Aerotech ANT95L Series User manual

Revision 2.00
ANT95L Series Single-Axis Linear Direct-Drive
Nanopositioning Stage
HARDWAREMANUAL

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available before you call.
This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2009-2021, Aerotech, Inc., All rights reserved.

Table of Contents
ANT95L Series Single-Axis Linear Direct-Drive Nanopositioning Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 20
2.4. Attaching the Payload to the Stage 22
Chapter 3: Electrical Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 28
3.3. Motor and Feedback Specifications 29
3.4. Limits, Marker, and Machine Direction 31
3.5. Motor and Feedback Phasing 32
Chapter 4: Maintenance 35
4.1. Service and Inspection Schedule 35
4.2. Cleaning and Lubrication 36
4.3. Troubleshooting 38
Appendix A: Warranty and Field Service 39
Appendix B: Revision History 41
Index 43
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List of Figures
Figure 1-1: GEN2 vs GEN1 Visual Comparison 11
Figure 2-1: Shipping Brackets 15
Figure 2-2: ANT95L-025 Dimensions 16
Figure 2-3: ANT95L-025 Mounting Plate Dimensions 16
Figure 2-4: ANT95L-050 Dimensions 17
Figure 2-5: ANT95L-050 Mounting Plate Dimensions 17
Figure 2-6: ANT95L-075 Dimensions 18
Figure 2-7: ANT95L-075 Mounting Plate Dimensions 18
Figure 2-8: ANT95L-100 Dimensions 19
Figure 2-9: ANT95L-100 Mounting Plate Dimensions 19
Figure 2-10: Mounting Hole Pattern 21
Figure 2-11: Load Orientations 23
Figure 2-12: Cantilevered Load Capabilities 23
Figure 3-1: ANT95LMotor and Feedback Wiring 28
Figure 3-2: Machine Direction 31
Figure 3-3: Hall Phasing Diagram 32
Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) 33
Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) 33
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List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 12
Table 1-3: ANT95L Series Specifications 13
Table 2-1: Stage Mounting Surface Flatness Requirement 20
Table 2-2: Stage to Mounting Surface Hardware 20
Table 2-3: Payload to Stage Surface Hardware 22
Table 3-1: 25-Pin Motor and Feedback Connector Pinout 27
Table 3-2: 25-Pin Mating Connector Part Numbers 27
Table 3-3: Hall-Effect Sensor Specifications 29
Table 3-4: Thermistor Specifications 29
Table 3-5: Encoder Specifications 29
Table 3-6: Limit Switch Specifications 29
Table 3-7: ANT95L Motor Specifications 30
Table 3-8: Encoder Resolution 30
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lRestrict access to the stage when it is connected to a power source.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lUncouple or otherwise prevent motor-coupled machinery movement when you do
service to the equipment.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lThe drive must contain a properly-sized fuse, matched to the motor cable wire size.
lSupply each operator with the necessary protection from live electrical circuits.
DANGER: Hot surfaces. The case temperature could exceed 70°C.
lDo not touch the motor while it is in operation.
lWait until the motor has cooled before you touch it.
DANGER: The motor is not rated for use in explosive atmospheres. Do not operate the
motor in the presence of potentially explosive mixtures of air-borne dust or
combustible vapors.
IMPORTANT: Equipment grounds must be in place and maintained to reduce the risk
of serious or potentially fatal injury from electric shock.
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DANGER: Strong Magnets / Electromagnetic Fields
lMotors and their associated drive, cables, and components are sources of elec-
tromagnetic fields. Persons with implanted medical devices need to evaluate the
risks associated with these devices before they can enter an area where the devices
are in use.
lStrong rare-earth magnets are present in the motor. Interaction with metallic objects
(tools, watches, or keys, for example) could produce pinch injuries or damage to the
equipment.
lUse non-magnetic tools when you do service to the motor.
DANGER: System travel can cause crush, shear, or pinch injuries. Restrict access to all
motor and stage parts while your system is connected to a power source.
lDo not put yourself in the travel path of machinery.
lMotors are capable of very high speeds and acceleration rates.
WARNING: To decrease the risk of damage to the equipment, you must obey the
precautions that follow
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lUse care when you move the ANT95L or you could negatively affect the performance
of it.
WARNING: Securely mount and position all system cables.
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT95L Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 8/6/2021
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