Alcatel Vacuum Technology Adixen ATH 1300 M User manual

ATH 2300 M/MT
MAGLEV HYBRID TURBOMOLECULAR PUMP
User’s Manual

GB 00779 – Ed 03 – June 2005
Alcatel Vacuum Technology, as part of the Alcatel
Group, has been supplying vacuum pumps, leak
detection systems, vacuum measurement and
micro machining systems for several years.
Thanks to its complete range of products, the
company has become an essential player in
multiple applications : instrumentation, Research
& Developement, industry and semiconductors.
Alcatel Vacuum Technology has launched Adixen,
its new brand name, in recognition of the
company’s international standing in vacuum
position.
With both ISO 9001 and 14001 certifications, the
French company is an acknowlegded expert in
service and support, and Adixen products have
the highest quality and environmental standards.
With 40 years of experience, AVT today has a
worldwide presence, through its international network
that includes a whole host of experienced subsidiaries,
distributors and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States, thirty
years ago, reinforced today by 2 others US
subsidiaries in Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and three of its
subsidiaries, Alcatel Hochvakuumtechnik (Germany),
Alcatel Vacuum Technology UK (Scotland) and Alcatel
Vacuum Systems (Italy) form the foundation for the
European partner network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has been
strengthened with Alcatel Vacuum Technology Korea
(in 1995), Alcatel Vacuum Technology Taïwan (in
2001), Alcatel Vacuum Technology Singapore, and
more recently with Alcatel Vacuum Technology
Shanghai (China) (in 2004).
This organization is rounded off by more than 40
represensatives based in a variety of continents.
Thus, whatever the circumstances, the users of Adixen
products can always rely on quick support of our
specialists in Vacuum Technology.

Alcatel Vacuum Technology France - User’s Manual ATH 2300 M/MT
ATH 2300 M/MT
Maglev hybrid turbomolecular pumps
Welcome
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GB 01717 - Edition 05- Nov 06
APPLICATIONS:
SEMICONDUCTOR APPLICATIONS
Plasma etching, Ion implantation, Sputtering,
Plasma deposition.
OTHERS APPLICATIONS
Electron microscopes, Surface analysis,
Research and development, High energy physics,
Space simulation, Accelerators.
ADVANTAGES:
High throughput - Quiet and clean vacuum - Corrosion
proof - High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
Dear Customer,
You have just purchased an
Adixen maglev hybrid turbo
pump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from Alcatel’s many years of
experience in the field
of turbomolecular pump
design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in using
it, we advise you to read this
manual carefully before any
intervention on your pump
and to pay particular
attention to
the equipment installation
and start-up section.
Refer to the controller user's manual
to use these pumps ATH 2300M/MT

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ATH 2300 M/MT
Maglev hybrid turbomolecular pumps
GB 01717 - Edition 05- Nov 06
This product complies with the requirements of European
Directives, listed in the Declaration of Conformity contained
in G 100 of controller user’s manual. These Directives are
amended by Directive 93/68/E.E.C (E.C. Marking).
Copyright/Intellectual property:
The use of Adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in
whole or any part without prior written authorization from
Alcatel Vacuum Technology France.
Specifications and information are subject to change
without notice by Alcatel Vacuum Technology France.
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 01718- Edition 04 - Nov 06
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MANUAL REFERENCE: 108895
EDITION: 05 - November 2006 General contents
ATH 2300 M/MT - User’s Manual
Chapter A INTRODUCTION
A 150 - Introduction to the ATH2300 M/MT
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Pump technical characteristics
A 510 - The accessories of the pump
A 515 - Pump accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and inlet air valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product maintenance
Chapter E MAINTENANCE INSTRUCTIONS
E 100 - Shipping procedure for contaminated pump
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 200 - First level maintenance parts
Chapter G APPENDIX
G 010 - Pumping curves
G 200 - Safety questionnaire
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

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General contents
ATH 2300 M/MT -User’s Manual
GB 01718- Edition 04 - Nov 06
MANUAL REFERENCE: 108895
EDITION: 05 - November 2006
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 01719 - Edition 03- Nov 06
1/1
Introduction
ATH 2300 M/MT User’s Manual
Detailed contents
A
A 150 Introduction to the ATH 2300 M/MT
A 200 Control loop of the pump
- 5 actives axis
- Automatic Balancing System
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The built-in heater band
- The back-up bearings
- Variation of the pump rotational speed
A 400 Pump technical characteristics
A 510 The accessories of the pump
A 515 Pump accessory dimensions
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

