ZYGO NewView 7200 User manual

Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E

ii
Warnings and Notes
Warning!
Denotes a hazard that could cause injury to personnel, and can also cause damage to
the equipment.
Note, provides helpful information.
CE Marking
If equipment has CE Marking it indicates compliance to safety requirements
established by the European Union. The directives and standards in compliance are
listed in a Declaration of Conformity, which is on file at Zygo Corporation,
Middlefield, Connecticut, USA.
© Copyright 2011 by Zygo Corporation. All rights reserved.
Information in this document is subject to change without notice. No liability is assumed with respect
to the use of the information contained in this documentation or software, or for damages in
connection with this information. Reproduction in any manner is forbidden without written permission
of Zygo Corporation.
Trademarks, product names, and company names used in this document belong to their respective
companies and are hereby acknowledged. Zygo Corporation disclaims any proprietary interest in
trademarks and product names other than its own.
OMP-0536 Rev. E June 2011

iii
Table of Contents
Introduction.....................................................................................................................1
Safety Precautions ....................................................................................................... 1
Safety Labels................................................................................................................ 2
The NewView(1) Optical Profiler.................................................................................... 2
Model Descriptions .................................................................................................. 3
NewView Options .................................................................................................... 3
NewView Components ................................................................................................. 4
Computer Components ................................................................................................ 5
Principle of Operation................................................................................................... 6
Installation.......................................................................................................................9
A Note About Installation.............................................................................................. 9
Site Requirements........................................................................................................ 9
Utility Requirements ................................................................................................... 10
System Layout............................................................................................................ 11
Part Stage Dimensions............................................................................................... 13
Preinstallation Checklist ............................................................................................. 15
Installation Summary.................................................................................................. 15
Assembling the Optical Profiler .................................................................................. 17
Changing the Sensor Height ...................................................................................... 19
Assembling the Part Stage......................................................................................... 21
Achieving Optimum Part Stage Performance ........................................................ 21
Manual Stage Assembly........................................................................................21
Motorized Stage Assembly .................................................................................... 22
X/Theta (or Y/Theta) Stage Alignment................................................................... 22
Parcentric Stage Alignment........................................................................................ 23
Custom Part Stage Fixturing.................................................................................. 24
Connecting Cables ..................................................................................................... 25
General Cable Guidelines...................................................................................... 25
Routing Cables ...................................................................................................... 26
Installing Field Zoom Lenses...................................................................................... 26
Installing the Objective Turret..................................................................................... 27
Objective Mounting..................................................................................................... 28
Installing Objectives into a Turret ............................................................................... 29
Installing a Single Objective ....................................................................................... 30
Operation.......................................................................................................................31
Operating the NewView.............................................................................................. 31
Start-up....................................................................................................................... 31
Shutdown ................................................................................................................... 32
NewView Controls and Guidelines ............................................................................. 33
Operating Precautions ........................................................................................... 34
Filter Tray Settings................................................................................................. 34
Working With Square Dovetails ............................................................................. 34
Electronics Enclosure Details..................................................................................... 35
Joystick Details........................................................................................................... 37

iv
Manual Part Stage Details.......................................................................................... 38
Adjusting the Manual Stage................................................................................... 38
Light Level Controls (Software) .................................................................................. 39
Light Level Function Keys...................................................................................... 39
The Light Level Window ........................................................................................ 39
Light Level Keys (Manual Light Level Adjustment)................................................ 39
Measurement Overview ............................................................................................. 40
1Setup...................................................................................................................... 40
Z-Stop Setup - Joystick.......................................................................................... 40
Part Setup - Manual Stage .................................................................................... 40
Part Setup- Motorized Stage ................................................................................. 40
Objective Setup - 50X and 100X Only ...................................................................40
2Focus ..................................................................................................................... 41
3Null ......................................................................................................................... 42
Nulling is Part Dependent...................................................................................... 42
Using the F-Stop ........................................................................................................ 43
Using the A-Stop ........................................................................................................ 44
Operational Hints........................................................................................................ 45
Perform Lateral Calibration.................................................................................... 45
Use System Error Files.......................................................................................... 45
Select the Right Objective ..................................................................................... 45
Using the 1X Michelson Objective......................................................................... 46
Using the Motorized Turret ....................................................................................47
Setting the Scan Length Control............................................................................ 48
Maintenance and Service.............................................................................................49
Maintaining the NewView ........................................................................................... 49
General Care.............................................................................................................. 49
Maintenance Schedule............................................................................................... 50
Spare Parts List.......................................................................................................... 50
Cleaning External Surfaces........................................................................................ 50
Cleaning the Electronics Enclosure Fan Filter ........................................................... 51
Cleaning Optics .......................................................................................................... 51
Precautions When Cleaning Optics ....................................................................... 51
Recommended Cleaning Materials........................................................................ 51
Recommended Cleaning Procedures.................................................................... 52
Lubricating the Motorized Parcentric Stage ............................................................... 52
Lubricating the Motorized Z Stage ............................................................................. 53
Lubricating the Motorized X/Y Stage.......................................................................... 54
Getting Service........................................................................................................... 55
Returning Equipment for Service ............................................................................... 55
Index...............................................................................................................................57

