Alcatel Vacuum Technology Adixen ATP Series User manual

ATP SERIES
POMPES TURBOMOLECULAIRES
TURBOMOLECULAR PUMPS
Manuel utilisateur
User’s manual
Réalisation/Publication: Alcatel Vacuum Technology France - Manuel Utilisateur - Ed 11 - Date : 03/2007 - Référence : 102710 *102710*

GB 02834 – Ed 04 – March- 2007
Alcatel Vacuum Technology, as part of the
Alcatel-Lucent Group, has been supplying
vacuum pumps, helium and hydrogen leak
detection systems, plasma sensors, vacuum
measurement for several years.
Thanks to its complete range of products, the
company has become an essential player in
multiple applications : instrumentation, Research
& Developement, industry and semiconductors.
Alcatel Vacuum Technology has launched Adixen,
its new brand name, in recognition of the
company’s international standing in vacuum
position.
With both ISO 9001 and 14001 certifications, the
French company is an acknowlegded expert in
service and support, and Adixen products have
the highest quality and environmental standards.
With 45 years of experience, AVT today has a
worldwide presence, through its international network
that includes a whole host of experienced subsidiaries,
distributors and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States, thirty
years ago, reinforced today by 2 others US
subsidiaries in Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and its
subsidiaries, Alcatel Hochvakuumtechnik (Germany),
Alcatel Vacuum Technology UK (Scotland), Alcatel
Vacuum Technology Benelux (Netherlands), Alcatel
Vacuum Systems (Italy) and more recently Adixen
Sensistor AB in Sueden (in 2007) form the foundation
for the European partner network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has been
strengthened with Alcatel Vacuum Technology Korea
(in 1995), Alcatel Vacuum Technology Taiwan (in
2001), Alcatel Vacuum Technology Singapore, Alcatel
Vacuum Technology Shanghai (China) (in 2004)
This organization is rounded off by more than 40
represensatives based in a variety of continents.
Thus, whatever the circumstances, the users of Adixen
products can always rely on quick support of our
specialists in Vacuum Technology.

ATP Series Turbomolecular Pumps
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GB 00393 - Edition 10 - March 00
Welcome
Dear Customer,
You have just purchased an
Alcatel turbomolecular pump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from Alcatel's many years
of experience in the field of
turbomolecular pump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
APPLICATIONS:
• INDUSTRY
Cryogenics, Freeze drying, Vacuum drying, etc.
• INSTRUMENTATION
Mass spectrometry, surface analysis, etc.
• RESEARCH AND DEVELOPMENT
Ultra-high vacuum systems, Particle accelerators, etc.
• VARIOUS SEMICONDUCTOR PROCESSES
ADVANTAGES:
The reliable and sturdy design of ATP pumps ensures perfor-
mance suited to the fields of application concerned.
MANUAL REFERENCE: 102 710
EDITION: 11- April 2007
Alcatel Vacuum Technology France - ATP User’s Manual

GB 00394 - Edition 10 - March 00
Contents
ATP User’s Manual
Introduction ■Introduction to the ATP range and
its associated ACT controllers . . . . . . . . . . . ■A 10
■Turbomolecular pump operating principle . . . . ■A 20
■The differents versions . . . . . . . . . . . . . . . ■A 30
■ACT controllers control modes. . . . . . . . . . . ■A 40
■Accessories. . . . . . . . . . . . . . . . . . . . . . ■A 50
■Integrable controllers . . . . . . . . . . . . . . . . ■A 60
■Technical characteristics of pumps . . . . . . . . ■A 70
■Dimensions of pumps . . . . . . . . . . . . . . . . ■A 80
■Controller technical characteristics. . . . . . . . . ■A 90
■Integrable controller technical characteristics
type Board and Brick. . . . . . . . . . . . . . . . ■A 100
■Integrable controller technical characteristics
type OEM Board . . . . . . . . . . . . . . . . . . ■A 110
Alcatel Vacuum Technology France - ATP User’s Manual 1/4

