Alcatel Vacuum Technology Adixen ATH 1300 M User manual

ATH 1300/1600 M-MT
MAGLEV HYBRID TURBOMOLECULAR PUMPS
User’s Manual

GB 00779 – Ed 02 - March 04
Alcatel Vacuum Technology, as part of the Alcatel
Group, has been supplying vacuum pumps, leak
detection systems, vacuum measurement and micro
machining systems.
Thanks to its complete range of products, the
company has become an essential player in multiple
applications : instrumentation, Research &
Developement, industry and semiconductors.
Alcatel Vacuum Technology has launched Adixen, its
new brand name, in recognition of the company’s
international standing in vacuum position.
With both ISO 9001 and 14001 certifications, the
French company is an acknowlegded expert in service
and support, and Adixen products have the highest
quality and environmental standards.
With 40 years of experience, AVT today has a
worldwide presence, through its international network
that includes a whole host of experienced subsidiaries,
distributors and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States, thirty
years ago, reinforced today by 2 others US
subsidiaries in Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and three of its
subsidiaries, Alcatel Hochvakuumtechnik (Germany),
Alcatel Vacuum Technology UK (Scotland) and Alcatel
Vacuum Systems (Italy) form the foundation for the
European partner network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has been
strengthened with Alcatel Vacuum Technology Korea
(in 1995), Alcatel Vacuum Technology Taïwan (in
2001), Alcatel Vacuum Technology Singapore, and
more recently with Alcatel Vacuum Technology
Shanghai (China) (in 2004).
This organization is rounded off by more than 40
represensatives based in a variety of continents.
Thus, whatever the circumstances, the users of
Adixen products can always rely on quick
support of our specialists in Vacuum
Technology.

Alcatel Vacuum Technology France - User’s ATH 1300 M/MT - ATH 1600 M/MT
ATH 1300 M/MT - ATH 1600 M/MT
Maglev hybrid turbomolecular pumps
Welcome
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GB 00720 - Edition 08 - Januaray 04
APPLICATIONS:
SEMICONDUCTOR APPLICATIONS
Plasma etching, Ion implantation, Sputtering,
Plasma deposition.
OTHERS APPLICATIONS
Electron microscopes, Surface analysis,
Research and development, High energy physics,
Space simulation, Accelerators.
ADVANTAGES:
High throughput - Quiet and clean vacuum - Corrosion
proof - High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
Dear Customer,
You have just purchased an
Alcatel maglev hybrid turbo
pump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from Alcatel’s many years
of experience in the field
of turbomolecular pump
design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention on
your pump and to pay
particular attention to
the equipment installation
and start-up section.
MANUAL REFERENCE: 105 677
EDITION: 12 - JANUARY 2004

Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - 1600 M/MT
ATH 1300 M/MT - ATH 1600 M/MT
Maglev hybrid turbomolecular pumps
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GB 00720 - Edition 08 - January 04
This product complies with the requirements of European
Directives, listed in the Declaration of Conformity contained in
G100 of this Manual. These Directives are amended by
Directive 93/68/E.E.C (E.C. Marking).
Copyright/Intellectual property:
The use of Alcatel products are subject to copyright and
intellectual property rights in force in any jurisdisction.
All rights reserved, including copying this document in whole
or any part without prior written authorization from Alcatel
Vacuum Technology France.
Specifications and information are subject to change without
notice by from Alcatel Vacuum Technology France.