1
Introduction Chapter
1
Get familiar with safety concerns and your metrology instrument, plus learn about
the technology beneath the cover.
Safety Precautions
Failure to follow safety precautions could result in damage to personnel and the
instrument, and may void the warranty.
WARNINGS!
• Disconnect Power During Installation. Ensure that all power is off during
installation, when connecting cables, or when servicing equipment.
• Ground the Instrument. To minimize shock hazard, the equipment must be
properly connected to an electrical ground through the power outlet.
• Use Care When Moving Equipment. It is recommended that several
helpers work together when lifting or moving the instrument. Contact the
appropriate agencies in your country for proper lifting recommendations.
• Handle Objectives and Field Zoom Lenses With Care. The objectives
and field zoom lenses are delicate optical components and should not be
mishandled or dropped. Store objectives and field zoom lenses in supplied
storage containers.
• Do Not Crash Objectives. Do not crash the objective or optical profiler into
the test part or part stage. Use caution when focusing and driving the z-axis.
• Keep Fingers and Objects Away from Moving Turrets. Both the
motorized objective turret and the field zoom turret, if so equipped, are
software controlled. Keep hands, fingers, and other objects away from
moving components.
• Keep Fingers and Objects Away from Moving Stages. Motorized stages
move during alignment and measurement operations. Keep hands, fingers,
and other objects away from the part stage area. For emergencies press the
Joystick’s Emergency Stop button to stop all stage motion.
• Do Not Touch Optical Surfaces. Do not touch exposed glass surfaces on
the instrument or on the objectives or field zoom lenses. Touching optical
components will degrade the optical quality of the imaging system.
• Clean Optics Only When Necessary. Do not clean optical surfaces unless
necessary. Improper and unnecessary cleaning may damage optical coatings.

NEWVIEW 7200 & 7300
2
• Do Not Modify Equipment. Do not install substitute parts or perform any
unauthorized modification of the equipment.
Safety Labels
Failure to follow the safety labels on the equipment and the recommendations in
this manual could result in damage to personnel and the instrument, and may
void the warranty.
Label Meaning
General Hazard. Proceed with caution. Refer to the manual for
instructions.
Electrical Shock. Proceed with caution; there is a risk of electrical
shock.
Do not crash the objective or optical profiler into the test part or stage.
Use caution when focusing and driving the z-axis.
Disconnect power before performing the specified procedure.
Refer to the manual for complete instructions on performing a specified
procedure.
The NewView(1) Optical Profiler
The ZYGO NewView(1) optical profiler is a general purpose, three dimensional,
surface structure analyzer. It provides graphic images and high resolution
numerical analysis to accurately characterize the surface structure of test parts.
The NewView uses scanning white light interferometry to image and measure the
micro structure and topography of surfaces in three dimensions. A wide variety
of surfaces can be measured.
All NewView profilers come with a granite base, a stable gantry column, and
motorized focus control. Options include single or motorized three field zoom
lens turret, manual or motorized 6-position objective turret, and manual or
motorized part stages.
(1) U.S. patent numbers 4,948,253, 5,398,113, 5,402,234, 5,784,164, 5,953,124,
6,028,670, 6,597,460, 6,714,307, 6,775,006, and 6,882,745; U.S. and foreign patents
pending.

INTRODUCTION
3
Model Descriptions
Model Description
7200 Base optical profiler with a high resolution camera, manually
interchangeable single field zoom lens, filter tray, aperture stop, and a turret
compatible closed loop transducer.
7300 All the features of Model 7200 plus- an aperture stop, an enhanced
illuminator, a higher speed camera, and an automatic three-position field
zoom lens turret.
NewView Options
Option Description
Field
Zoom
Lens
High-quality discrete field zoom lenses provide superior image
magnification and are available in the following powers:
0.5X, 0.75X, 1.0X, 1.5X, and 2.0X.
NewView 7200 accepts a single field zoom lens; the lens can be
manually interchanged. NewView 7300 accepts up to three field
zoom lenses automatically selected via software.
Objective Interferometric infinite conjugate objectives provide sharp images of the
part under test. ZYGO offers standard and long working distance
objectives in magnifications ranging from 1X to 100X.
Objective
Mounting
●Single objective dovetail.
●Manual 6-position turret.
●Motorized 6-position turret.
Camera ●640 x 480 (VGA) high-resolution camera (standard).
●992 x 992 (1K) ultra-high resolution camera (option for NewView 7300).
Stages ●1-axis stage; Motorized Z (focus), Manual Tip/Tilt and X/Y.
●3-axis stage; Motorized Z (focus) and X/Y, Manual Tip/Tilt.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and X/Y.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and X/Theta.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and Y/Theta.
The number of stage axes indicates the total number of
motorized axes in the configuration.
The motorized Z stage and motorized X/Y stages are also
available in a closed loop configuration.
Accessories are described in the NewView 7000 Accessory Guide,
OMP-0543.

