Varian HS-32 User manual

HS-32
Diffusion Pump
Instruction Manual
Manual No. 6999-01-132
Revision G
May 2000
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421-3133
[phone]
(800) 8-VARIAN

America
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421,
USA
Tel: [phone]
Fax: [phone]
Toll Free: 1 [phone]
Argentina
Varian Argentina Ltd.
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: [phone]
Fax: [phone]
Australia
Varian Australia Pty., Ltd.
6/81 Frenchs Forest Road
Frenchs Forest, NSW 2086
Australia
Tel: [phone]
Fax: [phone]
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: [phone]
Fax: [phone]
Canada
Varian Canada
6705 Millcreek Drive, Unit 5
Mississauga, Ontario L5N 5R9
Canada
Tel: [phone]
Fax: [phone]
China
Varian China Ltd.
Room 1201, Jinyu Mansion
No. 129A Xuanwumen Xidajie
Xicheng District
Beijing 100031
P.R. China
Tel: [phone]
Fax: [phone]
Varian Shanghai
Service Station
716 Yishan Road Shanghai
P.R. China 200233
Tel: [phone]
Fax: [phone]
England
Varian Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: [phone]
Fax: [phone]
France
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: [phone]
Fax: [phone]
Germany
Varian GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64229 Darmstadt
Germany
Tel: [phone]
Fax: [phone]
Hong Kong
Varian Technologies Asia, Ltd.
Rm 2611 Concordia Plaza
New Mandarin Plaza
1 Science Museum Rd.,
Tsimshatsui East, Kowloon
Hong Kong
Tel: [phone]
Fax: [phone]
India
Varian India PVT LTD
1010 Compotent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: [phone]
Fax: [phone]
Italy
Varian Vacuum Technologies
via Flli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]
Japan
Varian Vacuum Technologies
Sumitomo Shibaura
Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: [phone]
Fax: [phone]
Korea
Varian Technologies Korea, Ltd
Shinsa 2nd Bldg. 2F
966-5 Daechi Dong
Kangnam Gu, Seoul
Korea 135-280
Tel: [phone]
Fax: [phone]
Netherlands
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: [phone]
Fax: [phone]
Mexico
Varian S.A.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: [phone]
Fax: [phone]
Singapore
Varian Asia, Ltd.
1123 Serangoon Road
#03-02
Singapore 328207
Tel: [phone]
Fax: [phone]
Spain
Varian Iberica
Avda Pedro Diez 25
28019 Madrid
Spain
Tel: [phone]
Fax: [phone]
Russia
Varian Moscow
19A Khlebny per
121019 Moscow
Russia
Tel: [phone]
Fax: [phone]
Taiwan
Varian Technologies Asia Ltd.,
Taiwan Branch
18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan
Tel: [phone]
Fax: [phone]
Internet Users:
Visit us on the web at:
www.eVarian.com
Representatives in most countries
Sales and Service Offices

ii
SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE
RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH
REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY
FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND
MAINTENANCE INSTRUCTION MANUAL. SAFE OPERATION IS THE RESPONSIBILITY OF THE
USING ORGANIZATION AND ITS PERSONNEL. READ THE INSTRUCTION MANUAL AND
UNDERSTAND HOW TO AVOID HAZARDS PRIOR TO OPERATING THE DIFFUSION PUMP. ALL
PERSONS WHO WORK WITH OR ARE EXPOSED TO DIFFUSION PUMPS OR EQUIPMENT
WHICH UTILIZES SUCH PUMPS OR DIFFUSION PUMP FLUID MUST TAKE PRECAUTIONS TO
PROTECT THEMSELVES AGAINST POSSIBLE SERIOUS BODILY INJURY OR DEATH. DO NOT
BE CARELESS AROUND SUCH PRODUCTS.
THESE SHEETS AND THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTIONS
CAN HELP YOU TO OPERATE THIS PUMP SAFELY AND EFFICIENTLY. READ THEM. SPECIAL
OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION
INSTRUCTIONS. UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN
POOR PERFORMANCE, DAMAGE TO THE PUMP OR OTHER PROPERTY, SERIOUS BODILY
INJURY, AND POSSIBLE DEATH.
USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED
BY THE FOLLOWING SYMBOLS:
Designers of systems which utilize diffusion pumps must design out hazards wherever possible; pro-
vide guards, safety features, and interlocks for hazards which cannot be designed out; warn with
respect to hazards which cannot be designed out and which remain after utilizing guards, safety fea-
tures, and interlocks;and lastly, provide procedures and instructions on proper use, servicing, etc., so
as to minimize risk.
WARNING
Warnings are used when failure to observe instructions or precautions
could result in injury or death to humans.
CAUTION
Cautions are used when failure to observe instructions could result in
significant damage to equipment and/or facilities.