GB 00394 - Edition 10 - March 00
Contents
ATP User’s Manual
Alcatel Vacuum Technology France- ATP User’s Manual
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Start-up ■Safety instructions . . . . . . . . . . . . . . . . . . ■B 10
■Pump connections to an installation . . . . . . . . ■B 20
■Mechanical connections. . . . . . . . . . . . . . . ■B 30
■Water cooling connection . . . . . . . . . . . . . ■B 40
■ACT 200 T and 600 T electrical connections. . ■B 50
■ACT 200 T and 600 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . ■B 60
■ACT 200 T and 600 T controller start-up . . . . ■B 70
■ACT 1000 T electrical connections . . . . . . . . ■B 80
■ACT 1000 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . ■B 90
■ACT 1000 T controller start-up. . . . . . . . . . . ■B 100
■RS 232 or RS 485 serial link wiring . . . . . . . ■B 110
■Detailed description of RS commands
ACT 200 T and 600 T . . . . . . . . . . . . . . ■B 120
■Functions of integrable controllers
type Board and Brick . . . . . . . . . . . . . . . . ■B 130
■Functions of integrable controller
type OEM Board . . . . . . . . . . . . . . . . . . ■B 140

GB 00394 - Edition 10 - March 00
Contents
ATP User’s Manual
Alcatel Vacuum Technology France - ATP User’s Manual 3/4
Operation ■First pump start-up / Safety instructions . . . . . . ■C 10
■Turbomolecular pump operation
in a pumping application. . . . . . . . . . . . . . ■C 20
■Controlling the pump using the controller
front panel . . . . . . . . . . . . . . . . . . . . . . ■C 30
■Displaying the data concerning
ACT 200 T and 600 T pumping . . . . . . . . . ■C 40
■ACT 200 T and 600 T «Remote Control»
connector «Ext. safety» contact operation. . . . . ■C 50
■Controlling the pump using
communication software. . . . . . . . . . . . . . . ■C 61
Maintenance ■Diagnosis and troubleshooting
ACT 200 T and 600 T . . . . . . . . . . . . . . ■D 10
■Diagnosis and troubleshooting ACT 1000 T. . . ■D 20
■ATP 80/100/150/400
Maintenance frequency . . . . . . . . . . . . . . . ■D 30
■ATP 900 Maintenance frequency . . . . . . . . . ■D 40

GB 00394 - Edition 10 - March 00
Contents
ATP User’s Manual
Alcatel Vacuum Technology France- ATP User’s Manual
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Operation sheets ■Precautions before maintenance . . . . . . . . . . ■E 10
■ATP 80/100 Pumps lubrication . . . . . . . . . . ■E 20
■ATP 150/400/900 Pumps lubrication . . . . . . ■E 30
■ATP 80/100 bearing replacement . . . . . . . . ■E 40*
■ATP 150/400/900 bearing replacement . . . . ■E 50*
■Cleaning parts . . . . . . . . . . . . . . . . . . . . ■E 60*
■Pump running-in for ATP 80/100/150/400 . . ■E 70
■Maintenance counters for
ACT 200 T and 600 T controllers . . . . . . . . ■E 80
■ATP 900 pump running-in . . . . . . . . . . . . . . ■E 90
■Maintenance counters for
ACT 1000 T controllers . . . . . . . . . . . . . . ■E 100
Appendix ■Pumping curves. . . . . . . . . . . . . . . . . . . . ■G 10
Maintenance
components ■Maintenance parts. . . . . . . . . . . . . . . . . . ■F 10
* These chapters are included into the ball bearing replacement manual delivered with
the specific tool.

G 00396 - Edition 09 - February 99
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Chapter A
Alcatel Vacuum Technology France- ATP User’s Manual
ATP User’s Manual
Introduction
■Introduction to the ATP range and
its associated ACT controllers . . . . . . . . . . . . . . ■A 10
■Turbomolecular pump operating principle . . . . . . ■A 20
■The differents versions. . . . . . . . . . . . . . . . . . . ■A 30
■ACT controllers control modes . . . . . . . . . . . . . ■A 40
■Accessories . . . . . . . . . . . . . . . . . . . . . . . . . ■A 50
■Integrable controllers . . . . . . . . . . . . . . . . . . . ■A 60
■Technical characteristics of pumps . . . . . . . . . . . ■A 70
■Dimensions of pumps . . . . . . . . . . . . . . . . . . . ■A 80
■Controller technical characteristics . . . . . . . . . . . ■A 90
■Integrable controller technical characteristics
type Board and Brick . . . . . . . . . . . . . . . . . . ■A 100
■Integrable controller technical characteristics
type OEM Board . . . . . . . . . . . . . . . . . . . . . ■A 110

