Wentworth Laboratories PEGASUS S200 Series Service manual

PEGASUS
Models S200, S200D, S200-PR, S200LSC, 300S, 360S
WAFER PROBING EQUIPMENT
OPERATING AND SERVICE MANUAL
Issue 6.2, July 2011
Software version 6.1 onwards
Part Number 2091-001
The Leader in ProbeAbility ™

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Copyright notice
© Wentworth Laboratories Limited, 2002-2011.
ALL RIGHTS RESERVED
This document is copyrighted by Wentworth Laboratories Limited. No part of this manual may
be reproduced or transmitted in any form, by any means (electronic, photocopying, recording, or
otherwise) without the prior written permission of Wentworth Laboratories Limited.
Trademarks
Any trademarks, registered trademarks, or trade names mentioned in this manual that are not he
property of Wentworth Laboratories Limited are acknowledged to be the property of their
respective holders.
Disclaimer
Wentworth Laboratories Limited makes no representations or warranties regarding the contents
of this document. We reserve the right to revise this document, or make changes to the
specifications of the products described within, at any time without notice and without obligation
to notify any person for such revision or change.
Contact Information
If you have any questions or comments about the Pegasus prober or any other Wentworth
product, please direct your inquiry to your local sales representative or one of the Wentworth
offices:
Wentworth Laboratories, Inc
500 Federal Road
Brookfield, CT 06804
Tel: [phone]
Fax: [phone]
Wentworth Laboratories, Ltd
1 Gosforth Close
Sandy, Bedfordshire, SG19 1RB
ENGLAND
Tel: [phone]
Fax: [phone]
Wentworth Laboratories, Inc.
1102 Walsh Avenue
Santa Clara, CA 95050
Tel: [phone]
Fax: [phone]
Wentworth Japan Co., Ltd
1-8-15 Nakagawa, Tsuzuki-ku
Yokohama 224
JAPAN
Tel: [phone]
Fax: [phone]
Wentworth Laboratories, Inc.
3913 Todd Lane, Suite 505
Austin, TX 78744
Tel: [phone]
Fax: [phone]
Web site http://www.wentworthlabs.com

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SAFETY NOTICES
NOTE A NOTE in this manual refers to special information for the user‟s
attention. It provides additional and operational information that the user
should be aware of.
CAUTION A CAUTION in this manual denotes a hazard condition, either immediately
or the potential for one. It calls attention to a procedure that, if not
performed correctly or adhered to, could result in damage to or destruction
of the equipment. Do not proceed beyond a CAUTION sign until the
indicated conditions are fully understood and met.
WARNING A WARNING in this manual denotes a hazard condition, either
immediately or the potential for one. It calls attention to a procedure that, if
not performed correctly or adhered to, could result in injury or loss of life.
Do not proceed beyond a WARNING sign until the indicated conditions are
fully understood and met.
After instructions that will produce automatic movements, a note in this
format identifies what movements are to be expected. These movements
are not normally hazardous, but you must take care to avoid contact with
any moving parts.
This product and related documentation must be reviewed before use. Familiarisation of
the procedures within this manual must be achieved before attempting operation,
adjustments and/or repairs. This instrument has been designed and tested in accordance
to the requirement for CE marking and has been supplied in a safe and working
condition.
Wentworth Laboratories Ltd shall not be liable for errors contained herein or for
incidental or consequential damages in connection with the furnishing, performance, or
use of this material.
The information contained within this document is subject to change without notice.