viii
WARNING
High voltages (up to 480 V) can kill. Always break the primary circuit to
the power supply before starting to work on the heater and/or its wiring.
WARNING
Varian has no control over the types of gases passing through this
pump. These are entirely under the control of the process user and/or
the hardware systems integrator. Frequently, process gases are toxic,
flammable, corrosive, explosive, or otherwise reactive. Since these
gases can cause serious injury or death, it is very important to plumb
the exhaust of the pump to the facility’s hazardous gas exhaust system
which incorporates appropriate filters, scrubbers, etc., to insure that the
exhaust meets all air and water pollution control regulations.
WARNING
Diffusion pumps are typically cleaned with acetone, alcohol, or other
solvents.
When heated, sprayed or exposed to high temperature equipment,
these solvents become flammable and explosive, causing serious injury
or death. Do not use near a high-temperature source. Ventilate work-
ing area with a blower and use in large, well-ventilated room. When
heated or sprayed, solvents also becomes 4 to 5 times heavier than air
and will flow down, settling in tanks, pits, and low areas, thus displacing
air which can kill by asphyxiation. Use in a large, well-ventilated room.
Use of a self-contained breathing apparatus may be necessary.
Acetone, alcohol, and other solvents are irritants, narcotics, depres-
sants, and/or carcinogenics. Their inhalation and/or ingestion may pro-
duce serious effects. Prolonged or continued contact with the skin will
result in absorption through the skin and moderate toxicity. Always
ensure that cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
WARNING
Certain gases can become corrosive and toxic when trapped in oil.
Always wear protective gloves when handling dirty pump oil, drain it into
a closable container, and do not breathe the fumes of the oil. Always
use fully self-contained breathing apparatus.

ix
WARNING
When lifting some Varian diffusion pumps, use power-assisted equip-
ment and trained moving/installation personnel to avoid dropping, slip-
ping, and/or overturning the pump and severely injuring personnel.
Check weight of equipment before lifting and do not stand under equip-
ment being moved.
CAUTION
Alcohol, acetone, and other solvents degrade O-ring materials reducing
their ability to hold a vacuum. Do not use acetone or other solvents on
O-rings. If necessary to clean O-rings, wipe with lint-free, clean cloth,
wash in detergent and water, or use a small amount of pump oil.
Note
Always dispose of used or dirty oil properly and in compliance with all
local, state, and federal environmental laws and regulations.
WARNING
If hazardous gas, vapors, chemicals, or combustible mixtures are
pumped, sufficient quantities may exist during operation.This pump may
contain decomposed and/or overheated pump oils or poisonous and/or
overheated pump oils or poisonous and/or corrosive process materials
which are highly toxic and also can be an asphyxiant. Proper operation
will not always ensure that all hazardous materials have been removed.
WARNING
Hot oils can cause serious burns. Wear protective gloves and long
sleeved, loose fitting, heat resistant garments when draining pump oil.

Installation
1-5
1-4 UNPACKING
Pumps are factory-packaged to permit prolonged storage in suitably protected areas without special
precautions.
a. Remove flange covers, blank plugs, protective plugs from water connections, etc. Be careful
not to scratch or otherwise damage or mar the sealing surface – usually an O-ring groove on
top of the large inlet flange.
b. Carefully remove the outer shipping container and save it for evidence if damaged. Notify
the carrier immediately.Visually inspect the pump for damage that may have occurred
during shipping. Discard any internal packing which may have been used to protect the
internal components.
c. For non-critical work, after making sure that there are no foreign materials inside the pump, it
may be charged with fluid and used without disassembly. Otherwise, it should be disassembled
and cleaned. In general, cleaning may be required if the expected vacuum level is to be below
the 10-6 Torr (.000133 Pa) range.
d. Check the internal jet assembly. It should be concentric and firmly seated on the bottom of
the pump.The jet assembly should not rotate because of an indexing pin at the bottom.
1-5 CLEANING A NEW PUMP
a. Read cold cap maintenance and installation data which will be found in Section III,
para.3-4, of this manual. Remove the cold cap in accordance with these instructions.
b. Disassemble the internal jet system from the body of the pump. See Figure 3-2 for a section
drawing of a typical jet assembly.
c. Remove fill and drain plugs and gaskets if supplied.
d. Thoroughly clean all components of the jet assembly and pump casing interior (but not
O-ring gaskets) with acetone followed by an alcohol rinse.
WARNING
When lifting some Varian diffusion pumps, use power-assisted equip-
ment and trained moving/installation personnel to avoid dropping, slip-
ping, and/or overturning the pump and severely injuring personnel.
Check weight of equipment before lifting and do not stand under equip-
ment being moved.

