AIXTRON CRIUS II User guide
CONFIDENTIAL
CRIUS II
System Manual
Edition 06/2010
crius_II_en_00, Edition 06/2010
Imprint System Manual
CRIUS II
0
2CONFIDENTIAL AIXTRON - Dokumentation
Publisher AIXTRON AG
Kaiserstr. 98
D-52134 Herzogenrath
GERMANY
Technical Support Please contact your local AIXTRON subsidiary
Technical Support Line (emergency only): +49 (241) 8909 - 999
Editors Isartext GmbH, 81367 Munich, Germany
Language Original language: German
English translation: Isartext GmbH
Copyright © AIXTRON AG 2010. All rights reserved.
The legal end user of the AIXTRON CRIUS II may reproduce this document
for use with his CRIUS II only. For safety reasons complete copies must be
made. Any other reproduction without written permission by AIXTRON is for-
bidden.
The system software may be used for theCRIUS II only. It is strictly forbidden
to make copies or give the software to third parties.
The use of trademarks, brand names etc. in this document does not entitle
third parties to consider these names to be unprotected.
Subject to changes without notice.
Phone: +49 (241) 8909 - 0
Fax: +49 (241) 8909 - 677
E-mail: [email protected]
Website: www.aixtron.com
0
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System Manual Chapter overview
CRIUS II
AIXTRON - Dokumentation CONFIDENTIAL 3
Chapter overview
Use, data
Intended use. User qualifications. Technical data. 5
Safety
Regulations. Danger areas. Safety circuit. LOTO. 17
Description
Process technology. System overview. Components. 55
Installation
Transport. Assembly. Initial commissioning. 99
Operation
Operating elements. Switching on/off. Production. 109
Maintenance
Maintenance schedule. Maintenance work. 131
Storage, disposal
Deactivating. Storage. Disposal. 183
Appendix
Glossary. Tables and lists. Forms. 189
Index
Alphabetically sorted index. 193
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System Manual Use, data
CRIUS II
1Use,data
1Use,data
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.1 Validity of this System Manual . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.2 Intended use of the CRIUS II . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.3 Other uses and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.4 Use of this System Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1.5 Worldwide AIXTRON service centers. . . . . . . . . . . . . . . . . . . . 7
1.2 User qualifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3 Training . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.4 System identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4.1 Type label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Dimensions and weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5.1 Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5.2 Weight. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.6 Installation data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.1 Amperes interrupting capacity (AIC). . . . . . . . . . . . . . . . . . . . 13
1.6.2 Environmental conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.3 Pneumatic supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.4 Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.7 Conformance statement. . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
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6CONFIDENTIAL AIXTRON - Dokumentation
Use, data System Manual
Introduction CRIUS II
1
1.1 Introduction
1.1.1 Validity of this System Manual
Document identification: System Manual, crius_II_en_00, Edition 06/2010
This System Manual describes the CRIUS II.
You find the project number on the type label of your system.
This System Manual may show or describe components which are not part of
the AIXTRON scope of delivery. Such information is intended for better under-
standing. However, AIXTRON excludes any liability for such components and
the corresponding information.
1.1.2 Intended use of the CRIUS II
The CRIUS II is intended for epitaxial deposition of materials on wafers using
CVD technology. (CVD = chemical vapor deposition).
To guarantee that the system is run in accordance with the binding stipula-
tions, you must:
• Be qualified for working with the CRIUS II
• Read and observe the information contained in this System Manual
• Adhere to the technical data
• Perform maintenance work punctually
1.1.3 Other uses and applications
Written permission from AIXTRON AG (AIXTRON) is required for uses other
than those stipulated above. Any use beyond the applications described
above will be regarded as not conforming to provisions. AIXTRON declines all
liability for damages which occur when stipulations are disregarded.
AIXTRON - Dokumentation CONFIDENTIAL 7
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System Manual Use, data
CRIUS II Introduction
1.1.4 Use of this System Manual
This System Manual contains the information required to ensure that the
CRIUS II is used correctly. The System Manual is consideredto be anintegral
part of the CRIUS II. It must always be at hand near the CRIUS II.
The System Manual describes all stages of the serviceable life of the
CRIUS II: Transport, installation, initial commissioning, operation, mainte-
nance (preventive work), service (corrective work, repair), storage, disposal.
Check the table of contents to locate the relevant chapter.
AIXTRON delivers user documentation along with the product. Documents
can be re-ordered:
Contact us if you have queries about the contents of the documentation or if
you wish to give us feedback.
1.1.5 Worldwide AIXTRON service centers
For contact addresses of the worldwide AIXTRON service centers, please
refer to:
www.aixtron.com
NOTE:
Read Chapter 2 Safety, 17 prior to any work at the CRIUS II! It contains
important information for your own personal safety. This chapter must
have been read and understood by all persons who work at the CRIUS II
during any stage of its serviceable life.
