Alicat Scientific MC Series User manual

Precision Gas Mass Flow Controllers
Innovative Flow and Pressure Solutions
Operating Manual
MC Series
MCS Series MCV Series
MCR Series

09/28/2012 Rev.27 DOC-ALIMAN16C
Limited Lifetime Warranty
Alicat Scientic, Inc. warrants to the original purchaser (hereinafter referred to as “Buyer”) that instruments
manufactured by Alicat Scientic (hereinafter referred to as “Product”) shall be free from defects in
materials and workmanship for the life of the Products.
Under this warranty, the Product will be repaired or replaced at manufacturer’s option, without charge
for parts or labor when the Product is carried or shipped prepaid to the factory together with proof of
purchase.
The foregoing shall constitute the exclusive and sole remedy in lieu of other remedies of the Buyer for any
breach by Alicat Scientic of this warranty to the maximum extent permitted by law.
This warranty does not apply to any Product which has not been installed or used in accordance with the
Product operation and installation specications provided to Buyer verbally or in writing by Alicat Scientic
for the proper and normal use of the Product.
Buyer agrees hereunder that Alicat reserves the right to void any warranty, written or implied, if upon
Alicat’s examination of Product shall disclose to Alicat’s satisfaction that the Product failure was due
solely, or in part, to accident, misuse, neglect, abuse, alteration, improper installation, unauthorized repair
or improper testing by Buyer or agent of Buyer.
Alicat Scientic shall not be liable under any circumstances for indirect, special, consequential, or
incidental damages in connection with, or arising out of, the sale, performance, or use of the Products
covered by this warranty.
Alicat Scientic does not recommend, warrant or assume responsibility for the use of the Products in life
support applications or systems.
Alicat’s warranties as herein above set forth shall not be enlarged, diminished or affected by, and no
obligation or liability shall arise or grow out of Alicat’s rendering of technical advice in connection with
Buyer’s order of the Products furnished hereunder.
If Product becomes obsolete, Alicat Scientic, at its own discretion, reserves the right to repair the Product
with available replacement parts or upgrade the Product to a current, commercially available version of
the original Product. Should upgrading the Product be deemed necessary by Alicat, Buyer hereby agrees
to pay an upgrade fee equal to seventy percent of the retail value of the replacement Product. Alicat
Scientic hereunder makes no claim that replacement Products will look, function or operate in the same
or similar manner as the original product.
When a Product is returned to Alicat Scientic for recalibration this service is considered normal
preventative maintenance. Recalibration of Product shall not be treated as a warranty service unless
recalibration of Product is required as the result of repairs to Product pursuant to this Warranty. Failure
to recalibrate Product on a yearly basis will remove any and all obligations regarding repair or
replacement of Product as outlined by this Warranty to Buyer from Alicat Scientic.
This Warranty is in lieu of all other relevant warranties, expressed or implied, including the implied
warranty of merchantability and the implied warranty of tness for a particular purpose, and any warranty
against infringement of any patent.
Continued use or possession of Products after expiration of the applicable warranty period stated above
shall be conclusive evidence that the warranty is fullled to the full satisfaction of Buyer.
Alicat makes no warranty as to experimental, non-standard or developmental Products.
Accessories purchased from Alicat are not covered by this warranty.
Notice: Alicat Scientic, Inc. reserves the right to make any changes and improvements to the products
described in this manual at any time and without notice. This manual is copyrighted. This document
may not, in whole or in part, be copied, reproduced, translated, or converted to any electronic medium
or machine readable form, for commercial purposes, without prior written consent from the copyright
holder.
Note: Although we provide assistance on Alicat Scientic products both personally and through our
literature, it is the complete responsibility of the user to determine the suitability of any product to their
application.
Alicat Scientic, Inc.’s Wide-Range Laminar Flow Element Patent: The wide-range laminar ow
element and products using the wide-range laminar ow element are covered by U.S. Patent Number:
5,511,416. Manufacture or use of the wide-range laminar ow element in products other than Alicat
Scientic products or other products licensed under said patent will be deemed an infringement.
Conformity / Supplemental Information:
The product complies with the requirements of the Low Voltage Directive 73/23/EEC and the EMC
Directive 89/336/EEC (including 93/68/EEC) and carries the CE Marking accordingly. Contact the
manufacturer for more information.

3
Thank you for purchasing an Alicat Gas Flow Controller.
(see page 55)
Please contact Alicat at 1-888-290-6060 or info@alicat.com if you have

TABLE OF CONTENTS Page
7
9
9
Gas Absolute Pressure
Mass Flow Rate
Flashing Error Message
Loop Variable
22
23
23
23
Pressure Averaging
Flow Averaging
LCD Contrast
25
27
27
27

5
TABLE OF CONTENTS Page
32
33
35
Gas Viscosity 35
Other Gases
37
37
oC 39
oC
52
53
55
Accessories
Eight Pin Mini-DIN Pin-Out 73
Locking Industrial Connector Pin-Out 73
DB9 Pin-Out Diagram
PROFIBUS Pin-Out 75
DB15 Pin-Out Diagrams
Informaon for CSA and ATEX Labeled Devices

GETTING STARTED
Large Valve Mass Flow Controller shown with a
MOUNTING
by the spring force.
Inlet Connecon Port
Outlet Connecon Port
Control Valve 8 Pin MiniDIN
Display Screen
Inlet Connecon Port
Flow Direcon Arrow
Outlet Connecon Port
Power Jack

7
PLUMBING
We recommend that a 20 micron filter be installed upstream of controllers
with full scale ranges of 1(S)LPM or less and a 40 micron filter be installed
upstream of controllers with full scale ranges above 1(S)LPM.
PRESSURE
NOTE:
NOTE: Alicat MCQMCRQ
CAUTION!