Alcatel Vacuum Technology France – User’s Manual ATH 2300 M/MT 1/1
A 150
Introduction to the ATH 2300 M/MT
GB 01720 - Edition 04- November 06
1 magnetically levitated
hybrid turbo pump
ATH 2300 M Five active axes
Rotor position control in 5 directions.
Automatic balancing system
Lowest possible levels of noise and vibration.
Compensation for any imbalance of the rotor.
Maintenance free
Inert gas purge
Eliminate corrosion of the motor and magnetic bearing coils.
Battery free
In case of a power failure, the pump motor acts like
a generator to transform the rotor energy into electrical
power to supply the controller
ATH 2300 MT Integral heater band
Maintaining the pumps internal surface up to 75°C to prevent the
condensation effect.
Temperature regulated by the controller, or by the customer
device
Controllers The ATH 2300 M/MT pumps work with the OBC 2300 M controller
and with the Mag Power controller.
(refer to the User’s Manual).

5 active axis The mobile assembly formed by the turbo rotor and the shaft is
known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has five axes of freedom monitored by 5 active
bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
Position
detector
+
Correction
+
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded, the
controller corrects differences to bring the rotor back to its
optimum position, by varying the current in electromagnets.
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
A 200
Control loop of the pump
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GB 01722 - Edition 03- November 06
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

Unbalanced force
rejection control
The unbalanced force rejection control is an electronic device,
that monitors the rotor position, allowing it to rotate in its own
axis of inertia.
Changes in the rotor balance, due to deposit built-up during the
life time of the pump, are automatically compensated by the
unbalanced force rejection control.
Therefore, there is a total absence of vibration.
Rotor geometric axis
Stator geometric axis
Rotor inertia axis
A 200
Control loop of the pump
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GB 01722 - Edition 03- November 06
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 00725 - Edition 06 - January 06
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A 210
The pump operating principle
Pumping principle The ATHM pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section to
enhance ultra high-vacuum (UHV) and ultra clean technology (UCT).
The turbomolecular section provides high pumping speeds and
UHV ultimate vacuum. The molecular drag section provides a high
compression ratio and extends forevacuum tolerance up to 1.5 mbar.
Inlet
Dry back-up bearings
Exhaust
Cooling
Magnetic
levitated
bearings
Motor
Molecular
drag
Stator
Rotor
Gas
purge*
* The gas purge provides excellent protection for corrosive
applications.
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

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A 210
The pump operating principle
GB 00725 - Edition 06 - January 06
The hybrid-
turbo pump in an
installation
At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
Since the ATHM compression ratio is set by the design, the ATHM limit
pressure is given by that of the primary pump used.
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE ATMOSPHERIC
PRESSURE
Primary
pumping
Primary vacuum
Secondary vacuum
ATH XXXX MT In high pressure and high
throughtput processes such as
metal etch, deposit can build
up in the lower compression
stages of the rotor, leading
the pump to early failure.
The built-in heater band
allows pump heating up to
75 °C, which is sufficient
to prevent the condensation
effect.
This device is thermally
controlled by the controller, or
by the customer’s external regulator.
The MT version is delivered with its water valve.
The built-in heater band
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 00725 - Edition 06 - January 06
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A 210
The pump operating principle
The back-up bearings They are dry-lubricated ceramic ball bearings.
They are never used in normal operation, since the rotor is not in
contact with the bearings.
The back-up bearings are only used to protect the pump in accidental
air in-rushes, accidental shocks or power failure.
No maintenance By design, the pump doesn’t include parts liable to wear and doesn’t
need preventive maintenance. However, the back-up bearings used in
case of accidental shut-downs have to be changed when the controller
indicates it: the percentage of landing time to be deducted depends
on its frequency of use ( D 100).
Battery free In case of a power failure, the motor acts like a generator, supplying
enough power for the magnetic bearings.
When the rotation speed is lower than the minimum setpoint, the
pump lands and shuts down on the back-up bearings.
Variation of the pump
rotational speed The ATHM pump rotation speed can be selected and set between
a standby speed and the maximum speed. This makes it possible
to optimize pumping characteristics according to each customer
application (for example, high pressure pumping).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set between the low
speed value and the maximum speed.
- maximum speed preselected at factory.
For an inlet pressure ≤10-1 mbar, the pump rotation speed can be
selected between a minimum speed and a maximum speed specific
for each pump ( A 400).
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

