Agilent Technologies FRG-700 User manual

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Contents
Product Identification 5
Validity 5
Intended Use 6
Functional Principle 6
1Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 7
1.4 Liability and Warranty 9
2Technical Data 10
3Installation 17
3.1 Vacuum Connection 177
3.2 Power Connection 18
4Operation 233
4.1 Gas Type Dependence 233
4.2 Ignition Delay 23
4.3 Adjusting the Gauge 244
5Deinstallation 277
6Maintenance, Troubleshooting 288
7Returning the Product 299
8Disposal 30
9Literature 31
For cross-references within this document, the symbol (XY) is used,
for cross-references to further documents, listed under literature, the
symbol ([Z]).

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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Product Identification
In all communications with Agilent, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V Hz VA
Made in Liechtenstein
Agilent Technologies
Validity
This document applies to products with the following part num-
bers:
FRG-700 (FPM sealed)
FRG-702 (all-metal)
FRG700KF25 (DN 25 ISO-KF)
FRG702KF25 (DN 25 ISO-KF)
FRG700CF35 (DN 40 CF-F)
FRG702KF40 (DN 40 ISO-KF)
FRG702CF35 (DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with part number
FRG700KF25. They apply to the other products by analogy.
Wereserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Inverted Magnetron Pirani Gauges FRG-700 and FRG-702
have been designed for vacuum measurement of gases in the
pressure range of 5×10-9 …1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauges can be operated in connection with an Agilent
AGC-100 Vacuum Gauge Controller, an Agilent Turbo AG Rack
Controller, or with another controller.
Functional Principle
The gauges consist of two separate measurement systems
(Pirani and cold cathode system) the signals of which are
combined in such a way that one measurement signal is output.
The Pirani measurement circuit is always on.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between the
magnet and the heart pacemaker or prevent the
influence of strong magnetic fields by antimagnetic
shielding.
Communicate the safety instructions to all other users.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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1.4 Liability and Warranty
Agilent assumes no liability and the warranty becomes null and
void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.)
on the product
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals, filament), are not covered by the
warranty.

Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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2 Technical Data
Measuring range (air, N2)
5×10-9 …1000 mbar
Accuracy
±30% (in the range
1×10-8 …100 mbar)
Repeatability
±5% (in the range
1×10-8 …100 mbar)
Output signal (measuring signal)
Voltage range
0 …+10.5 V
Measurement range
1.82 …8.6 V
Voltage vs. pressure
logarithmic , 0.6 V/decade
Error signal
<0.5 V no supply
>9.5 V Pirani sensor de-
fective (filament rupture)
Output impedance
2×10 
Minimum loaded impedance
10 k, short-circuit proof
Response time
p > 10-6 mbar
(pressure dependent)
<10 ms
p = 10-8 mbar
1000 ms
Identification gauge
85 k, referenced to
supply common
Status
pin 6
p > 10-2 mbar
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode ignited
Combined Pirani / cold
cathode mode
High = 15 …30 VDC
LED
High voltage on (LED on)