A 10
Introduction to the ATP range and
its associated ACT controllers
Alcatel Vacuum Technology France - ATP User’s Manual
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- Ceramic ball bearings lubricated with grease;
- Adjustable rotation speed between 6000 and 27000 rpm;
- Natural convection, air or water cooling;
- "C" version for corrosive application with nitrogen purge;
- "HPC" high pressure version for semiconductor applications.
ATP turbomolecular
pumps
ACT Controllers
Main characteristics
- Alphanumeric display;
- Membran keyboard;
- Monitoring of testing and
troubleshooting parameters;
- Dry contact interface for
status signals;
- Optocoupled control inputs;
- RS 232/485 serial links;
- Operation at all voltages
between 85 and 264 V,
50/60 Hz.
The range of ACT controllers offers flexible use and
interfacing:
5 turbomolecular pump models from 80 to 900 l/s
3 controller models type ACT

A 10
Introduction to the ATP range and
its associated ACT controllers
Alcatel Vacuum Technology France - ATP User’s Manual
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The different products
available
The pumps ATP 80 ATP 100 ATP 150 ATP 400 ATP 900
ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C
Intake flange DN 63 ISO-K DN 100 ISO-K DN 100 ISO-K DN 160 ISO-K DN 200 ISO-K
DN 63 CF-F DN 100 CF-F DN 100 CF-F DN 160 CF-F DN 200 CF-F
natural convection xx
Cooling type air x x x x x
water x x x x x
The pumps
ATP 400 HPC ATP 900 HPC
Intake flange DN 100 ISO-K DN 200 ISO-K
DN 160 ISO-K DN 200 CF-F
Water cooling x x
The controllers ACT 200 T ACT 600 T ACT 1000 T
Cable length 1 m / 1,5 m 1 m / 1,5 m 3.5 m / 5 m
3.5 m / 5 m 3.5 m / 5 m 10 m
10 m / 20 m 10 m / 15 m / 20 m
Electronic boards to be
inserted in a rack x x

A 20
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Turbomolecular pump operating
principle
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE ATMOSPHERIC
PRESSURE
Primary
pumping
Primary vacuum
Secondary vacuum
Rotor
Stator
Dynamic
seal
Motor
Exhaust
Inlet
The turbomolecular pump in
an installation
Functional diagram In molecular operation, the gas molecules of the vacuum
system arrive at the pump intake. They are trapped
between the rotating disks of the rotor and the stationary
disks of the stator and carried to the exhaust of the pump.
At the turbomolecular pump exhaust, the gases are
evacuated to the atmosphere by a primary pump.
Since the ATP compression rate is set by the design, the ATP
limit pressure is given by that of the primary pump used.
The ceramic ball bearings
lubricated with grease enable
the pump to be fitted in any
position.

A 30
The different versions:
Standard, "C" Corrosive, etc.
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Standard Version
Pumping of clean, non-
corrosive gases
As for the entire range, the pump rotation speed is
adjustable, making it possible to produce the optimum
pumping characteristics for the customer's application.
There are two different types of speed:
- the nominal speed which corresponds to the maximum
rotation speed of the pump, or 27000 rpm;
- the reduced speed, or STANDBY speed, adjustable
between 6000 and 27000 rpm.
The inverted dynamic seal creates a high compression rate
between the bearings and the pump exhaust and thus
minimizes the quantity of corrosive gases in contact with
the bearings.
When used with a gas purge for high flow rate
applications, the dynamic seal can, on its own, provide
excellent protection for ultravacuum applications.
"C" Version
Corrosive applications
Inlet
Exhaust
N2Purge

