . . . . . . . . . 31
Assemble the Crankshaft . . . . . . . . . . . . . . . . . . 32
Inboard Housing Assembly . . . . . . . . . . . . . . . . . . . 35
Inboard Housing Exploded View . . . . . . . . . . . . 35
Inboard Housing Assembly . . . . . . . . . . . . . . . . 38
Insert the Shaft Seal . . . . . . . . . . . . . . . . . . . . 38
Insert the Crankshaft . . . . . . . . . . . . . . . . . . . . 40
Insert the Seal Housing . . . . . . . . . . . . . . . . . . 42
Install the Vents and Plugs . . . . . . . . . . . . . . . 45
Exhaust Port Reassembly . . . . . . . . . . . . . . . . 47
Bypass Port Reassembly . . . . . . . . . . . . . . . . . 49
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . . . 53
Orbiting Plate Exploded View . . . . . . . . . . . . . . 53
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . 55
Install the Bearing Assembly . . . . . . . . . . . . . . 55
Install the Wave Washer and Shaft Seal . . . . . 58
Install the Needle Bearings . . . . . . . . . . . . . . . 61
TriScroll 300 Assembly . . . . . . . . . . . . . . . . . . . . . . 65
TriScroll 300 Exploded View . . . . . . . . . . . . . . . 65
Final Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Install the Orbiting Plate . . . . . . . . . . . . . . . . . 72
Install the Outboard Housing . . . . . . . . . . . . . 78
Install the Sync Crank into the
Outboard Housing . . . . . . . . . . . . . . . . . . . . . 82
Replace the Cowling and Cover . . . . . . . . . . . 84
Put the Pump Back into Service . . . . . . . . . . . . . 86
Return for Request Health and Safety Certification
Sales and Service Offices

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Varian, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Vacuum Technologies
We
Wir
Nous
Nosotros
Wij
Noi
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Lexington, Massachusetts, USA
Varian, Inc.
TriScroll Series Vacuum Pump
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test
March 2003
D
ec
l
ara
ti
on o
f
C
on
f
orm
ity

vi
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
Preface
This manual provides the information you need to successfully perform scheduled maintenance on your
Vacuum Technologies TriScrollTM Dry Vacuum Pump. The time to perform major rebuild is typically
18,000 hours. If you have questions that are not addressed in this manual, please contact the nearest
Vacuum Technologies service facility listed on the rear cover of this manual.
Safety Considerations
READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.
The following format is used in this manual to call attention to hazards:
Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them.
The consequences of work performed by unskilled or improperly trained maintenance personnel, or
careless operation of the equipment employed in the specified maintenance procedures can be serious.
Every maintenance person must read and thoroughly understand the materials discussed and the
instructions provided in this manual, as well as any additional information provided by Vacuum
Technologies.
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.

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All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location.
WARNING Disconnect power from the TriScroll
300 before performing any mainte-
nance procedure.
Allow the pump to cool before perform-
ing any maintenance procedure.
Approximate cool-down time is one to
two hours.
CAUTION Wipe all O-rings clean with a lint-free
cloth before installation to ensure that
no foreign matter is presentto impair
the seal.
Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration andreduces their ability to
hold a vacuum.
If applicable, apply a small amount of
Krytox®GPL 224 grease and wipe the
O-rings “shiny” dry.
NOTE Vacuum Technologies recommends
replacing all O-rings during routine
maintenance or during any mainte-
nance procedure requiring that O-rings
be removed.
Unless otherwise stated, apply
Loctite®242 or Loctite PST®to the first
few threads only. Apply just enough to
obtain a seal.
WARNING The TriScroll 300 weighs 26.4 kg
(58 lbs). To avoid injury, use proper lift-
ing techniques when moving the pump.

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TriScroll 300 Dry Scroll Vacuum Pump
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Related TriScroll Manuals
Manuals related to the installation and operation, tip seal and pump module replacement for
TriScroll 300 series pumps are listed in the following table:
Maintenance and Tool Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A
description of each kit and ordering information is provided in the following table:
Title Applicable TriScroll Model Part Number
Pump Module Replacement All TriScroll 300 Series Models 699904285
Tip Seal Replacement Manual All TriScroll 300 Series Models 699904280
Installation and Operation Manual All TriScroll 300 Series Models 699904265
Description Contents Applicable TriScroll Model Part Number
Major Maintenance Tool Kit All bearings, bearing
seals, bearing lubricant,
O-rings, and tip seals
required to rebuild
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300MK
Maintenance Tool Kit All fixtures and tools
required to perform any
maintenance on
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300TK
Tip Seal Tool Kit All tools required to
change the tip seals on
any TriScroll Series
pump.
All TriScroll Series models PTSTSTKIT
Replacement Tip Seal Set Replacement tip seals
and static O-rings for
TriScroll 300 Series
pumps.
All TriScroll 300 Series models PTSS0300TS
NOTE: The Maintenance Tool Kit or the Tip Seal Tool Kit is required for
tip seal replacement.

