Page ii 799015, Revision A, 06/07 VIEW Benchmark 250
4 Installation 17
4.1 What This Chapter Contains 17
4.2 Choosing an Installation Site 18
4.3 Benchmark 250 System Layout 19
4.4 Receiving, Unpacking, &
Inspecting the Benchmark 250 System 20
4.5 Moving & Installing the System 21
4.6 Connecting the System 22
4.7 Powering Up the System &
Launching the Metrology Software 24
4.8 Operation Checks 25
4.9 Post Installation Checklist 26
4.10 Shutting Down the System 27
4.11 Installing the X, Y, & Z Shipping Restraints 28
4.12 Stage Fixture Mounting Holes 32
5 Principles of Operation & System Interconnections 33
5.1 What this Chapter Contains 33
5.2 Overview of Operation 34
5.3 Image Acquisition, Processing, & Display 35
5.4 Motion Control 36
5.4.1 X- & Y-Axis Motion 36
5.4.2 Z-Axis Motion 37
5.5 Illumination Sources 38
5.6 Optional Ronchi Grid Assembly 39
5.7 Optional AccuCentric Assembly 40
5.8 Zeroing the Stage 40
5.9 Benchmark 250 Schematic Diagram 40
6 Preventive Maintenance 43
6.1 What This Chapter Contains 43
6.2 Preventive Maintenance Schedule 44
6.3 Cleaning the User Components 45
6.3.1 Cleaning the Joystick 45
6.3.2 Cleaning the Mouse 45
6.3.3 Cleaning the Flat Panel Display 45
6.3.4 Cleaning the Keyboard 45
6.4 Cleaning the Stage, External Surfaces, & Stage Glass 46
6.4.1 Cleaning the Stage 46
6.4.2 Cleaning External Surfaces 46
6.4.3 Cleaning the Stage Glass 47
6.5 Cleaning & Lubricating the XY Stage Guide Rails 48
6.5.1 Cleaning & Lubricating the X-Axis Guide Rails 49
6.5.2 Cleaning & Lubricating the Y-Axis Guide Rails 51
6.6 Lubricating the X-Axis Drive Rod 53