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CONTENTS
IN THIS MANUAL -------------------------------------------------- 1
INTRODUCTION---------------------------------------------------- 2
1SPECIFICATIONS .............................................................................. 4
1.1 Installation instruction ................................................................... 4
1.2 Technical Specifications, Pegasus S200 Series............................ 4
2CONTROLS AND INDICATORS ........................................................ 9
2.1 Units ............................................................................................. 9
2.2 Mains Power Control................................................................... 10
2.3 Emergency Stop ......................................................................... 11
2.4 Power Supply Fault..................................................................... 12
3OPERATOR INTERFACES ...............................................................13
3.1 Screen and Function Keys.......................................................... 13
3.2 Keypad ....................................................................................... 14
3.3 Joystick....................................................................................... 15
3.4 Prober Status Indicator ............................................................... 16
OPERATING INSTRUCTIONS --------------------------------17
4POWER-UP AND CONFIGURATION SCREENS..............................18
4.1 Power-up Screen ........................................................................ 18
F5 = Shutdown –starts a controlled shutdown, as described in Chapter 17. 19
4.2 Configuration Screen .................................................................. 19
5RUN BATCH SCREEN ......................................................................21
5.1 Load Wafer and Choose Alignment Method................................ 21
5.2 Alignment Procedures................................................................. 22
5.3 Wafer Centre Wizard .................................................................. 28
5.4 Position Reference Die ............................................................... 28
5.5 Position Central Die .................................................................... 28
5.6 Position First Die......................................................................... 29
5.7 Manual Wafer Testing Screen..................................................... 30
5.8 Browse Wafer Screen ................................................................. 31
5.9 During Probing............................................................................ 31
5.10 After Probing............................................................................... 32
5.11 Probing Error Pause Screen ....................................................... 33

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6SETUP MENU....................................................................................35
6.1 Wafer Size...................................................................................37
6.2 X Index........................................................................................37
6.3 Y Index........................................................................................37
The Y Index parameter can be accessed remotely using the RYI, RYJ, RYM,
WYI, WYJ and WYM commands...........................................................37
6.4 X/Y Index Menu...........................................................................37
6.5 Probing Menu..............................................................................41
6.6 Z Lift Menu ..................................................................................45
6.7 Tester Menu ................................................................................49
6.8 Inking Menu.................................................................................52
6.9 Remote Menu..............................................................................55
6.10 Prober Options Menu ..................................................................56
7CHANGE PROBE CARD SCREEN...................................................63
7.1 Starting........................................................................................63
7.2 Setting the Calliper Position –S200D..........................................64
7.3 Set Probing Height ......................................................................64
7.4 Platform Control Screen ..............................................................65
8DEVICE OPTIONS SCREEN.............................................................67
8.1 Using Device Files.......................................................................67
8.2 Changing the Active Device ........................................................67
8.3 Creating a New Device File .........................................................68
8.4 Other Options..............................................................................68
9CHANGE INKER CARTRIDGE SCREEN .........................................69
10 CHANGE PROBE HEIGHT SCREEN................................................71
11 PROGRAM MODE SCREEN.............................................................73
11.1 Using Program Mode ..................................................................73
11.2 Running the Active Program........................................................73
11.3 Changing the Active Program......................................................73
11.4 Editing the Active Program File ...................................................74
11.5 Training a New Program File.......................................................75
12 POSITION CALIBRATION MENU.....................................................77
12.1 Probing Centre Position(s) ..........................................................77
12.2 Camera Centre Position ..............................................................78
12.3 Loading/unloading Position .........................................................79

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12.4 Change Probe Card Position ...................................................... 79
12.5 Prober Cleaner Wizard ............................................................... 80
12.6 Process Validation Position......................................................... 80
12.7 Manual Clean Position ................................................................ 81
13 REMOTE CONTROL FUNCTIONS....................................................83
13.1 Operation in Remote Mode ......................................................... 83
13.2 Further Remote Menu Options.................................................... 83
14 RE-INITIALISATION ..........................................................................84
14.1 Z-Axis ......................................................................................... 84
14.2 Stage .......................................................................................... 84
14.3 Platform ...................................................................................... 84
14.4 PMM ........................................................................................... 84
14.5 Arms ........................................................................................... 85
14.6 Reference Failure Screen ........................................................... 85
15 DIAGNOSE ........................................................................................87
15.1 Chuck Control ............................................................................. 87
15.2 Platform Control.......................................................................... 89
15.3 PMM/CAP Control....................................................................... 89
15.4 Robot Control.............................................................................. 89
15.5 System Options .......................................................................... 90
15.6 Factory Options .......................................................................... 90
16 REMOTE CHIP PROBING.................................................................91
16.1 Select and Load Chip Probing Map............................................. 91
16.2 Load Frame / Wafer .................................................................... 92
16.3 Alignment Procedure .................................................................. 92
16.4 Position Reference Die ............................................................... 94
16.5 After Probing............................................................................... 94
17 SHUTDOWN ......................................................................................95
18 FLYING ARM REMOVAL AND REPLACEMENT .............................96
18.1 Flying Arm Removal.................................................................... 96
18.2 Flying Arm Replacement............................................................. 97
18.3 Manual Adjustment of the Flying Arms........................................ 97

