ZYGO NewView 7200 User manual

Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E

ii
Warnings and Notes
Warning!
Denotes a hazard that could cause injury to personnel, and can also cause damage to
the equipment.
Note, provides helpful information.
CE Marking
If equipment has CE Marking it indicates compliance to safety requirements
established by the European Union. The directives and standards in compliance are
listed in a Declaration of Conformity, which is on file at Zygo Corporation,
Middlefield, Connecticut, USA.
© Copyright 2011 by Zygo Corporation. All rights reserved.
Information in this document is subject to change without notice. No liability is assumed with respect
to the use of the information contained in this documentation or software, or for damages in
connection with this information. Reproduction in any manner is forbidden without written permission
of Zygo Corporation.
Trademarks, product names, and company names used in this document belong to their respective
companies and are hereby acknowledged. Zygo Corporation disclaims any proprietary interest in
trademarks and product names other than its own.
OMP-0536 Rev. E June 2011

iii
Table of Contents
Introduction.....................................................................................................................1
Safety Precautions ....................................................................................................... 1
Safety Labels................................................................................................................ 2
The NewView(1) Optical Profiler.................................................................................... 2
Model Descriptions .................................................................................................. 3
NewView Options .................................................................................................... 3
NewView Components ................................................................................................. 4
Computer Components ................................................................................................ 5
Principle of Operation................................................................................................... 6
Installation.......................................................................................................................9
A Note About Installation.............................................................................................. 9
Site Requirements........................................................................................................ 9
Utility Requirements ................................................................................................... 10
System Layout............................................................................................................ 11
Part Stage Dimensions............................................................................................... 13
Preinstallation Checklist ............................................................................................. 15
Installation Summary.................................................................................................. 15
Assembling the Optical Profiler .................................................................................. 17
Changing the Sensor Height ...................................................................................... 19
Assembling the Part Stage......................................................................................... 21
Achieving Optimum Part Stage Performance ........................................................ 21
Manual Stage Assembly........................................................................................21
Motorized Stage Assembly .................................................................................... 22
X/Theta (or Y/Theta) Stage Alignment................................................................... 22
Parcentric Stage Alignment........................................................................................ 23
Custom Part Stage Fixturing.................................................................................. 24
Connecting Cables ..................................................................................................... 25
General Cable Guidelines...................................................................................... 25
Routing Cables ...................................................................................................... 26
Installing Field Zoom Lenses...................................................................................... 26
Installing the Objective Turret..................................................................................... 27
Objective Mounting..................................................................................................... 28
Installing Objectives into a Turret ............................................................................... 29
Installing a Single Objective ....................................................................................... 30
Operation.......................................................................................................................31
Operating the NewView.............................................................................................. 31
Start-up....................................................................................................................... 31
Shutdown ................................................................................................................... 32
NewView Controls and Guidelines ............................................................................. 33
Operating Precautions ........................................................................................... 34
Filter Tray Settings................................................................................................. 34
Working With Square Dovetails ............................................................................. 34
Electronics Enclosure Details..................................................................................... 35
Joystick Details........................................................................................................... 37

iv
Manual Part Stage Details.......................................................................................... 38
Adjusting the Manual Stage................................................................................... 38
Light Level Controls (Software) .................................................................................. 39
Light Level Function Keys...................................................................................... 39
The Light Level Window ........................................................................................ 39
Light Level Keys (Manual Light Level Adjustment)................................................ 39
Measurement Overview ............................................................................................. 40
1Setup...................................................................................................................... 40
Z-Stop Setup - Joystick.......................................................................................... 40
Part Setup - Manual Stage .................................................................................... 40
Part Setup- Motorized Stage ................................................................................. 40
Objective Setup - 50X and 100X Only ...................................................................40
2Focus ..................................................................................................................... 41
3Null ......................................................................................................................... 42
Nulling is Part Dependent...................................................................................... 42
Using the F-Stop ........................................................................................................ 43
Using the A-Stop ........................................................................................................ 44
Operational Hints........................................................................................................ 45
Perform Lateral Calibration.................................................................................... 45
Use System Error Files.......................................................................................... 45
Select the Right Objective ..................................................................................... 45
Using the 1X Michelson Objective......................................................................... 46
Using the Motorized Turret ....................................................................................47
Setting the Scan Length Control............................................................................ 48
Maintenance and Service.............................................................................................49
Maintaining the NewView ........................................................................................... 49
General Care.............................................................................................................. 49
Maintenance Schedule............................................................................................... 50
Spare Parts List.......................................................................................................... 50
Cleaning External Surfaces........................................................................................ 50
Cleaning the Electronics Enclosure Fan Filter ........................................................... 51
Cleaning Optics .......................................................................................................... 51
Precautions When Cleaning Optics ....................................................................... 51
Recommended Cleaning Materials........................................................................ 51
Recommended Cleaning Procedures.................................................................... 52
Lubricating the Motorized Parcentric Stage ............................................................... 52
Lubricating the Motorized Z Stage ............................................................................. 53
Lubricating the Motorized X/Y Stage.......................................................................... 54
Getting Service........................................................................................................... 55
Returning Equipment for Service ............................................................................... 55
Index...............................................................................................................................57

