Alcatel Vacuum Technology ATP 100 User manual

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Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual
D 51
Turbomolecular pump (ATP 100)
ORIGIN / DIAGNOSTIC
CONFIRMATION
SYMPTOM REMEDY
Edition 02 - February 02
GB 01458 -
Check the connections:
unplug and plug the cables
on the P0326 board and
the pump.
Critical failure Chap. C
“Error/information indicator and display”
Turbomolecular pump
overheating
Turbomolecular
pump failure
Check the dry pump.
Turbomolecular
pump speed
NO
Turbomolecular pump
Mechanical hard spot
(does not spin freely by hand)
Check the tightness of the
canalisations, valves, pumps
and cell. (alcohol test or use
of another detector).
NO
NO
Leaks
on lines, valves, pump or cell
Regrease the ball bearings
molecular pump
according to
E 45.
NO
Contact customer service.
P0326
Switch is in running-in
The exhaust pressure of
the turbomolecular pump
is not correct (≤5 mbar)
Greasing of the ball
bearings turbomolecular
pump to be performed

2/2 Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual
D 51
Turbomolecular pump (ATP 100)
ORIGIN / DIAGNOSTIC
CONFIRMATION
SYMPTOM REMEDY
Turbomolecular pump
Mechanical hard spot (does
not spin freely by hand)
Turbomolecular
pump speed
(continued)
Turbomolecular pump is
not connected with
molecular pump controller
board P0326
Check the
turbomolecular
pump connector
Edition 02 - February 02
GB 01458 -
Major fault Chap. C
“Error/information indicator and display”
Contact customer service.
Contact customer service.