NEWVIEW 7200 & 7300
4
NewView Components
Typical NewView System

INTRODUCTION
5
NewView Components (shown on previous page)
Component Description
Optical Profiler
(Sensor)
Provides three dimensional measurement data of the surface
under test. It is a scanning white light interferometric optical
profiler or sensor. Focus is performed by driving the sensor up or
down with the Z-axis motorized stage.
Interferometric
Objectives
Objectives gather light from the test part and form a real image of
it. The objective creates interference by dividing the light into two
paths; directing one to an internal reference surface and the other
to the test surface. Due to surface irregularities the measurement
wavefront travels different distances than the reference wavefront.
When the two wavefronts are recombined, the waves are out of
phase and form an interference pattern. This interference pattern
of light and dark bands is called “fringes”.
Part Stage Holds the part under test and provides for positioning under the
objective.
Electronics
Enclosure
Houses system electronics; it provides power to the NewView and
stages and interfaces to the computer.
Computer For system control, data storage, and running MetroPro software.
Worktable Nests against the vibration isolation table and holds the various
system components.
Vibration
Isolation Table
Isolates the optical profiler from environmental vibrations that
degrade measurements.
Monitor Displays MetroPro graphics and data. An on-screen live display is
used to display a live image of the part under test. It serves as
visual feedback when adjusting the interferometer focus and part
positioning.
Joystick Controls the motorized stages (including focus), z-stop settings,
and provides an emergency stop.
Keyboard and
Mouse
For data entry and software operation.
Power Manager Distributes power to the system components, provides surge
protection, and serves as the system disconnecting device.
Computer Components
For descriptions and specifications, refer to the manuals from the original
equipment manufacturer.

NEWVIEW 7200 & 7300
6
Principle of Operation
The NewView system uses scanning white light interferometry to image and
measure test part surfaces and provide surface structure analysis without
contacting the surface. Light from the optical profiler divides within the
interferometric objective; one portion reflects from the test surface and another
portion reflects from an internal, high quality reference surface in the objective.
Both portions are then directed onto a solid-state camera.
Interference between the two light wavefronts results in an image of light and
dark bands (called fringes) that indicate the surface structure of the part being
tested. The test part is scanned by vertically moving the objective with a
piezoelectric transducer (PZT). As the objective scans, a video system captures
intensities at each camera pixel. These intensities are converted into height maps
by MetroPro software. In addition, surface images are displayed on an on-screen
live display.
Measurements are three dimensional. Vertical measurements, normal to the
surface, are performed interferometrically. Lateral measurements, in the plane of
the surface, are performed by calculating the pixel size from the field of view of
the objective in use. Using these techniques the NewView analyzes and
quantifies the surface topography of parts. Results are displayed on a color
monitor as solid images, plots, and numeric representations of the surface.

INTRODUCTION
7
Optical Diagram

NEWVIEW 7200 & 7300
8

9
Installation Chapter
2
Make sure your working conditions are conducive to good metrology. Then position
and connect components, and install options.
A Note About Installation
This chapter describes the site and utility requirements, which should be
considered before the system is set up. It also provides installation instructions
for equipment manufactured by ZYGO. Installation instructions for other
components are covered in documentation provided by the original
manufacturers.
Warning!
Installation must be performed by ZYGO trained personnel or the warranty
may be void.
Site Requirements
Consideration Comment
Vibration The site should meet vibration criterion curve VC-C or better for
best instrument performance.
Floor The floor should be as stable as possible to avoid transmission of
vibrations into the system. A ground level, poured concrete slab is
recommended. The optional vibration isolation system effectively
minimizes most vibration effects.
Acoustic Noise Acoustic (sound) of sufficient amplitude can cause vibration of the
instrument, items under test, and even of the vibration isolation
table. This is especially true of low-frequency vibrations, which
may not be audible even at relatively high amplitude. Uninsulated
walls are prone to retransmitting acoustic vibration from adjoining
areas and suspended ceilings can couple roof mounted air
conditioning noise.