Alcatel Vacuum Technology France – User’s manual – ATH 2300M/MT 1/3
A 400
Technical characteristics of the
ATH 2300M/MT pump
GB 01725 - Edition 04 – Nov 06
The performances
of the pumps
Characteristics UNITS ATH 2300 M/MT
Inlet flange DN ISO 250-F
Maximum rotation speed rpm 31000
Standby speed rpm 15000 to 31000
N2
l/s 2100
He
l/s 2200
Pumping speed
H2
l/s 1200
N2
> 1.109
He
3.104
Compression rate
H2
2.103
Ultimate pressure without purge, measured
according to pneurop standard
Torr
mbar
< 6.10-9
< 8.10-9
Maximum pressure at inlet in continuous operation
** (not heated pump)
Torr
mbar
0.1
0.14
(water cooling)
Maximum pressure at inlet in continuous operation
** (heated pump 65°C)
Torr
mbar
0.015
0.02
(water cooling)
Maximum permissible pressure at exhaust** mbar 1.5
Maximum flowrate with N2 (heated at 65°C) sccm 1200
Maximum flowrate with N2 (unheated) sccm 2500
Purging maximum flow rate sccm 50
Vibration level (at 31000 rpm) µm < 0.01
Mounting orientation Any
Power supply required for heater band (MT)
100/120 V - 50/60 Hz
200/240 V - 50/60 Hz
250 W
Start-up time min 10
Cooling water flow rate l/h < 60
Water temperature °C 15 < T < 25
Maximum ambient temperature °C 40
Weight kg 58
Recommended forepump (Adixen) ADP / ADS
** The two maximum pressures cannot occur at the same time.

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Technical characteristics of the ATH 2300MT pump
A400
Alcatel Vacuum Technology - User’s Manual ATH 2300 M/MT
GB 01725 - Edition 04- Nov 06
Inlet flange
DN 250 ISO-F
DN 250 CF-F
DN 200 ISO-F
DN 200 CF-F
E
16
26
16
16
H
232.5
276.5
276.5
276.5
I
322.6
366.6
366.6
366.6
J
348
392
392
392
K
325.5
369.5
369.5
369.5
L
358.5
402.5
402.5
402.5
D
335
306
306
285
d1
310
284
260
260
d2
11
8.5
11
11
N
12
32
12
12
CG
170
204
204
204
A
15
5.65
15
15
a : Pump heater power
b : Inlet flange
d : Exhaust DN40 ISO - KF
e : Water inlet and outlet 1/4 NPT FEMALE
f : N2 purge DN16 ISO-KF
g : 6 holes M10-6H on ø 190
Depth max 29, Depth min 25
h : Electrical power supply
Dimensions in mm
N:number of holes d2 on d1
A°
E
H
K
CG
Center of Gravity
øD
ø207 ø242 ø310
J
L
48,2°
61°
60°
60°
70,5°
115,5
60°
22,5°
50,5° 217,9
131
I
174,5
131,5
IN
OUT
d
f
e
g
h
d1
OUT
HTR (CONN.)
a
b
Connector for thermal regulation

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Technical characteristics of the ATH 2300M pump
A400
Alcatel Vacuum Technology - User’s Manual ATH 2300 M/MT
GB 01725 - Edition 04- Nov 06
Inlet flange
DN 250 ISO-F
DN 250 CF-F
DN 200 ISO-F
DN 200 CF-F
E
16
26
16
16
H
232.5
276.5
276.5
276.5
I
322.6
366.6
366.6
366.6
J
348
392
392
392
K
325.5
369.5
369.5
369.5
L
358.5
402.5
402.5
402.5
D
335
306
306
285
d1
310
284
260
260
d2
11
8.5
11
11
N
12
32
12
12
CG
170
204
204
204
A
15
5.65
15
15
a : Pump heater power
b : Inlet flange
d : Exhaust DN40 ISO - KF
e : Water inlet and outlet 1/4 NPT FEMALE
f : N2 purge DN16 ISO-KF
g : 6 holes M10-6H on ø 190
Depth max 29, Depth min 25
h : Electrical power supply
Dimensions in mm
24,1°
160
E
H
K
I
J
L
A°
22,5°
61°
60°
50,5°
70,5°
60°
170
COG
center of gravity
174,5
131,5
52,8
øD
ø310
ø207
ø260
115,5
OUT
IN
.
N number of holes d2 on d1
d
b
e
f
g
h

