
DIGITAL MASS FLOW CONTROLLER operating manual 3
Contents
Getting Started __________________________________________4
Mounting _________________________________________4
Plumbing _______________________________________________5
Process Ports ______________________________________________5
Maximum Pressure _________________________________________ 5
Flow Controller Operation ___________________________________ 6
Power and Signal Connections ________________________6
RS-232 or RS-485 Digital Signals______________________ 7
Analog Signals _________________________________ 7
Serial Communication_____________________________________8
Establishing Communications _________________________8
Serial Terminal Application _________________________9
Unit ID and Modbus ID _______________________________9
Changing the Baud Rate __________________________ 10
Taring___________________________________________ 11
Collecting Flow Data _______________________________ 11
Commanding a New Setpoint ________________________ 12
Sending Setpoints as Floating Point Numbers_____________ 12
Sending Setpoints as Integers ______________________ 13
Creating a Setpoint Watchdog ______________________ 13
Flow Averaging ___________________________________ 14
Changing the Gas__________________________________ 14
PID Tuning _______________________________________ 15
Changing Gain Values ___________________________ 15
Tuning the PDF Control Algorithm ____________________ 16
Troubleshooting Valve Performance with PID Tuning ________ 16
Quick Command Guide _____________________________ 17
Modbus/RTU Communication _____________________________ 18
Modbus Registers _________________________________ 18
Configuration Registers __________________________ 19
Data Registers ________________________________20
Maintenance ___________________________________________ 21
Cleaning_________________________________________ 21
Recalibration _____________________________________ 21