POWER AND SIGNAL CONNECTIONS
Small Valve
NOTE:
Large Valve
Standard 8 Pin Mini-DIN Pin-Out
Pin Funcon Mini-DIN
cable color
Black
2
or Brown
3
Orange
5
Green
7 Blue
Purple
Note:
Underlined Items
CAUTION!
1 2
3 4 5
6 7 8

9
INPUT SIGNALS
Analog Input Signal
Standard 0-5 Vdc
76
543
21
8
5.12 Vdc
50 KOhm
Potentiometer
0-5 Vdc
Oponal 0-10 Vdc:
Oponal 4-20 mA:
NOTE:
NOTE:
CAUTION!

RS-232 / RS-485 Digital Input Signal
9876
9876
15 3 24 1 532 4
1
876
5
4
3
2
Pin Pin
5
3 Receive 3
2 Receive 5

OUTPUT SIGNALS
RS-232 / RS-485 Digital Output Signal
Standard Voltage (0-5 Vdc) Output Signal
Oponal 0-10 Vdc Output Signal
Oponal Current (4-20 mA) Output Signal
Oponal 2nd Analog Output Signal

CAUTION!
5
3
2
Purple
Red
Yellow
Purple
Red
Yellow
54321
9876
Unit C
Unit B
Unit A
Female Serial Cable Front
Purple (Ground)
Red
Yellow

Informaon for Alicat TFT (Color Display) Instruments
Mul-Color Display Color Codes:
GREEN
WHITE
RED
YELLOW
LCD Contrast:
contrast.
Display On/O:
Technical Data for TFT (Color Display) Meters, Gauges and Controllers
TFT
Specicaon Meter or
Gauge
Small Valve
Controller
Large Valve
Controller

The Main
MENU
enter the Select Menu
Totalizer
MENU
Totalizing ModeMENU
Select
Menu
DISPLAYS AND MENUS
Main
Select Menu
Select Menu you can change
Push MAIN
MASS
TOTAL
MENU
SCCM
+0.0
SCCM
ELAPSED
TIME
Totalizer
CONTROL
SETUP
RS232
COMM
MFG
DATA
MAIN
MISC
GAS
SELECT
Select Menu
#C
+21.50
+0.000
CCM MENU
SETPT
0.000
SCCM
Air
PSIA
+13.60
+
.
+0.000
SCCM
Main
BACK RESET
0000:00:00

MAIN
This
Gas Absolute Pressure: This sensor
PSIA.
Gas Temperature:
°C.
select F (Fahrenheit)
or
Set Point:SETPT
Volumetric Flow Rate:
CCM in this
#C
+21.50
+0.000
CCM MENU
SETPT
0.000
SCCM
Air
PSIA
+13.60
+
.
+0.000
SCCM
LN-DN
CANCEL SET
MODE
>#C
#K
#F
#R
LN-UP

Mass Flow Rate:
SCCM
S.
MENU: Pressing MENU switches the screen to the Select Menu
Flashing Error Message:MOVVOV
POVTOV
If the unit does return to normal operaon contact Alicat.

CONTROL
SETUP
RS232
COMM
MFG
DATA
MAIN
MISC
GAS
SELECT
SELECT MENU
setup screen.
Miscellaneous
Main
Manufacturer Data
#C
+21.50
+0.000
CCM MAIN
SETPT
0.000
SCCM
Air
PSIA
+13.60
+
.
+0.000
SCCM
MODEL
INFO
BACK MAIN
ALICAT SCIENTIFIC
Ph 520-290-6060
Fax 520-290-0109
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
PRESS
AVG
BACK
LCD
CONTRAST MAIN
ZERO
BAND FLOW
AVG
LN-DN
CANCEL SET
MODE
C2H6 Ethane
H2 Hydrogen
He Helium
>N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
LN-UP
BACK MAIN
UNIT ID
ABAUD
19200
SETPT
+0.00
Select Menu

CONTROL SETUP
Control Setup
SETPT SOURCE
to your controller.
Front Panel
NOTE:IPC
SETPT refers to the set-point
only if FRONT PANELSETPT.
LN-DN
CANCEL SET
LN-UP MODE
>RS232
FRONT PANEL
ANALOG
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0

CAUTION!
CONTROL SETUP (connued)
LOOP VAR
Pressing the LOOP VAR
with the control valve upstream of the
can be set to control on outlet pressure
See
page 20 – PID TUNING.
Contact Alicat if you are having dicules
with this procedure.
ON AUTO / OFF AUTO—
LN-DN
CANCEL SET
LN-UP MODE
>Mass Flow
Volumetric Flow
Pressure
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0

PID TUNING
All units leave the factory with a generic
PID.
Press LOOP TYPE.
P
I
D
loop.
I
00000
BACK LOOP
TYPE MAIN
P
00100 D
02501
LN-DN
CANCEL SET
LN-UP MODE
>PID
PD PID
PD2I PID
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0
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