Agilent Technologies FRG-700 User manual

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Contents
Product Identification 5
Validity 5
Intended Use 6
Functional Principle 6
1Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 7
1.4 Liability and Warranty 9
2Technical Data 10
3Installation 17
3.1 Vacuum Connection 177
3.2 Power Connection 18
4Operation 233
4.1 Gas Type Dependence 233
4.2 Ignition Delay 23
4.3 Adjusting the Gauge 244
5Deinstallation 277
6Maintenance, Troubleshooting 288
7Returning the Product 299
8Disposal 30
9Literature 31
For cross-references within this document, the symbol (XY) is used,
for cross-references to further documents, listed under literature, the
symbol ([Z]).

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Product Identification
In all communications with Agilent, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V Hz VA
Made in Liechtenstein
Agilent Technologies
Validity
This document applies to products with the following part num-
bers:
FRG-700 (FPM sealed)
FRG-702 (all-metal)
FRG700KF25 (DN 25 ISO-KF)
FRG702KF25 (DN 25 ISO-KF)
FRG700CF35 (DN 40 CF-F)
FRG702KF40 (DN 40 ISO-KF)
FRG702CF35 (DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with part number
FRG700KF25. They apply to the other products by analogy.
Wereserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702
have been designed for vacuum measurement of gases in the
pressure range of 5×10-9 …1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauges can be operated in connection with an Agilent
AGC-100 Vacuum Gauge Controller, an Agilent Turbo AG Rack
Controller, or with another controller.
Functional Principle
The gauges consist of two separate measurement systems
(Pirani and cold cathode system) the signals of which are
combined in such a way that one measurement signal is output.
The Pirani measurement circuit is always on.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between the
magnet and the heart pacemaker or prevent the
influence of strong magnetic fields by antimagnetic
shielding.
Communicate the safety instructions to all other users.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1.4 Liability and Warranty
Agilent assumes no liability and the warranty becomes null and
void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.)
on the product
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals, filament), are not covered by the
warranty.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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2 Technical Data
Measuring range (air, N2)
5×10-9 …1000 mbar
Accuracy
±30% (in the range
1×10-8 …100 mbar)
Repeatability
±5% (in the range
1×10-8 …100 mbar)
Output signal (measuring signal)
Voltage range
0 …+10.5 V
Measurement range
1.82 …8.6 V
Voltage vs. pressure
logarithmic , 0.6 V/decade
Error signal
<0.5 V no supply
>9.5 V Pirani sensor de-
fective (filament rupture)
Output impedance
2×10 
Minimum loaded impedance
10 k, short-circuit proof
Response time
p > 10-6 mbar
(pressure dependent)
<10 ms
p = 10-8 mbar
1000 ms
Identification gauge
85 k, referenced to
supply common
Status
pin 6
p > 10-2 mbar
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode ignited
Combined Pirani / cold
cathode mode
High = 15 …30 VDC
LED
High voltage on (LED on)

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused 1).
Voltage at the gauge
15 …30 VDC
(ripple 1 Vpp)
Power consumption
2 W
Fuse 1)
1 AT
Voltage at the supply unit with
maximum cable length
16 …30 VDC
(ripple 1 Vpp) 2)
Adjustment
Potentiometer <HV>
Potentiometer <ATM>
adjustment under 10-4 mbar
adjustment at atmospheric
pressure
Electrical connection
FCC68 socket, 8-pin
Sensor cable
8-pin, shielded
Line length
50 m (80.14 mm²)
Operating voltage
3.3 kV
Operating current
500 µA
Grounding concept
"Electrical Connection"
Vacuum connection –measuring
common
connected via 10 k(max.
voltage differential with
respect to safety ±50 V
accuracy ±10 V)
Supply common –signal common
conducted separately
1
)Agilent controllers fulfill this requirement.
2
)The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

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Materials on the vacuum side
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seal
FRG-700
FRG-702
Anode
Ignition aid
Pirani measurement tube
Pirani filament
stainless steel
stainless steel
ceramic
FPM 75
Ag, Cu, soft solder (Sn, Ag)
Mo
stainless steel
Ni, Au
W
Internal volume
20 cm³
Pressure
10 bar (absolute),
limited to inert gases
Temperatures
Operation
FRG-700
FRG-702
Bakeout
Pirani filament
Storage
+5 …+55 °C
+5 …+150 °C 3)
150 °C (without electronics
and magnetic shielding)
120 C
-40 …+65 °C
Relative humidity
80% at temperatures
+31°C decreasing to 50%
at +40°C
Mounting orientation
any
Use
indoors only, altitude up to
2000 m
Degree of protection
IP 40
3
)Up to 150 °C at the flange if mounted horizontally; without
magnetic shielding.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Dimensions [mm]
18
DN 25 ISO-KF
18.5
DN 40 ISO-KF
DN 40 CF-F
24
105
32 55
60
75
15.5
ø 63.5
92
ø 63.5
28 55
60
75

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Weight
FRG700KF25
FRG700CF35
700 g
980 g
FRG702KF25
FRG702KF40
FRG702CF35
730 g
750 g
1010 g
Measuring Signal vs. Pressure
Pressure p
1E+04
1E+02
1E+00
U [V]
0.00.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
1E–02
1E–04
1E–06
1E–08
sensor error
underrange
overrange
sensor error
Pa
mbar
torr
p = 101.667U-d
Measurement signal U [V]
p = 101.667×U-d

U = c + 0.6log10 p
mbar
Pa
Torr
d
11.33
9.33
11.46
c
6.8
5.6
6.875
valid in the range 5×10-9 mbar <p< 1000 mbar
3.8×10-9 Torr <p< 750 Torr
5×10-7 Pa <p< 1×105Pa

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Gas Type Dependence
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
p (mbar)
peff (mbar)
10–3 24 6 10–2 24 6 10–1 24 6 10024 6 10124 6 102
H2He Ne
Xe
Ar
Freon 12
Water
vapor
Air
O2
CO
N2
Kr
Indication range
>10-2 mbar)
CO2

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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p (mbar)
6
4
2
6
4
2
6
4
2
10–4
8
6
4
2He
Ar
Air
N2
O2
CO
10–5
8
6
4
2
10–6
10–3
8
10–2
8
10–1
8
Indication range
10-6 ... 10-1 mbar
peff (mbar)
10-6 2 4 6 10-6 2 4 6 10–4 2 4 6 10-3 2 4 6 10-2 2 4 6 10-1
In the range below 10-5 mbar, the pressure indication is linear.
For gases other than air, the pressure can be determined by
means of a simple conversion formula:
peff = K × pressure reading
Where
Gas type
K (mean values)
Air (O2, CO, N2)
Xe
Kr
Ar
H2
Ne
He
1.0
0.4
0.5
0.8
2.4
4.1
5.9

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3 Installation
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
CF flanges fulfill this requirement.
For gauges with a KF flange, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental
effects on the electronics of the product.
Before performing any tightness tests put the pro-
duct out of operation and remove the electronics
unit.
The gauge may be mounted in any orientation. To keep
condensates and particles from getting into the measur-
ing chamber preferably choose a horizontal to upright
position and possibly use a seal with a centering ring
and filter.
If adjustment should be possible after the gauge has
been installed, be sure to install it so that potentiometers
<HV> and <ATM> can be accessed with a screwdriver
("Adjusting the Gauge").

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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When making a CF flange connection, it can be ad-
vantageous to temporarily remove the electronics and
the magnet unit.
Hex. socket
AF 1.5
AF 7
Protective lid
Keep the protective lid.