NEWVIEW 7200 & 7300
10
Consideration Comment
Air Turbulence The site should be free of air movement. Air turbulence causes
uneven air density within small areas, which can refract portions of
the measurement beam and alter the measurement. Fans,
heaters, and air conditioners should not blow air onto the
instrument.
Temperature The temperature should be in the range of 15 to 30°C (59 to 86°F)
and remain relatively constant. Rapid temperature changes
degrade performance by causing uneven expansion and
contraction of the instrument and parts under test. Air conditioning,
heating devices, or vents, in the nearby area, can cause
temperature differences.
Cleanliness Keep the work environment clean. Over time, dust, smoke, and oil
can accumulate on the optics and degrade performance. Keeping
the site clean and periodically cleaning the instrument will minimize
this concern.
Utility Requirements
Requirement Comment
Electrical 100/120/220/240 VAC at 50/60 Hz
User to provide an isolated 15 amp circuit with an earth ground.
Compressed Air For optional vibration isolation table.
80 PSI (5.5 bar) dry and filtered source.
The vibration isolation table accepts a 1/4 in. diameter input hose.
For metric hoses the user must supply the appropriate adapter,
such as available from SMC Pneumatics.
Warning!
The equipment must be electrically grounded through the supply outlet.
Any interruption in the ground circuit can cause a shock hazard and could
result in personal injury.
The power strip or power manger plug is used as the “master”
disconnecting device. Ensure that the outlet is accessible.

INSTALLATION
11
System Layout
NewView Only Footprint

NEWVIEW 7200 & 7300
12
System Footprint

INSTALLATION
13
Part Stage Dimensions
Manual X/Y Stage Dimensions

NEWVIEW 7200 & 7300
14
Motorized X/Y Stage Dimensions

INSTALLATION
15
Preinstallation Checklist
;Inspect all packages for signs of shipping damage. Report any damage to
the carrier.
;Check that the shipment is complete.
;Ensure that the worksite has the required operating environment and
utilities.
;Contact your ZYGO representative to make arrangements for installation
and training.
;Move all shipping containers to the worksite. Allow the equipment to
acclimate for at least 24 hours. ZYGO recommends that you save the
shipping containers for future transport of the equipment.
Warning!
When lifting or moving equipment or pallets, contact the appropriate local
and national agencies for proper lifting recommendations.
Installation Summary
1. Open the box containing the vibration isolation table. Move and lift the
system in pieces as described in the next step to prevent injury.
Warning!
When moving and installing the vibration isolation table have several
helpers and use a forklift or hoist with lifting straps. Contact the
appropriate agencies in your country for proper lifting
recommendations.
2. Move the isolator legs (weight
200 lb, 90 kg) into position at
the installation location.
Position the wood spacer
inside the legs.
Place the counterweight
(weight 90 lb, 41 kg) on the
wood spacer
Place the table top (weight
300 lb, 136 kg) on the isolators
legs. Position the top so the
edge with holes is toward the
back.
Attach the counterweight to
the bottom of the table with 4
bolts.
Attach the cable guide to the
underside of the table top. See
“Routing Cables” later in this
chapter.

NEWVIEW 7200 & 7300
16
3. Unpack the worktable and move it into position around the vibration
isolation table.
4. Position the Electronics Enclosure on the bottom shelf and the computer on
the upper shelf under the worktable.
5. Connect the power cords through the power manager.
The power manager is for power distribution for the system. Other
equipment should not be connected to the power manager.
6. Position the power manager, monitor, keyboard, mouse, and Joystick on top
of the worktable.
7. Unpack the base and column and place it on the vibration isolation table.
Warning!
The granite base
and column weigh
about 170 lb
(77 kg). Four
people should lift
the base and
column, one at each
corner, using the
built-in lift edge on
the granite, as
shown here.
8. Unpack the sensor head and mount it to the column as described in greater
detail in this chapter.
Warning!
Handle the sensor head, zoom lenses, objectives, and turrets with
care; they are precision devices. Do not touch any glass surfaces.
9. Install the stage as described in greater detail later in this chapter.
10. Install the turret (if applicable) and mount an objective as described in
greater detail in this chapter.
11. Connect cables to all components routing cables so they don’t interfere with
the optical profiler motion or the part stage motion and so they don’t transmit
vibrations. Cables from the optical profiler are clamped to the back of the
vibration isolation table.
Refer to the cable connection diagram later in this chapter.
12. Connect the vibration isolation table to the compressed air supply.
Warning!
The power manager plug is used as the disconnecting device for the
NewView system. Ensure that the outlet is accessible.