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INTERCONNECTIONS AND INTERFACES -------------- 98
19 INTERCONNECTIONS ......................................................................99
19.1 Prober Rear Panel.......................................................................99
19.2 Controller Rear Panel................................................................101
20 TTL TESTER INTERFACE ..............................................................103
20.1 Inputs and Output......................................................................103
20.2 Tester Interface Timings............................................................107
21 SIMPLE RS232 / GPIB TESTER INTERFACE................................108
21.1 Prober Generated Events..........................................................108
21.2 Tester Generated Commands ...................................................110
21.3 Example Test Sequence ...........................................................110
22 REMOTE CONTROL USING A PC .................................................112
22.1 Overview ...................................................................................112
22.2 INF/SRQ Mode..........................................................................112
22.3 Text Terminator Character ........................................................112
23 REMOTE CONTROL BY RS232 .....................................................113
23.1 Connection to PC Serial Communications Port .........................114
24 REMOTE CONTROL BY GPIB (IEEE 488.2) ..................................115
25 REMOTE COMMAND STRUCTURE...............................................116
25.1 Pegasus Commands .................................................................116
25.2 Obsolete AWP Commands........................................................151
25.3 Prober Status Byte ....................................................................166
25.4 INF Codes.................................................................................167
SERVICING INSTRUCTIONS --------------------------------173
26 SERVICING .....................................................................................175
26.1 Before You Begin ......................................................................175
26.2 Motor Drive Coupling Adjustment (MK2 only) ............................176
26.3 Cleaning the Controller Air Filter................................................177
26.4 X and Y Ballscrew Lubrication...................................................177
26.5 Chuck Leadscrew Lubrication ...................................................178
26.6 Planarisation of Chuck ..............................................................180
26.7 Lead Screws .............................................................................183
26.8 Electrical Schematics ................................................................183

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1
IN THIS MANUAL
This is the Operating and Service Manual for the Pegasus series of wafer probers from
Wentworth Laboratories Limited.
The manual consists of five major sections:
INTRODUCTION –page 2
OPERATING INSTRUCTIONS –page 17
INTERCONNECTIONS AND INTERFACES –page 98
REMOTE CONTROL –page 108
SERVICING INSTRUCTIONS –page 173.

PEGASUS Operating and Service Manual 6.1
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INTRODUCTION
Chapters 1–3 introduce you to the major features of the Pegasus S200 series of wafer
probers:
SPECIFICATIONS ................................... Chapter 1
Fuse rating 6.3A T (time delay). For continued protection always replace
with the same type
WARNING The controller is double pole fused, and hence if the fuse in
the neutral line blows there will be mains voltage with respect to earth present inside the
controller. Therefore always remove the mains plug before doing any work in the
controller.
This equipment is designed to operate indoors, within the temperature range
18°C to 22°C at a maximum humidity 70%. Pollution degree 1
CONTROLS AND INDICATORS ............. Chapter 0
OPERATOR INTERFACES .................... Chapter 3