1
Introduction Chapter
1
Get familiar with safety concerns and your metrology instrument, plus learn about
the technology beneath the cover.
Safety Precautions
Failure to follow safety precautions could result in damage to personnel and the
instrument, and may void the warranty.
WARNINGS!
• Disconnect Power During Installation. Ensure that all power is off during
installation, when connecting cables, or when servicing equipment.
• Ground the Instrument. To minimize shock hazard, the equipment must be
properly connected to an electrical ground through the power outlet.
• Use Care When Moving Equipment. It is recommended that several
helpers work together when lifting or moving the instrument. Contact the
appropriate agencies in your country for proper lifting recommendations.
• Handle Objectives and Field Zoom Lenses With Care. The objectives
and field zoom lenses are delicate optical components and should not be
mishandled or dropped. Store objectives and field zoom lenses in supplied
storage containers.
• Do Not Crash Objectives. Do not crash the objective or optical profiler into
the test part or part stage. Use caution when focusing and driving the z-axis.
• Keep Fingers and Objects Away from Moving Turrets. Both the
motorized objective turret and the field zoom turret, if so equipped, are
software controlled. Keep hands, fingers, and other objects away from
moving components.
• Keep Fingers and Objects Away from Moving Stages. Motorized stages
move during alignment and measurement operations. Keep hands, fingers,
and other objects away from the part stage area. For emergencies press the
Joystick’s Emergency Stop button to stop all stage motion.
• Do Not Touch Optical Surfaces. Do not touch exposed glass surfaces on
the instrument or on the objectives or field zoom lenses. Touching optical
components will degrade the optical quality of the imaging system.
• Clean Optics Only When Necessary. Do not clean optical surfaces unless
necessary. Improper and unnecessary cleaning may damage optical coatings.

NEWVIEW 7200 & 7300
2
• Do Not Modify Equipment. Do not install substitute parts or perform any
unauthorized modification of the equipment.
Safety Labels
Failure to follow the safety labels on the equipment and the recommendations in
this manual could result in damage to personnel and the instrument, and may
void the warranty.
Label Meaning
General Hazard. Proceed with caution. Refer to the manual for
instructions.
Electrical Shock. Proceed with caution; there is a risk of electrical
shock.
Do not crash the objective or optical profiler into the test part or stage.
Use caution when focusing and driving the z-axis.
Disconnect power before performing the specified procedure.
Refer to the manual for complete instructions on performing a specified
procedure.
The NewView(1) Optical Profiler
The ZYGO NewView(1) optical profiler is a general purpose, three dimensional,
surface structure analyzer. It provides graphic images and high resolution
numerical analysis to accurately characterize the surface structure of test parts.
The NewView uses scanning white light interferometry to image and measure the
micro structure and topography of surfaces in three dimensions. A wide variety
of surfaces can be measured.
All NewView profilers come with a granite base, a stable gantry column, and
motorized focus control. Options include single or motorized three field zoom
lens turret, manual or motorized 6-position objective turret, and manual or
motorized part stages.
(1) U.S. patent numbers 4,948,253, 5,398,113, 5,402,234, 5,784,164, 5,953,124,
6,028,670, 6,597,460, 6,714,307, 6,775,006, and 6,882,745; U.S. and foreign patents
pending.