Contents
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
User’s Manual
ATH 1300 M/MT - 1600 M/MT
GB 00721 - Edition 12 - January 04
1/2
Introduction
Start-up
■Introduction to the ATH 1300 M/MT -
1600 M/MT and associated ACT controller . . .
■The pump operating principle . . . . . . . . . . . .
■Pump overview . . . . . . . . . . . . . . . . . . . . .
■ACT 1300 M controller. . . . . . . . . . . . . . . . .
■The accessories . . . . . . . . . . . . . . . . . . . . .
■The technical characteristics . . . . . . . . . . . . .
■Certificate of compliance SEMI S2-93 A . . . . .
■Safety instructions . . . . . . . . . . . . . . . . . . . .
■Unpacking and storage . . . . . . . . . . . . . . . .
■Pump connections to an installation . . . . . . . .
■Inlet and exhaust connections . . . . . . . . . . . .
■ Air inlet valve connection (option) . . . . . . . . . . .
■Nitrogen purge device connection . . . . . . . . .
■Water cooling connection . . . . . . . . . . . . . . .
■Heating band connection . . . . . . . . . . . . . . .
■Electrical connections . . . . . . . . . . . . . . . . . .
■«Dry contacts» connector wiring . . . . . . . . . .
■«Inputs/Outputs» connector wiring . . . . . . . . .
■«Rem.» connector wiring . . . . . . . . . . . . . . .
■RS 232 or RS 485 serial link wiring . . . . . . . .
■Detailed description of RS commands . . . . . . .
■A 10
■A 20
■A 30
■A 40
■A 50
■A 60
■A 70
■B 10
■B 20
■B 30
■B 31
■B 40
■B 50
■B 60
■B 70
■B 80
■B 90
■B 91
■B 100
■B 110
■B120

Contents
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
User’s Manual
ATH 1300 M/MT - 1600 M/MT
GB 00721 - Edition 12 - January 04
Cautions are used when failure to observe
instructions could result in significant damage to
equipment and/or facilities.
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Operation
Maintenance
Maintenance instructions
Maintenance components
Appendix
CAUTION!
Warnings are used when failure to observe instructions
could result in injury or death
WARNING
■Safety instructions . . . . . . . . . . . . . . . . . . . . . .
■Controller start-up . . . . . . . . . . . . . . . . . . . . . .
■Configuring the controller for the application . . .
■ Controlling the pump using the controller front panel
■“Local” and “Remote” mode operation. . . . . . . .
■«Ext. safety» contact operation . . . . . . . . . . . . .
■“INH” inhibit mode operation. . . . . . . . . . . . . .
■Safety instructions . . . . . . . . . . . . . . . . . . . . . .
■Diagnosis and Troubleshooting . . . . . . . . . . . . .
■Shipping procedure for contaminated pumps . . .
■Spare parts - Instructions of use . . . . . . . . . . . .
■First level maintenance parts . . . . . . . . . . . . . .
■Pumping curves . . . . . . . . . . . . . . . . . . . . . . .
■Safety questionnaire . . . . . . . . . . . . . . . . . . . .
■Declaration of conformity . . . . . . . . . . . . . . . . .
■C 10
■C 20
■C 30
■C 40
■C 50
■C 60
■C 70
■D 10
■D 20
■E 00
■F 00
■F 10
■G 10
■G 11
■G 100

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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
A 10
Introduction to
the ATH 1300 M/MT - ATH 1600 M/MT
and associated ACT controller
ATH 1300 M
ATH 1600 M
1 magnetically levitated
hybrid turbo pump
Five active axes
ACTIDYNE® Maglev
bearings type (S2M Patent)
Rotor position control in
5 directions.
Automatic balancing system
Lowest possible levels of
noise and vibration.
Compensation for any
imbalance of the rotor.
Maintenance free
Inert gas purge
Eliminate corrosion of
the motor and magnetic
bearing coils.
Battery free
In case of a power failure,
the pump motor acts like
a generator to transform
the rotor energy into
electrical power to supply
the controller.
ATH 1300 MT
ATH 1600 MT
Integral heater band
Maintaining the pumps internal surface up to 75°C
to prevent the condensation effect.
Temperature regulated by the ACT controller, or by
the customer device.