PEGASUS Operating and Service Manual 6.1
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PEGASUS Operating and Service Manual 6.1
4
1 SPECIFICATIONS
1.1 Installation instruction
WARNING When moving the stage observe standard lifting procedures for
heavy objects. The S200 weighs approximately 45kg and the 300S weighs
approximately 100kg.
Place the stage on a bench that will take the weight of the stage
Ensure that the bench and stage give a comfortable working height
WARNING When positioning the Controller ensure that the socket-outlet that powers
the Controller is easily accessible at all times. (This is the disconnect device of the system if
anything should go wrong).
Ensure that the ventilation holes in the bottom of the controller and the fan inlet at the
rear are not obscured.
1.2 Technical Specifications, Pegasus S200 Series
XY Stage
Type
High precision recirculating ball lead screws
S200 6-inch
S200 8-inch
Stage Travel
160mm x 160mm (6.3" x 6.3")
210mm x 210mm (8.3" x 8.3")
Resolution
1.25µm
1.25µm
Probing Speed
95mm/sec max (3.75"/sec max)
95mm/sec max (3.75"/sec max)
Indexable Range
10µm to 160mm (0.001" to 6.0")
10µm to 210mm (0.001" to 8.0")
Absolute Incremental
Accuracy
Better than ±7µm over 160mm
Better than ±7µm over 200mm
Repeatability
±4µm
±4µm
Chuck Stage
Type
Stepper motor drive –linear bearings
Total Travel
10mm (0.44") max
Fine Lift
User programmable within total travel
Overtravel
User programmable within total travel
Overtravel Indexable
User programmable within total travel

PEGASUS Operating and Service Manual 6.1
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Range
Search Window
User programmable within total travel
Resolution
1µm (0.00004")
Chuck Speed
See Cycle Times table (next page)

PEGASUS Operating and Service Manual 6.1
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Physical
Specifications
(without microscope)
S200 Prober
Controller Unit
Width
572mm (22.5")
450mm (17.7")
Depth (includes
connectors)
633mm (24.0")
480mm (19.0")
Height (excludes
optics)
300mm (12.0")
190mm ( 7.0")
Weight
45kg (99lb)
17kg (37.5lb)
Platform Height
Adjustment
Fine: 25mm micrometer control Gross: 50mm (2in) variable setting
Vacuum requirement
0.5 cfm at 20” Hg (min) from external pump
Power
220-240VAC 50Hz and 100-115V 60Hz, auto select, 1000VA
Fuse rating 6.3A T (time delay). For continued protection always replace with the same
type
WARNING The controller is double pole fused, and hence if the fuse in the neutral line
blows there will be mains voltage with respect to earth present inside the controller. Therefore
always remove the mains plug before doing any work in the controller.
This equipment is designed to operate indoors, within the temperature range 18°C to
22°C at a maximum humidity 70%. Pollution degree 1

PEGASUS Operating and Service Manual 6.1
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Technical Specifications, Pegasus 300S Series
XY Stage
Type
High precision recirculating ball lead
screws
Stage Travel
305mm x 305mm (12" x 12")
Resolution
0.3µm
Indexable Range
10µm to 300mm (0.001" to 12")
Absolute Incremental
Accuracy
Better than ±8µm over 300mm
Repeatability
±4µm
Chuck Stage
Type
Stepper motor drive –linear bearings
Total Travel
10mm (0.44") max
Fine Lift
User programmable within total travel
Overtravel
User programmable within total travel
Overtravel Indexable
Range
User programmable within total travel
Search Window
User programmable within total travel
Resolution
1µm (0.00004")

PEGASUS Operating and Service Manual 6.1
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Physical
Specifications
(without microscope)
300S Prober
Controller Unit
Width
828mm (32.6")
450mm (17.7")
Depth (includes
connectors)
810mm (31.8")
480mm (19.0")
Height (excludes
optics)
366mm (14.4")
190mm ( 7.0")
Weight
100kg (220lb) approx
17kg (37.5lb)
Platform Height
Adjustment
58mm (2.3”) variable setting
Vacuum requirement
0.5 cfm at 20” Hg (min) from external pump
Power
220-240VAC 50Hz and 100-115V 60Hz, auto select, 1000VA
Fuse rating 6.3A T (time delay). For continued protection always replace with the same
type
WARNING The controller is double pole fused, and hence if the fuse in the neutral line
blows there will be mains voltage with respect to earth present inside the controller. Therefore
always remove the mains plug before doing any work in the controller.
This equipment is designed to operate indoors, within the temperature range 18°C to
22°C at a maximum humidity 70%. Pollution degree 1