GB 02992- Edition 01- Nov 06
1/2
A 510
The accessories of the pump
Screen filter This filter protects the pump against solid particles.
Mesh size 3.5 mm. It is integrated into the pump housing.
DN 200 ISO (S.Steel) P.N.
Standard filter + standard clip 107824
Convexe filter + bored clip 108872
Removable filter + ASA clip 104907
DN 250 ISO
Convexe filter (alu) + standard clip 109199
Convexe filter (S.Steel) + bored clip 108762
Purge flow reduction device This device is used to reduce
the purge gas
flow rate in some processes.
Flow Reduction
device DN 16 P.N.
25 SCCM 066950
50 SCCM* 066752
* delivered with air inlet valve
Isolation valve
at inlet pump
The secondary isolation
valve is used to maintain
the vacuum in the chamber
while the pump is reset to
atmospheric pressure.
See the manufacturer’s
catalog.
Water valve The water valve is used to stop
the water flow rate.
The water valve is connected
to the controller with the
thermostatic cable.
( A 500 in the controller
User’s Manual)
Water valve P.N.
24VDC 108668
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

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A 510
The accessories of the pump
GB 02992 - Edition 01 - Nov 06
An entire range of connection accessories is available in the manufacturer’s catalog
(clamping ring, centering ring, etc.).
Length P.N.
1 m A462403-010
3,5 m A462403-035
5 m A462403-050
10 m A462403-100
20 mA459362-200
1.2 bar ABS max.
24
24 V DC P/N:111921
24V DC P/N :112417
Purge valve (50 sccm)
(operate only with the OBC
controller)
The purge flow warranties a
gas flushing for back-up bearing
protection from the pumped process
gases.
The purge of this valve can be
isolated during an air tightness test.
The purge of this valve warranties
a gas flushing for back-up bearing
protection. It can’t be isolated.
The air inlet valve will slow down
the pump in complete safety. With
this option, the braking time from
nominal speed to 0 rpm is t < 15 mn.
Without the valve, the braking time is
about 30 mn.
Air inlet valve and
permanent purge flow
(50 sccm)
Air inlet valve cables and
purge valve cables
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 02981 - Edition 01 - June 06
1/1
A 515
Accessory dimensions
Water valve dimensions
mm (inch)
Purge valve dimensions
(50 SCCM) mm (inch)
30 (1.18)
22 (0.86)
83.3 (3.28)
32 (1.26)
1/8 NPT
Can rotate
Plug coil
1/8" NPT female
Pump connection
44 (1.73)
30 (1.18)
25 (0.98)
54 (2.13)
63 (2.48)
Can
rotate
Plug coil
1/8" NPT female
Pump connection
Air inlet valve + continous
purge dimensions
(50 SCCM) mm (inch)
68.2 (2.68)
29 (1.14)
56 (2.20)
34.4 (1.35)
69 (2.72)
64 (2.52)
62 (2.44)
50 (1.97)
64.1 (2.52)
16
Out
1/8" NPT female
Inlet
1/8" NPT female
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT

GB 001726 - Edition 04- Nov 06
1/1
Start-up
ATH 2300 M/MT User’s Manual
Detailed contents
B
B 100 Safety instructions for installation
B 201 Unpacking and storage of the pump
B 300 Pump connections to an installation
- Equipment installation conditions
- Maglev pump connection instructions
- Why securing MAGLEV pump installation ?
- Installations specifications
- Inlet flange installation conditions
- Equipment installation conditions
B 310 Inlet and exhaust connections
B 330 Nitrogen purge and inlet air valve device connections
- Characteristics of filtered dry nitrogen supply
- Purge device (50 or 25 sccm)
- Valve with purge device (50 sccm)
- Air inlet valve with purge device (50 sccm)
B 340 Water cooling connection
- Characteristics of water cooling
B 401 Typical electrical wiring diagram
Alcatel Vacuum Technology France - User's Manual ATH 2300 M/MT