Installation
e. Remove all traces of the cleaning fluid by carefully drying with clean, dry, oil-free
compressed air.
f. For reassembly, reverse the above procedure.
g. Clean the flanges and O-ring grooves thoroughly with alcohol, using clean, lint-free rags.
1-6
WARNING
Diffusion pumps are typically cleaned with acetone, alcohol, or other
solvents.
When heated, sprayed or exposed to high temperature equipment,
these solvents become flammable and explosive, causing serious injury
or death. Do not use near a high-temperature source. Ventilate work-
ing area with a blower and use in large, well-ventilated room. When
heated or sprayed, solvents also become 4 to 5 times heavier than air
and will flow down, settling in tanks, pits, and low areas, thus displacing
air which can kill by asphyxiation. Use in a large, well-ventilated room.
Use of a self-contained breathing apparatus may be necessary.
Acetone, alcohol, and other solvents are irritants, narcotics, depres-
sants, and/or carcinogenics. Their inhalation and/or ingestion may pro-
duce serious effects. Prolonged or continued contact with the skin will
result in absorption through the skin and moderate toxicity. Always
ensure that cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
CAUTION
Acetone, alcohol, and other solvents degrade O-ring materials reducing
their ability to hold a vacuum. Do not use solvents on O-rings. If neces-
sary to clean O-rings, wipe with lint-free, clean cloth, wash in detergent
and water, or use a small amount of pump oil.
h. Remove all traces of acetone or alcohol by carefully drying with clean, dry, oil-free
compressed air. Install O-ring gasket.
1-6 UTILITY AND SYSTEM CONNECTIONS
1-6-1 Safety Considerations and Interlocks
a. Large pumps are equipped with two thermal switches. One is mounted at the body cooling
coils, the other at the center of the boiler plate (at the bottom of the pump).

Installation
These thermal switches are supplied NORMALLY CLOSED. The thermal switches have been
designed so that a cooling water failure or low oil level in the boiler will result in an increase in
temperature, causing the NORMALLY CLOSED contacts of the switches to open. When the
problem has been corrected and the temperature lowered, the thermal switch will automati-
cally reset itself.
1-7
WARNING
Utility failure can cause damage to the equipment, overheating, and
possible explosions. Designers of the equipment using diffusion pumps
must design their system to protect personnel and property from possi-
ble hazards.
b. A small lamp of the same voltage as the diffusion pump heater may be connected across
the terminals of the thermal switch.The lamp will normally be shunted by the contacts.
However, when the contacts open, the lamp will receive full line voltage and give a visual
trouble indication.
1-6-2 Vacuum Connections
a. The pump must be installed with the body vertical and plumb. Check that the mating flange on
the system (to the pump inlet) is horizontal within plus or minus 1 degree. If this condition is
not met, correct the system before installing the pump.The boiler of the pump (especially for
large pumps) must be horizontal to prevent uneven fluid level and avoid local overheating
where the fluid level would be too shallow.
b. Prepare inlet O-ring seals by wiping them with a clean cloth. Do not use solvents.Use a small
amount of diffusion pump oil to wet the cleaning cloth.Install the O-ring in the groove being
careful not to damage the sealing surface with cuts, nicks, or scratches.
c. Using appropriate lifting apparatus, align the bolt holes of the flanges and assemble the bolts.
Tighten the bolts evenly to compress the O-ring seal until light contact is achieved between
metal flanges.
d. Check fill and drain plugs for tightness. Apply light to medium torque, enough to compress
gaskets. Minute leaks through the gaskets may develop with use in this location.They may
be detectable with very sensitive mass spectrometer leak detectors.
1-6-3 CoolingWater Connections (See Figure 1-3)
The following method of external connections is recommended.
a. Water connections are designed for 3⁄8FPT fittings.The cold cap cooling coil and all of the
body and foreline cooling (except the quick cool coil) should be connected in series. A cooling
water supply of 3 to 4 gpm at 60°F to 80°F (16°C to 27°C) should be adequate. A higher flow
than this will not be harmful.