PEGASUS Operating and Service Manual 6.1
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2 CONTROLS AND INDICATORS
2.1 Units
The Pegasus consists of three main units:
Prober unit –the
travelling wafer chuck
and its base unit.
Keypad unit –the
manual control interface,
which usually located at
the side of the Prober.
Fig 2.1:S200 Prober and
Keypad units, with optional
optics
Controller unit –usually located under the bench. See Fig 2.2 on next page.
The three units are interconnected by cables during installation. This chapter will
explain the various functions and interconnections.

PEGASUS Operating and Service Manual 6.1
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2.2 Mains Power Control
Mains power input is to the rear of the Controller unit.
Mains power is controlled by the green button on the Controller unit.
Fig 2.2: Controller unit –
note the green power button.
LED Indication
Status
Green LED off
Red LED off
Mains not connected
Green LED flashing
Red LED off
Standby mode: mains connected, but
Pegasus not turned on
Green LED on
Red LED off
Operation mode
Green LED flashing
Red LED flashing
Emergency Stop
Green LED on
Red LED on
Power supply fault.
2.2.1 Power-On
When mains is connected, the Pegasus changes to Standby mode, so the green LED
gives short flashes with long gaps.
When you press the green button on the Controller, the Pegasus changes from Standby
mode to Operation mode, and the green LED turns permanently on.

PEGASUS Operating and Service Manual 6.1
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2.2.2 Manual Shutdown
Under normal conditions, the Pegasus should be switched off by pressing the Shutdown
function key.
However, it is possible to shut the machine down by pressing the green button, which
will switch to Standby mode, with the green LED giving short flashes and long gaps.
CAUTION In normal operation, do not turn the power off manually while the Pegasus
is probing or the chuck is moving. If you do this, there is a risk of equipment
damage. In an emergency, use the Emergency Stop button.
2.3 Emergency Stop
Fig 2.3: Emergency Stop
button
In an emergency, quickly press the red button at the
front left of the Prober unit.
The Pegasus will shut down safely into Emergency Stop mode
and all powered motion will cease.
NOTE For a non-emergency pause, giving the opportunity to resume the current
operation, press the Pause function key on the keypad.
2.3.1 Re-starting after an Emergency Stop
WARNING Do not re-start the Pegasus until you have:
Read and understood all the following instructions;
Rectified the cause of the emergency;
Verified that it is safe to re-start; and
Obtained authorisation to re-start after an emergency stop, if that is
required by your company‟s operating instructions.
When you press the red button, it stays locked in, and the red and green LED indicators
on the Controller flash (short flashes, short gaps).

PEGASUS Operating and Service Manual 6.1
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To re-start the Pegasus, you must release the red button, by twisting it clockwise until it
springs out. Now you can press the green button on the Controller to power the Pegasus
on again.
CAUTION Since the Pegasus was shut down in an abnormal condition, it will
automatically take the following actions on re-start:
The chuck will not move from the position where it was stopped
The chuck and pins vacuum will be on
The LCD will display the Power-up screen (Section 4.1)
There will be no stored „memory‟ of operations before the emergency
stop.
Be aware that these automatic actions will take place.
You will then need to set up the operating conditions again. Follow the instructions in
Chapter 4 onwards, taking care to safeguard the wafer, probe card and other delicate
items against possible damage.
2.4 Power Supply Fault
If the red LED indictor on the Controller button is permanently on, the Pegasus has
detected a fault in its power supplies.
You cannot switch the Pegasus into this state using any manual controls, and you
cannot make any repairs.
Contact your local Wentworth representative, or one of the Wentworth offices –see
inside front cover.