A 30
The different versions:
"HPC" High Pressure Corrosive
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00399 - Edition 01 - April 97
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These pumps are specially designed for high flow rate
applications in semiconductor applications. They provide:
- increased bearing protection;
- effective bearing protection when the purge is stopped
during equipment calibration;
- a reduction in the purge gas flow rate;
- a long bearing service life in the presence of corrosive
gases.
The pumps can be heated by the water circuit to prevent
condensation of the process gases (water circuit
temperature ≤65°C).
"HPC" Version
Corrosive version for
semiconductor
applications
Inlet
Exhaust
Water circuit
N2 Purge

A 40
ACT controllers control modes
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Local mode control
The front panel of the unit
comprises:
Remote controls
The remote control The remote control with the
REMOTE CONTROL connector
is used:
- for the remote control of
the START, STOP, STANDBY
functions;
- to replicate the monitoring
parameters available in
the form of dry contacts.
The RS232 serial link is used to control and monitor
the pump using a computer.
The RS485 serial link allows many pump installation in
a network.
The wiring characteristics are given on B 110.
Parameter selection and
configuration keys
Manual control keys
Parameter and message
LCD display
Pump status indicator lights
START
STOP ENTER STAND BY
PREVIOUS
ACT 200 T
FAULT
0
1
RS 232 / 485 TURBO PUMP CABLE
REMOTE CONTROL
1
1
RS 232 serial link
RS 485 serial link
2
2
2

A 40
ACT controllers control modes
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00400 - Edition 02 - February 99
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The ACT 600 T and
ACT 1000 T controllers are
1/2 rack units
START STOP STATUS STAND BY
ENTER
PREVIOUS
ACT 600 T
FAULT

A 50
Alcatel Vacuum Technology France - ATP User’s Manual
Accessories
This filter protects the pump against solid particles.
Mesh size 6 mm.
This filter stops particles ≥20 microns and is used in the
event of high densities of dust or risks of implosion when
pumping tubes or lamps.
Bake-out collar
Compact filter
Screen filter
Air refill
electrovalve system
This accelerates degassing and reduces the pressure
lowering times.
This is used to refill the pump with air after stopping
pumping or for a power supply cut.
GB 00401 - Edition 02 - February 99
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Pump accessories
Exhaust
Venting valves DN 25 DN 40
Powered and controlled by the ACT 101923*
Powered by the mains and
controlled by the ACT
240V 50/60Hz 063177 063478
220V 50/60Hz 056994 063191
200V 50/60Hz 063176 063480
115V 50/60Hz 063089 063099
100V 50/60Hz 063175 063479
* ATP 900 only
Filter Inlet flange
P/N DN 63 DN 100 DN 160 DN 200
ISO-K 063000 056844 056942 063158
CF-F 063115 056845 056928 063159
Filter Inlet flange
P/N DN 63 DN 100 DN 160 DN 200
ISO-K 063214 063215 063216 062911
P/N Pump type
ATP 80 ATP 100 ATP 150 ATP 400 ATP 900
200/240V
056934 056934 063028 101926 063324
50/60Hz
100/115V
063180 063180 063181 101927 063323
50/60Hz

A 50
Accessories
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Reduction flanges
Power supply cable Connection cable between the pump and the controller.
Cable length ACT 200 T
P/N
1 m
1.5 m
3.5 m
5 m
10 m
15 m
20 m
105185
A458759
101956
101957
101958
-
A458477
ACT 600 T
105086
A458885
101812
101810
101811
105303
A458478
105086
A458885
101812
101810
101811
-
A458478
ACT 1000 T
Flange DN 1 / DN 2 P/N
S.S.**ALU*
Material
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
063268
063269
063270
063267
062900
068912
062901
068911
062902
062904
062905
062906
062903
062725
062907
062909
062908
062910
066659
066660
63 ISO-K / 25 ISO-KF
63 ISO-K / 40 ISO-KF
63 ISO-K / 50 ISO-KF
63 ISO-K / 63 CF-F
100 ISO-K / 40 ISO-KF
100 ISO-K / 40 ISO-KF
100 ISO-K / 50 ISO-KF
100 ISO-K / 50 ISO-KF
100 ISO-K / 63 ISO-K
160 ISO-K / 50 ISO-KF
160 ISO--K / 63 ISO-K
160 ISO-K / 100 ISO-K
160 CF-F / 100 CF-F
200 ISO-K / 63 ISO-K
200 ISO-K / 100 ISO-K
200 ISO-K / 100 ISO-K
200 ISO-K / 160 ISO-K
200 ISO-K / 160 ISO-K
200 ISO-K / 250 ISO-K
200 CF-F / 250 CF-F
* ALU: Aluminium ** S.S.: Stainless Steel