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A 10
Introduction to
the ATH 1300 M/MT - ATH 1600 M/MT
and associated ACT controller
ACT 1300 M controller
The new generation of
ACT controller family
Especially designed for maglev turbopumps
Light and small controllers.
Battery free.
Automatically detects and operates the ATH 1300 M/MT
or ATH 1600 M/MT.
Convenient interface
Handy keyboard;
Alphanumeric display.
Modern pump monitoring
Monitoring of testing and troubleshooting parameters;
RS 232/485 serial links;
Automatic power supply detection from 100 V -15% to
120 V +10% and from 200 V -15% to 240 V +10%,
48/63 Hz single phase.
Power supply for heater:
100-120/200-240 V - 50/60 Hz
ATH 1300 MT: 200 W
ATH 1600 MT: 135 W
Large range of interface
Dry contacts interface for status signals and optocoupled
control inputs;
Selectable Analog 0-10 V output.

A 20
The pump operating principle
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
A hybrid technology The ATH 1300 M and the ATH 1600 M integrate
the advantages of a multi-staged turbomolecular pump
with a spiral helix molecular drag section to enhance
ultra high-vacuum (UHV) and ultra clean technology (UCT).
The turbomolecular section provides high pumping speeds
and UHV ultimate vacuum.
The molecular drag section provides a high compression
ratio and extends forevacuum tolerance up to 1.5 mbar.
Inlet
Magnetic
levitated
bearings
Gas purge
Cooling
Molecular
drag
Stator
Rotor
Motor
Dry back-up
bearings
Exhaust

A 20
The pump operating principle
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
5 actives axis The mobile assembly formed by the turbo rotor and
the shaft is known as the rotor. This rotor is driven by
the motor and held in suspension by magnetic fields
generated by electromagnets housed in active bearing,
type ACTIDYNE® maglev bearing (S2M Patent).
The mobile rotor has five axes of freedom monitored by
5 active bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Reference
signal
Detector signal
Electro-
magnet
Position
detector
+
Signal
processing
+
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded,
the ACT controller corrects differences to bring the rotor
back to its optimum position, by varying the current in
electro-magnets.
3 controlled translations (X, Y, Z)
2 controlled rocking (X, Y)

A 20
The pump operating principle
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Automatic Balancing
System
The back-up bearings
No maintenance
Battery free
The Automatic Balancing System is an electronic device.
That monitors the rotor position, allowing it to rotate on
its own axis of inertia.
Changes in the rotor balance, due to deposit built-up
during the life time of the pump, are automatically
compensated by the Automatic Balancing System.
Therefore, there is a total absence of vibration.
They are dry-lubricated ceramic ball bearings.
They are never used in normal operation, since the rotor
is not in contact with the bearings.
The back-up bearings are only used to protect the pump in
accidental air in-rushes, accidental shocks or power failure.
By design, the pump doesn’t include parts liable to wear
and doesn’t need preventive maintenance. However, the
back-up bearings used in case of accidental shut-downs
have to be changed when the controller indicates it: the
percentage of landing time to be deducted depends on its
frequency of use (see D 10).
In case of a power failure, the motor acts like a generator,
supplying enough power for the magnetic bearings.
When the rotation speed is lower than the minimum setpoint,
the pump lands and shuts down on the back-up bearings.
Rotor geometric axis
Stator geometric axis
Rotor inertia axis

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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
A 20
The pump operating principle
The hybrid-turbo pump
in an installation
At the pump exhaust, the gases are evacuated to
atmosphere by a primary pump.
Since the ATHM compression ratio is set by the design,
the ATHM limit pressure is given by that of the primary
pump used.
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Primary
pumping
Primary vacuum
Secondary vacuum

A 30
Pump overview
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Standard version
ATH 1300 M
ATH 1600 M
Gas purge
ATH 1300 MT
ATH 1600 MT
The built-in heater band
Inlet
Gas purge
Exhaust
The gas purge provides excellent protection for corrosive
applications.
In high pressure and high
throughtput processes such
as metal etch, deposit can
build up in the lower
compression stages of
the rotor, leading the
pump
to early failure.
The built-in heater band
allows pump heating up to
75°C, which is sufficient to prevent the condensation
effect.
This device is thermally controlled by the ACT controller,
or by the customer’s external regulator.
The MT version is delivered with its water valve.