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Use, data System Manual
User qualifications CRIUS II
1
1.2 User qualifications
Access rights The end user assigns access rights to his personnel according to their level of
training, knowledge, experience and responsibility.
The following four access levels are defined for the CRIUS II by default.
• Viewer
•Operator
• Technician
• Supervisor
For more information refer to the AIXACT software manual.
AIXTRON - Dokumentation CONFIDENTIAL 9
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System Manual Use, data
CRIUS II Training
1.3 Training
This document is intended for technically qualified personnel who have suc-
cessfully passed appropriate training for their access right on the CRIUS II.
This training must have been performed or authorized by AIXTRON. Only
appropriatelytrainedpersonnelcancorrectlyimplementthesafetyregulations
contained in this document.
Personnel without this training are considered as unauthorized. Unauthorized
personnel are not permitted to work on the CRIUS II. AIXTRON declines all lia-
bility for damages which occur when stipulations are disregarded.
AIXTRON offers standard and user-tailored training for AIXTRON products.
The training team will be pleased to provide you with further information.
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Use, data System Manual
System identification CRIUS II
1
1.4 System identification
1.4.1 Type label
The type labels identify the specific system and includes details of any cus-
tomer-specific adaptations.
State all details shown on the type label when you contact AIXTRON. When-
ever possible, also state the displayed software sequence step when you
make diagnosis inquiries in the event of disturbances. This ensures fast and
optimum support.
The following type labels are attached to the CRIUS II:
• System type label
Details of the system
• Heater type label
Details of the heater
Fig. 1-1, 10 and Fig. 1-2, 10 show the type labels.
Fig. 1-1 System type label
Fig. 1-2 Heater type label
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System Manual Use, data
CRIUS II Dimensions and weight
1.5 Dimensions and weight
1.5.1 Dimensions
Fig. 1-3 Dimensions of the CRIUS II [mm]; Side view and top view
A Gas mixing cabinet
B Reactor cabinet
C Heater power supply unit
D Heat exchanger
E Transformer
NOTE:
The technical data stated here may differ from the information in the
installation plan. If this is the case, the data contained in the installation
plan are binding.
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Use, data System Manual
Dimensions and weight CRIUS II
1
1.5.2 Weight
Tab. 1-1 Weight
Component Weight [kg]
Gas mixing cabinet Approx. 2800 kg
Reactor cabinet Approx. 3800 kg
Heater power supply unit Approx. 900 kg
Transformer Approx. 280 kg
Heat exchanger Approx. 171 kg
AIXTRON - Dokumentation CONFIDENTIAL 13
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System Manual Use, data
CRIUS II Installation data
1.6 Installation data
For installation data refer to the installation plan.
1.6.1 Amperes interrupting capacity (AIC)
The main switch of the CRIUS II can break a fault current of 35 kA.
1.6.2 Environmental conditions
The CRIUS II is for use within a clean room environment, at an operating tem-
perature of approx. 25 °C and a relative humidity of approx. 60 % (not higher
than 80 %).
Tab. 1-2 Environmental conditions
1.6.3 Pneumatic supply
Thepneumaticsupplyisrecommendedtobea lowpurityN2supply,toprevent
any oxygen entering the hydrogen lines in the unlikely event of a valve leaking
its pneumatic feed over the valve stem.
NOTE:
The technical data stated here may differ from the information in the
installation plan. If this is the case, the data contained in the installation
plan are binding.
Amperes interrupting capacity 35 kA
Storage During operation
Temperature 10…50 °C 15…25 °C
Relative humidity 30…80 %
(non-condensing) 45…80 %
(non-condensing)
NOTE:
Prevent condensation! The temperature of the pneumatic supply must
exceed the dew point of the ambient air by at least 2 °C. See Fig. 1-4,
14.
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Use, data System Manual
Installation data CRIUS II
1
1.6.4 Cooling water
Dew point diagram
Fig. 1-4 Dew point diagram
T1Room temperature
T2Minimum cooling water temperature
rH Relative humidity
NOTE:
Prevent condensation! The temperature of the cooling water must
exceed the dew point of the ambient air by at least 2 °C. See Fig. 1-4,
14.
10 15 20 25 30 35 40
20
25
30
35
40
45
50
55
60
65
100 %
90 %
80 %
70 %
60 %
50 %
40 %
30 %
20 %10 %
T [°C]
1
T [°C]
2
rH
AIXTRON - Dokumentation CONFIDENTIAL 15
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System Manual Use, data
CRIUS II Installation data
Cooling water quality
The following table lists the requirements for cooling water flowing through cir-
cuits with and without aluminum components.
Tab. 1-3 Water quality
*) cfu = colony forming units
NOTE:
Treat the cooling water with biocide to avoid excessive microbiological
concentration.