Installation
1-9
The temperature at the discharged cooling water should not exceed 130°F (54°C).If the water supply
pressure is low, it may be necessary to connect the different sections of cooling coils in parallel.This
should be done if the cooling water discharge temperature exceeds 130°F (54°C).The cooling water
discharge should, if possible, be connected to an open drain so that cooling water flow can readily be
checked.
b. The quick-cool coil at the boiler plate MUST be connected to an open drain and the feed line
controlled by a separate water 3-way valve (open, closed, and vent to atmosphere).The drain
must be below the boiler level so that it is drained completely when the quick-cool coil water
supply is shut off and the pump is operating.See Figure 1-3.
1-6-4 Electrical Connections (See Figure 1-4a, b, c, d, or e Diffusion Pump Wiring Diagram)
WARNING
High voltages (up to 480V) can kill. Always break the primary circuit to
the pump before starting to work on the heater and/or its wiring.
a. The pump heater has been designed to operate at a certain voltage. Check the heater for
correct supply voltage and, in the case of multiphase connections, for load balance by
measuring the resistance of each branch.
Heater circuit resistance (all 3-phase, 200V – 3.3 ohms
measured line-to-line) 240V – 4.8 ohms
460V – 17.6 ohms
415V – 14.4 ohms
480V – 19.2 ohms
b. Make connections to the terminals in the junction box (at the foreline).The use of flexible
conduit is recommended to facilitate removal of the pump for service.The pump should not
be operated at more than 5% over the rated voltage. Make connections in accordance with
the wiring diagram provided with each pump.
1-6-5 Thermal Switches
The thermal switches have been pre-set at the factory and should not require adjustment. The lower
thermal switch is set at 550°F; the lower switch is set at 220°F. Should any thermal switch be thrown
out of adjustment, it can be adjusted as follows.
1. Boiler thermal switch
The boiler thermal switch is mounted on a brass block at the center of the boiler.
The thermal switch should be adjusted, with the pump operating, as follows:
a) After several hours operation, disconnect the lead wires and place an
ohmmeter across the terminals of the thermal switch.

Installation
1-16
1-6-6 InitialVacuumTest
The purpose of this test is to establish the leak tightness of the system, specifically the vacuum con-
nections to the diffusion pump. (To eliminate misleading indications and the masking of leaks by the
fluid, the tests should be carried out with the diffusion pump “dry", i.e., before it is charged with the
pumping fluid.)
WARNING
Pumps and their components are designed for vacuum service; they
are not designed to be pressurized which could cause them to burst
possibly expelling shrapnel at lethal velocities. Serious accidents have
been caused by intentional pressurization of vacuum systems and their
components. NEVER PRESSURIZE ANY PART OF A VACUUM SYS-
TEM FOR TEST OR ANY OTHER PURPOSE. Always provide pressure
relief when designing diffusion pumps into systems and ensure that
pressure relief motion is limited to safe envelopes.
a Confirm the vacuum ultimate pressure characteristics of the mechanical pump.This should
closely approximate the value quoted in the manufacturer’s data, if the mechanical pump is
correctly installed, adjusted, and filled with clean oil. Pressure measurements should be made
with a continuously indicating total pressure gauge, such as a thermocouple gauge.This test
can be performed to evaluate either valved or unvalved systems. Connect the outlet or foreline
of the diffusion pump to the inlet of the mechanical backing pump, using appropriate vacuum-
tight connections.
b In the case of a valved system, close the roughing valve and main isolation valve ahead of
the diffusion pump. In the case of unvalved systems, the entire work chamber volume must
be included in the test. Evacuate the entire system with the mechanical pump only.
Let the mechanical pump reach an ultimate pressure in the system.This reading should
approximate the value obtained in step a above (usually 10 to 50 microns (1.33 to 6.65 Pa)). If
it does not, examine for leakage. If leakage is suspected, follow standard procedures for leak
testing.These will depend on the type of vacuum gauges and/or leak detection equipment
available.The most effective are Varian’s helium leak detectors.