INTRODUCTION
3
Model Descriptions
Model Description
7200 Base optical profiler with a high resolution camera, manually
interchangeable single field zoom lens, filter tray, aperture stop, and a turret
compatible closed loop transducer.
7300 All the features of Model 7200 plus- an aperture stop, an enhanced
illuminator, a higher speed camera, and an automatic three-position field
zoom lens turret.
NewView Options
Option Description
Field
Zoom
Lens
High-quality discrete field zoom lenses provide superior image
magnification and are available in the following powers:
0.5X, 0.75X, 1.0X, 1.5X, and 2.0X.
NewView 7200 accepts a single field zoom lens; the lens can be
manually interchanged. NewView 7300 accepts up to three field
zoom lenses automatically selected via software.
Objective Interferometric infinite conjugate objectives provide sharp images of the
part under test. ZYGO offers standard and long working distance
objectives in magnifications ranging from 1X to 100X.
Objective
Mounting
●Single objective dovetail.
●Manual 6-position turret.
●Motorized 6-position turret.
Camera ●640 x 480 (VGA) high-resolution camera (standard).
●992 x 992 (1K) ultra-high resolution camera (option for NewView 7300).
Stages ●1-axis stage; Motorized Z (focus), Manual Tip/Tilt and X/Y.
●3-axis stage; Motorized Z (focus) and X/Y, Manual Tip/Tilt.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and X/Y.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and X/Theta.
●5-axis stage; Motorized Z (focus), Tip/Tilt, and Y/Theta.
The number of stage axes indicates the total number of
motorized axes in the configuration.
The motorized Z stage and motorized X/Y stages are also
available in a closed loop configuration.
Accessories are described in the NewView 7000 Accessory Guide,
OMP-0543.

NEWVIEW 7200 & 7300
4
NewView Components
Typical NewView System

INTRODUCTION
5
NewView Components (shown on previous page)
Component Description
Optical Profiler
(Sensor)
Provides three dimensional measurement data of the surface
under test. It is a scanning white light interferometric optical
profiler or sensor. Focus is performed by driving the sensor up or
down with the Z-axis motorized stage.
Interferometric
Objectives
Objectives gather light from the test part and form a real image of
it. The objective creates interference by dividing the light into two
paths; directing one to an internal reference surface and the other
to the test surface. Due to surface irregularities the measurement
wavefront travels different distances than the reference wavefront.
When the two wavefronts are recombined, the waves are out of
phase and form an interference pattern. This interference pattern
of light and dark bands is called “fringes”.
Part Stage Holds the part under test and provides for positioning under the
objective.
Electronics
Enclosure
Houses system electronics; it provides power to the NewView and
stages and interfaces to the computer.
Computer For system control, data storage, and running MetroPro software.
Worktable Nests against the vibration isolation table and holds the various
system components.
Vibration
Isolation Table
Isolates the optical profiler from environmental vibrations that
degrade measurements.
Monitor Displays MetroPro graphics and data. An on-screen live display is
used to display a live image of the part under test. It serves as
visual feedback when adjusting the interferometer focus and part
positioning.
Joystick Controls the motorized stages (including focus), z-stop settings,
and provides an emergency stop.
Keyboard and
Mouse
For data entry and software operation.
Power Manager Distributes power to the system components, provides surge
protection, and serves as the system disconnecting device.
Computer Components
For descriptions and specifications, refer to the manuals from the original
equipment manufacturer.

NEWVIEW 7200 & 7300
6
Principle of Operation
The NewView system uses scanning white light interferometry to image and
measure test part surfaces and provide surface structure analysis without
contacting the surface. Light from the optical profiler divides within the
interferometric objective; one portion reflects from the test surface and another
portion reflects from an internal, high quality reference surface in the objective.
Both portions are then directed onto a solid-state camera.
Interference between the two light wavefronts results in an image of light and
dark bands (called fringes) that indicate the surface structure of the part being
tested. The test part is scanned by vertically moving the objective with a
piezoelectric transducer (PZT). As the objective scans, a video system captures
intensities at each camera pixel. These intensities are converted into height maps
by MetroPro software. In addition, surface images are displayed on an on-screen
live display.
Measurements are three dimensional. Vertical measurements, normal to the
surface, are performed interferometrically. Lateral measurements, in the plane of
the surface, are performed by calculating the pixel size from the field of view of
the objective in use. Using these techniques the NewView analyzes and
quantifies the surface topography of parts. Results are displayed on a color
monitor as solid images, plots, and numeric representations of the surface.