Circuit with Al components Circuit without Al compo-
nents
pH 7.5 … 8.0 7.0 … 8.0
German hardness < 7.5 °dH < 7.5 °dH
US hardness < 0.05 ppm < 0.05 ppm
Total dissolved solids 1…2 ppm 10 ppm
Oil content < 1 ppm < 1 ppm
Micro biologicals < 102cfu *) < 102cfu *)
Conductivity at 25 °C 2…25 µS/cm < 110 µS/cm
Resistivity at 25 °C 40…500 kΩcm
Concentration of inorganic ions
Chloride < 0.5 ppm < 10 ppm
Sulfate < 20 ppm < 25 ppm
Nitrate < 0.1 ppm
Cyanide < 12 ppm
Sodium < 0.5 ppm < 0.3 ppm
Calcium 0.6 ppm 0.6 ppm
Magnesium 0.1 ppm 0.1 ppm
Potassium 0.3 ppm 0.3 ppm
Silicate < 0.1 ppm < 1.0 ppm
Copper < 30 ppb
Aluminum < 1 ppm
Ammonia < 1.7 ×10-3 ppm
Oxygen < 20 ppm
Ozone < 0.1 ppm
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Use, data System Manual
Conformance statement CRIUS II
1
1.7 Conformance statement
Fig. 1-5, 16 shows an example of the EC declarartion of conformity for
machines.
Fig. 1-5 EC declaration of conformity (example)
AIXTRON
EC Declaration of Conformity for Machines
(according to the Directive for Machines 2006/42/EC, Annex II, sub. A)
Aixtron AG
Kaiserstr.98
D- 52134 Herzogenrath
DIN EN ISO 9001:2000 certified
hereby declares that the design of the system
Type: AIX …
Serial No.: 1001…
corresponds in its delivered type to the following relevant regulations:
EC-Directive for Machines 2006/42/EC
EC-EMC (Electro Magnetic Compatibility) Directive 2004/108/EC
EC-Low Voltage Directive 2006/95/EC
Applied harmonized and national standards as well as technical specifications:
EN 1037
EN 13850
EN 14121-1
EN 60204-1
EN 12100-1
EN 12100-2
EN 61000 -6-1
EN 55011
Aachen, 2010-02-26
Dr. Bernd Schulte
Executive Vice President, COO
Johannes Käppeler
Vice President Technology
Adresse: Aachen, Deutschland
Bevollmächtigter für die technischen Unterlagen
This declaration does not contain a gratification for properties. Please follow the safety guidelines of
the delivered product documentation. In case of non-agreed modifications of the product without the
consent of AIXTRON this declaration loses its validity.
T-E-Documentation Revision: 1.9 01/10
AIXTRON - Dokumentation CONFIDENTIAL 17
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System Manual Safety
CRIUS II
2 Safety
2 Safety
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.1 Compulsory reading material!. . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.2 Residual dangers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.3 Responsibilities regarding safety . . . . . . . . . . . . . . . . . . . . . . 18
2.2 General safety regulations for the end user . . . . . . . . . . . 19
2.2.1 Personnel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.2.2 System documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.2.3 Transport, installation and commissioning . . . . . . . . . . . . . . . 20
2.2.4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.2.5 Maintenance and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.2.6 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2.3 Hazard alerts in this System Manual . . . . . . . . . . . . . . . . . 23
2.4 Danger areas for operating personnel . . . . . . . . . . . . . . . . 24
2.5 Danger areas for maintenance and service personnel. . . 25
2.5.1 Dangers originating from electric power . . . . . . . . . . . . . . . . . 25
2.5.2 Dangers originating from mechanical energy . . . . . . . . . . . . . 27
2.5.3 Dangers originating from hazardous gases . . . . . . . . . . . . . . 28
2.6 Safety circuits. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
2.6.1 EMERGENCY-OFF button. . . . . . . . . . . . . . . . . . . . . . . . . . . 31
2.6.2 PROCESS-STOP button . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
2.6.3 Door locks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
2.7 Lockout/tagout procedure . . . . . . . . . . . . . . . . . . . . . . . . . . 38
2.7.1 Applying lockout/tagout devices . . . . . . . . . . . . . . . . . . . . . . . 38
2.7.2 What to do if a device cannot be locked. . . . . . . . . . . . . . . . . 41
2.7.3 Removing lockout/tagout devices. . . . . . . . . . . . . . . . . . . . . . 41
2.8 Personal protective equipment (PPE). . . . . . . . . . . . . . . . . 42
2.9 Fire risk report . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.10 Gas sensing equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.11 Unintended releases. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
2.12 Safety labels on the CRIUS II. . . . . . . . . . . . . . . . . . . . . . . . 46
2.12.1 Hazardous materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
2.12.2 Hazardous voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
2.12.3 Hot surface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
2.12.4 Pinch points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
2.12.5 Safety instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
2.13 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
2.13.1 Material Safety Data Sheets (MSDS) . . . . . . . . . . . . . . . . . . . 54
2.13.2 Electromagnetic compatibility. . . . . . . . . . . . . . . . . . . . . . . . . 54
2.13.3 Emission of gases and chemical substances . . . . . . . . . . . . . 54
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Safety System Manual
Introduction CRIUS II
2
2.1 Introduction
2.1.1 Compulsory reading material!
2.1.2 Residual dangers
The CRIUS II is constructed according to the most recent state of the art tech-
nology and to the officially approved safety regulations. The equipment has
been subjected to a meticulous safety check and a safety acceptance test.