A 60
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Integrable controllers
ACT 200 T Brick
ACT 200 T Board
Electronic boards can be
substitued to the box version
of the controller
ACT 200 T when the pump
has to be integrated in a
complex installation or
equipment.
They provide the functions of
speed variator, logic control
(controlled by serial link or
dry contacts) and power
supply (ACT 200 T Brick
only) and all the necessary
securities.
The Board version must be
supplied with DC.
ACT 200 T Board
ACT 200 T Brick
ACT 600 T Brick
ACT 600 T Board Also, theses electronic
boards can be substitued
to the box version of
the controller ACT 600 T.
ACT 600 T Board
ACT 600 T Brick
Connect the integrable controllers to the pump by ordering
separately the connection cable (see A 50 page 2).
Controller ACT 200 T
Part Number
Board
Brick 101933
103517
ACT 600 T
102018
103997

A 60
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GB 00402 - Edition 03 - March 00
Integrable controllers
OEM Board
The integrable controller
“OEM Board” (derivated
from CFV 100 former
controller range) is a simple
PC Board which can easily
integrated in an installation.
It can drive both ATP 80 and
ATP 100 pumps, in local or
by remote control.
OEM Board: P/N. P0022E4
Power supply cable
OEM Board / ATP 80-100 To connect the PC Board ,
it is necessary to separately
order specific connection
cable.
Cable lenght P/N
0,5 m
2,5 m
3,5 m
5 m
10 m
A458755
A458369
A458425
A458423
A458424
Accessories Some accessoiries can be connected to the OEM Board
to extand some functions.
OEM Board accessories P/N
Time meter 5 V
Time meter 10 V
Outside light kit
Interface kit
062761
062320
062939
062969

A 70
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Technical characteristics of pumps
Model characteristics 80 100 150 400 900
Inlet flange DN 63 ISO-K 63 CF-F 100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 160 ISO-K 160 CF-F 200 ISO-K 200 CF-F
N2l/s 80 100 140 400 900
Pumping speed He l/s 50 60 100 300 540
H2l/s 40 40 80 250 300
N28x10+7 8x10+7 7x10+8 7x10+8 1x10+9
Compression rate He 2500 2500 1.2x10+4 1.5x10+4 2x10+4
H2300 300 1x10+3 1x10+3 2x10+3
Rotation speed rpm 27000
Reduced speed rpm from 6000
Sound level
dBA ≤53
Start-up time (0 to 27000) 1min45s 1min45s 2min 3min 3min
Exhaust flange ISO-KF DN 25 DN 25 DN 25 DN 40 DN 40
Standard version characteristics ATP 80 ATP 100 ATP 150 ATP 400 ATP 900
Limit pressure* measured acc.
to Pneurop standard mbar 5x10-9 5x10-9 5x10-10 8x10-10 5x10-10
Maximum pressure at inlet
in continuous operation** mbar 1x10-1 1x10-1 1x10-1 2x10-2 1x10-2
Maximum permissible
pressure at exhaust** mbar 2x10-1 3x10-1 4x10-1 2x10-1 3x10-1
Maximum ambient temperature* °C 50
Flange drying temperature °C 120 120 100 100 100
natural cooling kg 3 4.3 3 4.3
Weight air cooling kg 4 5.3 4 5.3 6.5 9 17.5 18.5
water cooling kg 3.4 4.4 3.5 4.7 6.5 9 17 18
Recommended primary pump Pascal 2005 Pascal 2005 Pascal 2005 Pascal 2015 Pascal 2021
* For a water-cooled pump with CF-F flange and exhaust pressure < 1.10-2 mbar.
** The two maximum pressures cannot occur at the same time
Standard version