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TriScroll 300 Dry Scroll Vacuum Pump
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Factory Service Options
Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps
or TriScroll Pump Modules. Contact your nearest Vacuum, Inc. sales office for price and availability
information. Select your preferred service option from the table below.
Serial Number Notes
This manual applies to TriScroll 300 series with serial numbers beginning with LP, and ascending from
LPB80124. For service on TriScroll series pumps with serial numbers J7000001 to A8000108, contact
your nearest Varian, Inc. office.
TriScroll 300 series pumps with serial number above LPC80250 have 1/4-18 National Pipe Threads in
the bearing purge, gas ballast, and exhaust ports. Pumps with serial numbers below LPC80250 were
manufactured with 1/4-19 British Standard Pipe Threads. Contact your nearest Varian, Inc. office if
mating hardware is required.
Contacting Vacuum Technologies
In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN. See
the back cover of this manual for a listing of our sales and service offices.
Internet users:
❑Send email to Customer Service & Technical Support at [e-mail]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
Factory Service Options Part Number
Advance Exchange TriScroll 300 Single Phase EXPPTS03001
Advance Exchange TriScroll 300 Three Phase EXPPTS03003
Advance Exchange TriScroll 310 Single Phase EXPPTS03101
Advance Exchange TriScroll 310 Three Phase EXPPTS03103
Advance Exchange TriScroll 300 Pump Module Only EXPTS0300SC
Advance Exchange TriScroll 310 Pump Module Only EXPTS0310SC
Service/Rebuild TriScroll 300 Pump (Single or Three Phase) PTS0300KMA
Service/Rebuild TriScroll 310 Pump (Single or Three Phase) PTS0310KMA
Service/Rebuild TriScroll 300 Pump Module Only PTS0300SCRP
Service/Rebuild TriScroll 310 Pump Module Only PTS0310SCRP

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1
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
Major Maintenance
General Information
Vacuum Technologies TriScroll 300 series pumps are designed to provide years of trouble-free service if
maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal
replacement are recommended when the pump base pressure has risen to an unacceptably high level
for your application. Bearings, rotary seals and O-rings should also be replaced if the pump exhibits
humming or grinding noises from the bearings. Main bearing life may be shortened if your application
requires the pumping of high quantities of water vapor. Use of the bearing purge will keep this water
from impacting bearing life.
Required Equipment
❑Maintenance Tool Kit: PTSS0300TK (page 2)
❑Major Maintenance Kit: PTSS0300MK (page 4)
❑Arbor Press: 1/2 ton or larger, 10" work diameter capacity, 8" capacity over table
❑Oven: 400 oF temperature capability, 11" wide x 11" deep x 4" high minimum chamber,
500 watt or higher heating capacity
❑Heat Resistant Surface
❑Vacuum Gauge: Capable of measuring pressure of 5 mTorr to 20 mTorr with an accuracy of
± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

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Maintenance Tool Kit

3
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
Maintenance Tool Kit (continued)

4
TriScroll 300 Dry Scroll Vacuum Pump
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Major Maintenance Tool Kit
Nylon Sleeve
Shaft Seal
24x32x4

5
TriScroll 300 Dry Scroll Vacuum Pump
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Major Maintenance Tool Kit (continued)
TS-300 O-rings
O-ring
Part Number Quantity
Inside
Diameter
(in.)
Cross-Section
(in.)
2-016 6 0.614 0.070
2-111 2 0.424 0.103
2-115 1 0.674 0.103
2-118 3 0.862 0.103
2-121 1 1.049 0.103
2-137 1 2.050 0.103
2-152 1 3.237 0.103
2-157 1 4.487 0.103
2-205 1 0.421 0.139
2-269 1 8.734 0.139

6
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Tip Seal Tool Kit

7
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TriScroll 300 Disassembly
Remove and Disassemble the
Outboard Housing
1. Remove the three M5x16 screws that attach
the cowling to the module.
2. Remove the cowling.
.
3. Remove the six M5x22 screws that attach
the outboard cover to outboard housing.

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TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
4. Remove the outboard cover.
5. Remove and discard the O-ring.
6. Remove the six M5x10 screws that attach
the three sync crank covers to the outboard
housing.
TriScroll 300 Disassembly (continued)

9
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
7. Remove the sync crank covers.
8. Remove and discard the O-rings.
9. Remove the two M5x16 screws that attach
the intake clamp to the outboard housing.
TriScroll 300 Disassembly (continued)

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TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 4/29/04
10. Remove the intake clamp and intake fitting.
11. Remove and discard the O-ring.
12. Remove the six M6x45 screws that attach
the outboard housing to inboard housing.
13. Remove the outboard housing.
TriScroll 300 Disassembly (continued)