However it is impossible to rule out the possibility of residual dangers during
operation. Hazards exist:
• For personal safety of the operator
• For the CRIUS II and other property
For this reason, all work carried out in conjunction with the CRIUS II must be
performed by trained personnel only and in accordance with this System Man-
ual. The technical data must be observed on principle.
2.1.3 Responsibilities regarding safety
AIXTRON scope of responsibility
AIXTRON is responsible for the safety of the CRIUS II.
End user scope of responsibility
The end user is responsible for safety in the workspace around the CRIUS II.
The end user is also responsible for making sure that all safety regulations
pertaining to work at the CRIUS II are adhered to.
NOTE:
Read this chapter prior to any work at the CRIUS II! It contains important
information for your own personal safety. This chapter must have been
read and understood by all persons who work at the CRIUS II during any
stage of its serviceable life.
AIXTRON - Dokumentation CONFIDENTIAL 19
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System Manual Safety
CRIUS II General safety regulations for the end user
2.2 General safety regulations for the end user
2.2.1 Personnel
All personnel who work at the CRIUS II must have the required technical qual-
ificationsandhave receivedappropriateinstructionandtraining.Theymust be
informed about all dangers and risks in conjunction with this system.
Unauthorized persons are not allowed access to the CRIUS II.
2.2.2 System documentation
The system documentation consists of the System Manual, the basic docu-
mentation, the electrical documentation and the OEM manuals.
Reading and under-
standing The enduser must ensure that eachperson who works at the CRIUS II during
any stage of its serviceable life has read and understood the relevant parts of
the system documentation.
Basic documen-
tation, electrical
documentation
The basic documentation (e.g. installation plan) and the electrical documenta-
tion are customer specific and are an integral part of the system documenta-
tion.
OEM manuals OEM manuals (OEM = original equipment manufacturer) will contain safety-
relevant information and are an integral part of the system documentation.
Safekeeping The system documentation is delivered with the CRIUS II and is an integral
part of the product. The system documentation must always be at hand near
the CRIUS II.
Completeness Always use a complete and original version of the system documentation!
Sections in the documents may contain cross-references to other sections
which, in turn, include important information. Incomplete copies of the system
documentation cannot convey all the necessary information.
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Safety System Manual
General safety regulations for the end user CRIUS II
2
2.2.3 Transport, installation and commissioning
Transport,installation and commissioning of theCRIUS II may only be carried
out when technically qualified and authorized AIXTRON personnel supervise
the work.
Supply connections The end user provides the connections to supply the CRIUS II with electric
power, gases, compressed air, water, etc. in the required capacity and quality.
Supply lines for these media must be laid at an adequate distance to each
other. The lines must be protected against all kinds of mechanical damage or
stress. Lines on the floor must be covered properly to prevent the risk of trip-
ping.
Exhaust gases The end user must take appropriate measures to ensure a safe removal and
eco-friendly disposal of the exhaust gases.
Safety labels Safety labels must be used to notify personnel of residual dangers. The safety
labels must be mounted in the CRIUS II production area at all necessary loca-
tions.
Acceptance check Subsequent to initial commissioning, the end user is responsible to perform a
system acceptance check according to the local regulations concerning pre-
vention of accidents.
At the end of a successful system acceptance check, the acceptance report
will be signed by an authorized representative from AIXTRON and by a spe-
cialist delegated by the end user.
2.2.4 Operation
The CRIUS II must only be used as stipulated. See Chapter 1.1.2 Intended
use of the CRIUS II, 6.
All work instructions and procedures which could impair personnel or equip-
ment safety are strictly prohibited. The branch-specific and local regulations
concerning prevention of accidents must be followed.
Work place With appropriate instructions and checks, the end user guarantees for a work
environment around the CRIUS II that is orderly and clean. The work place
lighting should provide a minimum level 500 lux or should conform with the
local regulations.
Escape, rescue and
alarm plan The end user is responsible for creating an escape, rescue and alarm plan for
the work place and the CRIUS II surroundings.
Waste The end user is responsible for the eco-friendly removal and disposal of eco-
logically harmful waste produced by specific processes.
Table of contents
