FormFactor MS Series User manual

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User Guide
Micropositioners
MS Series
PN 108-206, Revision F, August 13, 2018

User Guide
Micropositioners
MS Series
PN 108-206, Revision F, August 13, 2018

© Copyright 2018 FormFactor, Inc. All rights reserved. No part of this document may be reproduced, transmitted or displayed in any form or
by any means except as duly authorized by FormFactor, Inc. FormFactor and the FormFactor logo are trademarks of FormFactor, Inc. All
other trademarks are the property of their respective owners.
Important Notice
While the information contained herein is believed to be accurate as of the date hereof, no express or implied representations or warranties
are made with respect to its accuracy or completeness. FormFactor, Inc., and its subsidiaries disclaim liability for any inaccuracies or
omissions. All information is subject to change without notice.
Users are required to read and follow carefully all safety, compliance and use instructions. Users assume all loss and liability arising from the
use of products in any manner not expressly authorized. The conditions and methods of use of products and information referred to herein
are the entire responsibility of the user and, to the maximum extent permitted by applicable law, FormFactor, Inc., and its subsidiaries shall
not be liable for any damages, losses, costs or expenses arising out of, or related to, the use thereof.
No license, express or implied, by estoppel or otherwise, under any intellectual property right is granted in connection herewith. Users shall
take all actions required to avoid intellectual property infringement.

Contents • i
Contents
Contents .......................................................................................................................................i
Before You Begin ........................................................................................................................iii
About This Guide ........................................................................................................................... iii
Notational Conventions................................................................................................................. iii
For More Information.................................................................................................................... iii
Chapter 1: Overview .....................................................................................................................1
Micropositioner Overview.............................................................................................................. 1
Features .................................................................................................................................1
Requirements ........................................................................................................................1
Safety .....................................................................................................................................1
Returning a Micropositioner for Service ........................................................................................ 1
RMA Number .........................................................................................................................1
Repacking ..............................................................................................................................2
Chapter 2: ERJ-02 Joystick .............................................................................................................3
Controls .......................................................................................................................................... 3
Operation ....................................................................................................................................... 4
Initializing Channels ...............................................................................................................4
Activating a Channel ..............................................................................................................4
Selecting Axis (X, Y, Z, Theta) .................................................................................................5
Set Contact Location ..............................................................................................................5
Set Separate Location ............................................................................................................5
Set Increment Distance .........................................................................................................6
Move in Increments (Die Stepping) .......................................................................................6
Chapter 3: MAC-Series Mounts .....................................................................................................7
MAC-02 Magnetic-Mount............................................................................................................... 7
MAC-02 Mount Dimensions ..................................................................................................8
MAC-05 Bolt-Down Mount............................................................................................................. 9
MAC-05 Mount Dimensions ................................................................................................10
MAC-22 Vacuum Mount............................................................................................................... 10
MAC-22 Vacuum Base Dimensions ......................................................................................11
Planarizing .................................................................................................................................... 11
Planarizing the Y-Axis ...........................................................................................................12
Planarizing the X-Axis ..........................................................................................................13
Chapter 4: Slide Mount for Summit 12K ......................................................................................15
Installing the Slide Mount ............................................................................................................ 15
Positioner Configurations ....................................................................................................15
Rail and Single Positioner ..........................................................................................15

ii • MS Series Micropositioners
Rail and Double Positioners ...................................................................................... 15
Installing the Rails ............................................................................................................... 16
North-South Positioner ............................................................................................. 17
East-West Positioner ................................................................................................. 17
Initializing the Positioners............................................................................................................ 17
Appendix A: Topic A ................................................................................................................... 19
Micropositioner Specifications .................................................................................................... 19
Micropositioner Dimensions........................................................................................................ 19
Axis Directions.............................................................................................................................. 20
Connector Pin Assignments ......................................................................................................... 20
Right-Hand MS1 and MS2 Pin Assignments ........................................................................ 20
Left-Hand MS1 and MS2 Pin Assignments .......................................................................... 21
Index ......................................................................................................................................... 23

Before You Begin • iii
Before You Begin
About This Guide
Welcome to the MS Series Micropositioners User Guide. This guide contains information
about micropositioner mounts and planarization.
Notational Conventions
This manual uses the following conventions:
NOTE
Note is used to indicate important information about the product that is not hazard related.
CAUTION
Caution is used to indicate the presence of a hazard which will or can cause minor personal
injury or property damage if the warning is ignored.
WARNING
Warning is used to indicate the presence of a hazard which can cause substantial personal
injury or property damage if the warning is ignored.
DANGER
Danger is used to indicate the presence of a hazard which will cause severe personal injury,
death or substantial property damage if the warning is ignored.
For More Information
More information may be available from these sources:
• Your probe station user guide
• Release Notes
• FormFactor’s website at www.formfactor.com.
• If you purchased your FormFactor product from a third-party vendor, you can contact that
vendor for service and support.
i
!
!
STOP

iv • MS Series Micropositioners

Overview • 1
Chapter
1Overview
Micropositioner Overview
Features
• Three axes of linear motion are available, with either 25.4 mm or 50.8 mm (1-inch or
2-inches) of travel.
• High-resolution, true linear motion provides ultra precise probe-tip placement (0.1 micron
step size).
• Small positioner size allows up to (6) micropositioners to be fitted to a 203 mm (8-inch)
station.
• Positioners can be operated manually, or through the use of the ERJ-02 joystick or the
probe system software.
• Both right- and left-handed models are available.
• Positioners are D.C.-, active-, coaxial-, or triaxial-probe compatible for capturing low level
and high frequency measurements.
• Mounts for most probes, grippers, and cutters are available.
• An an IEEE interface is also available.
Requirements
MS-Series micropositioners require the following:
• An ECX-56 expansion box (or equivalent)
• An ECA-53 expansion drive card (one card is required by each micropositioner)
Safety
The information in this guide facilitates the safe and effective operation of equipment. Any
deviation from the recommended procedures, modification to or use of the equipment for a
purpose for which it is not designed may create a hazardous operating situation. FormFactor,
Inc., disclaims any responsibility for consequences resulting from any such deviation,
modification, or application.
Returning a Micropositioner for Service
RMA Number
Before shipping a probe station to FormFactor, obtain a Return Material Authorization number
(RMA #). Contact the nearest FormFactor sales office, or in the U.S. call customer service at
[phone] or [phone].