A 30
Pump overview
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Variation of the pump
rotational speed
The ATHM pump rotation speed can be selected and set
between a standby speed and the maximum speed.
This makes it possible to optimize pumping characteristics
according to each customer application (for example, high
pressure pumping).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set
between the low speed value and the maximum speed.
- maximum speed preselected at factory.
For an inlet pressure ≤10-1 mbar, the pump rotation speed
can be selected between :
- a minimum speed of 15000 rpm and
- a maximum speed of 34000 rpm for ATH 1300 M/MT
and 39000 rpm for ATH 1600 M/MT.

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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
A 40
ACT 1300 M controller
Compact and functional
The ACT 1300 M controller belongs to the new generation
of ACT controller family.
Dimension: 1/2 Rack.
Weigth: 8.5 kg (18 lb).
All functions to monitor the ATHM are integrated into
the controller.
START STOP STATUS STAND BY
ENTER
PREVIOUS
ACT 1300 M
FAULT
Convenient interface
The front panel of the unit
consists of:
Parameter selection and
configuration keys
Manual control keys
Parameter and message
LCD display (4 lines).
Pump status indicator lights
{
{{

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A 40
ACT 1300 M controller
PUMP CABLE
REM.
DRY CONTACTS
RS 232
01
The rear panel of the unit
consists of:
1 Power supply connector
2 Pump connector
3 Relay terminal strip
(Wiring characteristics
on B 90.)
4 Analog output and
RS 485 serial link
(Wiring characteristics
on B 100.)
5 RS 232 connector
(Wiring characteristics
on B 110.)
6 Inputs, outputs
connector
(Wiring instructions
on B 91.)
7 Grounding
1
6
5
7
2
3
4
- to replicate the monitoring parameters available in the
form of dry contacts.
- selectable 0 - 10 Volts output for speed, pump current or
temperature;
RS485 serial link allowing many pump installations in a
network.
The RS 232 serial link is used to control and monitor the
pump using a computer.
- For the remote control of START/STOP/STANBY/INHIBIT
functions,
- to take in account external safety,
- to allow dry contact outputs.
Allow the fixation of a grounding cable to connect the
controller at the ground and to connect the grounding
cables of the accessories (water valve, air inlet valve
cable).

A 50
The accessories
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Flow Reduction device DN 16
Flow rate P.N.
25 SCCM 066950
50 SCCM* 066752
* delivered with air inlet valve
See the Alcatel catalog.
Pump accessories
Screen filter This filter protects the pump against solid particles.
Mesh size 3.5 mm. It is integrated into the pump housing.
This device is used to
reduce the purge gas
flow rate in some
processes.
Purge flow reduction device
Isolation valve
at inlet pump
The secondary isolation
valve is used to maintain
the vacuum in the chamber
while the pump is reset to
atmospheric pressure.
Air inlet valve
and cable
This valve will slow down
the pump in complete safety.
With this option, the braking
time from nominal speed to
0 rpm is t < 15 mn.
Without this accessory, the
braking time is about 30 mn.
(See B 40 for valve installation).
DN 200 ISO (S.Steel) P.N.
Standard filter + standard clip 107824
Convexe filter + bored clip 108872
Removable filter + standard clip 104907
DN 250 ISO
Convexe filter (alu) + standard clip 109199
Convexe filter (S.Steel) + standard clip 108762
Air inlet valve P.N.
12 VDC 106866
Air inlet cable
Length P.N.
1 m 106052
3.5 m 105172
5 m 105173
10 m 105174
15 m 105175
20 m A459362
An entire range of connection accessories is available in the Alcatel catalog (clamping
ring, centering ring, etc.).

A 50
The accessories
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Connection cable
Thermostatic cable
Controller accessories
Interconnecting cable between heater band and controller.
This cable includes water valve cable.
Interconnecting cable
between pump and
controller.
Length P.N.
1 m 104624
3.5 m 103719
5 m 103720
10 m 103721
15 m 104587
20 m A214574
Length P.N.
1 m 110 V A328698A
3.5 m 110 V A328698B
5 m 110 V A328698C
10 m 110 V A328698D
15 m 110 V A328698E
20 m 110 V A328698F
Length P.N.
1 m 230 V A328697A
3.5 m 230 V A328697B
5 m 230 V A328697C
10 m 230 V A328697D
15 m 230 V A328697E
20 m 230 V A328697F
Power line cable Cable to connect the
controller to the power
supply.
Length P.N.
2.5 m US A328406
2.5 m EUROPE A328405
The thermostatic cable must be connected to a 4 A circuit
breaker on the two phases.

A 60
The technical characteristics
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
The performances
of the pumps
* Others types of housing are available (see catalog).
** The two maximum pressures cannot occur at the same time.
Model characteristics ATH 1300 M/MT
Inlet flange* DN 160 ISO-K 200 ISO-K 250 ISO-K
160 CF-F 200 CF-F 250 CF-F
Maximum rotation speed rpm 34000
Standby speed rpm 15000 to 34000
N2l/s 920 1250 1350
Pumping speed He l/s 810 850 850
H2l/s 490 550 550
N21.107
Compression rate He 2.103
H21.102
Ultimate pressure without purge, meas.
according to Pneurop standard mTorr/mbar 6.10-6 / 8.10-9
Maximum pressure at inlet
in continuous operation** mbar 0.5
Maximum permissible
pressure at exhaust** mbar 1.5
Maximum flowrate with N2(heated) SCCM 1000
Maximum flowrate with N2(unheated) SCCM 3000
Purging maximum flow rate SCCM 50
Pressure with 100 SCCM flow mTorr/mbar
1.1 / 1.46x10-3
Pressure with 200 SCCM flow mTorr/mbar 2.26 / 3.0x10-3
Vibration level at maximal speed µm < 0.01
Mounting orientation Any
Power supply required for heater band (MT) 100-120 V - 50/60 Hz
200-240 V - 50/60 Hz
200 W
Start-up time min < 5
Maximum start-up power W 650
Maximum operating power
W 300
Cooling water flow rate l/h < 60
Water temperature
°C 15 < T < 25
Maximum ambient temperature
°C 40
Weight (DN 160 ISO-K model) kg (lb) 34 (75.5)
Recommended forepump ADP / ADS
ATH 1600 M/MT
200 ISO-K 250 ISO-K
200 CF-F 250 CF-F
39000
15000 to 39000
1400 1500
1150 1150
750 750
6.107
8.103
3.102
4.5 x10-6 / 6x10-9
0.2
1.5
1000
25 00
50
0.95 / 1.27x10-3
1.92 / 2.56x10-3
< 0.01
Any
100-120 V - 50/60 Hz
200-240 V - 50/60 Hz
135 W
< 6
650
300
< 60
15 < T < 25
40
35.5 (78.8)
ADP / ADS

A 60
The technical characteristics
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Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Controller characteristics
112.5
150
49
237
54.75
453
408
109.5
219
M 4
132.5
122.45
ACT 1300 M
PREVIOUS ENTER
+
STAND BYSTATUSSTOP
FAULT
START
CG Centre de gravité
CG
96
Model characteristics ACT 1300 M
Weight 8.5 kg
Dimensions HxWxD mm 132.5 x 219 x 453
1/2 Rack 19"
Power supply
Nominal voltage 100 V -15% to 120 V +10%
(single phase and two-phase) 200 V -15% to 240 V +10%
Frequency 48/63 Hz
Maximum power consumption 750 VA
Customer main circuit breaker rating 10 A
Ambient operating temperature T ≤50 °C
Controller dimensions